摘要:
A semiconductor device having a field effect transistor (FET) with enhanced performance by reduction of electrical contact resistance of electrodes and resistance of the electrodes per se is disclosed. The FET includes an n-type FET having a channel region formed in a semiconductor substrate, a gate electrode insulatively overlying the channel region, and a pair of source and drain electrodes which are formed at both ends of the channel region. The source/drain electrodes are made of silicide of a first metal. An interface layer that contains a second metal is formed in the interface between the substrate and the first metal. The second metal is smaller in work function than silicide of the first metal, and the second metal silicide is less in work function than the first metal silicide. A fabrication method of the semiconductor device is also disclosed.
摘要:
A semiconductor device having a field effect transistor (FET) with enhanced performance by reduction of electrical contact resistance of electrodes and resistance of the electrodes per se is disclosed. The FET includes an n-type FET having a channel region formed in a semiconductor substrate, a gate electrode insulatively overlying the channel region, and a pair of source and drain electrodes which are formed at both ends of the channel region. The source/drain electrodes are made of silicide of a first metal. An interface layer that contains a second metal is formed in the interface between the substrate and the first metal. The second metal is smaller in work function than silicide of the first metal, and the second metal silicide is less in work function than the first metal silicide. A fabrication method of the semiconductor device is also disclosed.
摘要:
A metal insulator semiconductor field effect transistor (MISFET) having a strained channel region is disclosed. Also disclosed is a method of fabricating a semiconductor device having a low-resistance junction interface. This fabrication method includes the step of forming a gate electrode above a silicon substrate with a gate insulator film being sandwiched therebetween. Then, form a pair of heavily-doped p (p+) type diffusion layers in or on the substrate surface at both sides of the gate electrode to a concentration of 5×1019 atoms/cm3 or more and yet less than or equal to 1×1021 atoms/cm3. Next, silicidize the p+-type layers by reaction with a metal in the state that each layer is applied a compressive strain.
摘要翻译:公开了具有应变通道区域的金属绝缘体半导体场效应晶体管(MISFET)。 还公开了一种制造具有低电阻结界面的半导体器件的方法。 该制造方法包括在硅衬底上形成栅电极的步骤,其间夹有栅绝缘膜。 然后,在栅极两侧的衬底表面中或其上形成一对重掺杂的p(p + SUP +)型扩散层,使其浓度达到5×10 19 原子/ cm 3以上且小于或等于1×10 21原子/ cm 3。 接下来,在各层施加压缩应变的状态下,通过与金属反应来硅化p + + +层。
摘要:
A semiconductor device comprises n-type and p-type semiconductor devices formed on the substrate, the n-type device including an n-channel region formed on the substrate, n-type source and drain regions formed opposite to each other interposing the n-channel region therebetween, a first gate insulator formed on the n-channel region, and a first gate electrode formed on the first gate insulator and including a compound of a metal M and a first group-IV elements Si1-a Gea (0≦a≦1), the p-type device including a p-channel region formed on the substrate, p-type source and drain regions formed opposite to each other interposing the p-channel region therebetween, a second gate insulator formed on the p-channel region, and a second gate electrode formed on the second gate insulator, and including a compound of the metal M and a second group-IV element Si1-c Gec (0≦c≦1, a≠c).
摘要翻译:半导体器件包括形成在衬底上的n型和p型半导体器件,n型器件包括形成在衬底上的n沟道区,n型源极和漏极区彼此相对形成, 沟道区域,形成在n沟道区上的第一栅极绝缘体和形成在第一栅极绝缘体上的第一栅电极,并且包括金属M和第一族IV元素Si 1-a的化合物, (0 <= a <= 1),p型器件包括形成在衬底上的p沟道区域,彼此相对形成的p型源极和漏极区域 在其间插入p沟道区域,形成在p沟道区域上的第二栅极绝缘体和形成在第二栅极绝缘体上的第二栅电极,并且包括金属M和第二IV族元素Si c)。
摘要:
A semiconductor device includes a semiconductor substrate; a first gate insulation film formed on the semiconductor substrate; a second gate insulation film formed on the semiconductor substrate; a first gate electrode formed on the first gate insulation film and fully silicided; and a second gate electrode formed on the second gate insulation film and fully silicided, a gate length or a gate width of the second gate electrode being larger than that of the first gate electrode, and a thickness of the second gate electrode being smaller than that of the first gate electrode.
摘要:
A metal insulator semiconductor field effect transistor (MISFET) having a strained channel region is disclosed. Also disclosed is a method of fabricating a semiconductor device having a low-resistance junction interface. This fabrication method includes the step of forming a gate electrode above a silicon substrate with a gate insulator film being sandwiched therebetween. Then, form a pair of heavily-doped p (p+) type diffusion layers in or on the substrate surface at both sides of the gate electrode to a concentration of 5×1019 atoms/cm3 or more and yet less than or equal to 1×1021 atoms/cm3. Next, silicidize the p+-type layers by reaction with a metal in the state that each layer is applied a compressive strain.
摘要:
A semiconductor device comprises n-type and p-type semiconductor devices formed on the substrate, the n-type device including an n-channel region formed on the substrate, n-type source and drain regions formed opposite to each other interposing the n-channel region therebetween, a first gate insulator formed on the n-channel region, and a first gate electrode formed on the first gate insulator and including a compound of a metal M and a first group-IV elements Si1-a Gea (0≦a≦1), the p-type device including a p-channel region formed on the substrate, p-type source and drain regions formed opposite to each other interposing the p-channel region therebetween, a second gate insulator formed on the p-channel region, and a second gate electrode formed on the second gate insulator, and including a compound of the metal M and a second group-IV element Si1-c Gec (0≦c≦1, a≠c).
摘要翻译:半导体器件包括形成在衬底上的n型和p型半导体器件,n型器件包括形成在衬底上的n沟道区,n型源极和漏极区彼此相对形成, 沟道区域,形成在n沟道区上的第一栅极绝缘体和形成在第一栅极绝缘体上的第一栅电极,并且包括金属M和第一族IV族元素Si1-a Gea(0≤...) a <= 1),所述p型器件包括形成在所述衬底上的p沟道区,形成在所述p沟道区之间的彼此相对形成的p型源极和漏极区,形成在所述p上的第二栅极绝缘体 以及形成在第二栅极绝缘体上的第二栅电极,并且包括金属M和第二IV族元素Si1-c Gec(0≤c≤1,a≤c)的化合物。
摘要:
A method of manufacturing a semiconductor device reducing interface resistance of n-type and p-type MISFETs are provided. According to the method, a gate dielectric film and a gate electrode of the n-type MISFET are formed on a first semiconductor region, a gate dielectric film and a gate electrode of the p-type MISFET are formed on a second semiconductor region, an n-type diffusion layer is formed by ion implantation of As into the first semiconductor region, a first silicide layer is formed by first heat treatment after a first metal containing Ni is deposited on the n-type diffusion layer, the first silicide layer is made thicker by second heat treatment after a second metal containing Ni is deposited on the first silicide layer and second semiconductor region, and third heat treatment is provided after formation of a second silicide layer and ion implantation of B or Mg into the second silicide layer.
摘要:
A semiconductor device includes a semiconductor substrate; a first gate insulation film formed on the semiconductor substrate; a second gate insulation film formed on the semiconductor substrate; a first gate electrode formed on the first gate insulation film and fully silicided; and a second gate electrode formed on the second gate insulation film and fully silicided, a gate length or a gate width of the second gate electrode being larger than that of the first gate electrode, and a thickness of the second gate electrode being smaller than that of the first gate electrode.
摘要:
A semiconductor device comprises n-type and p-type semiconductor devices formed on the substrate, the n-type device including an n-channel region formed on the substrate, n-type source and drain regions formed opposite to each other interposing the n-channel region therebetween, a first gate insulator formed on the n-channel region, and a first gate electrode formed on the first gate insulator and including a compound of a metal M and a first group-IV elements Si1−a Gea (0≦a≦1), the p-type device including a p-channel region formed on the substrate, p-type source and drain regions formed opposite to each other interposing the p-channel region therebetween, a second gate insulator formed on the p-channel region, and a second gate electrode formed on the second gate insulator, and including a compound of the metal M and a second group-IV element Si1−c Gec (0≦c≦1, a≠c).
摘要翻译:半导体器件包括形成在衬底上的n型和p型半导体器件,n型器件包括形成在衬底上的n沟道区,n型源极和漏极区彼此相对形成, 沟道区域,形成在n沟道区上的第一栅极绝缘体和形成在第一栅极绝缘体上的第一栅电极,并且包括金属M和第一族IV元素Si 1-a的化合物, (0 <= a <= 1),p型器件包括形成在衬底上的p沟道区域,彼此相对形成的p型源极和漏极区域 在其间插入p沟道区域,形成在p沟道区域上的第二栅极绝缘体和形成在第二栅极绝缘体上的第二栅电极,并且包括金属M和第二IV族元素Si c)。