公开(公告)号：US07183633B2

公开(公告)日：2007-02-27

申请号：US10469516

申请日：2002-03-01

申请人： Michael J. Daneman ,  Franklin Wall ,  Behrang Behin ,  Murali Chaparala ,  Mark W. Chang ,  Scott Dalton ,  Timothy Beerling ,  Stephen Panyko ,  Meng-Hsiung Kiang ,  Boris Kobrin ,  Chuang-Chia Lin

发明人： Michael J. Daneman ,  Franklin Wall ,  Behrang Behin ,  Murali Chaparala ,  Mark W. Chang ,  Scott Dalton ,  Timothy Beerling ,  Stephen Panyko ,  Meng-Hsiung Kiang ,  Boris Kobrin ,  Chuang-Chia Lin

IPC分类号： H01L23/02 ,  G02B26/08 ,  G02B6/42

CPC分类号： G02B6/3518 ,  G02B6/3546 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3584 ,  G02B26/0841

摘要： An optical cross-connect switch comprises a base (216), a flap (211) and one or more electrically conductive landing pads (222) connected to the flap (211). The flap (211) has a bottom portion that is movably coupled to the base (216) such that the flap (211) is movable with respect to a plane of the base (216) from a first orientation to a second orientation. The one or more landing pads (222) are electrically isolated from the flap (211) and electrically coupled to be equipotential with a landing surface.

摘要翻译： 光学交叉连接开关包括底座（216），翼片（211）和连接到翼片（211）的一个或多个导电着陆垫（222）。 翼片（211）具有可移动地联接到基部（216）的底部部分，使得翼片（211）能够相对于基部（216）的平面从第一方向移动到第二方向。 一个或多个着陆垫（222）与翼片（211）电隔离并且电耦合以与着陆表面等电位。

公开(公告)号：US06887391B1

公开(公告)日：2005-05-03

申请号：US09712420

申请日：2000-11-13

申请人： Michael J. Daneman ,  Behrang Behin

发明人： Michael J. Daneman ,  Behrang Behin

IPC分类号： B81B3/00 ,  B81C1/00 ,  C23F1/00 ,  H01L21/311

CPC分类号： B81C1/00571 ,  B81B2203/0136

摘要： MEMS structures may be formed on a substrate by forming a series trenches filled with etch-stop material in the device layer, followed by an isotropic etch of the device material stopping on the etch-stop material. This approach provides a controlled release method where the exact timing of the isotropic release etch becomes non-critical. Further, using this method, structures with significant topology may be fabricated while keeping the wafer topology to a minimum during processing until the very end of the process. Using the method of this invention, features with large topology may be formed while keeping the wafer topology to a minimum until the very end of the process.

摘要翻译： MEMS结构可以通过在器件层中形成填充有蚀刻停止材料的串联沟槽，然后在蚀刻停止材料上停止的器件材料的各向同性蚀刻，在衬底上形成。 这种方法提供了一种控制释放方法，其中各向同性释放蚀刻的精确定时变得非关键。 此外，使用这种方法，可以制造具有显着拓扑结构的结构，同时在处理期间将晶片拓扑保持最小，直到过程的最后结束。 使用本发明的方法，可以形成具有大拓扑结构的特征，同时将晶片拓扑保持在最小状态，直到处理结束。

公开(公告)号：US06819822B2

公开(公告)日：2004-11-16

申请号：US09751660

申请日：2000-12-28

申请人： Behrang Behin ,  Michael J. Daneman ,  Meng-Hsiung Kiang ,  Kam-Yin Lau ,  Satinderpall Pannu

发明人： Behrang Behin ,  Michael J. Daneman ,  Meng-Hsiung Kiang ,  Kam-Yin Lau ,  Satinderpall Pannu

IPC分类号： G02B635

CPC分类号： G02B6/3556 ,  B81B3/0021 ,  B81B2201/033 ,  B81B2201/045 ,  B81B2203/0181 ,  B81B2203/058 ,  B81B2207/07 ,  B81C1/00214 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/3542 ,  G02B6/3546 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3584 ,  G02B26/0833 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/0866 ,  H02N1/008

摘要： A two-dimensional scanner consists of a rotatable gimbal structure with vertical electrostatic comb-drive actuators and sensors. The scanner's two axes of rotation may be controlled independently by activating two sets of vertical comb-drive actuators. The first set of vertical comb-drive actuator is positioned in between a outer frame of the gimbal structure and the base, and the second set of vertical comb-drive actuator is positioned in between the inner part of the gimbal structure and the outer frame of the gimbal structure. The inner part of the gimbal structure may include a reflective surface, and the device may be used as a mirror. Furthermore, the capacitance of the vertical comb-drives may be measured to monitor the angular position of the mirror, and the capacitive position-monitoring signal may be used to implement closed-loop feedback control of the mirror angle. The two-dimensional scanner may be fabricated in a semiconductor process. Two-dimensional scanners may be used to produce fiber-optic switches.

摘要翻译： 二维扫描器由可旋转的万向架结构与垂直静电梳状驱动致动器和传感器组成。 扫描仪的两个旋转轴可以通过激活两组垂直梳齿驱动执行器来独立控制。 第一组垂直梳齿驱动致动器位于万向架结构的外框架和基座之间，第二组垂直梳齿驱动致动器定位在万向架结构的内部和外框之间 万向架结构。 万向节结构的内部可以包括反射表面，并且该装置可以用作反射镜。 此外，可以测量垂直梳状驱动器的电容以监视反射镜的角度位置，并且可以使用电容位置监视信号来实现镜角的闭环反馈控制。 二维扫描器可以在半导体工艺中制造。 二维扫描仪可用于生产光纤交换机。

公开(公告)号：US06764936B2

公开(公告)日：2004-07-20

申请号：US09912150

申请日：2001-07-23

申请人： Michael J. Daneman ,  Behrang Behin ,  Meng-Hsiung Kiang

发明人： Michael J. Daneman ,  Behrang Behin ,  Meng-Hsiung Kiang

IPC分类号： H01L2144

CPC分类号： G02B26/085 ,  B81B3/0008 ,  B81B3/001 ,  B81B3/0051 ,  G02B26/0833 ,  G02B26/0841

摘要： A device having a landing pad structure on an underside of a device and method for fabricating same. The device is formed from a device layer with at least one landing pad protruding from an underside thereof. The landing pad is attached to the device layer by a plug passing through an opening in the device layer. The device may be attached to the device layer by one or more compliant flexures, which allow the device to rotate in and out of a plane defined by the device layer. The landing pads are fabricated by forming one or more vias through the device layer. An underlying sacrificial layer is then partially etched to form one or more depressions at locations corresponding to locations of the vias in the device layer. The vias and depressions are then filled with a landing pad material to form a structure having one or more landing pads protruding from an underside of the device layer. The sacrificial layer is subsequently removed to release the device. Particular embodiments of both methods may be applied to fabricating microelectromechanical systems (MEMS) especially MEMS mirrors. The various embodiments are well suited to use with silicon on insulator (SOI) substrates.

摘要翻译： 一种在装置的下侧具有着陆垫结构的装置及其制造方法。 该装置由具有从其下侧突出的至少一个着陆板的装置层形成。 着陆垫通过穿过装置层中的开口的塞子附接到装置层。 该装置可以通过一个或多个柔顺的挠曲件附接到装置层，这允许装置在由装置层限定的平面内进出。 通过形成穿过器件层的一个或多个通孔来制造着陆焊盘。 然后将底层牺牲层部分地蚀刻以在对应于器件层中的通孔的位置的位置处形成一个或多个凹陷。 通孔和凹陷然后用着陆垫材料填充以形成具有从装置层的下侧突出的一个或多个着陆垫的结构。 随后去除牺牲层以释放该装置。 两种方法的特定实施例可以应用于制造微机电系统（MEMS），特别是MEMS镜。 各种实施例非常适合于与绝缘体上硅（SOI）衬底一起使用。

公开(公告)号：US07023604B2

公开(公告)日：2006-04-04

申请号：US09812066

申请日：2001-03-17

申请人： Behrang Behin ,  Robert Conant ,  Michael J. Daneman ,  David Horsley ,  Meng-Hsiung Kiang ,  David Lerner ,  Satinderpall Pannu

发明人： Behrang Behin ,  Robert Conant ,  Michael J. Daneman ,  David Horsley ,  Meng-Hsiung Kiang ,  David Lerner ,  Satinderpall Pannu

IPC分类号： C02B26/00 ,  C02B26/08 ,  C02B6/26

CPC分类号： G02B6/3556 ,  G02B6/3512 ,  G02B6/3588

摘要： A beam steering module comprised of a mirror stack array in close proximity to a collimator array controllably steers photons along two axis and in a direction substantially less than 90 degrees to the collimator orientation. Several configurations of the module are described using single and double axis mirror rotation and relay optics. Optical telecommunications switches are shown using modules coupled to each other along flat and curved surfaces, with and without use of fold mirror and enabling a plurality of configuration options including photodetector optical power monitoring schemes that require no external power taps.

摘要翻译： 光束转向模块包括靠近准直器阵列的反射镜堆叠阵列，其可控制地沿着两个轴线并且沿与准直器取向基本上小于90度的方向导引光子。 使用单轴和双轴镜旋转和中继光学器件描述了该模块的几种配置。 光通信开关被示出为使用具有和不使用折叠镜的平面和弯曲表面彼此耦合的模块，并且实现多个配置选项，包括不需要外部电源抽头的光电检测器光功率监控方案。

公开(公告)号：US06888979B2

公开(公告)日：2005-05-03

申请号：US09834744

申请日：2001-04-12

申请人： Behrang Behin ,  Michael J. Daneman ,  Chuang-Chia Lin ,  Boris Kobrin ,  Murali Chaparala ,  Gary Zalewski

发明人： Behrang Behin ,  Michael J. Daneman ,  Chuang-Chia Lin ,  Boris Kobrin ,  Murali Chaparala ,  Gary Zalewski

IPC分类号： B81B3/00 ,  B81C99/00 ,  G02B6/12 ,  G02B6/32 ,  G02B6/35 ,  G02B26/08 ,  G02B6/26

CPC分类号： G02B26/0841 ,  B81B3/0008 ,  B81B2201/045 ,  B81B2203/0181 ,  B81B2203/058 ,  B81C1/00214 ,  G02B6/32 ,  G02B6/3514 ,  G02B6/3518 ,  G02B6/3548 ,  G02B6/357 ,  G02B6/358 ,  G02B6/3584 ,  G02B2006/12104

摘要： A microelectromechanical (MEMS) apparatus has a base and a flap with a portion coupled to the base so that the flap may move out of the plane of the base between first and second position. The base may have a cavity with largely vertical sidewalls that contact a portion of the flap when the flap is in the second position Electrodes may be placed on the vertical sidewalls and electrically isolated from the base to provide electrostatic clamping of the flap to the sidewall. The base may be made from a substrate portion of a silicon-on-insulator (SOI) wafer and the flap defined from a device layer of the SOI wafer. The flap may be connected to the base by one or more flexures such as torsional beams. An array of one or more of such structures may be used to form an optical switch.

摘要翻译： 微机电（MEMS）装置具有底座和翼片，其中一部分联接到基座，使得翼片可在第一和第二位置之间移动离开基座的平面。 底座可以具有一个具有很大垂直侧壁的空腔，当翼片处于第二位置时，电极可以被放置在垂直侧壁上并与基座电隔离以提供瓣片向侧壁的静电夹持。 基底可以由绝缘体上硅（SOI）晶片的衬底部分和从SOI晶片的器件层限定的瓣形成。 翼片可以通过一个或多个挠曲件（例如扭转梁）连接到基座。 可以使用一个或多个这样的结构的阵列来形成光学开关。

公开(公告)号：US06528887B2

公开(公告)日：2003-03-04

申请号：US09798129

申请日：2001-03-01

申请人： Michael J. Daneman ,  Behrang Behin

发明人： Michael J. Daneman ,  Behrang Behin

IPC分类号： H01L2352

CPC分类号： G02B26/085 ,  B81B3/0008 ,  B81B3/001 ,  B81B3/0051 ,  G02B26/0833 ,  G02B26/0841

摘要： A MEMS device with a flap having one or more conductive landing areas electrically isolated from the flap and electrically coupled to a landing surface to reduce stiction. The device may be formed from a device layer of a silicon-on-insulator (SOI) substrate with conductive landing pads fabricated by forming one or more vias through the device layer, an underlying sacrificial layer etched to form one or more depressions at locations corresponding the vias and filled with a conductive landing pad material to form a structure having one or more electrically isolated landing pad areas on an underside of the device layer. A method for operating a MEMs device in an equipotential stiction reduction mode is also provided.

公开(公告)号：US06330102B1

公开(公告)日：2001-12-11

申请号：US09536164

申请日：2000-03-25

申请人： Michael J. Daneman ,  Behrang Behin ,  Satinderpall Pannu

发明人： Michael J. Daneman ,  Behrang Behin ,  Satinderpall Pannu

IPC分类号： G02B2600

CPC分类号： G02B6/3556 ,  B81B3/0021 ,  B81B2201/033 ,  B81B2201/045 ,  B81B2203/0181 ,  B81B2203/058 ,  B81B2207/07 ,  B81C1/00214 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/3542 ,  G02B6/3546 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3584 ,  G02B26/0833 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/0866 ,  H02N1/008

摘要： A beam steering module and switching system. The steering module is composed of a N×M array of single axis mirrors able to rotate about a particular axis (X-axis), a second N×M array of single axis mirrors able to rotate about an axis orthogonal to that of the first N×M array of mirrors (Y-axis), and a relay lens designed to image the first mirror array onto the second mirror array such that the beam angle may be controlled in both the X and Y-axis by adjusting the angle of the appropriate mirrors in the X and Y mirror arrays. Two steering modules may be combined to form a switching system. With two such steering modules, it is possible to completely determine, at the plane of the output fiber array, the position and angle of an optical beam emerging from any of the input fibers.

摘要翻译： 光束转向模块和开关系统。 转向模块由能够围绕特定轴线（X轴）旋转的单轴镜的N×M阵列组成，能够围绕与第一N×M阵列阵列的轴正交的轴线旋转的单轴镜的第二N×M阵列 （Y轴）和设计成将第一反射镜阵列成像到第二反射镜阵列上的中继透镜，使得可以通过调整X中的适当反射镜的角度来控制X和Y轴两者的光束角度，以及 Y镜阵列。 可以组合两个转向模块以形成切换系统。 使用两个这样的转向模块，可以在输出光纤阵列的平面处完全确定从任何输入光纤出射的光束的位置和角度。

公开(公告)号：US06788520B1

公开(公告)日：2004-09-07

申请号：US09724948

申请日：2000-11-28

申请人： Behrang Behin ,  Michael J. Daneman ,  Meng-Hsiung Kiang ,  Kam-Yin Lau ,  Timothy E. Beerling

发明人： Behrang Behin ,  Michael J. Daneman ,  Meng-Hsiung Kiang ,  Kam-Yin Lau ,  Timothy E. Beerling

IPC分类号： G02B2608

CPC分类号： G02B6/358 ,  G02B6/3512 ,  G02B6/3546 ,  G02B6/357 ,  G02B6/359

摘要： Disclosed is an apparatus and method for detecting whether rotatable MEMS elements are in the “on” or “off” position. Embodiments of the invention have application in devices switches that employ mirrors that move between an “on” or “off” position, wherein they reflect light from an input fiber into an output fiber in the “on” position, and allow the light to pass in the “off” position. Electrodes are positioned in the device such that the mirrors are close to, and therefor capacitively coupled to, a different electrode depending on whether they are in the “on” or “off” position. This invention is especially useful for switches that already employ electrodes for electrostatic clamping of mirrors in one or more positions, since those same electrodes can be used both to electrostatically clamp the mirrors and to sense their position. The method described in this invention comprises sensing of the capacitance between the mirrors and the one or more electrodes used to clamp the mirrors in its one or more position in order to detect which of the positions the mirrors are clamped in. Furthermore, the magnitude of the capacitances can be monitored to detect improper clamping.

摘要翻译： 公开了一种用于检测可旋转MEMS元件是处于“开”还是“关”位置的装置和方法。 本发明的实施例可应用于使用在“开”或“关”位置之间移动的反射镜的装置开关中，其中它们将来自输入光纤的光反射到处于“开”位置的输出光纤，并允许光通过 在“关”位置。 电极被定位在设备中，使得反射镜接近并因此电容耦合到不同的电极，这取决于它们是处于“开”还是“关”位置。 本发明对于已经使用用于在一个或多个位置中的反射镜的静电夹持的电极的开关特别有用，因为这些相同的电极可以用于静电夹紧反射镜并感测其位置。 本发明描述的方法包括检测反射镜之间的电容和用于将反射镜夹持在其一个或多个位置中的一个或多个电极，以便检测反射镜夹在哪一个位置。此外， 可以监控电容以检测不正确的夹紧。

公开(公告)号：US06586841B1

公开(公告)日：2003-07-01

申请号：US09546432

申请日：2000-04-10

申请人： Michael J. Daneman ,  Behrang Behin ,  Meng-Hsiung Kiang

发明人： Michael J. Daneman ,  Behrang Behin ,  Meng-Hsiung Kiang

IPC分类号： H01L2940

CPC分类号： G02B26/085 ,  B81B3/0008 ,  B81B3/001 ,  B81B3/0051 ,  G02B26/0833 ,  G02B26/0841

摘要： A device having a landing pad structure on an underside of a device and method for fabricating same. The device is formed from a device layer with at least one landing pad protruding from an underside thereof. The landing pad is attached to the device layer by a plug passing through an opening in the device layer. The device may be attached to the device layer by one or more compliant flexures, which allow the device to rotate in and out of a plane defined by the device layer. The landing pads are fabricated by forming one or more vias through the device layer. An underlying sacrificial layer is then partially etched to form one or more depressions at locations corresponding to locations of the vias in the device layer. The vias and depressions are then filled with a landing pad material to form a structure having one or more landing pads protruding from an underside of the device layer. The sacrificial layer is subsequently removed to release the device. Particular embodiments of both methods may be applied to fabricating microelectromechanical systems (MEMS) especially MEMS mirrors. The various embodiments are well suited to use with silicon on insulator (SOI) substrates.

摘要翻译： 一种在装置的下侧具有着陆垫结构的装置及其制造方法。 该装置由具有从其下侧突出的至少一个着陆板的装置层形成。 着陆垫通过穿过装置层中的开口的塞子附接到装置层。 该装置可以通过一个或多个柔顺的挠曲件附接到装置层，这允许装置在由装置层限定的平面内进出。 通过形成穿过器件层的一个或多个通孔来制造着陆焊盘。 然后将底层牺牲层部分地蚀刻以在对应于器件层中的通孔的位置的位置处形成一个或多个凹陷。 通孔和凹陷然后用着陆垫材料填充以形成具有从装置层的下侧突出的一个或多个着陆垫的结构。 随后去除牺牲层以释放该装置。 两种方法的特定实施例可以应用于制造微机电系统（MEMS），特别是MEMS镜。 各种实施例非常适合于与绝缘体上硅（SOI）衬底一起使用。