摘要:
Disclosed is an LSI package cooling heat sink having a heat diffusion plate and thin wire fins joined to the heat diffusion plate. The heat sink is mounted on an LSI package and the LSI package is cooled by the flowing of fluid through the thin wire fins. The wire fins are made of a net formed of longitudinal thin wires intersecting with horizontal thin wires. The net is formed to continuous rectangular shapes or a swirl shape and joined to the heat diffusion plate. The net is constituted so that the number of the thin wires vertical to the heat diffusion plate is larger than the number of the thin wires parallel thereto and the net is joined to the heat diffusion plate by brazing, diffusion joint, pressure welding or the like. Since the heat sink is formed of the net composed of the longitudinal thin wires intersecting with the horizontal thin wires, the irregular portions of the adjacent thin wires are formed at a dislocated position and fluid striking against the thin wires produces many turbulent flows so that a high heat transfer performance can be obtained. Further, since the net formed of the thin wires is used, the size of cooling fins can be reduced and noise can be also lowered. Further, it is possible to produce an LSI package cooling heat sink in a short time which heat sink is excellent in mass-production.
摘要:
An electromagnetic flowmeter comprises a ceramic measuring tube through which fluid to be measured flows, a pair of electromagnetic coils disposed on the outer surface of the measuring tube in the central region thereof at diametrically opposite positions and generating a magnetic field in a direction perpendicular to the direction of flow of the fluid, a pair of measuring electrodes fixed to the outer surface of the measuring tube in the central region thereof at diametrically opposite positions and having electrode axes perpendicular to both the direction of flow of the fluid and the direction of the magnetic field, and a pair of metallic shields fixed to the outer surface of the measuring tube in surrounding relation to the measuring electrodes. A pair of the measuring electrodes and a pair of the metallic shields are fixed to the ceramic measuring tube by a reaction product due to an interface reaction with the ceramic measuring tube under heating.
摘要:
An electromagnetic flowmeter for measuring the flow rate of a fluid. The flowmeter has a measuring tube made of ceramics and defining a fluid passage therein for the fluid, electrodes having ends exposed to an interior of the measuring tube through holes which are formed in a wall of the measuring tube, a magnetic field generating device disposed around the electrodes, and a case encasing the measuring tube, the electrodes and the magnetic field generating means. A ratio t/R between a wall thickness t and a mean radius R of the measuring tube is determined such that stress generated in the measuring tube by the fluid in the measuring tube does not exceed the rupture stress of the measuring tube. The measuring tube can have flanges on both axial ends thereof, a radial height of the flange from an outer surface of the measuring tube is not greater than the wall thickness of the tube when the tube is made of Al.sub.2 O.sub.3 and not greater than a value three times as large as the tube wall thickness when the tube is made of Si.sub.3 N.sub.4. The electrodes may be made from Ni or an Ni alloy and are secured to the measuring tube by press-fitting into holes formed in the tube wall or by jointing. The electromagnetic flowmeter thus obtained exhibits high strength and reliability and high degree of gas-tightness in the tube portions around the electrodes.
摘要:
A temperature-adjustment system for a vehicle includes temperature-adjustment passages and obtained by circularly connecting a battery, an inverter, a DC/DC converter, a traveling motor, and a pump that circulates the heat medium that adjusts temperatures by cooling/heating the heat generation elements, are provided. The temperature-adjustment passages and are provided with proportional valves that interrupt the flow of the heat medium and adjust the flow volume of the heat medium, an air flow-in part that introduces air into the battery temperature-adjustment passage, and a heat medium discharge part that discharges the heat medium from the temperature-adjustment passage to outside of the vehicle. The proportional valve, air flow-in part, battery, pump, and heat medium discharge part are preferably arranged in that order, and the proportional valve is closed and an air take-in valve and a heat medium discharge valve are opened.
摘要:
An electric drive system for a vehicle includes: an electric drive unit that electrically drives the vehicle; and a cooling unit that cools the electric drive unit, wherein: the electric drive unit and the cooling unit are mounted at a body frame of the vehicle via an elastic support member, the electric drive unit and the cooling unit being configured as an integrated unit.
摘要:
A lithium ion secondary battery comprises a case; a positive electrode foil having a current collector foil on which a positive electrode material is coated; an negative electrode film having a current collector film on which an negative electrode material is coated; a separator sandwiched between the positive electrode film and the negative electrode film, the films and the separator being arranged in multiple layers to form a group of electrodes enclosed in the case, a positive collector disc plate connected to the positive electrode side of the group of the electrodes, and an negative collector disc plate connected to the negative electrode side of the group of the electrodes. Each of the current collector foils has a non-coated portion extended along one side of the foils, a part or the entire of the non-coated portion being exposed from a side of the separator. At least one of the collector disc plate is welded to the side of the exposed non-coated portion of the group of the electrodes. The periphery of the collector disc plate has an annular portion, which is bent towards the group of electrodes.
摘要:
A plasma is generated by feeding an antenna with radio-frequency electric power generated by a radio-frequency power source, and one end of the antenna is grounded to the earth through a capacitor of variable capacitance. A Faraday shield is electrically isolated from the earth, and the capacitance of the variable capacitor is determined to be such a value that the voltage at the two ends of the antenna may be equal in absolute values and inverted to reduce the partial removal of the wall after the plasma ignition. At the time of igniting the plasma, the capacitance of the capacitor is adjusted to a larger or smaller value than that minimizing the damage of the wall.
摘要:
A plasma processing apparatus includes a vacuum chamber having a structure that surrounds a space where plasma is generated, a sample stage disposed in the chamber on which a sample to be processed is placed and coil antenna providing an electric field to the space. The structure has a non-conductive member surrounding the space and a conductive member covering the non-conductive member, both of which are disposed between the antenna and the space. The conductive member is electrically floated at least when the plasma is generated.
摘要:
There is provided a plasmar processing apparatus capable of positively controlling the temperature distribution of a semiconductor wafer during etching processing in a clear state, wherein an electrode block is provided with independent slits as coolant flow paths on the inner and outer peripheries and, at the same time, between these slits is formed a slit for suppressing heat transfer between the inner and outer peripheries, and owing to this slit for suppressing heat transfer, a uniform temperature in the electrode block is suppressed and thus it is possible to obtain an arbitrary independent temperature in the plane of the electrode block and positive and clear control of temperature distribution patterns can be performed.
摘要:
A plasma is generated by feeding an antenna with radio-frequency electric power generated by a radio-frequency power source, and one end of the antenna is grounded to the earth through a capacitor of variable capacitance. A Faraday shield is electrically isolated from the earth, and the capacitance of the variable capacitor is determined to be such a value that the voltage at the two ends of the antenna may be equal in absolute values and inverted to reduce the partial removal of the wall after the plasma ignition. At the time of igniting the plasma, the capacitance of the capacitor is adjusted to a larger or smaller value than that minimizing the damage of the wall.