公开(公告)号：US5925446A

公开(公告)日：1999-07-20

申请号：US573150

申请日：1995-12-15

申请人： Tsukasa Matsuda ,  Kunio Sakurai ,  Masaru Kato ,  Harumi Watanabe

发明人： Tsukasa Matsuda ,  Kunio Sakurai ,  Masaru Kato ,  Harumi Watanabe

IPC分类号： G03G15/01 ,  G03G7/00 ,  G03G13/01 ,  G03G13/16 ,  B32B7/02 ,  B32B5/16

CPC分类号： G03G13/16 ,  G03G13/01 ,  G03G7/0006 ,  G03G7/006 ,  Y10T428/24934 ,  Y10T428/273 ,  Y10T428/277

摘要： Electrophotographic transfer paper having a coating layer provided on at least one surface of base paper and pigments and adhesive agents as main components, wherein resistivity (VR) and surface resistivity (SV) of electrophotographic transfer paper after the humidity has adjusted to 10.degree. C., 30% RH for 12 hours satisfy the expression Log(VR/SR).ltoreq.1.5. Using such electrophotographic transfer paper, occurrence of discharge mark and occurrence of density irregularity in a high-density image region are prevented to thereby make it possible to provide electrophotographic transfer paper excellent in fixing characteristic, nonshowthrough, partial deletion and generation of paper dust.

公开(公告)号：US5637383A

公开(公告)日：1997-06-10

申请号：US573148

申请日：1995-12-15

申请人： Kunio Sakurai ,  Tsukasa Matsuda ,  Masaru Kato ,  Harumi Watanabe

发明人： Kunio Sakurai ,  Tsukasa Matsuda ,  Masaru Kato ,  Harumi Watanabe

IPC分类号： G03G7/00 ,  B32B3/00

CPC分类号： G03G7/006 ,  Y10T428/24934 ,  Y10T428/31 ,  Y10T428/31895 ,  Y10T428/31993

摘要： Electrophotographic transfer paper of the present invention satisfies at least one of expression of L.sub.MD /H.sub.MD .gtoreq.60 and L.sub.CD /H.sub.CD .gtoreq.35, where MD represents a paper direction parallel to the movement direction of a paper machine, L.sub.MD (cm) represents stiffness in MD, CD represents a paper direction perpendicular to the movement direction of the paper machine, and H.sub.CD (%) represents expansivity in CD.

摘要翻译： 本发明的电子照相转印纸满足LMD / HMD> / = 60和LCD / HCD> / = 35的表达式中的至少一个，其中MD表示与造纸机的移动方向平行的纸张方向，LMD（cm） 表示MD的刚度，CD表示与造纸机的移动方向垂直的纸张方向，HCD（％）表示CD的伸缩性。

公开(公告)号：US06592984B1

公开(公告)日：2003-07-15

申请号：US08573487

申请日：1995-12-15

申请人： Tsukasa Matsuda ,  Kunio Sakurai ,  Tsutomu Kurihara ,  Masaru Kato ,  Harumi Watanabe

发明人： Tsukasa Matsuda ,  Kunio Sakurai ,  Tsutomu Kurihara ,  Masaru Kato ,  Harumi Watanabe

IPC分类号： B32B516

CPC分类号： G03G7/006 ,  G03G7/0006 ,  Y10T428/253 ,  Y10T428/26

摘要： Electrophotographic transfer paper comprising base paper having provided on at least one side thereof a coating layer mainly comprising a pigment and a binder at a solids content of 2 to 12 g/m2, which has an Oken's smoothness of 60 to 300 seconds on each side thereof, an air permeability of 10 to 90 seconds, and a coefficient of paper-to-paper friction of 0.5 to 0.9 at 28° C. and 85% RH. The transfer paper has excellent running properties on a digital full-color copying machine or printer of indirect dry electrophotographic system irrespective of the environment of use, especially in a high humidity environment, while proving a satisfactory image.

摘要翻译： 电子照相转印纸，其包含在其至少一侧上设置有主要包含颜料和粘合剂的固体含量为2至12g / m 2的粘合剂的基纸，其每侧具有60至300秒的Oken平滑度 透气度为10〜90秒，28℃，85％RH时纸 - 纸摩擦系数为0.5〜0.9。 转印纸在数字全彩复印机或间接干电子照相系统的打印机上具有优异的运行特性，不管使用环境如何，特别是在高湿度环境下，同时证明了令人满意的图像。

公开(公告)号：US6120954A

公开(公告)日：2000-09-19

申请号：US288780

申请日：1999-04-09

申请人： Tsukasa Matsuda ,  Kunio Sakurai ,  Masaru Kato ,  Harumi Watanabe

发明人： Tsukasa Matsuda ,  Kunio Sakurai ,  Masaru Kato ,  Harumi Watanabe

IPC分类号： G03G15/01 ,  G03G7/00 ,  G03G13/01 ,  G03G13/16

CPC分类号： G03G13/16 ,  G03G13/01 ,  G03G7/0006 ,  G03G7/006 ,  Y10T428/24934 ,  Y10T428/273 ,  Y10T428/277

摘要： Electrophotographic transfer paper having a coating layer provided on at least one surface of base paper and pigments and adhesive agents as main components, wherein resistivity (VR) and surface resistivity (SV) of electrophotographic transfer paper after the humidity has adjusted to 10.degree. C., 30% RH for 12 hours satisfy the expression Log(VR/SR).ltoreq.1.5. Using such electrophotographic transfer paper, occurrence of discharge mark and occurrence of density irregularity in a high-density image region are prevented to thereby make it possible to provide electrophotographic transfer paper excellent in fixing characteristic, nonshowthrough, partial deletion and generation of paper dust.

摘要翻译： 具有设置在原纸和颜料和粘合剂的至少一个表面上的涂层作为主要成分的电子照相转印纸，其中湿度后电子照相转印纸的电阻率（VR）和表面电阻率（SV）已经调节到10℃。 ，30％RH，12小时，满足Log（VR / SR）= 1.5。 使用这样的电子转印纸，防止了高密度图像区域中的放电痕迹的发生和密度不均匀的发生，从而可以提供优异的固色特性，非穿透性，部分缺失和产生纸粉尘的电子照相转印纸。

公开(公告)号：US5662995A

公开(公告)日：1997-09-02

申请号：US497739

申请日：1995-07-03

申请人： Kunio Sakurai ,  Tsukasa Matsuda ,  Kyoko Inoue ,  Harumi Watanabe ,  Masaru Kato

发明人： Kunio Sakurai ,  Tsukasa Matsuda ,  Kyoko Inoue ,  Harumi Watanabe ,  Masaru Kato

IPC分类号： D21H19/70 ,  G03G7/00 ,  B32B3/26

CPC分类号： G03G7/0013 ,  D21H19/70 ,  G03G7/0006 ,  Y10T428/24802 ,  Y10T428/24934 ,  Y10T428/249953 ,  Y10T428/25 ,  Y10T428/27 ,  Y10T428/277 ,  Y10T428/31 ,  Y10T428/31993

摘要： Transfer paper for electrophotography of the present invention includes base paper; and a coating layer provided on at least one side of the base paper. The coating layer includes a pigment and a binder, has a solids content in the range of 2 to 10 g/m.sup.2, and has void-free areas containing no voids having a circle-equivalent diameter of equal to or more than 1 .mu.m and void area containing voids whose circle-equivalent diameter is equal to or more than 1 .mu.m. A proportion of void areas whose equivalent circle diameter is more than 20 .mu.m is not more than 2%, and the average equivalent circle diameter of the void areas and that of the void-free areas as observed on the surface of the coating layer satisfy at least one of the following conditions: (1) the average equivalent circle diameter of the void areas and that of the void-free areas are each from 1.5 to 10 .mu.m; (2) the average equivalent circle diameter of the void areas and that of the void-free areas are each 0.2 to 1.5 times the volume average particle size of the toner used for image formation; and (3) the average equivalent circle diameter of the void areas is from 1.0 to 10.0 .mu.m and that of the void-free area is from 1.5 to 10 .mu.m.

摘要翻译： 本发明的电子照相用转印纸包括原纸; 以及设置在原纸的至少一侧上的涂层。 涂层包括颜料和粘合剂，其固体含量在2至10g / m 2的范围内，并且具有不含圆当量直径等于或大于1μm的空隙的无空隙区域，以及 空心面积为圆当量直径等于或大于1μm的空隙。 当量圆直径大于20μm的空隙区域的比例不超过2％，在涂层表面观察到的空隙区域和无空隙区域的平均当量圆直径满足 以下条件中的至少一个：（1）空隙区域的平均当量圆直径和无空隙面积的平均当量圆直径分别为1.5至10μm; （2）空隙区域和无空隙区域的平均当量圆直径分别为图像形成用调色剂的体积平均粒径的0.2〜1.5倍。 （3）空隙面积的平均当量圆直径为1.0〜10.0μm，无空隙面积为1.5〜10μm。

公开(公告)号：US08486845B2

公开(公告)日：2013-07-16

申请号：US11084024

申请日：2005-03-21

申请人： Tsukasa Matsuda

发明人： Tsukasa Matsuda

IPC分类号： H01L21/31 ,  H01L21/469

CPC分类号： C23C16/45544 ,  C23C16/4554 ,  C23C16/515 ,  H01J37/32009 ,  H01J37/32532 ,  H01L21/28562

摘要： A method for depositing a film on a substrate using a plasma enhanced atomic layer deposition (PEALD) process includes disposing the substrate in a process chamber configured to facilitate the PEALD process, introducing a first process material within the process chamber and introducing a second process material within the process chamber. Also included is coupling electromagnetic power to the process chamber during introduction of the second process material in order to generate a plasma that facilitates a reduction reaction between the first and second process materials at a surface of the substrate. A reactive gas is introduced within the process chamber, the reactive gas chemically reacting with contaminants in the process chamber to release the contaminants from at least one of a process chamber component or the substrate.

摘要翻译： 使用等离子体增强原子层沉积（PEALD）工艺在衬底上沉积膜的方法包括将衬底布置在处理室中，该处理室被配置为便于PEALD工艺，在处理室内引入第一工艺材料并引入第二工艺材料 在处理室内。 还包括在引入第二工艺材料期间将电磁功率耦合到处理室，以便产生促进第一和第二工艺材料在衬底表面处的还原反应的等离子体。 反应性气体被引入处理室内，反应气体与处理室中的污染物质化学反应以从处理室组件或衬底中的至少一个释放污染物。

公开(公告)号：US08100147B2

公开(公告)日：2012-01-24

申请号：US11782090

申请日：2007-07-24

申请人： Hayashi Otsuki ,  Tsukasa Matsuda ,  Kyoko Ikeda

发明人： Hayashi Otsuki ,  Tsukasa Matsuda ,  Kyoko Ikeda

IPC分类号： B01F5/18

CPC分类号： G01N1/24 ,  C23C16/4405 ,  C23C16/4412 ,  G01N15/06 ,  G01N2015/0693 ,  H01L21/67069 ,  H01L21/67115 ,  H01L21/67253 ,  H01L21/68742 ,  Y10T137/8593 ,  Y10T137/87652 ,  Y10T137/8766

摘要： The present invention provides a particle measuring system which is provided in a processing system 40 which generates an atmosphere obtained by exhausting air or a gas in a processing chamber 48 by a vacuum pump 98 and applies a process concerning semiconductor manufacture to a wafer W in the atmosphere, attached to an exhaust pipe 90 which connects an exhaust opening 86 of the processing chamber 48 with the vacuum pump 98, and measures the number of the particles in the exhaust gas, and a measuring method thereof, the system and method providing a processing system and a cleaning method which terminate etching process by determining an end point based on the number of the particles in the exhaust gas and perform cleaning of unnecessary films.

摘要翻译： 本发明提供一种粒子测量系统，其设置在处理系统40中，该处理系统40产生通过真空泵98排出处理室48中的空气或气体而获得的气氛，并将与半导体制造有关的工艺应用于晶片W 附着在排气管90上，排气管90将处理室48的排气口86与真空泵98连接，并测量废气中的颗粒数量及其测量方法，该系统和方法提供处理 系统和清洁方法，其通过基于废气中的颗粒数量确定终点并执行不需要的膜的清洁来终止蚀刻工艺。

公开(公告)号：US07834739B2

公开(公告)日：2010-11-16

申请号：US12076337

申请日：2008-03-17

申请人： Shoji Yamaguchi ,  Mario Fuse ,  Yasunori Koda ,  Kunihiro Takahashi ,  Hiroyoshi Inoue ,  Tsukasa Matsuda

发明人： Shoji Yamaguchi ,  Mario Fuse ,  Yasunori Koda ,  Kunihiro Takahashi ,  Hiroyoshi Inoue ,  Tsukasa Matsuda

IPC分类号： B60R25/00 ,  G06F7/04 ,  G06F7/00

CPC分类号： G01R33/02

摘要： A baggage management gate includes a first reading device and a second reading device, a detecting device, a determining unit, a first opening and closing device and a second opening and closing device. The baggage management gate manages baggage that is restricted to be carried in or out from a predetermined region. And in order away from the region in which the baggage is managed, the first reading device, the second opening and closing device, the detecting device for both the first person and the second person, the first opening and closing device, and the second reading device are arranged in an entrance direction from the passage to the management region in which the baggage is managed.

摘要翻译： 行李管理门包括第一读取装置和第二读取装置，检测装置，确定装置，第一打开和关闭装置以及第二打开和关闭装置。 行李管理门管理被限制在预定区域内进出的行李。 并且为了远离管理行李的区域，第一读取装置，第二打开和关闭装置，用于第一人和第二人的检测装置，第一打开和关闭装置以及第二读取 设备沿着通道行进管理区域的入口方向排列。

公开(公告)号：US07667840B2

公开(公告)日：2010-02-23

申请号：US11965357

申请日：2007-12-27

申请人： Hayashi Otsuki ,  Tsukasa Matsuda ,  Kyoko Ikeda

发明人： Hayashi Otsuki ,  Tsukasa Matsuda ,  Kyoko Ikeda

IPC分类号： G01N21/00

CPC分类号： G01N1/24 ,  C23C16/4405 ,  C23C16/4412 ,  G01N15/06 ,  G01N2015/0693 ,  H01L21/67069 ,  H01L21/67115 ,  H01L21/67253 ,  H01L21/68742 ,  Y10T137/8593 ,  Y10T137/87652 ,  Y10T137/8766

摘要： The present invention provides a particle measuring system which is provided in a processing system that generates an atmosphere obtained by exhausting air or a gas in a processing chamber by a vacuum pump and applies a process concerning semiconductor manufacture to a wafer W in the atmosphere, attached to an exhaust pipe which connects an exhaust opening of the processing chamber with the vacuum pump, and measures the number of the particles in the exhaust gas, and a measuring method thereof, the system and method providing a processing system and a cleaning method which terminate etching process by determining an end point based on the number of the particles in the exhaust gas and perform cleaning of unnecessary films.

摘要翻译： 本发明提供一种粒子测量系统，其设置在处理系统中，该处理系统产生通过真空泵排出处理室中的空气或气体而获得的气氛，并将关于半导体制造的处理应用于大气中的晶片W，附着 涉及将处理室的排气口与真空泵连接并测量排气中的颗粒数的排气管及其测量方法，提供处理系统的系统和方法以及终止的处理室的清洁方法 通过基于排气中的颗粒数确定终点并执行不需要的膜的清洁来进行蚀刻处理。

公开(公告)号：US07351285B2

公开(公告)日：2008-04-01

申请号：US11092266

申请日：2005-03-29

申请人： Tsukasa Matsuda

发明人： Tsukasa Matsuda

IPC分类号： C30B23/00 ,  C23C16/00 ,  B05D3/00

CPC分类号： C23C16/18 ,  C23C16/16 ,  H01L21/28556 ,  H01L21/76868 ,  H01L21/76873

摘要： A method and system for forming a variable thickness seed layer on a substrate for a subsequent metal electrochemical plating process, where the seed layer thickness profile improves uniformity of the electroplated metal layer compared to when using a constant thickness seed layer. The method includes providing a substrate in a process chamber containing a showerhead, with the center of the substrate generally aligned with an inner gas delivery zone of the showerhead and the edge of the substrate generally aligned with an outer gas delivery zone of the showerhead. The method further includes depositing a seed layer on the substrate by exposing the substrate to a first gas containing a metal-containing precursor flowed through the inner gas delivery zone, and exposing the substrate to a second gas flowed through the outer gas delivery zone, whereby the seed layer is deposited with a thickness at the edge of the substrate that is less than the thickness at the center of the substrate.

摘要翻译： 一种用于在随后的金属电化学电镀工艺的衬底上形成可变厚度籽晶层的方法和系统，其中与使用恒定厚度的种子层相比，种子层厚度分布改善了电镀金属层的均匀性。 该方法包括在包含喷头的处理室中提供衬底，其中衬底的中心大致与喷头的内部气体输送区域对准，并且衬底的边缘与喷头的外部气体输送区域大致对准。 该方法还包括通过将衬底暴露于含有流过内部气体输送区的含金属前体的第一气体，并将衬底暴露于流过外部气体输送区的第二气体，从而将衬底层沉积在衬底上，由此 籽晶层在衬底的边缘处被沉积成小于衬底中心的厚度。