公开(公告)号：US09804384B2

公开(公告)日：2017-10-31

申请号：US15027527

申请日：2014-05-09

Applicant: M-SOLV LIMITED

Inventor： David Charles Milne ,  Philip Thomas Rumsby

IPC: G02B26/08 ,  G02B26/10 ,  B23K26/00 ,  B23K26/082 ,  G02B5/30 ,  G02B27/09

CPC classification number: G02B26/101 ,  B23K26/00 ,  B23K26/082 ,  B23K26/352 ,  G02B5/3066 ,  G02B27/0927

Abstract: The invention relates to a laser scanning system and associated method. In a disclosed arrangement the method comprises using a laser source to produce a laser beam; using a scanning module to scan the laser beam over the surface of a substrate; and using a redirecting unit at a position in a beam path of the laser beam between the scanning module and the substrate to control the direction of incidence of the laser beam onto the substrate, wherein: the laser beam is scanned over a predetermined region on the substrate in such a way that each portion of the region is exposed by the laser beam from a plurality of different directions of incidence.

公开(公告)号：US09843155B2

公开(公告)日：2017-12-12

申请号：US14373798

申请日：2013-04-19

Applicant: M-SOLV LIMITED

Inventor： David Charles Milne ,  Philip Thomas Rumsby ,  David Thomas Edmund Myles

IPC: H05K3/00 ,  H01S3/00 ,  B23K26/06 ,  H01S3/0941 ,  H01S3/11 ,  B23K26/073 ,  B23K26/082 ,  B23K26/066 ,  B23K26/362 ,  B23K26/402

CPC classification number: H01S3/11 ,  B23K26/0648 ,  B23K26/066 ,  B23K26/0661 ,  B23K26/073 ,  B23K26/082 ,  B23K26/0821 ,  B23K26/361 ,  B23K26/362 ,  B23K26/402 ,  B23K2103/50 ,  H01S3/0057 ,  H01S3/0071 ,  H01S3/0941 ,  H05K3/0035 ,  H05K3/0073 ,  H05K2203/0557

Abstract: Apparatus and methods for forming fine scale structures (4, 4′, 4″, 5, 6, 7, 8) in the surface of a dielectric substrate (3) to two or more depths are disclosed. In an example, the apparatus comprises a first solid state laser (12) arranged to provide a first pulsed laser beam (13), a first mask (16) having a pattern for defining a first set of structures (4, 6, 7, 8) at a first depth, a projection lens (17) for forming a reduced size image of said pattern on the surface (3) of the substrate and a beam scanner arranged to scan said first pulsed laser beam (13) in a two-dimensional raster scan relative to the first pattern to form a first set of structures (4, 6, 7, 5) at a first depth in the substrate, wherein the first or a further solid state laser is arranged to form a second set of structures (8) at a second depth in the substrate (3).

公开(公告)号：US20150230341A1

公开(公告)日：2015-08-13

申请号：US14373798

申请日：2013-04-19

Applicant: M-SOLV LIMITED

Inventor： David Charles Milne ,  Philip Thomas Rumsby ,  David Thomas Edmund Myles

IPC: H05K3/00 ,  H01S3/00 ,  B23K26/06 ,  H05K3/46 ,  B23K26/073 ,  H01S3/0941 ,  H01S3/11

CPC classification number: H01S3/11 ,  B23K26/0648 ,  B23K26/066 ,  B23K26/0661 ,  B23K26/073 ,  B23K26/082 ,  B23K26/0821 ,  B23K26/361 ,  B23K26/362 ,  B23K26/402 ,  B23K2103/50 ,  H01S3/0057 ,  H01S3/0071 ,  H01S3/0941 ,  H05K3/0035 ,  H05K3/0073 ,  H05K2203/0557

Abstract: Apparatus and methods for forming fine scale structures (4, 4′, 4″, 5, 6, 7, 8) in the surface of a dielectric substrate (3) to two or more depths are disclosed. In an example, the apparatus 25 comprises a first solid state laser (12) arranged to provide a first pulsed laser beam (13), a first mask (16) having a pattern for defining a first set of structures (4, 6, 7, 8) at a first depth, a projection lens (17) for forming a reduced size image of said pattern on the surface (3) of the substrate and a beam scanner arranged to scan said first pulsed laser beam (13) in a two-dimensional raster scan relative to the first pattern to form a first set of structures (4, 6, 7, 5) at a first depth in the substrate, wherein the first or a further solid state laser is arranged to form a second set of structures (8) at a second depth in the substrate (3).

Abstract translation: 公开了在电介质基板（3）的表面中形成两个或更多深度的精细尺度结构（4,4'，5“，6,7,8）的装置和方法。 在一个示例中，装置25包括布置成提供第一脉冲激光束（13）的第一固态激光器（12），具有用于限定第一组结构（4,6,7）的图案的第一掩模（16） ，8）在第一深度处，用于在所述基板的表面（3）上形成所述图案的缩小尺寸图像的投影透镜（17）和布置成以二维扫描所述第一脉冲激光束（13）的光束扫描器 相对于第一图案的三维光栅扫描，以在衬底中的第一深度处形成第一组结构（4,6,7,5），其中第一或另一固体激光器被布置成形成第二组 在基板（3）中的第二深度处的结构（8）。