RESIN COMPOSITION FOR MAKING RESIST PATTERN INSOLUBLE, AND METHOD FOR FORMATION OF RESIST PATTERN BY USING THE SAME
    2.
    发明申请
    RESIN COMPOSITION FOR MAKING RESIST PATTERN INSOLUBLE, AND METHOD FOR FORMATION OF RESIST PATTERN BY USING THE SAME 有权
    用于制造耐腐蚀图案的树脂组合物,以及使用它们形成耐力图案的方法

    公开(公告)号:US20110111349A1

    公开(公告)日:2011-05-12

    申请号:US13004898

    申请日:2011-01-12

    IPC分类号: G03F7/20 C08L37/00

    摘要: A resist pattern-insolubilizing resin composition is used in a resist pattern-forming method. The resist pattern-insolubilizing resin composition includes solvent and a resin. The resin includes a first repeating unit that includes a hydroxyl group in its side chain and at least one of a second repeating unit derived from a monomer shown by a following formula (1-1) and a third repeating unit derived from a monomer shown by a following formula (1-2), wherein for example, R1 represents a hydrogen atom, A represents a methylene group, R2 represents a group shown by a following formula (2-1) or a group shown by a following formula (2-2), R3 represents a methylene group, R4 represents a hydrogen atom, and n is 0 or 1, wherein each of R34 represents at least one of a hydrogen atom and a linear or branched alkyl group having 1 to 10 carbon atoms.

    摘要翻译: 抗蚀剂图案不溶化树脂组合物用于抗蚀剂图案形成方法。 抗蚀剂图案不溶化树脂组合物包括溶剂和树脂。 树脂包括在其侧链中包含羟基的第一重复单元和由下式(1-1)所示的单体衍生的第二重复单元和由下式表示的单体衍生的第三重复单元中的至少一种: 下述式(1-2)表示的基团,其中,例如,R1表示氢原子,A表示亚甲基,R2表示下述式(2-1)所示的基团或下述式(2- 2)中,R3表示亚甲基,R4表示氢原子,n表示0或1,R34表示氢原子和碳原子数1〜10的直链或支链烷基中的至少一种。

    Resin composition for making resist pattern insoluble, and method for formation of resist pattern by using the same
    3.
    发明授权
    Resin composition for making resist pattern insoluble, and method for formation of resist pattern by using the same 有权
    用于制造抗蚀剂图案的树脂组合物不溶性,以及通过使用它们形成抗蚀剂图案的方法

    公开(公告)号:US08877429B2

    公开(公告)日:2014-11-04

    申请号:US13004898

    申请日:2011-01-12

    摘要: A resist pattern-insolubilizing resin composition is used in a resist pattern-forming method. The resist pattern-insolubilizing resin composition includes solvent and a resin. The resin includes a first repeating unit that includes a hydroxyl group in its side chain and at least one of a second repeating unit derived from a monomer shown by a following formula (1-1) and a third repeating unit derived from a monomer shown by a following formula (1-2), wherein for example, R1 represents a hydrogen atom, A represents a methylene group, R2 represents a group shown by a following formula (2-1) or a group shown by a following formula (2-2), R3 represents a methylene group, R4 represents a hydrogen atom, and n is 0 or 1, wherein each of R34 represents at least one of a hydrogen atom and a linear or branched alkyl group having 1 to 10 carbon atoms.

    摘要翻译: 抗蚀剂图案不溶化树脂组合物用于抗蚀剂图案形成方法。 抗蚀剂图案不溶化树脂组合物包括溶剂和树脂。 树脂包括在其侧链中包含羟基的第一重复单元和由下式(1-1)所示的单体衍生的第二重复单元和由下式表示的单体衍生的第三重复单元中的至少一种: 下述式(1-2)表示的基团,其中,例如,R1表示氢原子,A表示亚甲基,R2表示下述式(2-1)所示的基团或下述式(2- 2)中,R3表示亚甲基,R4表示氢原子,n表示0或1,R34表示氢原子和碳原子数1〜10的直链或支链烷基中的至少一种。

    Acrylic Polymer and Radiation-Sensitive Resin Composition
    5.
    发明申请
    Acrylic Polymer and Radiation-Sensitive Resin Composition 有权
    丙烯酸聚合物和辐射敏感性树脂组合物

    公开(公告)号:US20070269754A1

    公开(公告)日:2007-11-22

    申请号:US10567117

    申请日:2004-08-04

    IPC分类号: C08G61/02 G03C5/00

    摘要: To provide a resist which is excellent in the solubility in a resist solvent and little dependent on baking temperature and can form developed patterns reduced in line edge roughness. An acrylic polymer characterized by comprising units of the general formula (1), units of general formula (2), and units of general formula (3) and/or units of general formula (4), wherein R, R′, R″ and R′″ are each hydrogen, methyl, or trifluoromethyl; R1 is hydrogen, C1-4 linear or branched alkyl, alkoxy, or C1-4 linear or branched fluoroalkyl; X is a C7-20 polycyclic aliphatic hydrocarbon group consisting of carbon atoms and hydrogen atoms; R2 and R3 are each independently C1-4 linear or branched alkyl; R4 is a C4-20 alicyclic hydrocarbon group; R5 is C1-4 linear or branched alkyl; and R6 and R7 are each hydrogen or C1-4 linear or branched alkyl.

    摘要翻译: 提供一种在抗蚀剂溶剂中溶解性优异且几乎不依赖于烘烤温度的抗蚀剂,并且可以形成线边缘粗糙度减小的显影图案。 一种丙烯酸类聚合物,其特征在于包含通式(1)的单元,通式(2)的单元和通式(3)的单元和/或通式(4)的单元,其中R,R',R' '和R“'分别是氢,甲基或三氟甲基; R 1是氢,C 1-4 - 直链或支链烷基,烷氧基或C 1-4 - 直链或支链氟代烷基; X是由碳原子和氢原子组成的C 7-20多环脂族烃基; R 2和R 3各自独立地为C 1-4 - 直链或支链烷基; R 4是C 4-20脂肪族烃基; R 5是C 1-4烷基直链或支链烷基; 和R 6和R 7各自为氢或C 1-4 - 直链或支链烷基。

    Acrylic copolymer and radiation-sensitive resin composition
    6.
    发明申请
    Acrylic copolymer and radiation-sensitive resin composition 有权
    丙烯酸共聚物和辐射敏感树脂组合物

    公开(公告)号:US20060074139A1

    公开(公告)日:2006-04-06

    申请号:US10533254

    申请日:2003-11-04

    IPC分类号: C08J3/28

    CPC分类号: C08F220/26 G03F7/0397

    摘要: An acrylic copolymer having a specific structure and a radiation-sensitive resin composition comprising the acrylic copolymer having high transparency to radiation, excelling in basic properties as a resist such as sensitivity, resolution, dry etching resistance, and pattern shape, and, in particular, excelling in forming contact holes and lines-and-spaces.

    摘要翻译: 具有特定结构的丙烯酸共聚物和辐射敏感性树脂组合物,其包含对辐射具有高透明度的丙烯酸共聚物,作为抗敏剂,例如灵敏度,分辨率,耐干蚀刻性和图案形状的基本性能优异, 优秀的形成接触孔和线和空格。

    METHOD FOR DETERMINING STAGE OF CHRONIC KIDNEY DISEASE, DEVICE THEREFOR AND METHOD FOR OPERATING THE SAME
    8.
    发明申请
    METHOD FOR DETERMINING STAGE OF CHRONIC KIDNEY DISEASE, DEVICE THEREFOR AND METHOD FOR OPERATING THE SAME 有权
    用于确定慢性假性疾病病症的方法,其装置及其操作方法

    公开(公告)号:US20130068945A1

    公开(公告)日:2013-03-21

    申请号:US13700795

    申请日:2011-05-30

    IPC分类号: A61B5/00

    摘要: This invention provides a method or device for determining the stage of chronic kidney disease.The present invention relates to a method for determining a stage of chronic kidney disease in a subject suffering from kidney disease, the method comprising the steps of: (A-1) measuring the content of at least one marker selected from the group consisting of markers (1) to (16) in a specimen from the subject, (B-1) determining the stage indicated by each marker by comparing the content of the at least one marker in the specimen from the subject, which has been measured in step (A-1), with a reference content range determined in each stage, and (C-1) determining that when each marker indicates the same stage, which has been determined in step (A-1), the chronic kidney disease in the subject is in that stage.

    摘要翻译: 本发明提供了一种用于确定慢性肾脏疾病阶段的方法或装置。 本发明涉及一种用于确定患有肾脏疾病的受试者的慢性肾脏疾病阶段的方法,所述方法包括以下步骤:(A-1)测量选自标记物中的至少一种标志物的含量 (B-1)通过比较在步骤(1)中测量的来自受试者的标本中的至少一个标记物的含量来确定每个标记物指示的阶段(B-1) A-1),每个阶段确定参考含量范围,和(C-1)确定当每个标记指示在步骤(A-1)中确定的相同阶段时,受试者中的慢性肾脏疾病 在那个阶段

    Acrylic polymer and radiation-sensitive resin composition
    10.
    发明授权
    Acrylic polymer and radiation-sensitive resin composition 有权
    丙烯酸聚合物和辐射敏感树脂组合物

    公开(公告)号:US07704669B2

    公开(公告)日:2010-04-27

    申请号:US10567117

    申请日:2004-08-04

    摘要: To provide a resist which is excellent in the solubility in a resist solvent and little dependent on baking temperature and can form developed patterns reduced in line edge roughness. An acrylic polymer characterized by comprising units of the general formula (1), units of general formula (2), and units of general formula (3) and/or units of general formula (4), wherein R, R′, R″ and R′″ are each hydrogen, methyl, or trifluoromethyl; R1 is hydrogen, C1-4 linear or branched alkyl, alkoxy, or C1-4 linear or branched fluoroalkyl; X is a C7-20 polycyclic aliphatic hydrocarbon group consisting of carbon atoms and hydrogen atoms; R2 and R3 are each independently C1-4 linear or branched alkyl; R4 is a C4-20 alicyclic hydrocarbon group; R5 is C1-4 linear or branched alkyl; and R6 and R7 are each hydrogen or C1-4 linear or branched alkyl.

    摘要翻译: 提供一种在抗蚀剂溶剂中溶解性优异且几乎不依赖于烘烤温度的抗蚀剂,并且可以形成线边缘粗糙度减小的显影图案。 一种丙烯酸类聚合物,其特征在于包含通式(1)的单元,通式(2)的单元和通式(3)的单元和/或通式(4)的单元,其中R,R',R“ 和R'“各自为氢,甲基或三氟甲基; R1是氢,C1-4直链或支链烷基,烷氧基或C1-4直链或支链氟代烷基; X是由碳原子和氢原子组成的C7-20多环脂族烃基; R2和R3各自独立地为C1-4直链或支链烷基; R4是C4-20脂环族烃基; R5是C1-4直链或支链烷基; 并且R 6和R 7各自为氢或C 1-4直链或支链烷基。