公开(公告)号：US4292618A

公开(公告)日：1981-09-29

申请号：US129195

申请日：1980-03-11

申请人： Masanori Tanabe ,  Satoshi Shimada ,  Akio Yasukawa ,  Motohisa Nishihara ,  Takeo Nagata

发明人： Masanori Tanabe ,  Satoshi Shimada ,  Akio Yasukawa ,  Motohisa Nishihara ,  Takeo Nagata

IPC分类号： G01B7/16 ,  G01L1/18 ,  H01L29/84 ,  G01L1/22

CPC分类号： H01L29/84 ,  G01L1/18

摘要： A semiconductor substrate has a major surface, another major surface on the opposite side of the first major surface, a strain gauge stripe formed in the central portion of the second major surface by diffusing an impurity therein, and electrodes connected to the strain gauge stripes. These strain gauge stripes are spaced from the peripheral edge of the second major surface by a distance greater than 1/3 of the length of the same major surface. The first major surface of the semiconductor substrate is bonded to an elastic metal load plate.

摘要翻译： 半导体衬底具有主表面，在第一主表面的相对侧上的另一个主表面，通过在其中扩散杂质而形成在第二主表面的中心部分中的应变计条，以及连接到应变计条纹的电极。 这些应变计条纹与第二主表面的周缘间隔大于同一主表面长度的1/3。 半导体基板的第一主表面与弹性金属负载板接合。

公开(公告)号：US4319397A

公开(公告)日：1982-03-16

申请号：US165985

申请日：1980-07-07

申请人： Masanori Tanabe ,  Satoshi Shimada ,  Akio Yasukawa ,  Hideyuki Nemoto ,  Motohisa Nishihara ,  Masatoshi Tsuchiya ,  Ko Soeno

发明人： Masanori Tanabe ,  Satoshi Shimada ,  Akio Yasukawa ,  Hideyuki Nemoto ,  Motohisa Nishihara ,  Masatoshi Tsuchiya ,  Ko Soeno

IPC分类号： G01D5/16 ,  H01L29/84 ,  H01L21/58

CPC分类号： H01L29/84 ,  Y10T29/49103

摘要： A strain gauge is formed on one main surface of a semiconductor single crystal substrate while an insulating oxide film is formed on the other main surface of the substrate. A metal junction layer including several layers inclusive of eutectic alloy layers is formed on the surface of the insulating oxide film and the thus prepared structure is mounted on a metal strain generator. By heating this assembly to temperatures approximating to the eutectic point of the eutectic alloy layer, the semiconductor substrate and the metal strain generator are joined together.

摘要翻译： 在半导体单晶基板的一个主表面上形成应变计，同时在基板的另一个主表面上形成绝缘氧化膜。 在绝缘氧化膜的表面上形成包括共晶合金层的数层的金属接合层，将这样制作的结构安装在金属应变发生器上。 通过将该组件加热到接近共晶合金层的共晶点的温度，将半导体衬底和金属应变发生器连接在一起。

公开(公告)号：US06877383B2

公开(公告)日：2005-04-12

申请号：US10247637

申请日：2002-09-20

申请人： Junichi Horie ,  Yasuo Onose ,  Norio Ichikawa ,  Seiji Kuryu ,  Satoshi Shimada ,  Akihiko Saito ,  Keiji Hanzawa ,  Masahiro Matsumoto ,  Hiroshi Moriya ,  Akio Yasukawa ,  Atsushi Miyazaki

发明人： Junichi Horie ,  Yasuo Onose ,  Norio Ichikawa ,  Seiji Kuryu ,  Satoshi Shimada ,  Akihiko Saito ,  Keiji Hanzawa ,  Masahiro Matsumoto ,  Hiroshi Moriya ,  Akio Yasukawa ,  Atsushi Miyazaki

IPC分类号： G01L9/00 ,  G01L9/12

CPC分类号： G01L9/0073

摘要： By sealing a diaphragm with less processes and lower cost and reducing deformation due to remaining stress, a stable and highly reliable pressure sensor construction is proposed. The pressure sensor is low in measurement error and small in floating capacitance and leakage current and good in characteristic. As a means to attain the above object, a polycrystalline silicon diaphragm is sealed with a silicon oxide film deposited through a LPCVD method and then completely covered. The diaphragm is placed on a surface of a semiconductor substrate with a nearly constant gap of 0.15 to 1.3 μm, and has difference-in-grade constructions of a deformation reducing means due to remaining stress.

摘要翻译： 通过以较少的工艺密封隔膜，降低成本，减少由于剩余应力引起的变形，提出了一种稳定可靠的压力传感器结构。 压力传感器测量误差小，浮动电容和漏电流小，特性好。 作为实现上述目的的手段，用通过LPCVD方法沉积的氧化硅膜密封多晶硅隔膜，然后完全覆盖。 隔膜被放置在半导体衬底的表面上，具有0.15-1.3μm的几乎恒定的间隙，并且由于剩余应力而具有变形减小装置的不同级别的构造。

公开(公告)号：US06167761A

公开(公告)日：2001-01-02

申请号：US09103612

申请日：1998-06-24

申请人： Keiji Hanzawa ,  Akio Yasukawa ,  Satoshi Shimada ,  Seikou Suzuki ,  Akihiko Saito ,  Masahiro Matsumoto ,  Atsushi Miyazaki ,  Norio Ichikawa ,  Junichi Horie ,  Seiji Kuryu

发明人： Keiji Hanzawa ,  Akio Yasukawa ,  Satoshi Shimada ,  Seikou Suzuki ,  Akihiko Saito ,  Masahiro Matsumoto ,  Atsushi Miyazaki ,  Norio Ichikawa ,  Junichi Horie ,  Seiji Kuryu

IPC分类号： G01L912

CPC分类号： G01L9/0073

摘要： In a capacitance type pressure sensor, a diaphragm is formed of a fragile material using an impurity-diffused monocrystal silicon and constitutes a stable pressure-responsive structure which does not undergo a plastic deformation. Between the diaphragm and a movable electrode is formed an oxide film to diminish stray capacitance between the movable electrode and a substrate and also between the movable electrode and a impurity-diffused layer. The oxide film and the movable electrode are each divided into plural regions so that the divided regions of the movable electrode are formed on the divided regions of the oxide film, thereby diminishing stress strain induced by a difference in therm expansion coefficient among the diaphragm, oxide film and movable electrode. The upper surface of a fixed electrode is covered with a structure for the fixed electrode which structure is formed by an insulating polycrystal silicon film not doped with impurity whereby the rigidity of the electrode is enhanced and it is possible to diminish a leak current.

摘要翻译： 在电容式压力传感器中，使用杂质扩散的单晶硅由脆性材料形成隔膜，构成不发生塑性变形的稳定的压力响应结构。 在隔膜和可动电极之间形成氧化膜，以减小可动电极和基板之间以及可移动电极和杂质扩散层之间的杂散电容。 氧化物膜和可动电极分别分成多个区域，使得可动电极的分割区域形成在氧化膜的分割区域上，从而减小由隔膜，氧化物中的热膨胀系数差引起的应力应变 薄膜和可动电极。 固定电极的上表面被固定电极的结构覆盖，该结构由不掺杂杂质的绝缘多晶硅膜形成，由此电极的刚性增强并且可以减小漏电流。

公开(公告)号：US20070089504A1

公开(公告)日：2007-04-26

申请号：US11483549

申请日：2006-07-11

申请人： Keiji Hanzawa ,  Satoshi Shimada ,  Akio Yasukawa ,  Naoki Saito ,  Keiichi Nakada ,  Izumi Watanabe

发明人： Keiji Hanzawa ,  Satoshi Shimada ,  Akio Yasukawa ,  Naoki Saito ,  Keiichi Nakada ,  Izumi Watanabe

IPC分类号： G01F1/68

CPC分类号： G01F1/6845 ,  G01F1/692 ,  H01L2924/0002 ,  H01L2924/00

摘要： A gas flow measuring apparatus includes a detecting element including a heating resistor and a thermo-sensitive resistor disposed on a diaphragm and external terminals connected to the heating resistor and the thermo-sensitive resistor, and a flow rate detecting unit which controls heating temperature of the heating resistor and which detects a flow rate of gas according to a change in a resistance value of the heating resistor or the thermo-sensitive resistor. The detecting element includes a resistor area in which the heating resistor and the thermo-sensitive resistor are formed and a fixed section area in which the external terminals are formed. A stress mitigating unit is formed between the resistor area and the fixed section area.

摘要翻译： 一种气体流量测量装置，包括检测元件，该检测元件包括加热电阻器和设置在隔膜上的热敏电阻器和连接到加热电阻器和热敏电阻器的外部端子，以及流量检测单元，其控制 加热电阻器，其根据加热电阻器或热敏电阻器的电阻值的变化来检测气体的流量。 检测元件包括其中形成有加热电阻器和热敏电阻器的电阻器区域和形成有外部端子的固定部分区域。 在电阻器区域和固定部分区域之间形成减压单元。

公开(公告)号：US5936235A

公开(公告)日：1999-08-10

申请号：US30853

申请日：1998-02-26

申请人： Rintaro Minamitani ,  Akio Yasukawa ,  Shizuhisa Watanabe

发明人： Rintaro Minamitani ,  Akio Yasukawa ,  Shizuhisa Watanabe

IPC分类号： F02D35/00 ,  G01L9/00 ,  G01L11/00 ,  G01L23/06 ,  G01L23/16 ,  G01L23/22 ,  H01J5/16

CPC分类号： G01L23/16 ,  G01L23/221 ,  G01L9/0076

摘要： A cylinder pressure sensor is adapted to detect a cylinder pressure by detecting a change in the amount of light being transmitted through an optical fiber in an axial direction. Two support portions support the optical fiber at two points along the length thereof. A diaphragm in contact with the optical fiber causes bending of the optical fiber in dependence upon a change in the cylinder pressure. The position at which a force is applied against the optical fiber by the diaphragm is deviated from a center position between the two support portions. The resulting cylinder pressure sensor is capable of accurately measuring cylinder pressure and knocking over a long period of time with a low cost and reduced initial variations.

摘要翻译： 气缸压力传感器适于通过检测在轴向方向上透过光纤的光量的变化来检测气缸压力。 两个支撑部分沿其长度的两个点处支撑光纤。 与光纤接触的隔膜根据气缸压力的变化导致光纤弯曲。 通过隔膜向光纤施加力的位置偏离两个支撑部之间的中心位置。 所得到的气缸压力传感器能够以低成本和初始变化降低，精确地测量气缸压力和敲击长时间。

公开(公告)号：US07992435B2

公开(公告)日：2011-08-09

申请号：US12512512

申请日：2009-07-30

申请人： Rintaro Minamitani ,  Keiji Hanzawa ,  Akio Yasukawa

发明人： Rintaro Minamitani ,  Keiji Hanzawa ,  Akio Yasukawa

IPC分类号： G01F1/68

CPC分类号： G01F1/6845

摘要： In a structure in which peripheral part of a diaphragm section of an electrical insulating film is covered with a protective film made of an organic material, the resistor wire on the diaphragm section crosses the peripheral part of the diaphragm section. At a place where a narrow wire of a resistance temperature detector and the like crosses the peripheral part of the diaphragm section, the protective film is thinner than the other part, and the dust impact resistance is reduced. At a place where a heating resistor wire connected to a heating resistor body or resistance temperature detector wires connected to resistance temperature detector bodies cross a periphery of the diaphragm section, a film component protruding from an electrical insulating film is arranged side by side with the heating resistor wire or the resistance temperature detector wires.

摘要翻译： 在电绝缘膜的隔膜部分的周边部分被有机材料制成的保护膜覆盖的结构中，隔膜部分上的电阻器线与隔膜部分的周边部分交叉。 在电阻温度检测器等的细线与隔膜部的周边部分交叉的地方，保护膜比其他部分薄，防尘性降低。 在与加热电阻体连接的加热电阻线或与电阻温度检测体相连的电阻温度检测器线与隔膜部分的周边交叉的位置处，从电绝缘膜突出的膜部件并排配置， 电阻丝或电阻温度检测器线。

公开(公告)号：US07942053B2

公开(公告)日：2011-05-17

申请号：US12261700

申请日：2008-10-30

申请人： Naoki Saito ,  Takeshi Morino ,  Yuki Okamoto ,  Keiji Hanzawa ,  Hiromu Kikawa ,  Akio Yasukawa

发明人： Naoki Saito ,  Takeshi Morino ,  Yuki Okamoto ,  Keiji Hanzawa ,  Hiromu Kikawa ,  Akio Yasukawa

IPC分类号： G01F1/68

CPC分类号： G01F1/6845 ,  G01F5/00 ,  G01F15/12

摘要： An air flow measuring instrument, comprising: an auxiliary passage 8 arranged inside a main passage through which fluid flows, a tabular member 5 on which a pattern of a heating resistor for measuring an air flow is provided on one face 5a, the tabular member being disposed inside the auxiliary passage so that the one face 5a on which the heating resistor pattern of the tabular member is provided is disposed along a flow of fluid inside the auxiliary passage 8, a heating resistor pattern-side fluid passage 8a portion formed so that the fluid flows between the face 5a and a passage-forming surface 8d of the auxiliary passage, and a back-surface 8b side fluid passage portion formed so that fluid flows between a face 5b on a side opposite to the face of the tabular member and the passage-forming surface of the auxiliary passage. Guidance portion 13 guiding dust that collides against the end portion to back-surface side fluid passage portion 8b side is provided on upstream-side end of tabular member.

摘要翻译： 一种气流测量仪器，包括：辅助通道8，布置在流体流过的主通道内部;平板状构件5，在一个面5a上设置有用于测量气流的加热电阻器的图案，平板状构件为 设置在辅助通道内部，使得设置有平板状构件的加热电阻体图形的一个面5a沿着辅助通道8内的流体流布置，形成的加热电阻器图案侧流体通道8a部分， 流体在表面5a和辅助通道的通道形成表面8d之间流动，并且后表面8b侧流体通道部分形成为使得流体在与板状构件的表面相对的一侧的表面5b和 辅助通道的通道形成表面。 引导部分13引导与端部至后表面侧流体通道部分8b侧碰撞的灰尘，该引导部分13设置在平板状部件的上游侧端部。

公开(公告)号：US07469582B2

公开(公告)日：2008-12-30

申请号：US11905490

申请日：2007-10-01

申请人： Naoki Saito ,  Masayuki Kozawa ,  Shinya Igarashi ,  Hiromu Kikawa ,  Akio Yasukawa ,  Akira Takasago

发明人： Naoki Saito ,  Masayuki Kozawa ,  Shinya Igarashi ,  Hiromu Kikawa ,  Akio Yasukawa ,  Akira Takasago

IPC分类号： G01F1/68

CPC分类号： G01F1/684 ,  F02D41/187 ,  G01F1/6842 ,  G01F1/688 ,  G01F1/69 ,  G01F5/00

摘要： A heating resistor type flow measuring device comprising a housing having a support part provided between a frame body and a connector and connected to the mounting part of a fluid passage, a flow rate detection element held on the frame body side of the housing, and an electronic circuit held on the housing and connected electrically to the flow rate detection element and the connector, wherein the electronic circuit is held on the frame body side of the housing and positioned in the fluid passage, a member with the rigidity higher than the material of the main structural member of the housing is formed integrally with the support part, the housing is fixed to the fluid passage through the member with high rigidity. A metal plate is inserted into the support part so as to increase rigidity. Further, a distance is provided between the support part and a metal plate forming a route for conducting the heat transferred to the metal base fixing an electronic circuit substrate by a plastic mold so as to form a structure obstructing a heat transfer, or a clearance is provided in a portion spaced by the plastic mold between the support part and the metal base so as to form a structure obstructing a heat transfer.

摘要翻译： 一种加热电阻器型流量测量装置，包括：壳体，其具有设置在框体和连接器之间的支撑部，并且连接到流体通道的安装部分;流量检测元件，其保持在壳体的框体侧;以及 电子电路保持在壳体上并与流量检测元件和连接器电连接，其中电子电路被保持在壳体的框架主体侧并且定位在流体通道中，刚性高于 壳体的主结构构件与支撑部一体地形成，壳体通过构件以高刚性固定到流体通道。 将金属板插入支撑部，以增加刚性。 此外，在支撑部分和金属板之间设置一个距离，该金属板形成用于传导通过塑料模具固定电子电路基板的传送到金属基座的热量的路线，以便形成阻碍热传递的结构，或者间隙是 设置在由塑料模具在支撑部分和金属基座之间间隔开的部分中，以形成阻碍热传递的结构。

公开(公告)号：US4739125A

公开(公告)日：1988-04-19

申请号：US907006

申请日：1986-09-15

申请人： Yutaka Watanabe ,  Fumiyuki Kobayashi ,  Masao Sekibata ,  Shigeo Kuroda ,  Akio Yasukawa ,  Shigejiro Sekine

发明人： Yutaka Watanabe ,  Fumiyuki Kobayashi ,  Masao Sekibata ,  Shigeo Kuroda ,  Akio Yasukawa ,  Shigejiro Sekine

IPC分类号： H01L23/50 ,  H01L23/495 ,  H01L23/498 ,  H05K1/02 ,  H05K1/18 ,  H05K3/34

CPC分类号： H01L23/49555 ,  H01L23/49811 ,  H05K3/3426 ,  H01L2924/0002 ,  H05K1/0271 ,  H05K2201/10689 ,  H05K2201/10719 ,  H05K2201/10727 ,  H05K2201/10757 ,  H05K2201/10946 ,  Y02P70/613

摘要： An electric component part has its lead terminals bent in thickness directions in a middle section thereof at least two positions so that a step section virtually in parallel to the bottom of a circuit substrate is formed with the intention of absorbing the external force applied to the part by chaging the shape of the lead terminals. Increase in the part layout area due to the formation of the horizontal step section can be avoided, when necessary, by shifting the terminal lead out position on the component part inward thereby to minimize the jetty dimensions.

摘要翻译： 电气部件的导线端子在其中间部分的至少两个位置处具有在厚度方向上弯曲的引线端子，从而形成与电路基板的底部实际上平行的台阶部分，其目的是吸收施加到部件的外力 通过跟踪引线端子的形状。 当需要时，可以避免由于形成水平台阶部而导致的部件布局区域的增加，通过将部件部件上的端子引出位置向内移位，从而使喷射尺寸最小化。