公开(公告)号：US5305338A

公开(公告)日：1994-04-19

申请号：US757419

申请日：1991-09-10

申请人： Hitoshi Wakata ,  Akihiro Suzuki ,  Kenyu Haruta ,  Haruhiko Nagai ,  Akihiko Iwata ,  Shinji Murata ,  Isamu Tanakura ,  Tomohiro Sasagawa ,  Yuito Kimura

发明人： Hitoshi Wakata ,  Akihiro Suzuki ,  Kenyu Haruta ,  Haruhiko Nagai ,  Akihiko Iwata ,  Shinji Murata ,  Isamu Tanakura ,  Tomohiro Sasagawa ,  Yuito Kimura

IPC分类号： H01S3/0971 ,  H01S3/00 ,  H03K17/08

CPC分类号： H01S3/0971 ,  H01L2924/0002

摘要： A switch device used for a laser device, includes series-parallel connected switch elements or modules. The switch elements or modules are simultaneously turned on by trigger signals from trigger circuits. The transmission lines for connecting the trigger circuits to respective switch elements are equal to one another in length. A protecting circuit is provided for the switch elements, and indicators are provided for indicating the shortcircuit of the switch elements. In the switch device, the number of wires for the switch elements is made small and heat generated from the switch elements is effectively radiated. The modules are easily stacked, and firmly connected to a control unit for controlling the switch elements. A discharge excited laser device using the switch device has a high efficiency and a long lifetime and is reliable.

摘要翻译： 用于激光装置的开关装置包括串联并联的开关元件或模块。 开关元件或模块通过来自触发电路的触发信号同时导通。 用于将触发电路连接到各个开关元件的传输线的长度彼此相等。 为开关元件提供保护电路，并且提供用于指示开关元件的短路的指示器。 在开关装置中，用于开关元件的导线的数量变小，并且从开关元件产生的热量被有效地辐射。 模块容易堆叠，并且牢固地连接到用于控制开关元件的控制单元。 使用开关器件的放电激发激光器具有高效率和长寿命，并且是可靠的。

公开(公告)号：US5258994A

公开(公告)日：1993-11-02

申请号：US718534

申请日：1991-06-19

申请人： Kenyu Haruta ,  Akihiro Suzuki ,  Akihiko Iwata ,  Yasushi Minamitani ,  Hitoshi Wakata ,  Tomohiro Sasagawa ,  Takashi Kumagai

发明人： Kenyu Haruta ,  Akihiro Suzuki ,  Akihiko Iwata ,  Yasushi Minamitani ,  Hitoshi Wakata ,  Tomohiro Sasagawa ,  Takashi Kumagai

IPC分类号： H01S3/0971 ,  H01S3/097

CPC分类号： H01S3/0971

摘要： A discharge-excited laser apparatus includes a pair of discharge electrodes extending in a direction of an optical axis; a plurality of charging capacitors charged by a power source; a plurality of peaking capacitors arranged in parallel in a longitudinal direction of the discharge electrodes and receiving energy accumulated in the charging capacitors; and a plurality of semiconductor switches arranged with conductive plates in the longitudinal direction of the discharge electrodes and connected in series and in parallel to the peaking capacitors. The construction of the semiconductor switches enables uniform shift of the energy in the charging capacitors to the peaking capacitors and reduction of inductance of a loop for capacity shifting.

摘要翻译： 放电激励激光装置包括沿光轴方向延伸的一对放电电极; 由电源充电的多个充电电容器; 多个峰值电容器，沿着放电电极的纵向方向平行设置，并且接收蓄积在充电电容器中的能量; 以及多个半导体开关，其沿着放电电极的长度方向排列有导电板，并且与峰值电容器串联并联。 半导体开关的结构使得充电电容器中的能量均匀地移动到峰值电容器，并且减小用于容量偏移的回路的电感。

公开(公告)号：US6008914A

公开(公告)日：1999-12-28

申请号：US935161

申请日：1997-09-22

申请人： Tomohiro Sasagawa ,  Kenyu Haruta ,  Yukio Sato ,  Hitoshi Wakata, deceased ,  Mitsuo Inoue ,  Akihiro Suzuki ,  Shuichi Fujikawa ,  Yoshio Saito

发明人： Tomohiro Sasagawa ,  Kenyu Haruta ,  Yukio Sato ,  Hitoshi Wakata, deceased ,  Mitsuo Inoue ,  Akihiro Suzuki ,  Shuichi Fujikawa ,  Yoshio Saito

IPC分类号： B23K26/06 ,  B23K26/067 ,  B23K26/38 ,  G03H1/08 ,  G03H1/16 ,  G02B5/32 ,  G02B27/44 ,  G02B27/46

CPC分类号： G03H1/0005 ,  B23K26/0604 ,  B23K26/066 ,  B23K26/067 ,  B23K26/386 ,  G03H1/08 ,  G03H1/16 ,  G03H2001/0094

摘要： The laser transfer machining apparatus comprises a shaping unit for shaping the laser beam so that the laser beam has a beam pattern which corresponds to a desired pattern to be machined in the object to be machined and a generating unit disposed separately from the shaping unit for simultaneously generating a plurality of laser beams each having the beam pattern from the laser beam shaped by the shaping unit. The generating unit is adapted to emit the plural laser beams while simultaneously defining a plurality of radiation directions of the generated plural laser beams to the object to be machined. The laser transfer machining apparatus can provide a high efficiency of utilization of light and reduce the time required for machining. Furthermore, the laser transfer machining apparatus can utilize a laser with a relatively low spatially coherence such as an eximer laser.

摘要翻译： 激光传递加工装置包括：成形单元，用于使激光束成形，使得激光束具有对应于待加工物体中要加工的期望图案的光束图案;以及与成形单元分开设置的发生单元，用于同时 产生多个激光束，每个激光束具有来自由成形单元成形的激光束的光束图案。 发生单元适于发射多个激光束，同时将所生成的多个激光束的多个辐射方向限定到待加工物体。 激光转印加工装置可以提供高效率的光利用并减少加工所需的时间。 此外，激光转印加工装置可以利用具有较低空间相干性的激光器，例如准分子激光器。

公开(公告)号：US6110291A

公开(公告)日：2000-08-29

申请号：US689313

申请日：1996-08-07

申请人： Kenyu Haruta ,  Koichi Ono ,  Hitoshi Wakata ,  Mutsumi Tsuda ,  Yoshio Saito ,  Keisuke Nanba ,  Kazuyoshi Kojima ,  Tetsuya Takami ,  Akihiro Suzuki ,  Tomohiro Sasagawa ,  Kenichi Kuroda ,  Toshiyuki Oishi ,  Yukihiko Wada ,  Akihiko Furukawa ,  Yasuji Matsui ,  Akimasa Yuki ,  Takaaki Kawahara ,  Hideki Yabe ,  Taisuke Furukawa ,  Kouji Kise ,  Noboru Mikami ,  Tsuyoshi Horikawa ,  Tetsuo Makita ,  Kazuo Kuramoto ,  Naohiko Fujino ,  Hiroshi Kuroki ,  Tetsuo Ogama ,  Junji Tanimura

发明人： Kenyu Haruta ,  Koichi Ono ,  Hitoshi Wakata ,  Mutsumi Tsuda ,  Yoshio Saito ,  Keisuke Nanba ,  Kazuyoshi Kojima ,  Tetsuya Takami ,  Akihiro Suzuki ,  Tomohiro Sasagawa ,  Kenichi Kuroda ,  Toshiyuki Oishi ,  Yukihiko Wada ,  Akihiko Furukawa ,  Yasuji Matsui ,  Akimasa Yuki ,  Takaaki Kawahara ,  Hideki Yabe ,  Taisuke Furukawa ,  Kouji Kise ,  Noboru Mikami ,  Tsuyoshi Horikawa ,  Tetsuo Makita ,  Kazuo Kuramoto ,  Naohiko Fujino ,  Hiroshi Kuroki ,  Tetsuo Ogama ,  Junji Tanimura

IPC分类号： C23C14/02 ,  C23C14/08 ,  C23C14/22 ,  C23C14/28 ,  C23C14/34 ,  C23C14/54 ,  C23C14/56 ,  C23C14/00

CPC分类号： C23C14/087 ,  C23C14/022 ,  C23C14/22 ,  C23C14/28 ,  C23C14/3471 ,  C23C14/54 ,  C23C14/541 ,  C23C14/547 ,  C23C14/564 ,  Y10S505/732

摘要： A thin film forming apparatus using laser includes a chamber (1), a target (5) placed therein, a laser light source (10) for emitting laser beam to target (5), and a substrate holder (3). When target (5) is irradiated with laser beam (16), a plume (15) is generated, and materials included in plume (15) are deposited on the surface of a substrate (2) held by substrate holder (3). The laser beam emitted from laser light source (10) has its cross section shaped to a desired shape when passed through a shielding plate (4804), for example, so that the surface of the target (5) is irradiated with the beam having uniform light intensity distribution. Therefore, a plume (15) having uniform density distribution of active particles is generated, and therefore a thin film of high quality can be formed over a wide area with uniform film quality, without damaging the substrate.

公开(公告)号：US4914662A

公开(公告)日：1990-04-03

申请号：US248900

申请日：1988-09-26

申请人： Hajime Nakatani ,  Yoshibumi Minowa ,  Hitoshi Wakata ,  Haruhiko Nagai ,  Kenyu Haruta

发明人： Hajime Nakatani ,  Yoshibumi Minowa ,  Hitoshi Wakata ,  Haruhiko Nagai ,  Kenyu Haruta

IPC分类号： H01S3/131

CPC分类号： H01S3/131

摘要： A laser wavelength is stabilized by deriving a portion of laser beam emitted from a wavelength variable laser oscillator, spectroscopically processing the laser beam portion by means of a wavelength monitor mechanism, measuring a spatial intensity distribution of the spectroscopically processed beam portion, spectroscopically processing light having a specific wavelength and measuring a spatial intensity distribution thereof, analyzing the measured spatial intensity distribution of the spectroscopically processed beam portion on the basis of the measured spatial intensity distribution of the spectroscopically processed light having the specific wavelength, and controlling wavelength of the laser oscillator according to a result of the analysis.

摘要翻译： 通过导出从波长可变激光振荡器发射的激光束的一部分来稳定激光波长，通过波长监测机构对激光束部分进行光谱处理，测量光谱处理的光束部分的空间强度分布，光谱处理具有 特定波长并测量其空间强度分布，基于所测量的具有特定波长的光谱处理光的空间强度分布，并根据测量的激光振荡器的波长控制光谱处理光束部分的测量空间强度分布， 分析结果。

公开(公告)号：US5107511A

公开(公告)日：1992-04-21

申请号：US381723

申请日：1989-08-25

申请人： Hajime Nakatani ,  Yoshibumi Minowa ,  Hiromi Kaneko ,  Hitoshi Wakata ,  Kenyu Haruta ,  Haruhiko Nagai ,  Kenichi Yasuda ,  Hiroyuki Mukumoto

发明人： Hajime Nakatani ,  Yoshibumi Minowa ,  Hiromi Kaneko ,  Hitoshi Wakata ,  Kenyu Haruta ,  Haruhiko Nagai ,  Kenichi Yasuda ,  Hiroyuki Mukumoto

IPC分类号： H01S3/137 ,  H01S3/225

CPC分类号： H01S3/137 ,  H01S3/225

摘要： A method and apparatus for stabilizing the wavelength in a laser. The apparatus includes a first and second etalon for fine and rough tuning, respectively, of a laser oscillator. The output power and wavelength of the laser beam, for example, can be used to adjust these etalons to provide a constant output power and to counteract the change in etalon characteristics due to heat.

公开(公告)号：US4722090A

公开(公告)日：1988-01-26

申请号：US839145

申请日：1986-03-12

申请人： Kenyu Haruta ,  Hitoshi Wakata ,  Yukio Sato ,  Haruhiko Nagai

发明人： Kenyu Haruta ,  Hitoshi Wakata ,  Yukio Sato ,  Haruhiko Nagai

IPC分类号： H01S3/036 ,  H01S3/134 ,  H01S3/225 ,  H01S3/22

CPC分类号： H01S3/134 ,  H01S3/036 ,  H01S3/225

摘要： The present invention relates to excimer laser equipment which is one kind of gas laser, and in particular to a rare gas-halide excimer laser using rare gases and halogens as laser media, and adapted to control the concentration of halogens contained in laser media therewithin on the basis of the result of the measurement of the concentration of halogens in the laser media which is being used for the oscillation of laser rays therein, whereby the stabilized oscillation of the laser is always possible.

摘要翻译： 本发明涉及作为一种气体激光器的准分子激光设备，特别涉及使用稀有气体和卤素作为激光介质的稀有气体卤化物准分子激光器，并适用于控制激光介质中含有的卤素浓度 测量激光介质中用于激光射线的激光介质中的卤素浓度的结果的基础，由此激光器的稳定振荡总是可能的。

公开(公告)号：US4686682A

公开(公告)日：1987-08-11

申请号：US782568

申请日：1985-10-01

申请人： Kenyu Haruta ,  Hitoshi Wakata ,  Yukio Sato ,  Haruhiko Nagai ,  Hajime Nakatani ,  Hideki Kita

发明人： Kenyu Haruta ,  Hitoshi Wakata ,  Yukio Sato ,  Haruhiko Nagai ,  Hajime Nakatani ,  Hideki Kita

IPC分类号： H01S3/036 ,  H01S3/038 ,  H01S3/041 ,  H01S3/0971 ,  H01S3/225 ,  H01S3/097

CPC分类号： H01S3/036 ,  H01S3/0385 ,  H01S3/041 ,  H01S3/0971 ,  H01S3/0384 ,  H01S3/225

摘要： A discharge excitation type short pulse laser device which is constructed with first and second main electrodes disposed in confrontation with the direction of the laser beam axis as their longitudinal direction, an auxiliary electrode provided on the rear surface part of the second main electrode and opposed to the second main electrode through the dielectric member, a pulse circuit for applying a pulse voltage across the first and second main electrodes, and a circuit for applying a voltage across the auxiliary electrode and the second main electrode, the circuit forming a part of the pulse circuit, or being independent of the pulse circuit, wherein the second main electrode is made of an electrically conductive material having a plurality of apertures therein, the second main electrode and the dielectric member are disposed in tight adhesion each other, and the second main electrode is thinly formed to enable creeping discharge to be produced on the surface of the dielectric member, thereby distributing electrons to be the seed for the main discharge to be generated across the main electrode.

摘要翻译： 一种放电激励型短脉冲激光器件，其由与激光束轴线的方向对置设置的第一和第二主电极作为其纵向方向构成，辅助电极设置在第二主电极的后表面部分上并与 通过电介质构件的第二主电极，用于在第一和第二主电极上施加脉冲电压的脉冲电路，以及用于在辅助电极和第二主电极之间施加电压的电路，形成脉冲的一部分的电路 电路或独立于脉冲电路，其中第二主电极由其中具有多个孔的导电材料制成，第二主电极和电介质构件彼此紧密地配置，第二主电极 被薄形成以能够在电介质构件的表面上产生爬电放电， 从而将电子分配成跨越主电极而产生的用于主放电的种子。

公开(公告)号：US4837773A

公开(公告)日：1989-06-06

申请号：US267629

申请日：1988-10-31

申请人： Hitoshi Wakata ,  Mitsuo Inoue ,  Yukio Sato ,  Kenyu Haruta ,  Haruhiko Nagai

发明人： Hitoshi Wakata ,  Mitsuo Inoue ,  Yukio Sato ,  Kenyu Haruta ,  Haruhiko Nagai

IPC分类号： H01S3/0971

CPC分类号： H01S3/09716

摘要： A discharge excitation type short pulse laser device is provided with a preliminary ionization circuit, the effeciency of preliminary ionization of which is remarkably improved. The laser device comprises a main discharge circuit including first and second main electrodes which are confronted with each other in a laser medium, main discharge capacitor means for storing energy for main discharge, and a discharge starting high voltage switch; and a preliminary ionization circuit connected to said high voltage switch, said preliminary ionization circuit including a discharging gap for preliminary ionization, a preliminary ionization capacitor and an inductance.

摘要翻译： 放电励磁型短脉冲激光装置具有初电离电路，其初步电离效果显着提高。 激光装置包括：主放电电路，包括在激光介质中彼此面对的第一和第二主电极，用于存储用于主放电的能量的主放电电容器装置和放电启动高压开关; 以及与所述高电压开关连接的初步电离电路，所述初步电离电路包括用于初步电离的放电间隙，初步电离电容器和电感。

公开(公告)号：US6033741A

公开(公告)日：2000-03-07

申请号：US693719

申请日：1996-08-07

申请人： Kenyu Haruta ,  Koichi Ono ,  Hitoshi Wakata ,  Yoshio Saito ,  Kazuyoshi Kojima ,  Tetsuya Takami ,  Akihiro Suzuki ,  Yukihiko Wada

发明人： Kenyu Haruta ,  Koichi Ono ,  Hitoshi Wakata ,  Yoshio Saito ,  Kazuyoshi Kojima ,  Tetsuya Takami ,  Akihiro Suzuki ,  Yukihiko Wada

IPC分类号： C23C14/02 ,  C23C14/08 ,  C23C14/22 ,  C23C14/28 ,  C23C14/34 ,  C23C14/54 ,  C23C14/56 ,  C23C14/00

CPC分类号： C23C14/087 ,  C23C14/022 ,  C23C14/22 ,  C23C14/28 ,  C23C14/3471 ,  C23C14/54 ,  C23C14/541 ,  C23C14/547 ,  C23C14/564 ,  Y10S505/732

摘要： A thin film forming apparatus using laser includes a chamber (1), a target (5) placed therein, a laser light source (10) for emitting laser beam to target (5), and a substrate holder (3). When target (5) is irradiated with laser beam (16), a plume (15) is generated, and materials included in plume (15) are deposited on the surface of a substrate (2) held by substrate holder (3). The laser beam emitted from laser light source (10) has its cross section shaped to a desired shape when passed through a shielding plate (4804), for example, so that the surface of the target (5) is irradiated with the beam having uniform light intensity distribution. Therefore, a plume (15) having uniform density distribution of active particles is generated, and therefore a thin film of high quality can be formed over a wide area with uniform film quality, without damaging the substrate.

摘要翻译： 使用激光的薄膜形成装置包括：室（1），放置在其中的靶（5），用于将目标物（5）发射激光的激光源（10）和基板保持器（3）。 当用激光束（16）照射靶（5）时，产生羽流（15），并且包含在羽流（15）中的材料沉积在由基板保持器（3）保持的基板（2）的表面上。 从激光光源（10）发射的激光束的横截面通过遮蔽板（4804）时成形为期望的形状，使得靶（5）的表面被均匀地照射 光强分布。 因此，产生具有均匀的活性粒子密度分布的羽流（15），因此可以在不损害基板的情况下，在宽的区域上形成具有均匀膜质量的高质量的薄膜。