公开(公告)号：US20100025223A1

公开(公告)日：2010-02-04

申请号：US12535014

申请日：2009-08-04

申请人： Tatsuya Yanagida ,  Masaki Nakano ,  Akira Endo

发明人： Tatsuya Yanagida ,  Masaki Nakano ,  Akira Endo

IPC分类号： B01J19/12

CPC分类号： H05G2/003 ,  H05G2/005 ,  H05G2/006 ,  H05G2/008

摘要： Offset in the ejection direction of target material droplets is corrected in order to stabilize EUV output in an EUV light source device. An extreme ultraviolet light source device includes a droplet generation device 110 that outputs target material droplets 101 towards a predetermined plasma emission point 103; a charging device 130 that charges the target material droplets 101; a trajectory correction device 140 that generates a force field in the trajectory to correct the travel direction of the charged target material droplets 101a so that the charged target material droplets 101a travel towards the plasma emission point 103; and a laser light source 150 that irradiates, at the plasma emission point 103, a laser beam onto the charged target material to generate plasma thereby.

摘要翻译： 校正目标材料液滴的排出方向的偏移，以便稳定EUV光源装置中的EUV输出。 极紫外光源装置包括：液滴产生装置110，其将目标材料液滴101朝向预定等离子体发射点103输出; 对目标材料液滴101进行充电的充电装置130; 轨迹校正装置140，其在轨迹中产生力场，以校正充电的目标材料液滴101a的行进方向，使得带电目标材料液滴101a朝向等离子体发射点103行进; 以及激光源150，其在等离子体发射点103处将激光束照射到带电目标材料上以产生等离子体。

公开(公告)号：US08853656B2

公开(公告)日：2014-10-07

申请号：US12535014

申请日：2009-08-04

申请人： Tatsuya Yanagida ,  Masaki Nakano ,  Akira Endo

发明人： Tatsuya Yanagida ,  Masaki Nakano ,  Akira Endo

IPC分类号： H05G2/00

CPC分类号： H05G2/003 ,  H05G2/005 ,  H05G2/006 ,  H05G2/008

摘要： Offset in the ejection direction of target material droplets is corrected in order to stabilize EUV output in an EUV light source device. An extreme ultraviolet light source device includes a droplet generation device 110 that outputs target material droplets 101 towards a predetermined plasma emission point 103; a charging device 130 that charges the target material droplets 101; a trajectory correction device 140 that generates a force field in the trajectory to correct the travel direction of the charged target material droplets 101a so that the charged target material droplets 101a travel towards the plasma emission point 103; and a laser light source 150 that irradiates, at the plasma emission point 103, a laser beam onto the charged target material to generate plasma thereby.

摘要翻译： 校正目标材料液滴的排出方向的偏移，以便稳定EUV光源装置中的EUV输出。 极紫外光源装置包括：液滴产生装置110，其将目标材料液滴101朝向预定等离子体发射点103输出; 对目标材料液滴101进行充电的充电装置130; 轨迹校正装置140，其在轨迹中产生力场，以校正充电的目标材料液滴101a的行进方向，使得带电目标材料液滴101a朝向等离子体发射点103行进; 以及激光源150，其在等离子体发射点103处将激光束照射到带电目标材料上以产生等离子体。

公开(公告)号：US08569721B2

公开(公告)日：2013-10-29

申请号：US12372958

申请日：2009-02-18

申请人： Masaki Nakano ,  Akira Endo

发明人： Masaki Nakano ,  Akira Endo

IPC分类号： H05H1/00

CPC分类号： H05G2/003 ,  H05G2/006 ,  H05G2/008

摘要： In an LPP type EUV light source apparatus, the intensity of radiated EUV light is stabilized by improving the positional stability of droplets. The extreme ultra violet light source apparatus includes: a chamber in which extreme ultra violet light is generated; a target supply division including a target tank for storing a target material therein and an injection nozzle for injecting the target material in a jet form, for supplying the target material into the chamber; a charging electrode applied with a direct-current voltage between the target tank and itself, for charging droplets when the target material in the jet form injected from the injection nozzle is broken up into the droplets; a laser for applying a laser beam to the droplets of the target material to generate plasma; and a collector mirror for collecting extreme ultra violet light radiated from the plasma to output the extreme ultra violet light.

摘要翻译： 在LPP型EUV光源装置中，通过提高液滴的位置稳定性来稳定辐射EUV光的强度。 极紫外光源装置包括：产生极紫外光的室; 目标供给部，包括用于存储目标材料的目标罐和用于将喷射形式的目标材料喷射的喷嘴，用于将目标材料供应到所述室中; 充电电极，其在目标罐和本身之间施加直流电压，用于在从注射喷嘴注入的喷射形式的目标材料分解成液滴时充入液滴; 用于将激光束施加到目标材料的液滴以产生等离子体的激光器; 以及用于收集从等离子体辐射的极紫外光以输出极紫外光的集光镜。

公开(公告)号：US08365180B2

公开(公告)日：2013-01-29

申请号：US10593572

申请日：2006-06-28

申请人： Shinichiro Kawasaki ,  Kiyoshi Ikehara ,  Masaki Nakano

发明人： Shinichiro Kawasaki ,  Kiyoshi Ikehara ,  Masaki Nakano

IPC分类号： G06F9/46 ,  G06F9/50 ,  G06F9/455

CPC分类号： G06F9/45516

摘要： An in-vehicle terminal (101) is provided, which has a function ensuring that computer resource secured by a virtual machine (1a1) or a virtual machine (1b1) is controlled within a limit value of the computer resource that is allocated to the corresponding virtual machine, or a function which is capable of executing multiple virtual machines appropriately.When the virtual machine (1a1) or the virtual machine (1b1) requests securing the computer resource, the in-vehicle terminal (101) requests the OS (143) to secure computer resource in response to the request, if the requested resource is lower than the limit value of the computer resource that is allocated to the corresponding virtual machine. Furthermore, the in-vehicle terminal (101) checks at predetermined intervals the continuously selected count of the virtual machine previously selected, and if the continuously selected count is equal to the limit value, or the virtual machine is in standby state, a different virtual machine is selected and the OS (143) is instructed to execute the selected virtual machine.

摘要翻译： 提供了一种车载终端（101），其具有确保由虚拟机（1a1）或虚拟机（1b1）保护的计算机资源被控制在分配给对应的计算机资源的限制值内的功能 虚拟机或能够适当地执行多个虚拟机的功能。 当虚拟机（1a1）或虚拟机（1b1）请求保护计算机资源时，如果所请求的资源较低，则车载终端（101）响应于该请求请求OS（143）保护计算机资源 而不是分配给相应虚拟机的计算机资源的限制值。 此外，车载终端（101）以预定间隔检查先前选择的虚拟机的连续选择的计数，并且如果连续选择的计数等于限制值，或虚拟机处于待机状态，则不同的虚拟 选择机器，并且指示OS（143）执行所选择的虚拟机。

公开(公告)号：US08129700B2

公开(公告)日：2012-03-06

申请号：US12150077

申请日：2008-04-24

申请人： Yoshifumi Ueno ,  Masato Moriya ,  Masaki Nakano ,  Hiroshi Komori

发明人： Yoshifumi Ueno ,  Masato Moriya ,  Masaki Nakano ,  Hiroshi Komori

IPC分类号： H05G2/00

CPC分类号： B08B17/02 ,  H05G2/003 ,  H05G2/008

摘要： Solid tin (Sn) is used as a target, a CO2 laser is used as an excitation source for the target, and after the size of debris emitted from plasma is decreased to a nanometer or smaller size by exciting the solid tin by a laser beam outputted from the CO2 laser, the emitted debris of a nanometer or smaller size is acted upon so as not to reach the optical element. In accordance with the present invention, in the EUV light source apparatus, the debris emitted together with EUV light from plasma generated by exciting a target within a chamber by a laser beam is prevented from adhering to an optical element provided within the chamber and forming a metal film. As a result, the service life of the optical element can be extended.

摘要翻译： 使用固体锡（Sn）作为目标，使用CO 2激光作为靶的激发源，并且在通过激光束激发固体锡后，从等离子体发射的碎片的尺寸减小到纳米或更小的尺寸之后 从CO 2激光器输出的纳米尺寸或更小尺寸的发射碎片被作用到不会到达光学元件。 根据本发明，在EUV光源装置中，防止了通过用激光束激发室内的目标物而产生的来自等离子体的EUV光一起发射的碎片附着在设置在室内的光学元件，并形成 金属膜。 结果，可以延长光学元件的使用寿命。

公开(公告)号：US20110271051A1

公开(公告)日：2011-11-03

申请号：US13143443

申请日：2010-01-20

申请人： Masaki Nakano ,  Masatsugu Ogawa

发明人： Masaki Nakano ,  Masatsugu Ogawa

IPC分类号： G06F12/08

CPC分类号： G06F3/0632 ,  G06F3/0611 ,  G06F3/0677 ,  G06F3/0686 ,  G11B27/002 ,  G11B2220/2537 ,  G11B2220/41

摘要： For the purpose of reducing the time for information processing in an array type disk device provided with a plurality of optical disk devices, when a beginning address is notified from any one of the optical disk devices to a main control device of the array type disk device, the main control device determines the beginning address notified first as a writing start address, without waiting for a notification of a beginning address from any other optical disk devices. Then, the main control device notifies the determined writing start address to the respective optical disk devices. Accordingly, even if search times for the writing start address are different among the optical disk devices, all the optical disk devices can start the writing of information based on which optical disk device has most quickly notified the beginning address.

摘要翻译： 为了减少设置有多个光盘装置的阵列式磁盘装置中的信息处理的时间，当从任何一个光盘装置通知起始地址到阵列式磁盘装置的主控装置时 ，主控制装置将首先通知的开始地址确定为写入开始地址，而不用等待来自任何其他光盘装置的起始地址的通知。 然后，主控制装置将确定的写入开始地址通知各光盘装置。 因此，即使在光盘装置中写入开始地址的搜索时间不同，所有的光盘装置都可以开始基于哪个光盘装置最快地通知起始地址的信息的写入。

公开(公告)号：US20100143202A1

公开(公告)日：2010-06-10

申请号：US12581461

申请日：2009-10-19

申请人： Takayuki YABU ,  Takanobu Ishihara ,  Masaki Nakano

发明人： Takayuki YABU ,  Takanobu Ishihara ,  Masaki Nakano

IPC分类号： G05D7/00 ,  B23P11/00

CPC分类号： H05G2/003 ,  H05G2/005 ,  Y10T29/49826

摘要： In a target supply unit of an extreme ultraviolet light source apparatus for generating extreme ultraviolet light by applying a laser beam to a target material to turn the target material into plasma, clogging of a target nozzle for supplying the target material to a laser beam application point is suppressed. The target supply unit includes: a target container for accommodating the target material; a target nozzle for injecting the target material supplied from the target container; and a reducing gas supply unit for supplying a reducing gas into the target container. Instead of using the reducing gas, a carbon-based material having a reduction action may be provided within the target container for causing reduction reaction.

摘要翻译： 在用于通过向目标材料施加激光以将目标材料转化为等离子体来产生极紫外光的目标供应单元中，将用于将目标材料供应的目标喷嘴堵塞到激光束施加点 被压制 目标供给单元包括：用于容纳目标材料的目标容器; 用于喷射从目标容器供给的目标材料的目标喷嘴; 以及用于向目标容器供给还原气体的还原气体供给单元。 代替使用还原气体，可以在目标容器内提供具有还原作用的碳基材料用于引起还原反应。

公开(公告)号：US20100102309A1

公开(公告)日：2010-04-29

申请号：US12525537

申请日：2008-02-04

申请人： Ken Nakahara ,  Hiroyuki Yuji ,  Masashi Kawasaki ,  Akira Ohtomo ,  Atsushi Tsukazaki ,  Tomoteru Fukumura ,  Masaki Nakano

发明人： Ken Nakahara ,  Hiroyuki Yuji ,  Masashi Kawasaki ,  Akira Ohtomo ,  Atsushi Tsukazaki ,  Tomoteru Fukumura ,  Masaki Nakano

IPC分类号： H01L29/221

CPC分类号： H01L29/22 ,  H01L29/045 ,  H01L29/225 ,  H01L29/402 ,  H01L29/43 ,  H01L29/45 ,  H01L29/47 ,  H01L29/7786 ,  H01L29/7787 ,  H01L29/861 ,  H01L29/872 ,  H01L31/0296 ,  H01L51/0035 ,  H01L51/0037 ,  H01L51/0071 ,  H01L51/0072 ,  H01L51/4233 ,  Y02E10/549

摘要： To solve the foregoing problems, provided is a ZnO-based semiconductor element having an entirely novel function distinct from hitherto, using a ZnO-based semiconductor and organic matter for an active role. An organic electrode 2 is formed on a ZnO-based semiconductor 1, and an Au film 3 is formed on the organic electrode 2. An electrode formed of a multilayer metal film including a Ti film 4 and an Au film 5 is formed on the back surface of the ZnO-based semiconductor 1 so as to be opposed to the organic electrode 2. A bonding interface between the organic electrode 2 and the ZnO-based semiconductor 1 is in a pn junction-like state. Thus, rectification occurs therebetween.

摘要翻译： 为了解决上述问题，提供了使用ZnO类半导体和有机物作为主动作用的具有与迄今不同的全新功能的ZnO类半导体元件。 在ZnO类半导体1上形成有机电极2，在有机电极2上形成Au膜3.在背面形成由包含Ti膜4和Au膜5的多层金属膜形成的电极 ZnO基半导体1的表面与有机电极2相对。有机电极2和ZnO系半导体1之间的接合界面处于pn结状态。 因此，在它们之间发生整流。

公开(公告)号：US20100002554A1

公开(公告)日：2010-01-07

申请号：US12518150

申请日：2007-12-05

申请人： Masaki Nakano ,  Masatsugu Ogawa ,  Shuichi Ohkubo

发明人： Masaki Nakano ,  Masatsugu Ogawa ,  Shuichi Ohkubo

IPC分类号： G11B7/00

CPC分类号： G11B19/125 ,  G11B7/0053 ,  G11B7/00736 ,  G11B7/00745 ,  G11B2007/0006

摘要： An optical disk device includes an optical head unit, a drive means and a recording surface state determination means, and determines the type of an optical disk based on a state of the information recording surface. The information recording surface includes a management region on which management information is recorded and formed by a guiding groove or a prepit sequence and a data recording region on which a user data is recorded and on which a track formed by a guiding groove or a prepit sequence. The optical head unit irradiates a focused beam onto the information recording surface of an optical disk which rotates. The drive means drives to move the focused beam along a radial direction of the optical disk by driving the optical head unit. The recording surface state determination means determines a state of the information recording surface based on a reflected light of the focused beam. The optical disk device determines the type of the optical disk based on a state of the information recording surface in a determination region being set to straddle between a management region and the data recording region.

摘要翻译： 光盘装置包括光头单元，驱动装置和记录表面状态确定装置，并且基于信息记录表面的状态来确定光盘的类型。 信息记录表面包括管理区域，管理信息由导槽或预处理序列记录和形成，并且在其上记录用户数据的数据记录区域，并且由引导槽或预处理序列形成的轨道 。 光头单元将聚焦光束照射到旋转的光盘的信息记录表面上。 驱动装置通过驱动光头单元来驱动聚焦光束沿着光盘的径向方向移动。 记录表面状态确定装置基于聚焦光束的反射光来确定信息记录表面的状态。 光盘装置根据设置在管理区域和数据记录区域之间的确定区域中的信息记录表面的状态来确定光盘的类型。

公开(公告)号：US07615766B2

公开(公告)日：2009-11-10

申请号：US11723347

申请日：2007-03-19

申请人： Masaki Nakano

发明人： Masaki Nakano

IPC分类号： G01J1/18

CPC分类号： H01J49/162 ,  H01J49/027 ,  H01J49/16 ,  H05G2/001

摘要： A target supplier accelerates a target material injected from a nozzle such that a velocity of the target material after accelerated is kept within a predetermined range. The target supplier includes: a target nozzle that injects a target material in a liquid droplet state or solid particle state; an electric charge supplying unit that supplies electric charge to the target material; a charge amount measuring unit that measures an amount of the electric charge supplied to the target material by the electric charge supplying unit; a control unit that controls the electric charge supplying unit in a feedback manner based on a measurement result obtained by the charge amount measuring unit; and an accelerator that accelerates the target material supplied with the electric charge by the electric charge supplying unit.

摘要翻译： 目标供应商加速从喷嘴喷射的目标材料，使得加速后的目标材料的速度保持在预定范围内。 目标供应商包括：将目标材料注入液滴状态或固体颗粒状态的目标喷嘴; 向目标材料供给电荷的电荷供给单元; 电荷量测量单元，其测量由所述电荷供应单元供应到所述目标材料的电荷的量; 控制单元，其基于由所述计费量测量单元获得的测量结果以反馈方式控制所述电荷供给单元; 以及加速器，其加速由电荷供给单元供给的电荷的目标材料。