Integrated Circuit and Methods of Manufacturing a Contact Arrangement and an Interconnection Arrangement
    1.
    发明申请
    Integrated Circuit and Methods of Manufacturing a Contact Arrangement and an Interconnection Arrangement 失效
    集成电路和制造触点布置方法和互连布置

    公开(公告)号:US20080203586A1

    公开(公告)日:2008-08-28

    申请号:US11679295

    申请日:2007-02-27

    申请人: Lars Bach

    发明人: Lars Bach

    IPC分类号: H01L21/4763 H01L23/48

    摘要: A contact arrangement is manufactured by providing a substrate that includes first regions that are arranged along a row direction and a second region. An interlayer is provided that covers the first regions and the second region. A buried mask including a first trim opening above the first regions is provided. A top mask including first template openings is provided, where each first template opening is arranged above one of the first regions. A second template opening is provided above the second region. The fill material and the interlayer are etched to form contact trenches above the first regions and the second region. Substrate area efficient chains of evenly spaced contacts are provided.

    摘要翻译: 通过提供包括沿着行方向布置的第一区域和第二区域的基板来制造接触装置。 提供了覆盖第一区域和第二区域的中间层。 提供了包括在第一区域上方的第一修剪开口的掩埋掩模。 提供包括第一模板开口的顶部掩模,其中每个第一模板开口布置在第一区域之上。 第二模板开口设置在第二区域的上方。 蚀刻填充材料和中间层以在第一区域和第二区域之上形成接触沟槽。 提供均匀间隔触点的基板区域有效链。

    Semiconductor memory device and method of manufacturing thereof
    2.
    发明申请
    Semiconductor memory device and method of manufacturing thereof 失效
    半导体存储器件及其制造方法

    公开(公告)号:US20070138516A1

    公开(公告)日:2007-06-21

    申请号:US11304062

    申请日:2005-12-15

    申请人: Lars Bach

    发明人: Lars Bach

    IPC分类号: H01L29/76

    摘要: A semiconductor memory (26) having a plurality of memory cells (25), the semiconductor memory (26) having a substrate (1), at least one wordline (2) and first (3) and second lines (4). Each memory cell (25) of the plurality of memory cells (25) includes a fin (15) of semiconductor material, the fin (15) having a top surface (5), first (6) and second (7) opposing sidewalls and first (8) and second (9) opposing ends. The fin (15) extends along a first direction (X). Each memory cell (25) also includes a charge-trapping layer (11) disposed on the first (6) and second (7) sidewalls of said fin (15), a patterned first insulating layer (10) disposed on the top surface (5) of the fin (15), wherein the first insulating layer (10) abuts the top surface (5) of the fin (15) and the charge-trapping layer (11). Each memory cell (25) also includes a first doping region (12) coupled to the first end (8) of said fin (15) and a second doping region (13) coupled to the second end (9) of the fin (15).

    摘要翻译: 具有多个存储单元(25)的半导体存储器(26),所述半导体存储器(26)具有衬底(1),至少一个字线(2)和第一(3)和第二线(4)。 多个存储单元(25)的每个存储单元(25)包括半导体材料的翅片(15),翅片(15)具有顶表面(5),第一(6)和第二(7)相对的侧壁和 第一(8)和第二(9)相对端。 翅片(15)沿第一方向(X)延伸。 每个存储单元(25)还包括设置在所述翅片(15)的第一(6)和第二(7)侧壁上的电荷捕获层(11),设置在顶表面上的图案化的第一绝缘层(10) 5),其中第一绝缘层(10)邻接散热片(15)的顶表面(5)和电荷捕获层(11)。 每个存储单元(25)还包括耦合到所述鳍片(15)的第一端(8)的第一掺杂区域(12)和耦合到鳍片(15)的第二端(9)的第二掺杂区域(13) )。

    High density corrugated wafer board panel product
    5.
    发明授权
    High density corrugated wafer board panel product 失效
    高密度瓦楞纸板面板产品

    公开(公告)号:US5047280A

    公开(公告)日:1991-09-10

    申请号:US293073

    申请日:1989-01-03

    申请人: Lars Bach

    发明人: Lars Bach

    IPC分类号: E04C2/32

    摘要: A `high density` corrugated wafer board panel is provided. The wafer board panel has a substantially uniform density ranging from between about 700 kg/m.sup.3 to 900 kg/m.sup.3. As a result of increasing the density of the panel without changing the panel weight per projected unit area, a panel having improved overall flexure performance properties is provided.

    摘要翻译: 提供“高密度”波纹晶片板面板。 晶片板面板具有从约700kg / m 3到900kg / m 3之间的基本均匀的密度。 由于在不改变每个投影单位面积的面板重量的情况下增加面板的密度,所以提供了具有改进的整体挠曲性能特性的面板。

    Apparatus for the manufacture of a corrugated wafer board panel
    6.
    发明授权
    Apparatus for the manufacture of a corrugated wafer board panel 失效
    用于制造波纹晶片板面板的装置

    公开(公告)号:US4616991A

    公开(公告)日:1986-10-14

    申请号:US765840

    申请日:1985-08-15

    摘要: A platen assembly is provided having a working surface which can be mechanically converted between planar and corrugated configurations. A mat of wood wafers coated with thermosetting resin binder is deposited between upper and lower, spaced apart platen assemblies of this type. The platen assemblies, in the planar configuration, are then pressed together to a limited extent to pre-compress the mat to fix the wafers. Horizontal force is then applied to the platen assemblies to convert them to the corrugated configuration, with the pre-compressed mat retained therebetween. The mat is therefore forced to adopt a corrugated form. The platen assemblies are then further pressed together and heated, to cure the resin and produce a corrugated wafer board panel.

    摘要翻译: 提供了具有工作表面的压板组件,该工作表面可在平面和波纹结构之间机械地转换。 涂有热固性树脂粘合剂的木片的垫子沉积在这种类型的上部和下部间隔开的压板组件之间。 在平面构型中的压板组件然后在一定程度上被压在一起,以预先压缩垫以固定晶片。 然后将水平力施加到压板组件以将它们转换成波纹状结构,其中预压垫保持在其间。 因此,垫子被迫采用波纹形式。 然后将压板组件进一步压在一起并加热,以固化树脂并产生波纹晶片板面板。

    Integrated circuits having a contact structure having an elongate structure and methods for manufacturing the same
    7.
    发明授权
    Integrated circuits having a contact structure having an elongate structure and methods for manufacturing the same 有权
    具有细长结构的接触结构的集成电路及其制造方法

    公开(公告)号:US08178927B2

    公开(公告)日:2012-05-15

    申请号:US12152471

    申请日:2008-05-14

    申请人: Lars Bach

    发明人: Lars Bach

    IPC分类号: H01L21/70

    摘要: In an embodiment, an integrated circuit is provided. The integrated circuit may include an active area extending along a first direction corresponding to a current flow direction through the active area, a contact structure having an elongate structure. The contact structure may be electrically coupled with the active area. Furthermore, the contact structure may be arranged such that the length direction of the contact structure forms a non-zero angle with the first direction of the active area.

    摘要翻译: 在一个实施例中,提供集成电路。 集成电路可以包括沿着对应于通过有源区域的当前流动方向的第一方向延伸的有源区域,具有细长结构的接触结构。 接触结构可以与有源区电耦合。 此外,接触结构可以被布置成使得接触结构的长度方向与有源区域的第一方向形成非零角度。

    METHOD INCLUDING SELECTIVE TREATMENT OF STORAGE LAYER
    8.
    发明申请
    METHOD INCLUDING SELECTIVE TREATMENT OF STORAGE LAYER 审中-公开
    包括存储层选择性处理的方法

    公开(公告)号:US20090323411A1

    公开(公告)日:2009-12-31

    申请号:US12164593

    申请日:2008-06-30

    申请人: Lars Bach

    发明人: Lars Bach

    IPC分类号: G11C11/34 H01L21/311

    摘要: Method including selective treatment of storage layer. One embodiment includes the formation of a material layer on a topology with protruding portions, which may be assigned to active areas, and with recessed portions, which may be assigned to isolation structures. A mask material is deposited that grows selectively above the protruding portions and that forms a mask which covers first portions of the material layer wrapping around at least portions of the protruding portions. Openings in the mask are formed above second portions of the material layer above the recessed portions. Then the material layer is treated in the second portions in a self-aligned manner.

    摘要翻译: 方法包括选择性处理存储层。 一个实施例包括在拓扑结构上形成具有突出部分的材料层,其可以分配给有源区域以及可以分配给隔离结构的凹陷部分。 沉积掩模材料,其选择性地在突出部分上生长,并且形成覆盖围绕突出部分的至少一部分缠绕的材料层的第一部分的掩模。 掩模中的开口形成在凹部上方的材料层的第二部分之上。 然后以自对准的方式在第二部分处理材料层。

    Semiconductor memory device with channel regions along sidewalls of fins
    9.
    发明授权
    Semiconductor memory device with channel regions along sidewalls of fins 失效
    半导体存储器件,其通道区域沿翅片的侧壁

    公开(公告)号:US07394128B2

    公开(公告)日:2008-07-01

    申请号:US11304062

    申请日:2005-12-15

    申请人: Lars Bach

    发明人: Lars Bach

    IPC分类号: H01L27/108

    摘要: A semiconductor memory (26) having a plurality of memory cells (25), the semiconductor memory (26) having a substrate (1), at least one wordline (2) and first (3) and second lines (4). Each memory cell (25) of the plurality of memory cells (25) includes a fin (15) of semiconductor material, the fin (15) having a top surface (5), first (6) and second (7) opposing sidewalls and first (8) and second (9) opposing ends. The fin (15) extends along a first direction (X). Each memory cell (25) also includes a charge-trapping layer (11) disposed on the first (6) and second (7) sidewalls of said fin (15), a patterned first insulating layer (10) disposed on the top surface (5) of the fin (15), wherein the first insulating layer (10) abuts the top surface (5) of the fin (15) and the charge-trapping layer (11). Each memory cell (25) also includes a first doping region (12) coupled to the first end (8) of said fin (15) and a second doping region (13) coupled to the second end (9) of the fin (15).

    摘要翻译: 具有多个存储单元(25)的半导体存储器(26),所述半导体存储器(26)具有衬底(1),至少一个字线(2)和第一(3)和第二线(4)。 多个存储单元(25)的每个存储单元(25)包括半导体材料的翅片(15),翅片(15)具有顶表面(5),第一(6)和第二(7)相对的侧壁和 第一(8)和第二(9)相对端。 翅片(15)沿第一方向(X)延伸。 每个存储单元(25)还包括设置在所述翅片(15)的第一(6)和第二(7)侧壁上的电荷捕获层(11),设置在顶表面上的图案化的第一绝缘层(10) 5),其中第一绝缘层(10)邻接散热片(15)的顶表面(5)和电荷捕获层(11)。 每个存储单元(25)还包括耦合到所述鳍片(15)的第一端(8)的第一掺杂区域(12)和耦合到鳍片(15)的第二端(9)的第二掺杂区域(13) )。

    Field effect transistor arrangement, memory device and methods of forming the same
    10.
    发明申请
    Field effect transistor arrangement, memory device and methods of forming the same 审中-公开
    场效应晶体管布置,存储器件及其形成方法

    公开(公告)号:US20080067604A1

    公开(公告)日:2008-03-20

    申请号:US11522516

    申请日:2006-09-18

    申请人: Lars Bach

    发明人: Lars Bach

    IPC分类号: H01L29/772 H01L21/8234

    摘要: Sacrificial structures are provided on a substrate. A template fills a space between the sacrificial structures. The sacrificial structures are removed, where openings are formed in the template. A polysilicon layer is deposited in a single continuous deposition process. First portions of the polysilicon layer fill the openings. A second portion of the polysilicon layer bear on the first portions and the template. The second portion is patterned to form a base layer of a connection line. The first portions that may form gate electrodes and the base layer are provided in a single deposition process without temporarily exposing the upper edges of the first portions and without forming a deposition interface between the first portions and the base layer.

    摘要翻译: 牺牲结构设置在基板上。 模板填充牺牲结构之间的空间。 去除牺牲结构,其中在模板中形成开口。 在单个连续沉积工艺中沉积多晶硅层。 多晶硅层的第一部分填充开口。 多晶硅层的第二部分承载在第一部分和模板上。 图案化第二部分以形成连接线的基层。 可以在单个沉积工艺中提供可形成栅极电极和基底层的第一部分,而不会暂时暴露第一部分的上边缘并且在第一部分和基底层之间形成沉积界面。