摘要:
A process for planarizing, polishing, or providing other modification of a wafer surface or other workpiece. The process includes using an abrasive article having a textured abrasive coating affixed to a backing. The abrasive article includes a monitoring element, such as a window, to allow transmission of radiation therethrough. The radiation level is monitored throughout the planarization process to determine the approach of the desired endpoint. The window in the abrasive coating can be an area devoid of abrasive coating or having minimal or a thinned abrasive coating.
摘要:
A process for planarizing, polishing, or providing other modification of a wafer surface or other workpiece. The process includes using an abrasive article having a textured abrasive coating affixed to a backing. The abrasive article includes a monitoring element, such as a window, to allow transmission of radiation therethrough. The radiation level is monitored throughout the planarization process to determine the approach of the desired endpoint. The window in the abrasive coating can be an area devoid of abrasive coating or having minimal or a thinned abrasive coating.
摘要:
An apparatus and method for abrasively processing an article involves the use of an abrasive product provided with a machine discernable pattern representative of information of varying types. The pattern is read while the abrasive product moves relative to the article, and is used to control the movement of the abrasive product relative to the article. The pattern may include one or more of a machine discernable electrical characteristic, optical characteristic, topographic characteristic or magnetic characteristic. Reading the pattern may involve one or more of electrically, optically, mechanically or magnetically reading the machine discernable pattern provided on the abrasive product. The pattern may include one or more of indicia, protrusions, depressions, holes, voids, color or pigment variations, bar codes, magnetic transitions or periodic markings. The pattern may include one or more of indexing information, servo information, alignment information or abrasive product identification information. Closed-loop servo control of abrasive product movement may be effected using the servo/indexing pattern information. The abrasive product may constitute a movable pad and an abrasive slurry. The pad may be moved in a controlled manner relative to the article such that the pad and the abrasive slurry abrasively contact the article. The pattern provided on the pad may be read subsequent to a cleaning operation. An information system may be used to store various types of data derived, in part, from use of the abrasive product pattern information. The stored data may be used for a variety of identification, tracking, accounting, inventory, handling, and statistical purposes.
摘要:
A device provides liquid material for application to a surface. The device comprises in order at least a carrying substrate, frangible microcapsules containing the liguid to be applied, a raised area around the microcapsules of a structurally rigid material, and a flexible, liquid permeable material overlaying the microcapsules. Pressure on the liquid permeable material ruptures the microcapsules and enables the liquid to flow through the permeable material.
摘要:
In the manufacture of magnetic recording media, coatings are applied from water-borne dispersions of inorganic particles, a polymer containing functional groups and an agent for crosslinking the polymer, the crosslinking agent being a polyfunctional aziridine such as ##STR1##
摘要:
Writing instruments are provided comprising a) a friction transferable binder comprising a colorant, and b) frangible microcapsules containing a liquid solvent. The writing instrument contains sufficient microcapsules to provide a Coloration Uniformity Percentage (defined herein) of at least about 25%.
摘要:
A fragrance-delivery composition is provided having cake-forming components and microcapsules containing fragrance oil. The composition is a coherent cake, and has a VOC content less than 250 grams of per liter less water, fragrance oil and exempt solvents.
摘要:
Disclosed is a device for selectively indicating strain comprising a layer of polymeric binder and, distributed in or adjacent to the binder layer, microcapsules containing an indicating means, whereby when the binder is stiff, minor flexure of the device causes rupture of the microcapsules and releases the indicating means. This device has a non-stiff state such that a given strain applied to the binder layer in the non-stiff state will not release the indicating means, and a stiff state such that the same given strain applied to the binder layer in the stiff state will release the indicating means. Also disclosed is a method for determining exposure of an article to a given low temperature.
摘要:
The disclosure relates to abrasive articles useful in chemical-mechanical polishing (CMP), the articles including a substrate with opposite major surfaces, an abrasive material overlaying at least a portion of at least one of the major surfaces, and at least one of a radio frequency identification (RFID) tag, a RFID tag reader, or a sensor for providing CMP information to a transmitter positioned near the substrate, the transmitter positioned near the substrate and adapted to wirelessly receive CMP information and wirelessly transmit the CMP information to a remote receiver. The disclosure also relates to a CMP pad conditioner for wirelessly communicating CMP information to a remote receiver, a CMP process monitoring system for wirelessly communicating CMP information to a remote receiver, and a method for conditioning a CMP pad using a CMP process monitoring system for wireless communicating CMP information to a remote receiver.
摘要:
Internally replenished gas-containing enclosures are described. Such enclosures include a replenishing gas source internal to the enclosure, wherein the gas source comprises a gas contained within a permeable membrane. Exemplary gas sources include a plurality of bubbles and pouches. Materials useful for the permeable membrane include glass, glass ceramics, metals, metal oxides, polymeric films, as well as combinations of such materials. The gas source may be located within the enclosure or it may be incorporated into a resin (e.g., an adhesive or a gasket) positioned between sections of an enclosure. Methods of internally replenishing an enclosure are also described.