Process for forming diamond-like thin film
    2.
    发明授权
    Process for forming diamond-like thin film 失效
    形成金刚石薄膜的方法

    公开(公告)号:US5662877A

    公开(公告)日:1997-09-02

    申请号:US827853

    申请日:1992-01-30

    摘要: The present invention improves the adhesive property by pretreating under uniform conditions the substrate surface of metal, ceramics or glass etc. with a poor adhesive property, by accelerating ions under an electric field to the substrate in advance of a diamond-like film forming process. In light of the fact that a diamond-like film forming process by ionized deposition uses thermal electron ionization means and an electric potential is applied to a grid to accelerate ionized hydrocarbon ions, the present invention could attain the aimed purpose by ionizing and then accelerating a bombardment gas such as argon as a pretreatment process in the same apparatus.

    摘要翻译: 本发明通过在金刚石成膜工序之前,通过在电场下将离子加速到基板,在均匀的条件下预处理具有差的粘合性的金属,陶瓷或玻璃等的基板表面来提高粘合性。 鉴于通过电离沉积的类金刚石膜形成工艺使用热电子电离装置并且电势施加到栅格以加速离子化的烃离子的事实,本发明可以通过电离然后加速 轰击气体如氩气作为预处理过程在同一设备中。

    Apparatus for the synthesis of diamond-like thin films
    3.
    发明授权
    Apparatus for the synthesis of diamond-like thin films 失效
    用于合成类金刚石薄膜的装置

    公开(公告)号:US5169452A

    公开(公告)日:1992-12-08

    申请号:US853349

    申请日:1992-03-16

    IPC分类号: C23C16/27 C23C16/50 C23C16/54

    摘要: Diamond-like thin films having high uniformity and high crystallinity are produced by introducing a hydrocarbon material gas into a chamber, ionizing the gas, and depositing the ionized gas on a substrate. The gas is ionized by thermionic emission from two or more files of hot cathodes, each file having a plurality of filaments arranged at substantially uniform intervals in a linear or zigzag line configuration. Each file of hot cathodes is surrounded separately by an anode at a substantially uniform distance from a respective file of the filaments.

    摘要翻译: 通过将烃材料气体引入室中,使气体离子化并将离子化气体沉积在基板上来制造具有高均匀性和高结晶度的菱形薄膜。 气体通过两个或更多个热阴极文件的热电子发射离子化,每个文件具有以线性或之字形线构造以基本均匀的间隔布置的多根细丝。 热阴极的每个文件由与各细丝的相应文件基本相同的距离的阳极分开包围。

    Articles having diamond-like protective film and method of manufacturing
the same
    6.
    发明授权
    Articles having diamond-like protective film and method of manufacturing the same 失效
    具有类金刚石保护膜的制品及其制造方法

    公开(公告)号:US5827613A

    公开(公告)日:1998-10-27

    申请号:US209571

    申请日:1994-03-10

    IPC分类号: B29C33/56

    摘要: Articles having a diamond-like protective film formed thereon, each comprising a substrate of a material selected from the group consisting of alloys containing at least Co, Ni, or Fe, ceramics, and glass and which has only a slight affinity for a diamond-like thin film, an Mo film formed on the substrate, and a diamond-like thin film formed further thereon. Such articles are manufactured by a method which comprises holding a grid made of Mo close to the surface of the substrate, bombarding the grid and the substrate surface with a bombarding gas consisting of inert gas atoms of Ar or the like, thereby removing contaminants from the surface and depositing Mo atoms on the substrate surface to form an Mo film thereon, ionizing a low-molecular-weight hydrocarbon or a feed gas capable of producing a low-molecular-weight hydrocarbon upon decomposition or reaction, and then accelerating the resulting ions and depositing the same on the Mo film to form a diamond-like film thereon. The substrate is preferably a metallic mold constructed of a hardened steel. The Mo film enhances the bond of the diamond-like film to the substrate and improves the strength of the mold surface.

    摘要翻译: 在其上形成有金刚石状保护膜的制品,每个包含选自由至少含有Co,Ni或Fe的合金,陶瓷和玻璃组成的组的基材,并且其对金刚石 - 形成在基板上的Mo膜,以及形成在其上的金刚石状薄膜。 这样的制品通过以下方法制造:将由Mo制成的栅格保持在基板的表面附近,用Ar等惰性气体原子的轰击气体轰击栅格和基板表面,由此从 在基板表面上沉积Mo原子以在其上形成Mo膜,在分解或反应时电离低分子量烃或能够产生低分子量烃的进料气体,然后加速所得离子和 将其沉积在Mo膜上以在其上形成类金刚石膜。 基板优选为由硬化钢构成的金属模。 Mo膜增强了类金刚石膜与基材的结合,提高了模具表面的强度。

    Magnetic recording medium having a specified plasma polymerized hydrogen
containing carbon film and lubricant
    8.
    发明授权
    Magnetic recording medium having a specified plasma polymerized hydrogen containing carbon film and lubricant 失效
    具有特定等离子体聚合氢的碳膜和润滑剂的磁记录介质

    公开(公告)号:US5677051A

    公开(公告)日:1997-10-14

    申请号:US651902

    申请日:1996-05-21

    IPC分类号: G11B5/72 G11B5/84 G11B5/66

    摘要: A magnetic recording medium possessing excellent electromagnetic characteristics, corrosion resistance, durability, abrasion resistance and lubricity, has an undercoat layer, a ferromagnetic metal layer, a protective layer and a lubricating layer formed in this order on a non-magnetic substrate, or has an undercoat layer, a ferromagnetic metal layer, an intercepting layer, a protective layer and a lubricating layer formed in this order on a non-magnetic substrate, wherein the protective layer is a plasma-polymerized hydrogen-containing carbon film having a refractive index of 1.90 or more and a contact angle of less than 80 degrees, the film thickness of the protective layer or the total film thickness of the protective layer and the intercepting layer is 30 to 150 .ANG., the undercoat layer, as well as the intercepting layer, is a film formed of silicon oxide represented by SiOx (x=1.8-1.95), and the lubricating layer is formed of a compound selected from the group consisting of polar perfluoropolyethers, non-polar perfluoropolyethers, perfluorocarboxylic acids, phosphazens, perfluoroalkylates and perfluoroacrylate compounds; and a method for producing the recording medium.

    摘要翻译: 具有优异的电磁特性,耐腐蚀性,耐久性,耐磨性和润滑性的磁记录介质具有在非磁性基板上依次形成的底涂层,强磁性金属层,保护层和润滑层,或具有 底涂层,强磁性金属层,截留层,保护层和润滑层,其依次形成在非磁性基板上,其中保护层是折射率为1.90的等离子体聚合的含氢碳膜 以上,接触角小于80度,保护层的膜厚或保护层和截留层的总膜厚为30〜150安培,底涂层以及截留层为 由SiOx(x = 1.8-1.95)表示的由氧化硅形成的膜,并且润滑层由选自p 全氟聚醚,非极性全氟聚醚,全氟羧酸,磷腈,全氟烷基化物和全氟丙烯酸酯化合物; 以及记录介质的制造方法。

    Medium related members
    9.
    发明授权
    Medium related members 失效
    中等相关成员

    公开(公告)号:US4988573A

    公开(公告)日:1991-01-29

    申请号:US379344

    申请日:1989-07-13

    IPC分类号: C23C16/30 G11B23/087

    摘要: A plasma-polymerized film covers a surface of a medium related member which constructs or is disposed in a casing in which a tape or disk-shaped recording medium is receiving for travel or rotating motion. The film contains C, F and at least one element of Si, B, P and N. The total content of F and at least one element of Si, B, P, and N ranges from 5 to 40 atom % of the film, and the atomic ratio of (Si+B+P+N)/F ranges from 2/10 to 5/1.

    摘要翻译: 等离子体聚合膜覆盖介质相关部件的表面,其构造或设置在其中带或盘状记录介质被接收用于行进或旋转运动的壳体中。 该膜含有C,F和Si,B,P和N中的至少一种元素.F和Si,B,P和N中的至少一种元素的总含量为5至40原子% (Si + B + P + N)/ F的原子比为2/10〜5/1。

    Magnetic recording medium
    10.
    发明授权
    Magnetic recording medium 失效
    磁记录介质

    公开(公告)号:US4900622A

    公开(公告)日:1990-02-13

    申请号:US97607

    申请日:1987-09-16

    IPC分类号: C23C14/22 G11B5/66

    摘要: A magnetic recording medium comprising a ferromagnetic metal thin film comprised predominantly of cobalt on a substrate is improved in durability and performance by forming the ferromagnetic metal thin film as a multi-layered structure including at least two layers, one or both of which contain an organic polymer. A plasma-polymerized film may be provided as an interlayer between the layers of the metal thin film or as a topcoat.

    摘要翻译: 包含主要由钴在基片上的强磁性金属薄膜的磁记录介质通过形成强磁性金属薄膜作为包括至少两层的多层结构而提高了耐久性和性能,其中一层或两层含有有机层 聚合物。 等离子体聚合膜可以作为金属薄膜层之间的中间层或顶涂层而提供。