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    Low temperature Bi-CMOS compatible process for MEMS RF resonators and filters
    2.
    发明授权
    Low temperature Bi-CMOS compatible process for MEMS RF resonators and filters 失效
    用于MEMS RF谐振器和滤波器的低温Bi-CMOS兼容工艺

    公开(公告)号：US07943412B2

    公开(公告)日：2011-05-17

    申请号：US10316254

    申请日：2002-12-10

    申请人： Leena Paivikki Buchwalter ,  Kevin Kok Chan ,  Timothy Joseph Dalton ,  Christopher Vincent Jahnes ,  Jennifer Louise Lund ,  Kevin Shawn Petrarca ,  James Louis Speidell ,  James Francis Ziegler

    发明人： Leena Paivikki Buchwalter ,  Kevin Kok Chan ,  Timothy Joseph Dalton ,  Christopher Vincent Jahnes ,  Jennifer Louise Lund ,  Kevin Shawn Petrarca ,  James Louis Speidell ,  James Francis Ziegler

    IPC分类号： H01L21/00

    CPC分类号： B81C1/00246 ,  B81B2201/0271 ,  B81C1/0023 ,  B81C2203/0735 ,  H03H3/0072 ,  H03H9/2405

    摘要： A method of formation of a microelectromechanical system (MEMS) resonator or filter which is compatible with integration with any analog, digital, or mixed-signal integrated circuit (IC) process, after or concurrently with the formation of the metal interconnect layers in those processes, by virtue of its materials of composition, processing steps, and temperature of fabrication is presented. The MEMS resonator or filter incorporates a lower metal level, which forms the electrodes of the MEMS resonator or filter, that may be shared with any or none of the existing metal interconnect levels on the IC. It further incorporates a resonating member that is comprised of at least one metal layer for electrical connection and electrostatic actuation, and at least one dielectric layer for structural purposes. The gap between the electrodes and the resonating member is created by the deposition and subsequent removal of a sacrificial layer comprised of a carbon-based material. The method of removal of the sacrificial material is by an oxygen plasma or an anneal in an oxygen containing ambient. A method of vacuum encapsulation of the MEMS resonator or filter is provided through means of a cavity containing the MEMS device, filled with additional sacrificial material, and sealed. Access vias are created through the membrane sealing the cavity; the sacrificial material is removed as stated previously, and the vias are re-sealed in a vacuum coating process.

    摘要翻译： 一种形成微机电系统（MEMS）谐振器或滤波器的方法，其与在任何模拟，数字或混合信号集成电路（IC）工艺中的集成兼容，或者与这些工艺中的金属互连层的形成同时 ，由于其组成材料，加工步骤和制造温度。 MEMS谐振器或滤波器包含形成MEMS谐振器或滤波器的电极的较低金属电平，其可与IC上的现有金属互连电平中的任何一个或任何一个共享。 它还包括谐振元件，该谐振元件由用于电连接和静电驱动的至少一个金属层和至少一个用于结构目的的电介质层组成。 通过沉积并随后去除由碳基材料构成的牺牲层来产生电极和谐振构件之间的间隙。 去除牺牲材料的方法是通过氧等离子体或在含氧环境中的退火。 MEMS谐振器或滤波器的真空封装方法是通过一个包含MEMS器件的空腔的装置提供的，其中填充有额外的牺牲材料并被密封。 通过隔膜密封腔形成通孔; 如先前所述去除牺牲材料，并且在真空涂覆工艺中重新密封通孔。

    Low temperature bi-CMOS compatible process for MEMS RF resonators and filters
    4.
    发明申请
    Low temperature bi-CMOS compatible process for MEMS RF resonators and filters 失效
    用于MEMS RF谐振器和滤波器的低温双CMOS兼容工艺

    公开(公告)号：US20090108381A1

    公开(公告)日：2009-04-30

    申请号：US10316254

    申请日：2002-12-10

    申请人： Leena Paivikki Buchwalter ,  Kevin Kok Chan ,  Timothy Joseph Dalton ,  Christopher Vincent Jahnes ,  Jennifer Louise Lund ,  Kevin Shawn Petrarca ,  James Louis Speidell ,  James Francis Ziegler

    发明人： Leena Paivikki Buchwalter ,  Kevin Kok Chan ,  Timothy Joseph Dalton ,  Christopher Vincent Jahnes ,  Jennifer Louise Lund ,  Kevin Shawn Petrarca ,  James Louis Speidell ,  James Francis Ziegler

    IPC分类号： H03H9/24 ,  H01L23/28 ,  H01L21/56

    CPC分类号： B81C1/00246 ,  B81B2201/0271 ,  B81C1/0023 ,  B81C2203/0735 ,  H03H3/0072 ,  H03H9/2405

    摘要： A method of formation of a microelectromechanical system (MEMS) resonator or filter which is compatible with integration with any analog, digital, or mixed-signal integrated circuit (IC) process, after or concurrently with the formation of the metal interconnect layers in those processes, by virtue of its materials of composition, processing steps, and temperature of fabrication is presented. The MEMS resonator or filter incorporates a lower metal level, which forms the electrodes of the MEMS resonator or filter, that may be shared with any or none of the existing metal interconnect levels on the IC. It further incorporates a resonating member that is comprised of at least one metal layer for electrical connection and electrostatic actuation, and at least one dielectric layer for structural purposes. The gap between the electrodes and the resonating member is created by the deposition and subsequent removal of a sacrificial layer comprised of a carbon-based material. The method of removal of the sacrificial material is by an oxygen plasma or an anneal in an oxygen containing ambient. A method of vacuum encapsulation of the MEMS resonator or filter is provided through means of a cavity containing the MEMS device, filled with additional sacrificial material, and sealed. Access vias are created through the membrane sealing the cavity; the sacrificial material is removed as stated previously, and the vias are re-sealed in a vacuum coating process.

    摘要翻译： 一种形成微机电系统（MEMS）谐振器或滤波器的方法，其与在任何模拟，数字或混合信号集成电路（IC）工艺中的集成兼容，或者与这些工艺中的金属互连层的形成同时 ，由于其组成材料，加工步骤和制造温度。 MEMS谐振器或滤波器包含形成MEMS谐振器或滤波器的电极的较低金属电平，其可与IC上的现有金属互连电平中的任何一个或任何一个共享。 它还包括谐振元件，该谐振元件由用于电连接和静电驱动的至少一个金属层和至少一个用于结构目的的电介质层组成。 通过沉积并随后去除由碳基材料构成的牺牲层来产生电极和谐振构件之间的间隙。 去除牺牲材料的方法是通过氧等离子体或在含氧环境中的退火。 MEMS谐振器或滤波器的真空封装方法是通过一个包含MEMS器件的空腔的装置提供的，其中填充有额外的牺牲材料并被密封。 通过隔膜密封腔形成通孔; 如先前所述去除牺牲材料，并且在真空涂覆工艺中重新密封通孔。

    Focussing of therapeutic radiation on internal structures of living bodies
    6.
    发明授权
    Focussing of therapeutic radiation on internal structures of living bodies 有权
    聚焦治疗辐射对活体内部结构的影响

    公开(公告)号：US06179767B2

    公开(公告)日：2001-01-30

    申请号：US09241503

    申请日：1999-02-01

    申请人： James Francis Ziegler ,  Robert Jacob von Gutfeld

    发明人： James Francis Ziegler ,  Robert Jacob von Gutfeld

    IPC分类号： A61B500

    CPC分类号： A61B6/12 ,  A61N5/1049 ,  A61N2005/1051 ,  A61N2005/1091

    摘要： This invention helps achieve accurate focussing of therapeutic radiation at an internal structure (e.g. cancerous organ), which is often substantially movable within a living body. For this purpose, suitable sensors are laproscopically or surgically implanted at the location of the organ. These sensors may include semiconductor materials, scintillation materials, piezo-acoustic materials, x-ray emitters, or other materials which emit a signal when they are scanned by a beam of harmless investigative radiation, such as low intensity therapeutic radiation. The emitted signal is then monitored via implanted wires or light fibers or via external detectors during scanning to determine the targetted location at which a signal maximum occurs, whereupon the desired intensity of therapeutic radiation is focussed on this targetted location.

    摘要翻译： 本发明有助于在内部结构（例如癌性器官）处实现治疗辐射的精确聚焦，其通常在活体内基本上可移动。 为此，将合适的传感器在器官的位置进行轮廓扫描或手术植入。 这些传感器可以包括半导体材料，闪烁材料，压电声学材料，x射线发射器或当它们被无害调查辐射束（例如低强度治疗辐射）扫描时发出信号的其它材料。 然后在扫描期间通过植入的线或光纤或经由外部检测器监测发射的信号，以确定出现信号最大值的目标位置，由此将所需的治疗辐射强度集中在该目标位置上。

    Radiation microdosimeters correlated with biological cells and cell components
    8.
    发明授权
    Radiation microdosimeters correlated with biological cells and cell components 有权
    辐射微量计与生物细胞和细胞成分相关

    公开(公告)号：US08858888B2

    公开(公告)日：2014-10-14

    申请号：US13959616

    申请日：2013-08-05

    申请人： James Francis Ziegler ,  Chao-tuan Liu ,  Razmig Hagop Messerian ,  Wayne Newhauser

    发明人： James Francis Ziegler ,  Chao-tuan Liu ,  Razmig Hagop Messerian ,  Wayne Newhauser

    IPC分类号： G01N27/00 ,  G01N23/00

    CPC分类号： H01L31/18 ,  A61B6/42 ,  A61B6/542 ,  G01N23/00 ,  G01N23/10 ,  G01N33/48728 ,  G01T1/026 ,  H01L27/14683

    摘要： One feature pertains to a radiation dosimeter comprising a microdosimeter cell array that includes a first microdosimeter cell having a first semiconductor volume configured to generate a first current in response to incident radiation. The first semiconductor volume may have at least one of a first size, a first shape, a first semiconductor type, and/or a first semiconductor doping type and concentration that is associated with a first biological cell type or a first biological cell component type. The dosimeter may further comprise a processing circuit communicatively coupled to the microdosimeter cell array and configured to generate a signal based on the first current. The signal generated may be indicative of an amount of radiation absorbed by the microdosimeter cell array. A display may be utilized by the dosimeter to show a radiation level reading based on the signal generated.

    摘要翻译： 一个特征涉及包括微量测仪单元阵列的放射剂量计，该微量计单元阵列包括具有第一半导体体积的第一微量测单元，第一半容量体积被配置为响应于入射辐射而产生第一电流。 第一半导体体积可以具有与第一生物细胞类型或第一生物细胞组分类型相关联的第一尺寸，第一形状，第一半导体类型和/或第一半导体掺杂类型和浓度中的至少一种。 剂量计还可以包括通信地耦合到微测量计单元阵列并被配置为基于第一电流产生信号的处理电路。 产生的信号可以指示由微量计单元阵列吸收的辐射量。 剂量计可以利用显示器来基于产生的信号来显示辐射水平读数。

    RADIATION DETECTING WEARABLE DEVICES
    9.
    发明申请
    RADIATION DETECTING WEARABLE DEVICES 审中-公开
    辐射检测易损设备

    公开(公告)号：US20150346350A1

    公开(公告)日：2015-12-03

    申请号：US14821681

    申请日：2015-08-07

    申请人： James Francis Ziegler ,  Razmig Hagop Messerian ,  Wayne Newhauser

    发明人： James Francis Ziegler ,  Razmig Hagop Messerian ,  Wayne Newhauser

    IPC分类号： G01T1/02 ,  H01L31/08

    CPC分类号： G01N23/10 ,  G01N2223/501 ,  G01N2223/6126 ,  G01T1/026 ,  H01L31/085

    摘要： One feature pertains to a microdosimeter cell array that includes a plurality of microdosimeter cells each having a semiconductor volume adapted to generate a current in response to incident radiation. The semiconductor volumes of each of the plurality of microdosimeter cells have at least one of a size, a shape, a semiconductor type, and/or a semiconductor doping type and concentration that is associated with one or more cells or cell components of a human eye. A processing circuit is also communicatively coupled to the microdosimeter cell array and generates a signal based on the currents generated by the semiconductor volumes of the plurality of microdosimeter cells. The signal generated by the processing circuit is indicative of an amount of radiation absorbed by the microdosimeter cell array.

    摘要翻译： 一个特征涉及包含多个微量度计单元的微量测单元阵列，每个微量计单元具有适于响应入射辐射产生电流的半导体体积。 多个微量计单元中的每一个的半导体体积具有与人眼的一个或多个细胞或细胞组分相关联的尺寸，形状，半导体类型和/或半导体掺杂类型和浓度中的至少一种 。 处理电路还通信地耦合到微量测单元阵列，并且基于由多个微量测单元的半导体体积产生的电流产生信号。 由处理电路产生的信号指示由微量计单元阵列吸收的辐射量。

    Enhancement of persistent currents in high TC superconductors
    10.
    发明授权
    Enhancement of persistent currents in high TC superconductors 失效
    在高TC超导体中增强持续电流

    公开(公告)号：US5912210A

    公开(公告)日：1999-06-15

    申请号：US907435

    申请日：1997-08-08

    申请人： Lia Krusin-Elbaum ,  Alan David Marwick ,  Paul William Lisowski ,  James Russell Thompson, Jr. ,  James Francis Ziegler

    发明人： Lia Krusin-Elbaum ,  Alan David Marwick ,  Paul William Lisowski ,  James Russell Thompson, Jr. ,  James Francis Ziegler

    IPC分类号： C01G1/00 ,  H01B13/00 ,  H01L39/24 ,  H01L39/12

    CPC分类号： H01L39/249 ,  H01L39/2483

    摘要： There is disclosed herein an invention for increasing the current carrying capability of high-Tc superconductor materials. The inventive method includes irradiating such superconductors with light particles, such as neutrons, protons and thermal neutrons, having energy sufficient to cause fission of one or more elements in the superconductor material at a dose rate and for a time sufficient to create highly splayed (dispersed in orientation) extended columns of damaged material therein. These splayed tracks significantly enhance the pinning of magnetic vortices thereby effectively reducing the vortex creep at high temperatures resulting in increased current carrying capability.

    摘要翻译： 这里公开了用于增加高Tc超导体材料的载流能力的发明。 本发明的方法包括用诸如中子，质子和热中子的光粒子照射这种超导体，其具有足够的能量以在剂量速率下引起超导体材料中的一种或多种元素的裂变，并且足以产生高度展开的（分散的 在方向上）延伸的受损材料列。 这些显示的轨迹显着增强了磁旋涡的钉扎，从而有效地降低了高温下的涡流蠕变，从而提高了载流能力。