Semiconductor device having a multi-layered conductive structure which
includes an aluminum alloy layer, a high melting temperature metal
layer, and a high melting temperature nitride layer
    1.
    发明授权
    Semiconductor device having a multi-layered conductive structure which includes an aluminum alloy layer, a high melting temperature metal layer, and a high melting temperature nitride layer 失效
    具有多层导电结构的半导体器件包括铝合金层,高熔点金属层和高熔点氮化物层

    公开(公告)号:US5646449A

    公开(公告)日:1997-07-08

    申请号:US504062

    申请日:1995-07-18

    摘要: A semiconductor having multi-layer metalization which has a metal layer between aluminum alloy and metal nitride layers, that prevents failure of interconnects when electromigration causes a discontinuity in the aluminum alloy layer. In a one embodiment, the metal of the metal layer and the metal of the nitride layer are both the same metal, such as titanium. In a method of manufacturing the semiconductor device, an insulating layer is formed on a surface of a semiconductor substrate, and in vacuum chambers, the alloy layer is formed on the insulating layer, a metal layer is formed on the alloy layer, and a metal nitride layer is formed on the metal layer in an nitrogen atmosphere. Sputtering, such as DC magnetron sputtering, RF-bias sputtering, or thermal evaporation deposition, may be used to apply the respective nitride, metal and alloy layers. If the same metal is used for the metal layer and the nitride layer, the same vacuum chamber may be used to apply both layers, by replacing an inert gas atmosphere used during metal layer deposition by a nitrogen gas atmosphere for use during the nitride layer deposition.

    摘要翻译: 具有多层金属化的半导体,其在铝合金和金属氮化物层之间具有金属层,防止当电迁移导致铝合金层不连续时互连的故障。 在一个实施例中,金属层的金属和氮化物层的金属都是相同的金属,例如钛。 在制造半导体器件的方法中,在半导体衬底的表面上形成绝缘层,在真空室中,在绝缘层上形成合金层,在合金层上形成金属层,金属层 在氮气气氛下在金属层上形成氮化物层。 可以使用诸如DC磁控溅射,RF偏置溅射或热蒸镀沉积的溅射来施加相应的氮化物,金属和合金层。 如果相同的金属用于金属层和氮化物层,则可以使用相同的真空室来施加两层,通过在氮化物层沉积期间用氮气气氛替换在金属层沉积期间使用的惰性气体气氛 。

    Semiconductor device having multi-layered metalization and method of manufacturing the same
    2.
    发明授权
    Semiconductor device having multi-layered metalization and method of manufacturing the same 失效
    具有多层金属化的半导体装置及其制造方法

    公开(公告)号:US06306762B1

    公开(公告)日:2001-10-23

    申请号:US08760557

    申请日:1996-12-04

    IPC分类号: H01L214763

    摘要: A semiconductor having multi-layer metalization which has a metal layer between aluminum alloy and metal nitride layers, that prevents failure of interconnects when electromigration causes a discontinuity in the aluminum alloy layer. In a one embodiment, the metal of the metal layer and the metal of the nitride layer are both the same metal, such as titanium. In a method of manufacturing the semiconductor device, an insulating layer is formed on a surface of a semiconductor substrate, and in vacuum chambers, the alloy layer is-formed on the insulating layer, a metal layer is formed on the alloy layer, and a metal nitride layer is formed on the metal layer in an nitrogen atmosphere. Sputtering, such as RF-bias sputtering, or thermal evaporation deposition, may be used to apply the respective nitride, metal and alloy layers. If the same metal is used for the metal layer and the nitride layer, the same vacuum chamber may be used to apply both layers, by replacing an inert gas atmosphere used during metal layer deposition by a nitrogen gas atmosphere for use during the nitride layer deposition.

    摘要翻译: 具有多层金属化的半导体,其在铝合金和金属氮化物层之间具有金属层,防止当电迁移导致铝合金层不连续时互连的故障。 在一个实施例中,金属层的金属和氮化物层的金属都是相同的金属,例如钛。 在制造半导体器件的方法中,在半导体衬底的表面上形成绝缘层,在真空室中,在绝缘层上形成合金层,在合金层上形成金属层, 在氮气气氛下在金属层上形成金属氮化物层。 可以使用诸如RF偏压溅射或热蒸镀沉积的溅射来施加相应的氮化物,金属和合金层。 如果相同的金属用于金属层和氮化物层,则可以使用相同的真空室来施加两层,通过在氮化物层沉积期间用氮气气氛替换在金属层沉积期间使用的惰性气体气氛 。

    Semiconductor device having low and high breakdown voltage transistors
    4.
    发明授权
    Semiconductor device having low and high breakdown voltage transistors 失效
    具有低和高击穿电压晶体管的半导体器件

    公开(公告)号:US06693344B1

    公开(公告)日:2004-02-17

    申请号:US09642225

    申请日:2000-08-21

    IPC分类号: H01L2900

    CPC分类号: H01L21/8222 H01L27/0825

    摘要: A base of a low breakdown voltage npn bipolar transistor has p+ diffusion layers. A field insulating layer is formed on the p+ diffusion layer located between the p+ diffusion layer and an emitter, while the p+ diffusion layer encloses the surface of the emitter and has a window part immediately under the emitter. Thus, a semiconductor device and a method of fabricating the same capable of suppressing dispersion of a current amplification factor hFE in a wafer plane of the low breakdown voltage transistor and fabricating the low breakdown voltage transistor and a high breakdown voltage transistor through simple steps are obtained.

    摘要翻译: 低耐压npn双极晶体管的基极具有p +扩散层。 在位于p +扩散层和发射极之间的p +扩散层上形成场绝缘层,而p +扩散层包围发射极的表面,并且在发射极的正下方具有窗口部分 。 因此,获得能够抑制电流放大系数hFE在低击穿电压晶体管的晶片平面中的分散并且通过简单的步骤制造低击穿电压晶体管和高击穿电压晶体管的半导体器件及其制造方法 。

    Method of making a semiconductor device having a polydiode element
    5.
    发明授权
    Method of making a semiconductor device having a polydiode element 失效
    制造具有多晶硅元件的半导体器件的方法

    公开(公告)号:US06387745B1

    公开(公告)日:2002-05-14

    申请号:US09457715

    申请日:1999-12-10

    IPC分类号: H01L218234

    摘要: An aluminum wire is connected to a P-type layer of a polydiode element through a resistive element consisting of a barrier metal film and a tungsten plug. Another aluminum wire is connected to an N-type layer of the polydiode element through another resistive element consisting of another barrier metal film and another tungsten plug. Thus, a semiconductor device including a polydiode element which is resistant to surge or contamination is provided.

    摘要翻译: 铝线通过由阻挡金属膜和钨插塞构成的电阻元件连接到多晶硅元件的P型层。 另一铝线通过由另一个阻挡金属膜和另一个钨插塞组成的另一个电阻元件连接到多晶硅元件的N型层。 因此,提供了一种包括抗电涌或污染的多极体元件的半导体器件。

    Typewriter
    9.
    发明授权
    Typewriter 失效
    打字机

    公开(公告)号:US4283150A

    公开(公告)日:1981-08-11

    申请号:US38845

    申请日:1979-05-14

    CPC分类号: B41J7/30 B41J7/96

    摘要: An electric typewriter having a prevention mechanism for preventing printing errors caused by a depression of a few keys in very rapid succession. The prevention mechanism includes a lock member for locking a clutch, which is interposed between a drive motor and a printing mechanism, in a disengaged condition. The lock member is normally held in a non-operational position for allowing the clutch to be engaged, and is moved in response to a special operation of a sensing member to an operational position for keeping the clutch in a disengaged condition. The sensing member is so disposed as to be moved in a distinct way different from the normal operation mode when a few keys have been depressed in very rapid succession.

    摘要翻译: 一种具有预防机构的电动打字机,其用于防止因非常快速的连续按压几个按键引起的打印错误。 防止机构包括用于锁定离合器的锁定构件,该离合器介于驱动马达和打印机构之间,处于脱离状态。 锁定构件通常保持在非操作位置以允许离合器接合,并且响应于感测构件的特殊操作而移动到用于将离合器保持在脱离状态的操作位置。 感测构件被布置成当以非常快速的连续按压几个键时以与正常操作模式不同的不同方式移动。

    Single element print head
    10.
    发明授权
    Single element print head 失效
    单元打印头

    公开(公告)号:US4234262A

    公开(公告)日:1980-11-18

    申请号:US26676

    申请日:1979-04-03

    IPC分类号: B41J1/60

    CPC分类号: B41J1/60 Y10T403/604

    摘要: A single element print head having an apparatus for firmly and releasably attaching itself to the drive shaft of a typewriter. The body of the print head is provided with a central opening therethrough for receipt of the drive shaft. A cap is secured on the body around one end of the opening with the purpose of slidably holding a manual slide member in its guide recess and fixedly holding a base portion of a hair pin shaped spring in its holding groove. The spring has a pair of arms for firmly fastening therebetween, and for releasing the drive shaft by virtue of its resilience and the action of a pair of cam surfaces. The pair of cam surfaces are formed in the bottom portion of the slide member, diverging from one end to the other end like a front portion of a bullet, for expanding the arms from each other to release the arms from the drive shaft by means of the slide movement of the slide member.

    摘要翻译: 单元件打印头具有用于牢固且可释放地将自身附接到打字机的驱动轴上的装置。 打印头的主体设置有穿过其的中心开口,用于接收驱动轴。 盖子围绕开口的一端被固定在主体上,目的是在其引导凹槽中可滑动地保持手动滑动构件,并将发夹形弹簧的基部固定地保持在其保持槽中。 弹簧具有用于牢固地紧固在其间的一对臂,并且由于其弹性和一对凸轮表面的作用来释放驱动轴。 一对凸轮表面形成在滑动构件的底部,如同子弹的前部从一端向另一端分叉,用于使臂互相扩张,以使臂从驱动轴通过 滑动构件的滑动运动。