Electric deionization apparatus
    1.
    发明授权
    Electric deionization apparatus 有权
    电去离子装置

    公开(公告)号:US06423205B1

    公开(公告)日:2002-07-23

    申请号:US09646958

    申请日:2000-10-27

    IPC分类号: C02F140

    摘要: The object of this invention is to provide an electrical deionization apparatus with which various feed water types ranging from water of high ion concentration to water of low ion concentration can be consistently deionized with high efficiency. At least part of cation-exchange membranes and anion-exchange membranes alternate between electrodes to form an alternating array of deionization and concentration compartments and the deionization compartment contains a woven or non-woven fabric made of cation-exchange fiber that is placed on the cation-exchange membrane side in a face-to-face relationship with a woven or non-woven fabric made of anion-exchange fiber that is placed on the anion-exchange membrane side, with the passageway of feed water between the two woven or non-woven fabrics containing an ion-conducting spacer provided with an ion-exchanging capability.

    摘要翻译: 本发明的目的是提供一种电去离子装置,其具有从高离子浓度的水到低离子浓度的水的各种给水类型能够以高效率一致地去离子。 阳离子交换膜和阴离子交换膜的至少一部分在电极之间交替形成去离子和浓缩隔室的交替排列,去离子室包含由放置在阳离子上的阳离子交换纤维制成的织造或非织造织物 - 与由阴离子交换纤维制成的织造或非织造织物的面对面关系的交换膜侧,所述织物或非织造织物放置在阴离子交换膜侧,进料水在两个织造或非织造织物之间的通道, 含有具有离子交换能力的离子导电间隔物的无纺织物。

    Apparatus for radiation-induced graft polymerization treatment of fabric webs
    5.
    发明授权
    Apparatus for radiation-induced graft polymerization treatment of fabric webs 有权
    用于织物网的辐射诱导接枝聚合处理的装置

    公开(公告)号:US06659751B1

    公开(公告)日:2003-12-09

    申请号:US09762583

    申请日:2001-02-09

    IPC分类号: D06M1426

    摘要: A polymer substrate for radiation-induced graft polymerization in the form of a woven or non-woven fabric that comprises a woven or non-woven fabric composed of polymer fiber and a reinforcement polymer having a greater strength and a slower rate of radiation-induced graft polymerization than said polymer fiber. Also, radiation graft treated stock prepared from said polymer substrate. In another aspect, a radiation graft treated material in the form of a woven or non-woven fabric material that is composed of polymer monofilament fiber of which only the surface has undergone a radiation-induced graft polymerization but of which the center remains unaffected by grafting. In addition, a method for performing radiation-induced graft polymerization on substrates in the form of webs of woven or non-woven fabric, which comprises the steps of exposing a substrate woven or non-woven fabric composed of polymer fiber to electron beams in a nitrogen atmosphere, contacting the irradiated substrate with a specified amount of monomer in a nitrogen atmosphere, and subjecting the monomer and the substrate in mutual contact to graft polymerization in a nitrogen atmosphere, characterized in that the first through third steps are performed in succession.

    摘要翻译: 用于辐射诱导的织造或非织造织物形式的接枝聚合的聚合物基质,其包含由聚合物纤维组成的织造或非织造织物和具有较大强度和较慢辐射诱导移植速率的增强聚合物 聚合比所述聚合物纤维。 而且,由所述聚合物基质制备的辐射接枝处理的原料。 在另一方面,一种由编织或非织造织物材料形式的辐射接枝处理材料,其由聚合物单丝纤维组成,其仅表面经历了辐射诱导的接枝聚合,但其中心保持不受接枝影响 。 另外,在机织或非织造纤维网形式的基材上进行辐射诱导的接枝聚合的方法,包括以下步骤:将由聚合物纤维构成的基底编织或非织造织物暴露于电子束中 氮气气氛下,在氮气气氛中使照射的基材与规定量的单体接触,并使单体和基材相互接触,在氮气气氛中进行接枝聚合,其特征在于,连续进行第一至第三步骤。

    Electrolytic Deposition Treatment Apparatus and Method
    6.
    发明申请
    Electrolytic Deposition Treatment Apparatus and Method 审中-公开
    电解沉积处理装置及方法

    公开(公告)号:US20070227905A1

    公开(公告)日:2007-10-04

    申请号:US11629791

    申请日:2005-06-16

    摘要: The present invention provides an electrolytic deposition treatment apparatus and method which can reduce metal ion concentration of waste water to be treated by electrolytic deposition to the degree to which treated water can be discharged to the outside, and which can treat waste water, even if the quantity of waste water produced in a semiconductor device fabrication apparatus is large. The electrolytic deposition treatment apparatus comprises a cathode(3) for depositing metal ions in water to be treated as metal, a cation exchange membrane(4) disposed so as to face the cathode(3), and an anode(6) disposed so as to face the cation exchange membrane(4) through a cation exchanger(5). The water to be treated is supplied to a space between the cathode(3) and the cation exchange membrane(4).

    摘要翻译: 本发明提供一种电解沉积处理装置和方法,其可以通过电解沉积将待处理的废水的金属离子浓度降低到处理水能够排出到外部的程度,并且其可以处理废水,即使 在半导体装置制造装置中产生的废水量大。 电解沉积处理装置包括:阴极(3),用于将金属离子沉积在待处理的水中作为金属;阳极交换膜(4),其设置为与阴极(3)相对;以及阳极(6) 通过阳离子交换器(5)面对阳离子交换膜(4)。 待处理的水被供给到阴极(3)和阳离子交换膜(4)之间的空间。

    Liquid Treatment Apparatus
    8.
    发明申请
    Liquid Treatment Apparatus 审中-公开
    液体处理装置

    公开(公告)号:US20080023334A1

    公开(公告)日:2008-01-31

    申请号:US11629792

    申请日:2005-06-16

    IPC分类号: B01D61/48 C02F1/469

    摘要: A liquid treatment apparatus includes a cathode chamber (4) having a cathode (7), an anode chamber (1) having an anode (6), a deionization chamber (2) disposed between the cathode chamber (4) and the anode chamber (1), and a neutralization chamber (3) disposed between the cathode chamber (4) and the anode chamber (1). The deionization chamber is configured to selectively remove cations or anions from a water to be treated and receive ions having the same charge as the selectively removed ions from the cathode chamber (4) or the anode chamber (1). The neutralization chamber is configured to receive the removed ions and electrically neutralize the removed ions by ions supplied from the anode chamber (1) or the cathode chamber (4). An ion exchange membrane is provided to partition the deionization chamber and the neutralization chamber.

    摘要翻译: 液体处理装置包括具有阴极(7)的阴极室(4),具有阳极(6)的阳极室(1),设置在阴极室(4)和阳极室(4)之间的去离子室 1)和设置在阴极室(4)和阳极室(1)之间的中和室(3)。 去离子室被配置为从待处理的水中选择性地去除阳离子或阴离子,并接收与阴极室(4)或阳极室(1)中选择性去除的离子具有相同电荷的离子。 中和室被配置为接收去除的离子并且通过从阳极室(1)或阴极室(4)供应的离子电离中去除的离子。 提供离子交换膜以分离去离子室和中和室。

    Electrochemical liquid treatment equipments
    9.
    发明申请
    Electrochemical liquid treatment equipments 审中-公开
    电化学液体处理设备

    公开(公告)号:US20070056847A1

    公开(公告)日:2007-03-15

    申请号:US10556057

    申请日:2004-05-25

    IPC分类号: C25B9/10

    摘要: The present invention aims to provide electrode compartment structures in electrochemical liquid treatment equipments, which enable stable operation using pure water as an electrode compartment liquid requiring no concentration adjustment without adverse electrode reaction. The present invention relates an electrochemical liquid treatment equipment comprising ion exchange membranes between an anode and a cathode, which has an anode compartment defined by the anode and a cation exchange membrane and a cathode compartment defined by the cathode and an anion exchange membrane (12), each of the anode compartment and cathode compartment being packed with an ion exchanger (14) composed of a fibrous a material, each of the anode and cathode (11) being formed from a liquid- and gas-permeable and electrically conductive material, and the equipment also having an electrode compartment liquid flowing chamber (15) which is formed behind each of the anode and cathode.

    摘要翻译: 本发明旨在提供电化学液体处理设备中的电极室结构,其能够使用纯水作为不需要浓度调节而不产生不利电极反应的电极室液体的稳定操作。 本发明涉及一种包括阳极和阴极之间的离子交换膜的电化学液体处理设备,其具有由阳极限定的阳极室和由阴极和阴离子交换膜(12)限定的阳离子交换膜和阴极室, 阳极室和阴极室中的每一个都填充有由纤维材料构成的离子交换器(14),阳极和阴极(11)中的每一个由液体和气体可渗透的导电材料形成,并且 该设备还具有形成在每个阳极和阴极之后的电极室液体流动室(15)。

    Material supply system in semiconductor device manufacturing plant
    10.
    发明申请
    Material supply system in semiconductor device manufacturing plant 失效
    半导体器件制造厂的材料供应系统

    公开(公告)号:US20050177273A1

    公开(公告)日:2005-08-11

    申请号:US10507699

    申请日:2003-03-27

    摘要: In a small scaled plant intended for flexible manufacturing, a pure water supply system is provided at a low cost without reducing a production efficiency. A pure water system produces a plurality of grades of pure water which are supplied through pipes connected to points of use for cleaning, CMP, lithography, and the like. Upon receipt of a request signal from each point of use for starting to use a certain grade of pure water, a controller determines whether or not a required amount exceeds the capacity of the grade of pure water which can be supplied by the pure water system. If not, the controller sends a use permission signal to the point of use for permitting the same to use the pure water. When a certain use point is using the requested grade of pure water, the controller may not permit the requesting point of use to use the pure water until a use end signal is sent from the use point which is using the pure water.

    摘要翻译: 在用于灵活制造的小规模工厂中,以低成本提供纯净水供应系统,而不降低生产效率。 纯水系统产生多个等级的纯水,其通过连接到用于清洁,CMP,光刻等的使用点的管道供应。 一旦控制器收到来自每个使用点的请求信号以开始使用一定等级的纯水,则控制器确定所需量是否超过纯水系统能提供的纯水等级的容量。 如果没有,控制器将使用许可信号发送到使用点,以允许其使用纯净水。 当某个使用点正在使用所要求的纯水量时,控制器可能不允许请求使用点使用纯净水,直到从使用纯水的使用点发出使用结束信号。