PIEZOELECTRIC THIN FILM RESONATOR, FILTER, AND COMMUNICATION APPARATUS
    1.
    发明申请
    PIEZOELECTRIC THIN FILM RESONATOR, FILTER, AND COMMUNICATION APPARATUS 有权
    压电薄膜共振器,过滤器和通讯设备

    公开(公告)号:US20100060385A1

    公开(公告)日:2010-03-11

    申请号:US12397932

    申请日:2009-03-04

    IPC分类号: H03H9/15

    摘要: A piezoelectric thin film resonator includes a substrate, a lower electrode formed on the substrate, a piezoelectric film formed on the substrate and the lower electrode, and an upper electrode formed on the piezoelectric film and opposing the lower electrode, an upper electrode formed on the piezoelectric film. The upper electrode has a main portion and an extended portion connected to the main portion, the main portion opposing the lower electrode and an opening disposed between the substrate and the lower electrode, the extended portion having a portion which opposes the opening and the substrate.

    摘要翻译: 压电薄膜谐振器包括基板,形成在基板上的下电极,形成在基板和下电极上的压电膜,以及形成在压电膜上并与下电极相对的上电极,形成在基板上的上电极 压电薄膜。 上部电极具有与主体部分连接的主要部分和延伸部分,与下部电极相对的主要部分和设置在基板和下部电极之间的开口,延伸部分具有与开口和基板相对的部分。

    ELECTRONIC CIRCUIT AND ELECTRONIC MODULE
    2.
    发明申请
    ELECTRONIC CIRCUIT AND ELECTRONIC MODULE 有权
    电子电路和电子模块

    公开(公告)号:US20120306591A1

    公开(公告)日:2012-12-06

    申请号:US13485688

    申请日:2012-05-31

    IPC分类号: H03H9/70

    摘要: An electronic circuit includes a plurality of duplexers that are coupled to an antenna terminal and have a pass band different from each other and a plurality of acoustic wave filters that are respectively coupled between the antenna terminal and the plurality of the duplexers, wherein filter characteristics of a first acoustic wave filter of the plurality of the acoustic wave filters are set so as to allow passage of a signal in both a pass band for transmitting and a pass band for receiving of a first duplexer of the plurality of the duplexers that is coupled to the first acoustic wave filter and suppress passage of a signal in both a pass band for transmitting and a pass band for receiving of a second duplexer of the plurality of the duplexers that is different from the first duplexer.

    摘要翻译: 电子电路包括耦合到天线端子并具有彼此不同的通带的多个双工器,以及分别耦合在天线端子和多个双工器之间的多个声波滤波器,其中滤波器特性 多个声波滤波器的第一声波滤波器被设定为允许通过用于发送的通带中的信号和用于接收耦合到多个双工器的多个双工器的第一双工器的通带 第一声​​波滤波器,并且抑制用于发送的通带中的信号的通过和用于接收与第一双工器不同的多个双工器的第二双工器的通带。

    FILTER, DUPLEXER AND COMMUNICATION APPARATUS
    4.
    发明申请
    FILTER, DUPLEXER AND COMMUNICATION APPARATUS 有权
    过滤器,双工器和通信设备

    公开(公告)号:US20100060384A1

    公开(公告)日:2010-03-11

    申请号:US12494990

    申请日:2009-06-30

    IPC分类号: H03H9/205 H01L41/04

    摘要: A filter has a plurality of piezoelectric thin film resonators formed by sandwiching a piezoelectric film with a lower electrode disposed on a substrate and an upper electrode. Each of the piezoelectric thin film resonators has an electrode region formed with the upper electrode and the lower electrode overlapping each other, whose outline includes a curve. Among the plural piezoelectric thin film resonators, the piezoelectric thin film resonators in the opposing electrode regions of the adjacent piezoelectric thin film resonators are shaped to have outlines complementary to each other. With the filter, influences caused by transverse mode undesired wave of the piezoelectric thin film resonators can be suppressed. Therefore, miniaturization can be achieved without sacrificing the mechanical strength of electrodes having hollow structures.

    摘要翻译: 滤波器具有多个压电薄膜谐振器,其通过将设置在基板上的下电极和上电极夹在压电薄膜上而形成。 每个压电薄膜谐振器具有由上电极和下电极形成的电极区域彼此重叠,其轮廓包括曲线。 在多个压电薄膜谐振器中,相邻的压电薄膜谐振器的相对电极区域中的压电薄膜谐振器被成形为具有彼此互补的轮廓。 利用滤波器​​,可以抑制由压电薄膜谐振器的横向不需要的波形引起的影响。 因此,可以在不牺牲具有中空结构的电极的机械强度的情况下实现小型化。

    PIEZOELECTRIC THIN-FILM RESONATOR, COMMUNICATION MODULE AND COMMUNICATION DEVICE
    6.
    发明申请
    PIEZOELECTRIC THIN-FILM RESONATOR, COMMUNICATION MODULE AND COMMUNICATION DEVICE 有权
    压电薄膜谐振器,通信模块和通信设备

    公开(公告)号:US20120299444A1

    公开(公告)日:2012-11-29

    申请号:US13570422

    申请日:2012-08-09

    IPC分类号: H01L41/04 H01L41/08

    CPC分类号: H03H9/13 H03H9/131

    摘要: A piezoelectric thin-film resonator includes a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode and an upper electrode that is located opposite the lower electrode across at least a part of the piezoelectric film. A mass load film is provided on the upper electrode. The mass load film includes a plurality of concave or convex patterns in at least a region that faces the lower electrode. The plurality of concave or convex patterns are densely arranged in a central portion of the region and are sparsely arranged in a peripheral portion of the region.

    摘要翻译: 压电薄膜谐振器包括基板,设置在基板上的下电极,设置在下电极上的压电膜和位于压电薄膜的至少一部分上的与下电极相对的上电极。 在上电极上设置质量负荷膜。 质量负载膜在至少面向下电极的区域中包括多个凹凸图案。 多个凹凸图案被密集地布置在该区域的中心部分中,并且稀疏地布置在该区域的周边部分中。

    ACOUSTIC WAVE DEVICE
    7.
    发明申请
    ACOUSTIC WAVE DEVICE 有权
    声波设备

    公开(公告)号:US20120182092A1

    公开(公告)日:2012-07-19

    申请号:US13431669

    申请日:2012-03-27

    IPC分类号: H03H9/205

    摘要: An acoustic wave device includes a main resonator and a sub resonator each having a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on an upper side of the piezoelectric film. A frequency control film is provided on an upper side of a resonance area in which the upper electrode and the lower electrode face each other in at least one of the main resonator and the sub resonator. The frequency control film has multiple convex patterns, and the convex patterns are arranged with a common pitch for spurious adjustment and with different areas in the main resonator and the sub resonator.

    摘要翻译: 声波装置包括主谐振器和子谐振器,每个具有基板,设置在基板上的下电极,设置在下电极上的压电膜和设置在压电膜上侧的上电极。 频率控制膜设置在谐振区域的上侧,其中上电极和下电极在主谐振器和子谐振器中的至少一个中彼此面对。 频率控制膜具有多个凸形图案,并且凸形图案以公共间距布置以​​进行杂散调整,并且在主谐振器和子谐振器中具有不同的区域。

    FILTER ELEMENT, DUPLEXER AND ELECTRONIC DEVICE
    8.
    发明申请
    FILTER ELEMENT, DUPLEXER AND ELECTRONIC DEVICE 失效
    滤波器元件,双工器和电子器件

    公开(公告)号:US20110267155A1

    公开(公告)日:2011-11-03

    申请号:US13177797

    申请日:2011-07-07

    IPC分类号: H03H9/58 H03H9/205

    摘要: A filter element includes a plurality of multilayer filters that are connected in cascade, each of the plurality of multilayer filters including a plurality of piezoelectric thin-film resonators stacked vertically, each of the piezoelectric thin-film resonators including a piezoelectric film and a pair of first electrodes between which the piezoelectric film is interposed, and a capacitor connected between an input terminal of one of the plurality of multilayer filters of a preceding stage and an input terminal of another one of the plurality of multilayer filters of a following stage, exciting directions of piezoelectric thin-film resonators to which the input terminals of the multilayer filters of the preceding and following stages are connected being opposite to each other.

    摘要翻译: 滤波器元件包括串联连接的多个多层滤波器,多个多层滤波器中的每一个包括垂直堆叠的多个压电薄膜谐振器,每个压电薄膜谐振器包括压电薄膜和一对 插入压电膜的第一电极和连接在前级的多个多层滤波器中的一个的输入端子和后级的多个多层滤波器中的另一个的输入端子之间的电容器,激励方向 压电薄膜谐振器彼此相反地连接有前级和后级的多层滤波器的输入端。

    PIEZOELECTRIC THIN-FILM RESONATOR AND METHOD FOR MANUFACTURING THE SAME
    9.
    发明申请
    PIEZOELECTRIC THIN-FILM RESONATOR AND METHOD FOR MANUFACTURING THE SAME 有权
    压电薄膜共振器及其制造方法

    公开(公告)号:US20130033151A1

    公开(公告)日:2013-02-07

    申请号:US13563505

    申请日:2012-07-31

    IPC分类号: H01L41/04 H01L41/22

    摘要: A piezoelectric thin-film resonator includes: a lower electrode provided on a substrate; a piezoelectric film that is provided on the lower electrode and includes at least two layers; an upper electrode that is provided on the piezoelectric film and has a region sandwiching the piezoelectric film with the lower electrode and facing the lower electrode; and an insulating film that is provided in a region in which the lower electrode and the upper electrode face each other and between each of the at least two layers, wherein an upper face of the insulating film is flatter than a lower face of the insulating film.

    摘要翻译: 压电薄膜谐振器包括:设置在基板上的下电极; 压电膜,其设置在所述下电极上并且包括至少两层; 上部电极,其设置在所述压电膜上,并且具有将所述压电膜与所述下部电极夹在中间且与所述下部电极相对的区域; 以及绝缘膜,其设置在所述下电极和所述上电极彼此面对并且在所述至少两层中的每一个之间的区域中,其中所述绝缘膜的上表面比所述绝缘膜的下表面平坦 。