Wavelength scanning interferometry and interferometer employing laser
diode
    1.
    发明授权
    Wavelength scanning interferometry and interferometer employing laser diode 失效
    采用激光二极管的波长扫描干涉仪和干涉仪

    公开(公告)号:US4759628A

    公开(公告)日:1988-07-26

    申请号:US826341

    申请日:1986-02-05

    CPC分类号: G01J9/04 G01J3/45

    摘要: In an interferometry wherein a light beam from a light source is divided in two, one of which is used as a reference beam and the other beam is used as an inspecting beam, and the two beams are projected again on an identical plane so as to form an interference pattern; a wavelength scanning type laser diode interferometry characterized in that a laser diode is employed as the light source, and that an injection current of the laser diode is modulated thereby to scan a wavelength of the laser diode and to change an intensity distribution of the interference pattern.

    摘要翻译: 在其中来自光源的光束被分成两部分的干涉测量中,其中一个用作参考光束,另一个光束用作检查光束,并且两个光束再次投射在相同的平面上,以便 形成干扰模式; 波长扫描型激光二极管干涉测量法,其特征在于使用激光二极管作为光源,并且调制激光二极管的注入电流,从而扫描激光二极管的波长并改变干涉图案的强度分布 。

    Hologram lens
    2.
    发明授权
    Hologram lens 失效
    全息镜头

    公开(公告)号:US4688880A

    公开(公告)日:1987-08-25

    申请号:US632848

    申请日:1984-07-20

    IPC分类号: G02B5/32 G03H1/02 G11B7/135

    CPC分类号: G02B5/32

    摘要: A hologram lens of the present invention has a spherical hologram surface, the center of said spherical surface being in agreement with a focal point of the lens, and the radius of said spherical surface being in agreement with a focal distance of the lens. Therefore, the hologram lens of the invention produces little aberration.

    摘要翻译: 本发明的全息透镜具有球面全息图表面,所述球面的中心与透镜的焦点一致,并且所述球面的半径与透镜的焦距一致。 因此,本发明的全息透镜产生很小的像差。

    Information recording medium with clock information therein
    5.
    发明授权
    Information recording medium with clock information therein 失效
    具有时钟信息的信息记录介质

    公开(公告)号:US5959943A

    公开(公告)日:1999-09-28

    申请号:US932056

    申请日:1997-09-17

    摘要: A magneto-optical data recording system comprises magnetic field pulse applying means for applying to a magneto-optic recording medium a magnetic field pulse of a polarity corresponding to code data to be recorded, and means for heating the recording medium in a pulsating manner at a predetermined frequency synchronous with the code data to be recorded. During recording, the magnetic field pulse applying means applies a magnetic field pulse of a polarity corresponding to code data along a track of the recording medium and the heating means continuously heats the recording medium in a pulsating manner at a predetermined frequency synchronous with the code data to thereby directly overwrite the code data. The magnetic field pulse applying means includes a magnetic coil driven by code data from a source of code data (data generator). The heating means includes an optical head which comprises a source of laser beam driven by a laser driver and an optical system which focuses the laser beam from the source of laser beam as a small light spot onto the recording medium.

    摘要翻译: 一种磁光数据记录系统,包括磁场脉冲施加装置,用于向磁光记录介质施加与要记录的代码数据相对应的极性的磁场脉冲,以及用于以脉动方式加热记录介质的装置, 与要记录的代码数据同步的预定频率。 在记录期间,磁场脉冲施加装置沿着记录介质的轨道施加与代码数据对应的极性的磁场脉冲,并且加热装置以与代码数据同步的预定频率的脉动方式连续地加热记录介质 从而直接覆盖代码数据。 磁场脉冲施加装置包括由代码数据源(数据发生器)的代码数据驱动的磁线圈。 加热装置包括光学头,其包括由激光驱动器驱动的激光束源和将来自激光源的激光束作为小光点聚焦到记录介质上的光学系统。

    Optical projection printing apparatus wherein wafer mark has a grating
pitch in the sagittal plane of the first optical system
    6.
    发明授权
    Optical projection printing apparatus wherein wafer mark has a grating pitch in the sagittal plane of the first optical system 失效
    光学投影印刷设备,其中晶片标记在第一光学系统的矢状平面中具有光栅间距

    公开(公告)号:US4857744A

    公开(公告)日:1989-08-15

    申请号:US224654

    申请日:1988-07-27

    IPC分类号: G03F9/00

    CPC分类号: G03F9/7049

    摘要: An optical projection printing apparatus which can irradiate a mask with light from a first light source to focus the mask pattern on a resist of a semiconductor wafer in a highly accurate alignment by a first optical system including a projection lens. A wafer mark formed on the wafer to have a grating pattern shape is arranged to have its grating pitch direction located in the sagittal plane of the first optical system. The wafer mark is irradiated with the light coming from a second light source having a wavelength different from that of the first light source. Of the reflected light from the wafer mark, only the .+-. 1st order diffraction light is extracted by a filter and partially superposed on the mask in a transversely misaligned state so that the reflected light from the wafer mark may be focused by a second optical system. The aforementioned filter is disposed in the Fourier plane of the second optical system.

    摘要翻译: 一种光学投影印刷设备,其可以用来自第一光源的光照射掩模,以通过包括投影透镜的第一光学系统以高度准确的对准将掩模图案聚焦在半导体晶片的抗蚀剂上。 形成在晶片上以具有光栅图案形状的晶片标记被布置成使其光栅俯仰方向位于第一光学系统的矢状平面中。 用来自具有与第一光源的波长不同的波长的第二光源的光照射晶片标记。 在来自晶片标记的反射光中,只有+/- 1级衍射光被滤光器提取,并以横向不对准状态部分地重叠在掩模上,使得来自晶片标记的反射光可以通过第二光学 系统。 上述滤光器设置在第二光学系统的傅立叶平面中。

    Optical system to condense light from a semiconductor laser into a
circular spot
    7.
    发明授权
    Optical system to condense light from a semiconductor laser into a circular spot 失效
    用于将来自半导体激光器的光聚合成圆点的光学系统

    公开(公告)号:US4235507A

    公开(公告)日:1980-11-25

    申请号:US937982

    申请日:1978-08-30

    IPC分类号: G02B27/09 G11B7/135 G02B21/00

    摘要: An optical system has an objective lens for focussing on a dotted information carrying video disc the light emitted from a light source of semiconductor laser whose radiant region has different longitudinal and lateral dimensions, and a coupling lens disposed between the objective lens and the laser source for condensing the light from the laser source. The coupling lens has a magnification factor of not greater than 7.

    摘要翻译: 一种光学系统具有物镜,用于聚焦于承载视频光盘的点状信息,其辐射区域具有不同的纵向和横向尺寸的半导体激光器的光源发射的光,以及设置在物镜和激光源之间的耦合透镜, 冷凝来自激光源的光。 耦合透镜的放大系数不大于7。