Neutral beam apparatus for in-situ production of reactants and kinetic
energy transfer
    1.
    发明授权
    Neutral beam apparatus for in-situ production of reactants and kinetic energy transfer 失效
    用于原位生产反应物和动能传递的中性束装置

    公开(公告)号:US5468955A

    公开(公告)日:1995-11-21

    申请号:US359974

    申请日:1994-12-20

    IPC分类号: H05H3/02

    CPC分类号: H05H3/02

    摘要: The discovery that a location exists in a plasma sheath surrounding a plasma near a plasma confining surface where recombination of ions and electrons is favored due to Coulombic interaction is exploited to provide filtration of flux components and enhance neutralization of ions extracted from the plasma. By engineering of the dimensions of apertures in an apertured plate in accordance with plasma conditions and differential pumping, a high quality, high flux neutral beam can be developed wherein the particle energies may be scalable from very low levels below that which causes crystal lattice damage in semiconductor materials to very high levels. The production of a beam of neutral beam of good directivity and well-defined geometry is further exploited to provide predictability in plasma chemistry reactions and to form reactants in-situ for semiconductor processing. In-situ production of minute quantities of hydrofluoric acid for interface tailoring provides a "dry", high vacuum compatible alternative to wet etch processes.

    摘要翻译: 发现位于等离子体围绕等离子体周围的等离子体护套中的发现,其中离子和电子的重组由于库仑相互作用而有利于提供过量的助熔剂组分并增强从等离子体中提取的离子的中和。 通过根据等离子体条件和差分泵送工程化孔径的尺寸,可以开发出高质量的高通量中性束,其中粒子能量可以从低于导致晶格损伤的低水平的可伸缩性 半导体材料达到非常高的水平。 进一步开发了具有良好方向性和明确定义的几何形状的中性束束的生产,以提供等离子体化学反应中的可预测性并在半导体处理中原位形成反应物。 用于界面裁缝的微量氢氟酸的原位生产为湿法蚀刻工艺提供了“干”,高真空兼容的替代方案。

    ANISOTROPIC ETCH OF COPPER USING PASSIVATION
    2.
    发明申请
    ANISOTROPIC ETCH OF COPPER USING PASSIVATION 有权
    使用钝化的铜的各向异性蚀刻

    公开(公告)号:US20150376797A1

    公开(公告)日:2015-12-31

    申请号:US14320058

    申请日:2014-06-30

    申请人: Lee Chen Ying Zhang

    发明人: Lee Chen Ying Zhang

    摘要: A method for anisotropically etching a feature in a Cu-containing layer includes providing a substrate having a Cu-containing layer and a patterned etch mask formed on the Cu-containing layer such that on exposed Cu-containing layer is exposed to processing through the patterned etch mask, passivating a first surface of the exposed Cu-containing layer, and inhibiting passivation of a second surface of the Cu-containing layer. A Cu compound is formed on said second surface of the Cu-containing layer, and the Cu compound is removed from the second surface of the Cu-containing layer to anisotropically etch a feature in the Cu-containing layer.

    摘要翻译: 一种用于各向异性蚀刻含Cu层中的特征的方法包括提供具有含Cu层的基板和形成在含Cu层上的图案化蚀刻掩模,使得暴露的含Cu层暴露于通过图案化的处理 蚀刻掩模,钝化暴露的含Cu层的第一表面,并抑制含Cu层的第二表面的钝化。 在Cu含量层的第二表面上形成Cu化合物,并且从Cu含量层的第二表面除去Cu化合物以各向异性地蚀刻含Cu层中的特征。

    Method and system for intelligently forwarding multicast packets
    3.
    发明授权
    Method and system for intelligently forwarding multicast packets 有权
    智能转发组播报文的方法和系统

    公开(公告)号:US09112715B2

    公开(公告)日:2015-08-18

    申请号:US12765765

    申请日:2010-04-22

    IPC分类号: H04L12/18

    CPC分类号: H04L12/1886

    摘要: A routing system utilizes a layer 2 switch interconnecting several routers to intelligently forward multicast packets throughout an interne exchange carrying multicast content. The layer 2 switch performs protocol snooping to extract a lookup key that is based on network layer protocol information. The lookup key is uniquely formulated to support either shared or explicit source distribution trees. The lookup key is used to query a forwarding memory that returns an outgoing port index. The outgoing port index points to one or more outgoing ports that are eligible to receive the multicast packet. The outgoing ports are also connected to the neighboring device(s) that are designated to receive the multicast packet. The routing system also supports real time maintenance and updating of the forwarding memory based on the periodic exchange of control messages. The routing system is configured to support PIM routers operating in PIM SM or PIM SSM modes. However, the routing system can also support other multicast protocols and/or standards.

    摘要翻译: 路由系统利用互连多个路由器的层2交换机在携带多播内容的内部交换机中智能地转发多播分组。 第二层交换机执行协议侦听,提取基于网络层协议信息的查找密钥。 查找密钥是独一无二的,用于支持共享或明确的源分发树。 查询键用于查询返回出站端口索引的转发内存。 出站端口索引指向一个或多个有资格接收组播数据包的输出端口。 输出端口也连接到被指定为接收多播分组的相邻设备。 路由系统还支持基于控制消息的周期性交换的转发存储器的实时维护和更新。 路由系统配置为支持以PIM SM或PIM SSM模式运行的PIM路由器。 然而,路由系统还可以支持其他多播协议和/或标准。

    Plasma tuning rods in microwave resonator plasma sources
    4.
    发明授权
    Plasma tuning rods in microwave resonator plasma sources 有权
    微波谐振器等离子体源中的等离子体调谐棒

    公开(公告)号:US09111727B2

    公开(公告)日:2015-08-18

    申请号:US13249560

    申请日:2011-09-30

    摘要: The invention provides a plurality of resonator subsystems. The resonator subsystems can comprise one or more resonant cavities configured to couple electromagnetic (EM) energy in a desired EM wave mode to plasma by generating resonant microwave energy in a resonant cavity adjacent the plasma. The resonator subsystem can be coupled to a process chamber using one or more interface subsystems and can comprise one or more resonant cavities, and each resonant cavity can have a plurality of plasma tuning rods coupled thereto. Some of the plasma tuning rods can be configured to couple the EM-energy from one or more of the resonant cavities to the process space within the process chamber.

    摘要翻译: 本发明提供了多个谐振器子系统。 谐振器子系统可以包括一个或多个谐振腔,其被配置为通过在与等离子体相邻的谐振腔中产生谐振微波能量将所期望的EM波模式中的电磁(EM)能量耦合到等离子体。 谐振器子系统可以使用一个或多个接口子系统耦合到处理室,并且可以包括一个或多个谐振腔,并且每个谐振腔可以具有耦合到其上的多个等离子体调谐棒。 一些等离子体调谐杆可被配置成将EM能量从一个或多个谐振腔耦合到处理室内的处理空间。

    NETWORK PROXY LAYER FOR POLICY-BASED APPLICATION PROXIES
    5.
    发明申请
    NETWORK PROXY LAYER FOR POLICY-BASED APPLICATION PROXIES 审中-公开
    网络代理层用于基于策略的应用程序

    公开(公告)号:US20150156223A1

    公开(公告)日:2015-06-04

    申请号:US14094529

    申请日:2013-12-02

    IPC分类号: H04L29/06

    摘要: A system and method for providing a network proxy layer are disclosed. The network proxy layer may receive a connection establishment event for a client connection of an application session and send the client connection event to an application proxy for the application session, the application proxy being associated with an application of a server. Upon establishment of the client connection, the network proxy layer may receive one or more data packets from the client connection. The network proxy layer may further receive a connection establishment event for a server connection of the application session of the server, and receive one or more data packets from the server connection.

    摘要翻译: 公开了一种用于提供网络代理层的系统和方法。 网络代理层可以接收用于应用会话的客户端连接的连接建立事件,并且将客户端连接事件发送到应用程序会话的应用代理,应用代理与服务器的应用相关联。 在建立客户端连接时,网络代理层可以从客户端连接接收一个或多个数据分组。 网络代理层还可以接收服务器应用会话的服务器连接的连接建立事件,并从服务器连接接收一个或多个数据包。

    System and method for an adaptive TCP SYN cookie with time validation
    7.
    再颁专利
    System and method for an adaptive TCP SYN cookie with time validation 有权
    具有时间验证的自适应TCP ​​SYN cookie的系统和方法

    公开(公告)号:USRE44701E1

    公开(公告)日:2014-01-14

    申请号:US13413191

    申请日:2012-03-06

    IPC分类号: G01R31/08 H04L12/56

    CPC分类号: H04L47/10 H04L63/1458

    摘要: Provided is a method and system for TCP SYN cookie validation. The method includes receiving a session SYN packet by a TCP session setup module of a host server, generating a transition cookie including a time value representing the actual time, sending a session SYN/ACK packet, including the transition cookie, in response to the received session SYN packet, receiving a session ACK packet, and determining whether a candidate transition cookie in the received session ACK packet comprises a time value representing a time within a predetermined time interval from the time the session ACK packet is received.

    摘要翻译: 提供了一种用于TCP SYN cookie验证的方法和系统。 所述方法包括:通过主机服务器的TCP会话建立模块接收会话SYN分组,生成包含表示实际时间的时间值的转换cookie,响应于接收到的发送包括转换cookie的会话SYN / ACK分组 会话SYN分组,接收会话ACK分组,以及确定接收到的会话ACK分组中的候选转移cookie是否包括表示从接收到会话ACK分组的时间起的预定时间间隔内的时间的时间值。

    Adaptive recipe selector
    8.
    发明授权
    Adaptive recipe selector 有权
    自适应配方选择器

    公开(公告)号:US08501499B2

    公开(公告)日:2013-08-06

    申请号:US13073237

    申请日:2011-03-28

    摘要: The invention provides a method of processing a wafer using Ion Energy (IE)-related multilayer process sequences and Ion Energy Controlled Multi-Input/Multi-Output (IEC-MIMO) models and libraries that can include one or more measurement procedures, one or more IEC-etch sequences, and one or more Ion Energy Optimized (IEO) etch procedures. The IEC-MIMO process control uses dynamically interacting behavioral modeling between multiple layers and/or multiple IEC etch sequences. The multiple layers and/or the multiple IEC etch sequence can be associated with the creation of lines, trenches, vias, spacers, contacts, and gate structures that can be created using IEO etch procedures.

    摘要翻译: 本发明提供了一种使用离子能量(IE)相关的多层过程序列和离子能量控制多输入/多输出(IEC-MIMO)模型和可包括一个或多个测量过程的库来处理晶片的方法,其中一个或多个 更多的IEC蚀刻序列和一个或多个离子能量优化(IEO)蚀刻程序。 IEC-MIMO过程控制使用多层和/或多个IEC蚀刻序列之间的动态交互行为建模。 多层和/或多个IEC蚀刻序列可以与可以使用IEO蚀刻工艺创建的线,沟槽,通孔,间隔物,触点和栅极结构的产生相关联。

    System and method for distributed multi-processing security gateway
    9.
    发明授权
    System and method for distributed multi-processing security gateway 有权
    分布式多处理安全网关的系统和方法

    公开(公告)号:US08464333B1

    公开(公告)日:2013-06-11

    申请号:US13347027

    申请日:2012-01-10

    IPC分类号: G06F21/00

    摘要: A system and method for a distributed multi-processing security gateway establishes a host side session, selects a proxy network address for a server, uses the proxy network address to establish a server side session, receives a data packet, assigns a central processing unit core from a plurality of central processing unit cores in a multi-core processor of the security gateway to process the data packet, processes the data packet according to security policies, and sends the processed data packet. The proxy network address is selected such that a same central processing unit core is assigned to process data packets from the server side session and the host side session. By assigning central processing unit cores in this manner, higher capable security gateways are provided.

    摘要翻译: 用于分布式多处理安全网关的系统和方法建立主机侧会话,为服务器选择代理网络地址,使用代理网络地址建立服务器端会话,接收数据包,分配中央处理单元核心 从安全网关的多核处理器中的多个中央处理单元核心处理数据分组,根据安全策略处理数据分组,并发送处理后的数据分组。 代理网络地址被选择为使得相同的中央处理单元核心被分配以处理来自服务器端会话和主机侧会话的数据分组。 通过以这种方式分配中央处理单元核心,提供了更高能力的安全网关。

    Method and system for etching a MEM device
    10.
    发明授权
    Method and system for etching a MEM device 有权
    蚀刻MEM器件的方法和系统

    公开(公告)号:US08460567B2

    公开(公告)日:2013-06-11

    申请号:US12165801

    申请日:2008-07-01

    申请人: Lee Chen

    发明人: Lee Chen

    IPC分类号: B44C1/22

    摘要: A method and system for etching a substrate is described and, in particular, a method for etching large, high aspect ratio features, such as those in micro-electromechanical devices (MEMs), is also described. The method comprises disposing a substrate in a processing system, forming plasma having a substantial population of negatively-charged ions, and etching one or more features in the substrate using the negative ion population.

    摘要翻译: 描述了用于蚀刻衬底的方法和系统,并且特别地描述了用于蚀刻大的高纵横比特征的方法,例如微机电器件(MEM)中的那些。 该方法包括将衬底设置在处理系统中,形成具有大量负电荷离子的等离子体,以及使用负离子群蚀刻衬底中的一个或多个特征。