公开(公告)号：US20080006880A1

公开(公告)日：2008-01-10

申请号：US11857122

申请日：2007-09-18

申请人： Marius Orlowski ,  Suresh Venkatesan

发明人： Marius Orlowski ,  Suresh Venkatesan

IPC分类号： H01L29/76

CPC分类号： H01L29/7846 ,  H01L29/0653 ,  H01L29/1054 ,  H01L29/165 ,  H01L29/66628 ,  H01L29/66636 ,  H01L29/7848 ,  H01L29/78687

摘要： A method and apparatus is presented that provides mobility enhancement in the channel region of a transistor. In one embodiment, a channel region (18) is formed over a substrate that is bi-axially stressed. Source (30) and drain (32) regions are formed over the substrate. The source and drain regions provide an additional uni-axial stress to the bi-axially stressed channel region. The uni-axial stress and the bi-axially stress are both compressive for P-channel transistors and tensile for N-channel transistors. Both transistor types can be included on the same integrated circuit.

摘要翻译： 提出了一种在晶体管的沟道区域中提供迁移率增强的方法和装置。 在一个实施例中，沟槽区域（18）形成在双轴向应力的衬底上。 源极（30）和漏极（32）区域形成在衬底上。 源极和漏极区域向双向应力通道区域提供额外的单轴应力。 单向应力和双轴向应力对于P沟道晶体管是压缩的，对于N沟道晶体管是拉伸的。 两种晶体管类型都可以包含在同一集成电路中。

公开(公告)号：US20070218628A1

公开(公告)日：2007-09-20

申请号：US11375890

申请日：2006-03-15

申请人： Marius Orlowski ,  Suresh Venkatesan

发明人： Marius Orlowski ,  Suresh Venkatesan

IPC分类号： H01L21/8242

CPC分类号： H01L27/1211 ,  H01L21/845 ,  H01L27/1203 ,  H01L27/1207 ,  H01L29/66795 ,  H01L29/785

摘要： An electronic device can include a base layer, a semiconductor layer, and a first semiconductor fin spaced apart from and overlying a semiconductor layer. In a particular embodiment, a second semiconductor fin can include a portion of the semiconductor layer. In another aspect, a process of forming an electronic device can include providing a workpiece that includes a base layer, a first semiconductor layer that overlies and is spaced apart from a base layer, a second semiconductor layer that overlies, and an insulating layer lying between the first semiconductor layer and the second semiconductor layer. The process can also include removing a portion of the second semiconductor layer to form a first semiconductor fin, and forming a conductive member overlying the first semiconductor fin.

摘要翻译： 电子器件可以包括基极层，半导体层和与半导体层间隔开并覆盖半导体层的第一半导体鳍片。 在特定实施例中，第二半导体鳍片可以包括半导体层的一部分。 另一方面，形成电子器件的工艺可以包括提供一种工件，其包括基底层，覆盖并与基底层间隔开的第一半导体层，覆盖在第二半导体层上的绝缘层和位于第二半导体层之间的绝缘层 第一半导体层和第二半导体层。 该工艺还可以包括去除第二半导体层的一部分以形成第一半导体鳍片，以及形成覆盖在第一半导体鳍片上的导电构件。

公开(公告)号：US20060194384A1

公开(公告)日：2006-08-31

申请号：US11382432

申请日：2006-05-09

申请人： Suresh Venkatesan ,  Mark Foisy ,  Michael Mendicino ,  Marius Orlowski

发明人： Suresh Venkatesan ,  Mark Foisy ,  Michael Mendicino ,  Marius Orlowski

IPC分类号： H01L21/8238

CPC分类号： H01L21/84 ,  H01L21/823807 ,  H01L27/1203

摘要： A semiconductor device structure uses two semiconductor layers to separately optimize N and P channel transistor carrier mobility. The conduction characteristic for determining this is a combination of material type of the semiconductor, crystal plane, orientation, and strain. Hole mobility is improved in P channel transistors when the conduction characteristic is characterized by the semiconductor material being silicon germanium, the strain being compressive, the crystal plane being (100), and the orientation being . In the alternative, the crystal plane can be (111) and the orientation in such case is unimportant. The preferred substrate for N-type conduction is different from the preferred (or optimum) substrate for P-type conduction. The N channel transistors preferably have tensile strain, silicon semiconductor material, and a (100) plane. With the separate semiconductor layers, both the N and P channel transistors can be optimized for carrier mobility.

摘要翻译： 半导体器件结构使用两个半导体层来分别优化N沟道晶体管和P沟道晶体管的迁移率。 用于确定的导电特性是半导体的材料类型，晶面，取向和应变的组合。 当导电特性的特征在于半导体材料为硅锗时，p型沟道晶体管的空穴迁移率得到改善，应变为压缩，晶面为（100），取向为100。 或者，晶面可以是（111），在这种情况下的取向是不重要的。 用于N型导电的优选衬底不同于用于P型导电的优选（或最佳）衬底。 N沟道晶体管优选具有拉伸应变，硅半导体材料和（100）平面。 通过分开的半导体层，N沟道晶体管和P沟道晶体管都可以优化载流子迁移率。

公开(公告)号：US20060046366A1

公开(公告)日：2006-03-02

申请号：US10925108

申请日：2004-08-24

申请人： Marius Orlowski ,  Suresh Venkatesan

发明人： Marius Orlowski ,  Suresh Venkatesan

IPC分类号： H01L21/336

CPC分类号： H01L29/7846 ,  H01L29/0653 ,  H01L29/1054 ,  H01L29/165 ,  H01L29/66628 ,  H01L29/66636 ,  H01L29/7848 ,  H01L29/78687

摘要： A method and apparatus is presented that provides mobility enhancement in the channel region of a transistor. In one embodiment, a channel region (18) is formed over a substrate that is bi-axially stressed. Source (30) and drain (32) regions are formed over the substrate. The source and drain regions provide an additional uni-axial stress to the bi-axially stressed channel region. The uni-axial stress and the bi-axial stress are both compressive for P-channel transistors and both tensile for N-channel transistors. The result is that carrier mobility is enhanced for both short channel and long channel transistors. Both transistor types can be included on the same integrated circuit.

摘要翻译： 提出了一种在晶体管的沟道区域中提供迁移率增强的方法和装置。 在一个实施例中，沟槽区域（18）形成在双轴向应力的衬底上。 源极（30）和漏极（32）区域形成在衬底上。 源极和漏极区域向双向应力通道区域提供额外的单轴应力。 单向应力和双轴向应力对于P沟道晶体管都是压缩的，对于N沟道晶体管都是拉伸的。 结果是短沟道和长沟道晶体管的载流子迁移率增强。 两种晶体管类型都可以包含在同一集成电路中。

公开(公告)号：US20050275018A1

公开(公告)日：2005-12-15

申请号：US10865351

申请日：2004-06-10

申请人： Suresh Venkatesan ,  Mark Foisy ,  Michael Mendicino ,  Marius Orlowski

发明人： Suresh Venkatesan ,  Mark Foisy ,  Michael Mendicino ,  Marius Orlowski

IPC分类号： H01L21/8234 ,  H01L21/8238 ,  H01L21/84 ,  H01L27/12

CPC分类号： H01L21/84 ,  H01L21/823807 ,  H01L27/1203

摘要： A semiconductor device structure uses two semiconductor layers to separately optimize N and P channel transistor carrier mobility. The conduction characteristic for determining this is a combination of material type of the semiconductor, crystal plane, orientation, and strain. Hole mobility is improved in P channel transistors when the conduction characteristic is characterized by the semiconductor material being silicon germanium, the strain being compressive, the crystal plane being (100), and the orientation being . In the alternative, the crystal plane can be (111) and the orientation in such case is unimportant. The preferred substrate for N-type conduction is different from the preferred (or optimum) substrate for P-type conduction. The N channel transistors preferably have tensile strain, silicon semiconductor material, and a (100) plane. With the separate semiconductor layers, both the N and P channel transistors can be optimized for carrier mobility.

摘要翻译： 半导体器件结构使用两个半导体层来分别优化N沟道晶体管和P沟道晶体管的载流子迁移率。 用于确定的导电特性是半导体的材料类型，晶面，取向和应变的组合。 当导电特性的特征在于半导体材料为硅锗时，p型沟道晶体管的空穴迁移率得到改善，应变为压缩，晶面为（100），取向为100。 或者，晶面可以是（111），在这种情况下的取向是不重要的。 用于N型导电的优选衬底不同于用于P型导电的优选（或最佳）衬底。 N沟道晶体管优选具有拉伸应变，硅半导体材料和（100）平面。 通过分开的半导体层，N沟道晶体管和P沟道晶体管都可以优化载流子迁移率。

公开(公告)号：US09355910B2

公开(公告)日：2016-05-31

申请号：US13324740

申请日：2011-12-13

申请人： Mahbub Rashed ,  Irene Y. Lin ,  Steven Soss ,  Jeff Kim ,  Chinh Nguyen ,  Marc Tarabbia ,  Scott Johnson ,  Subramani Kengeri ,  Suresh Venkatesan

发明人： Mahbub Rashed ,  Irene Y. Lin ,  Steven Soss ,  Jeff Kim ,  Chinh Nguyen ,  Marc Tarabbia ,  Scott Johnson ,  Subramani Kengeri ,  Suresh Venkatesan

IPC分类号： H01L21/70 ,  H01L21/8234 ,  H01L27/02 ,  H01L21/768 ,  H01L27/118

CPC分类号： H01L23/535 ,  H01L21/28518 ,  H01L21/76895 ,  H01L21/823418 ,  H01L21/823475 ,  H01L21/823814 ,  H01L21/823871 ,  H01L23/53238 ,  H01L27/0207 ,  H01L27/092 ,  H01L27/11807 ,  H01L29/0847 ,  H01L2924/0002 ,  H01L2924/00

摘要： A semiconductor device is provided for implementing at least one logic element. The semiconductor device includes a semiconductor substrate with a first transistor and a second transistor formed on the semiconductor substrate. Each of the transistors comprises a source, a drain, and a gate. A trench silicide layer electrically connects one of the source or the drain of the first transistor to one of the source or the drain of the second transistor.

摘要翻译： 提供半导体器件用于实现至少一个逻辑元件。 该半导体器件包括具有第一晶体管的半导体衬底和形成在半导体衬底上的第二晶体管。 每个晶体管包括源极，漏极和栅极。 沟槽硅化物层将第一晶体管的源极或漏极之一电连接到第二晶体管的源极或漏极之一。

公开(公告)号：US20140042641A1

公开(公告)日：2014-02-13

申请号：US13568737

申请日：2012-08-07

申请人： Mahbub Rashed ,  Yuansheng Ma ,  Irene Lin ,  Jason Stephens ,  Yunfei Deng ,  Yuan Lei ,  Jongwook Kye ,  Rod Augur ,  Shibly Ahmed ,  Subramani Kengeri ,  Suresh Venkatesan

发明人： Mahbub Rashed ,  Yuansheng Ma ,  Irene Lin ,  Jason Stephens ,  Yunfei Deng ,  Yuan Lei ,  Jongwook Kye ,  Rod Augur ,  Shibly Ahmed ,  Subramani Kengeri ,  Suresh Venkatesan

IPC分类号： H01L21/768 ,  H01L23/48

CPC分类号： H01L23/5386 ,  H01L21/76895 ,  H01L21/823871 ,  H01L23/5384 ,  H01L27/0207 ,  H01L27/0924 ,  H01L29/7851 ,  H01L2924/0002 ,  H01L2924/00

摘要： An approach for providing MOL constructs using diffusion contact structures is disclosed. Embodiments include: providing a first diffusion region in a substrate; providing, via a first lithography process, a first diffusion contact structure; providing, via a second lithography process, a second diffusion contact structure; and coupling the first diffusion contact structure to the first diffusion region and the second diffusion contact structure. Embodiments include: providing a second diffusion region in the substrate; providing a diffusion gap region between the first and second diffusion regions; providing the diffusion contact structure over the diffusion gap region; and coupling, via the diffusion contact structure, the first and second diffusion regions.

摘要翻译： 公开了一种使用扩散接触结构提供MOL构造的方法。 实施例包括：在衬底中提供第一扩散区域; 通过第一光刻工艺提供第一扩散接触结构; 经由第二光刻工艺提供第二扩散接触结构; 以及将所述第一扩散接触结构耦合到所述第一扩散区和所述第二扩散接触结构。 实施例包括：在衬底中提供第二扩散区域; 在所述第一和第二扩散区之间提供扩散间隙区域; 在扩散间隙区域上提供扩散接触结构; 以及经由扩散接触结构耦合第一和第二扩散区域。

公开(公告)号：US08621074B2

公开(公告)日：2013-12-31

申请号：US13458327

申请日：2012-04-27

申请人： Faiyaz Shikari ,  Madhav Matta ,  Suresh Venkatesan

发明人： Faiyaz Shikari ,  Madhav Matta ,  Suresh Venkatesan

IPC分类号： G06F15/173

CPC分类号： H04L43/08 ,  G06F9/546 ,  G06F2209/548 ,  H04L67/10 ,  H04L67/1002 ,  H04L67/1008

摘要： A management system for processing message-based communications comprising a plurality of servers configured to implement a plurality of sessions that process a plurality of messages, a plurality of message queues coupled to the servers and configured to exchange the messages with the servers, and a workload manager coupled to the servers and the message queues and configured to reallocate the sessions to the different servers and the corresponding message queues to achieve load balance between the servers and the message queues in a recurring manner during processing of the messages by the servers based on a depth of each of the message queues, a quantity of sessions for each of the servers, and a workload manager configuration.

摘要翻译： 一种用于处理基于消息的通信的管理系统，包括被配置为实现处理多个消息的多个会话的多个服务器，耦合到所述服务器并被配置为与所述服务器交换消息的多个消息队列，以及工作负载 管理器耦合到服务器和消息队列，并被配置为将会话重新分配到不同的服务器和相应的消息队列，以在服务器基于以下情况处理消息期间以重复的方式实现服务器和消息队列之间的负载平衡 每个消息队列的深度，每个服务器的会话数量以及工作负载管理器配置。

公开(公告)号：US08618607B1

公开(公告)日：2013-12-31

申请号：US13539830

申请日：2012-07-02

申请人： Mahbub Rashed ,  David Doman ,  Marc Tarabbia ,  Irene Lin ,  Jeff Kim ,  Chinh Nguyen ,  Steve Soss ,  Scott Johnson ,  Subramani Kengeri ,  Suresh Venkatesan

发明人： Mahbub Rashed ,  David Doman ,  Marc Tarabbia ,  Irene Lin ,  Jeff Kim ,  Chinh Nguyen ,  Steve Soss ,  Scott Johnson ,  Subramani Kengeri ,  Suresh Venkatesan

IPC分类号： H01L21/02

CPC分类号： H01L27/0207 ,  H01L27/11807

摘要： One illustrative device disclosed herein includes a continuous active region defined in a semiconducting substrate, first and second transistors formed in and above the continuous active region, each of the first and second transistors comprising a plurality of doped regions formed in the continuous active region, a conductive isolating electrode positioned above the continuous active region between the first and second transistors and a power rail conductively coupled to the conductive isolating electrode.

摘要翻译： 本文公开的一个说明性器件包括限定在半导体衬底中的连续有源区，形成在连续有源区中和上方的第一和第二晶体管，第一和第二晶体管中的每一个包括形成在连续有源区中的多个掺杂区， 导电隔离电极位于第一和第二晶体管之间的连续有源区上方，导电隔离电极与导电隔离电极导电耦合。

公开(公告)号：US08598633B2

公开(公告)日：2013-12-03

申请号：US13351101

申请日：2012-01-16

申请人： Marc Tarabbia ,  James B. Gullette ,  Mahbub Rashed ,  David S. Doman ,  Irene Y. Lin ,  Ingolf Lorenz ,  Larry Ho ,  Chinh Nguyen ,  Jeff Kim ,  Jongwook Kye ,  Yuansheng Ma ,  Yunfei Deng ,  Rod Augur ,  Seung-Hyun Rhee ,  Jason E. Stephens ,  Scott Johnson ,  Subramani Kengeri ,  Suresh Venkatesan

发明人： Marc Tarabbia ,  James B. Gullette ,  Mahbub Rashed ,  David S. Doman ,  Irene Y. Lin ,  Ingolf Lorenz ,  Larry Ho ,  Chinh Nguyen ,  Jeff Kim ,  Jongwook Kye ,  Yuansheng Ma ,  Yunfei Deng ,  Rod Augur ,  Seung-Hyun Rhee ,  Jason E. Stephens ,  Scott Johnson ,  Subramani Kengeri ,  Suresh Venkatesan

IPC分类号： H01L23/52

CPC分类号： H01L23/5286 ,  H01L21/76895 ,  H01L21/823475 ,  H01L27/088 ,  H01L2924/0002 ,  H01L2924/00

摘要： A semiconductor device includes a semiconductor substrate having a diffusion region. A transistor is formed within the diffusion region. A power rail is disposed outside the diffusion region. A contact layer is disposed above the substrate and below the power rail. A via is disposed between the contact layer and the power rail to electrically connect the contact layer to the power rail. The contact layer includes a first length disposed outside the diffusion region and a second length extending from the first length into the diffusion region and electrically connected to the transistor.

摘要翻译： 半导体器件包括具有扩散区域的半导体衬底。 晶体管形成在扩散区内。 电力轨设置在扩散区域的外侧。 接触层设置在基板上方和电源轨下方。 通孔设置在接触层和电源轨之间以将接触层电连接到电源轨。 接触层包括设置在扩散区域外部的第一长度和从第一长度延伸到扩散区域并电连接到晶体管的第二长度。