公开(公告)号：US4292618A

公开(公告)日：1981-09-29

申请号：US129195

申请日：1980-03-11

申请人： Masanori Tanabe ,  Satoshi Shimada ,  Akio Yasukawa ,  Motohisa Nishihara ,  Takeo Nagata

发明人： Masanori Tanabe ,  Satoshi Shimada ,  Akio Yasukawa ,  Motohisa Nishihara ,  Takeo Nagata

IPC分类号： G01B7/16 ,  G01L1/18 ,  H01L29/84 ,  G01L1/22

CPC分类号： H01L29/84 ,  G01L1/18

摘要： A semiconductor substrate has a major surface, another major surface on the opposite side of the first major surface, a strain gauge stripe formed in the central portion of the second major surface by diffusing an impurity therein, and electrodes connected to the strain gauge stripes. These strain gauge stripes are spaced from the peripheral edge of the second major surface by a distance greater than 1/3 of the length of the same major surface. The first major surface of the semiconductor substrate is bonded to an elastic metal load plate.

摘要翻译： 半导体衬底具有主表面，在第一主表面的相对侧上的另一个主表面，通过在其中扩散杂质而形成在第二主表面的中心部分中的应变计条，以及连接到应变计条纹的电极。 这些应变计条纹与第二主表面的周缘间隔大于同一主表面长度的1/3。 半导体基板的第一主表面与弹性金属负载板接合。

公开(公告)号：US4319397A

公开(公告)日：1982-03-16

申请号：US165985

申请日：1980-07-07

申请人： Masanori Tanabe ,  Satoshi Shimada ,  Akio Yasukawa ,  Hideyuki Nemoto ,  Motohisa Nishihara ,  Masatoshi Tsuchiya ,  Ko Soeno

发明人： Masanori Tanabe ,  Satoshi Shimada ,  Akio Yasukawa ,  Hideyuki Nemoto ,  Motohisa Nishihara ,  Masatoshi Tsuchiya ,  Ko Soeno

IPC分类号： G01D5/16 ,  H01L29/84 ,  H01L21/58

CPC分类号： H01L29/84 ,  Y10T29/49103

摘要： A strain gauge is formed on one main surface of a semiconductor single crystal substrate while an insulating oxide film is formed on the other main surface of the substrate. A metal junction layer including several layers inclusive of eutectic alloy layers is formed on the surface of the insulating oxide film and the thus prepared structure is mounted on a metal strain generator. By heating this assembly to temperatures approximating to the eutectic point of the eutectic alloy layer, the semiconductor substrate and the metal strain generator are joined together.

摘要翻译： 在半导体单晶基板的一个主表面上形成应变计，同时在基板的另一个主表面上形成绝缘氧化膜。 在绝缘氧化膜的表面上形成包括共晶合金层的数层的金属接合层，将这样制作的结构安装在金属应变发生器上。 通过将该组件加热到接近共晶合金层的共晶点的温度，将半导体衬底和金属应变发生器连接在一起。

公开(公告)号：US4173900A

公开(公告)日：1979-11-13

申请号：US883589

申请日：1978-03-06

申请人： Masanori Tanabe ,  Satoshi Shimada ,  Motohisa Nishihara ,  Kazuji Yamada ,  Yasumasa Matsuda ,  Michitaka Shimazoe ,  Yoshitaka Matsuoka ,  Yukio Takahashi ,  Katsuya Katohgi ,  Mitsuo Ai

发明人： Masanori Tanabe ,  Satoshi Shimada ,  Motohisa Nishihara ,  Kazuji Yamada ,  Yasumasa Matsuda ,  Michitaka Shimazoe ,  Yoshitaka Matsuoka ,  Yukio Takahashi ,  Katsuya Katohgi ,  Mitsuo Ai

IPC分类号： G01L9/00 ,  H01L29/84 ,  G01L9/06

CPC分类号： G01L9/0054 ,  H01L29/84

摘要： A semiconductor pressure transducer comprising a disc-shaped pressure-responsive diaphragm; a pair of radial strain gauge units having a piezoresistance effect, formed by injecting an impurity in the radial direction in the surface of the diaphragm; and a pair of tangential strain gauge units having a piezoresistance effect, formed by injecting an impurity in the tangential direction in the surface of the diaphragm, wherein the distance from the pair of the radial strain gauge units to the center of the circular diaphragm is greater than the distance from the pair of the tangential strain gauge units to the center of the circular diaphragm.

摘要翻译： 一种半导体压力传感器，包括盘形压力响应膜片; 一对具有压阻效应的径向应变计单元，其通过在所述隔膜的表面中沿径向注入杂质而形成; 以及具有压阻效应的一对切向应变计单元，其通过在隔膜的表面中沿切线注入杂质形成，其中从一对径向应变计单元到圆形隔膜的中心的距离更大 比从一对切向应变计单元到圆形隔膜中心的距离。

公开(公告)号：US4670969A

公开(公告)日：1987-06-09

申请号：US694990

申请日：1985-01-25

申请人： Kazuji Yamada ,  Yutaka Kobayashi ,  Kanji Kawakami ,  Satoshi Shimada ,  Masanori Tanabe ,  Shigeyuki Kobori

发明人： Kazuji Yamada ,  Yutaka Kobayashi ,  Kanji Kawakami ,  Satoshi Shimada ,  Masanori Tanabe ,  Shigeyuki Kobori

IPC分类号： H01L29/84 ,  G01L9/00 ,  G01P15/08 ,  H01L21/428

CPC分类号： G01L9/0042 ,  G01P15/0802 ,  G01P2015/084 ,  Y10S148/012 ,  Y10S148/159 ,  Y10S148/168 ,  Y10T29/42 ,  Y10T29/49103

摘要： A method of making a silicon diaphragm pressure sensor includes forming an oxide film on one surface of a monocrystalline silicon substrate. A polycrystalline silicon layer is formed on the oxide film. The oxide film may be partly removed before the formation of the polycrystalline silicon layer. The polycrystalline silicon layer is heated and melt to recrystallize the same, thereby converting the polycrystalline silicon layer into a monocrystalline silicon layer. On the monocrystalline silicon layer may be epitaxially grown an additional monocrystalline silicon layer. By using the oxide film as an etching stopper, a predetermined portion of the substrate is etched over a range from the other surface of the substrate to the oxide film, thereby providing a diaphragm of the pressure sensor.

摘要翻译： 制造硅膜压力传感器的方法包括在单晶硅衬底的一个表面上形成氧化膜。 在氧化物膜上形成多晶硅层。 在形成多晶硅层之前可以部分地去除氧化膜。 将多晶硅层加热熔化，使其重结晶，从而将多晶硅层转化为单晶硅层。 在单晶硅层上可以外延生长另外的单晶硅层。 通过使用氧化膜作为蚀刻停止层，在从衬底的另一个表面到氧化膜的范围内蚀刻衬底的预定部分，从而提供压力传感器的隔膜。

公开(公告)号：US07782568B2

公开(公告)日：2010-08-24

申请号：US11351771

申请日：2006-02-10

申请人： Kiyonori Shiraki ,  Masanori Tanabe ,  Masahiko Soga

发明人： Kiyonori Shiraki ,  Masanori Tanabe ,  Masahiko Soga

IPC分类号： G11B5/60

CPC分类号： G11B5/3967 ,  G11B5/3116 ,  G11B5/3163 ,  G11B2005/0021

摘要： Embodiments of the invention provide a compact thin-film magnetic head capable of being increased in the number of terminals, and a magnetic disk drive that uses the thin-film magnetic head. In one embodiment, a thin-film magnetic head is constructed that has a magnetic response element, multiple connection object terminals, multiple lead conductors electrically connected to the magnetic response element, and multiple connection sections each formed between each of the connection object terminals and one of the multiple lead conductors in order to electrically connect each of the connection object terminals and one of the lead conductor. All of the multiple lead conductors are provided in the state where they extend from the magnetic response element to the lower layers of the multiple connection object terminals. A magnetic disk drive using the thin-film magnetic head is constructed.

摘要翻译： 本发明的实施例提供能够增加端子数量的紧凑型薄膜磁头和使用该薄膜磁头的磁盘驱动器。 在一个实施例中，构造了具有磁响应元件，多个连接对象端子，电连接到磁响应元件的多个引线导体和各连接对象端子之间形成的多个连接部分的薄膜磁头， 的多个引线导体，以便电连接每个连接对象端子和引线导体之一。 所有的多个引线导体在从磁响应元件延伸到多个连接对象端子的下层的状态下被提供。 构造使用薄膜磁头的磁盘驱动器。

公开(公告)号：US06288871B1

公开(公告)日：2001-09-11

申请号：US09478515

申请日：2000-01-06

申请人： Masanori Tanabe

发明人： Masanori Tanabe

IPC分类号： G11B531

CPC分类号： G11B5/313 ,  G11B5/012 ,  G11B5/3109 ,  G11B5/3116

摘要： A thin film magnetic head which can suppress magnetic saturation at opposite ends of width of a narrow track width to reduce the amount of recording side-fringing onto a recording medium and which can assure a necessary recording magnetic field satisfactorily. Also a magnetic disk apparatus using the head. A second magnetic yoke has a magnetic gap depth over which the spacing of a magnetic gap keeps substantially equal toward a rear portion of the second magnetic yoke, starting at the tip of a second magnetic pole and the spacing between a first magnetic yoke and the second magnetic yoke is increased toward the rear portion, starting at a position corresponding to the magnetic gap depth. The second magnetic pole of the second magnetic yoke has in the track width direction a width for recording a signal on a track width of the recording medium. The width keeps constant over a predetermined length toward the rear portion, starting at the second magnetic pole tip and spreads monotonically toward the rear, starting at a position corresponding to the predetermined length. The predetermined length terminating in the spread start position of the width of the second magnetic yoke is set to be shorter than the magnetic gap depth.

摘要翻译： 一种薄膜磁头，其可以抑制窄轨道宽度的宽度的相对端处的磁饱和，以减少记录侧边缘到记录介质上的量，并且可以令人满意地确保必要的记录磁场。 也是使用磁头的磁盘装置。 第二磁轭具有磁隙深度，磁隙的间隔在第二磁轭的尖端处从第二磁轭的后部保持基本相等，并且第一磁轭与第二磁轭之间的间隔 从对应于磁隙深度的位置开始，磁轭向后部增加。 第二磁轭的第二磁极在磁道宽度方向上具有用于在记录介质的磁道宽度上记录信号的宽度。 从第二磁极尖端开始，宽度保持恒定在预定长度上，从第二磁极尖端开始，并且在对应于预定长度的位置开始向后延伸。 终止在第二磁轭的宽度的扩展开始位置的预定长度被设定为比磁隙深度短。

公开(公告)号：US07733606B2

公开(公告)日：2010-06-08

申请号：US11226578

申请日：2005-09-13

申请人： Atsushi Kato ,  Kiyonori Shiraki ,  Masanori Tanabe

发明人： Atsushi Kato ,  Kiyonori Shiraki ,  Masanori Tanabe

IPC分类号： G11B5/60

CPC分类号： G11B5/6064 ,  G11B5/314 ,  G11B5/607 ,  G11B5/6082

摘要： Embodiments of the invention prevent the write element lead wires from inducing crosstalk current in the read element lead wires. In one embodiment, a magnetic head slider comprises: a substrate portion; a heating resistor formed on the substrate portion through the intermediary of an insulation layer; a magnetic write element and a magnetic read element which are formed over the heating resistor through the intermediary of an insulation layer; and a terminal array structure provided with first terminals to wire the magnetic write element, second terminals to wire the magnetic read element, and third terminals to wire the heating resistor, wherein two of the third terminals for the heating resistor are located respectively on the opposite outer sides of the first and second terminals. In addition, an arm suspension is provided with a wiring structure in which wires connected to the terminals of the magnetic head slider, wires connected to the terminals, and wires connected to the terminals are guided to a predetermined direction and the magnetic write element lead wires are separated from the magnetic read element lead wires by the wires located in the central portion.

摘要翻译： 本发明的实施例防止写入元件引线在读取元件引线中引起串扰电流。 在一个实施例中，磁头滑块包括：基板部分; 加热电阻器，其通过绝缘层形成在所述基板部分上; 磁性写入元件和磁性读取元件，其通过绝缘层中间形成在加热电阻器的上方; 以及端子阵列结构，其具有用于连接磁性写入元件的第一端子，用于连接磁性读取元件的第二端子和用于连接加热电阻器的第三端子，其中用于加热电阻器的第三端子中的两个分别位于相对的 第一和第二端子的外侧。 此外，臂悬架设置有布线结构，其中连接到磁头滑块的端子的导线，连接到端子的电线和连接到端子的电线被引导到预定方向，并且磁性写入元件引线 通过位于中央部分的导线与磁性读取元件引线分离。

公开(公告)号：US4633099A

公开(公告)日：1986-12-30

申请号：US554332

申请日：1983-11-22

申请人： Masanori Tanabe ,  Kanji Kawakami

发明人： Masanori Tanabe ,  Kanji Kawakami

IPC分类号： G01D5/14 ,  G01D5/18 ,  G01L1/18 ,  G01L9/00 ,  G01L9/06 ,  G01N27/00 ,  G01N27/07 ,  G01N27/12 ,  G01N27/414 ,  H01L29/84 ,  H03K3/353 ,  G01L1/22 ,  H01L27/20 ,  H03K5/153

CPC分类号： G01L1/18 ,  G01D5/18 ,  G01L9/0098 ,  G01L9/06 ,  Y10T307/786

摘要： The drain voltage of an IGFET having a channel responsive to the change in physical quantity to be measured is negatively fed back to the gate terminal of the IGFET. The negative feedback loop includes series connection of a first amplifier having an amplification factor larger than unity and a second amplifier having an amplification factor smaller than unity. The interconnection point between the first and the second amplifiers is connected to the output terminal. There is provided a stable, highly sensitive and highly reliable semiconductor sensor.

摘要翻译： 具有响应于要测量的物理量的变化的通道的IGFET的漏极电压被负反馈到IGFET的栅极端子。 负反馈回路包括具有大于1的放大系数的第一放大器和具有小于1的放大系数的第二放大器的串联连接。 第一和第二放大器之间的互连点连接到输出端子。 提供了稳定，高灵敏度和高可靠性的半导体传感器。

公开(公告)号：US07911738B2

公开(公告)日：2011-03-22

申请号：US11788511

申请日：2007-04-19

申请人： Masayuki Kurita ,  Toshiya Shiramatsu ,  Masanori Tanabe ,  Takayoshi Ohtsu

发明人： Masayuki Kurita ,  Toshiya Shiramatsu ,  Masanori Tanabe ,  Takayoshi Ohtsu

IPC分类号： G11B5/31 ,  G11B5/60 ,  G11B5/56 ,  G11B5/39

CPC分类号： G11B5/6005 ,  G11B5/6064

摘要： According to embodiments of the present invention, a magnetic head slider provided with a heater disposed near a read element to adjust flying height, is required to increase a thermal protrusion by heat generated by the heater without increasing a thermal protrusion attributable to heat generated by a recording current or environmental temperature. A magnetic head slider includes a thin-film head unit including a read element, a heater having a thin heating line extended above and below the read element, a write element, and an insulating layer of alumina (Al2O3) or the like insulating those components. The thin heating line of the heater is formed from a thin resistive film of NiCr or the like. The thin heating line of the heater is extended above and below the read element so as to meander in a zigzag shape in a direction perpendicular to the device forming surface. The thin heating line has a thickness between about 0.1 and 0.2 μm, a width between about 1 and 3 μm, a length of about 100 μm, and a resistance between about 50 and 500 Ω.

摘要翻译： 根据本发明的实施例，需要设置有设置在读取元件附近以调节飞行高度的加热器的磁头滑块，以增加由加热器产生的热量的热突起，而不增加由于由 记录当前或环境温度。 磁头滑块包括：薄膜头单元，其包括读取元件，具有在读取元件上方和下方延伸的薄加热线的加热器，写入元件以及绝缘这些元件的氧化铝（Al 2 O 3）等的绝缘层 。 加热器的细加热线由NiCr等的薄电阻膜形成。 加热器的细加热线在读取元件的上方和下方延伸，以便在垂直于器件形成表面的方向上以锯齿形弯曲。 薄加热线具有约0.1至0.2μm之间的厚度，约1至3μm的宽度，约100μm的长度和约50至500之间的电阻。

公开(公告)号：US20070247758A1

公开(公告)日：2007-10-25

申请号：US11788511

申请日：2007-04-19

申请人： Masayuki Kurita ,  Toshiya Shiramatsu ,  Masanori Tanabe ,  Takayoshi Ohtsu

发明人： Masayuki Kurita ,  Toshiya Shiramatsu ,  Masanori Tanabe ,  Takayoshi Ohtsu

IPC分类号： G11B5/60

CPC分类号： G11B5/6005 ,  G11B5/6064

摘要： According to embodiments of the present invention, a magnetic head slider provided with a heater disposed near a read element to adjust flying height, is required to increase a thermal protrusion by heat generated by the heater without increasing a thermal protrusion attributable to heat generated by a recording current or environmental temperature. A magnetic head slider includes a thin-film head unit including a read element, a heater having a thin heating line extended above and below the read element, a write element, and an insulating layer of alumina (Al2O3) or the like insulating those components. The thin heating line of the heater is formed from a thin resistive film of NiCr or the like. The thin heating line of the heater is extended above and below the read element so as to meander in a zigzag shape in a direction perpendicular to the device forming surface. The thin heating line has a thickness between about 0.1 and 0.2 μm, a width between about 1 and 3 μm, a length of about 100 μm, and a resistance between about 50 and 500Ω.

摘要翻译： 根据本发明的实施例，需要设置有设置在读取元件附近以调节飞行高度的加热器的磁头滑块，以增加由加热器产生的热量的热突起，而不增加由于由 记录当前或环境温度。 磁头滑动器包括薄膜头单元，其包括读取元件，具有在读取元件上方和下方延伸的薄加热线的加热器，写入元件和氧化铝绝缘层（Al 2 > O 3等）绝缘这些部件。 加热器的细加热线由NiCr等的薄电阻膜形成。 加热器的细加热线在读取元件的上方和下方延伸，以便在垂直于器件形成表面的方向上以锯齿形弯曲。 薄加热线具有约0.1至0.2μm之间的厚度，约1至3μm之间的宽度，约100μm的长度和约50至500mega之间的电阻。