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公开(公告)号：US08248614B2
公开(公告)日：2012-08-21
申请号：US12405063
申请日：2009-03-16
IPC分类号： G01B9/02
CPC分类号： G01N21/45 , G01B9/02007 , G01B9/02012 , G01B9/02024 , G01B9/02027 , G01B9/02069 , G01B9/021 , G01B11/0675 , G01N21/453 , G01N21/6458 , G01N2021/1787
摘要： An optical system performs imaging in a transmissive and reflective mode. The system includes an optical interferometer that generates interference phenomena between optical waves to measure multiple distances, thicknesses, and indices of refraction of a sample. Measurements are made through a galvanometer that scans a pre-programmed angular arc. An excitation-emission device allows an electromagnetic excitation and emission to pass through an objective in optical communication with the sample. An electromagnetic detector receives the output of the optical interferometer and the excitation-emission device to render a magnified three dimensional image of the sample.
摘要翻译： 光学系统以透射和反射模式执行成像。 该系统包括光学干涉仪，其产生光波之间的干涉现象，以测量样品的多个距离，厚度和折射率。 通过扫描预编程角弧的电流计进行测量。 激发发射装置允许电磁激发和发射通过与样品光学通信的物镜。 电磁检测器接收光干涉仪和激发发射装置的输出，以呈现样品的放大三维图像。
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公开(公告)号：US20100231895A1
公开(公告)日：2010-09-16
申请号：US12405063
申请日：2009-03-16
IPC分类号： G01N21/00
CPC分类号： G01N21/45 , G01B9/02007 , G01B9/02012 , G01B9/02024 , G01B9/02027 , G01B9/02069 , G01B9/021 , G01B11/0675 , G01N21/453 , G01N21/6458 , G01N2021/1787
摘要： An optical system performs imaging in a transmissive and reflective mode. The system includes an optical interferometer that generates interference phenomena between optical waves to measure multiple distances, thicknesses, and indices of refraction of a sample. Measurements are made through a galvanometer that scans a pre-programmed angular arc. An excitation-emission device allows an electromagnetic excitation and emission to pass through an objective in optical communication with the sample. An electromagnetic detector receives the output of the optical interferometer and the excitation-emission device to render a magnified three dimensional image of the sample.
摘要翻译： 光学系统以透射和反射模式执行成像。 该系统包括光学干涉仪，其产生光波之间的干涉现象，以测量样品的多个距离，厚度和折射率。 通过扫描预编程角弧的电流计进行测量。 激发发射装置允许电磁激发和发射通过与样品光学通信的物镜。 电磁检测器接收光干涉仪和激发发射装置的输出，以呈现样品的放大三维图像。
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公开(公告)号：US08264694B2
公开(公告)日：2012-09-11
申请号：US12405089
申请日：2009-03-16
IPC分类号： G01B11/02
CPC分类号： G01B9/021 , G01B11/0675 , G01B11/2441 , G01N21/4133 , G02B21/0056
摘要： An optical system includes an optical interferometer that generates interference phenomena between optical waves to measure multiple distances, thicknesses, and indices of refraction of a sample. An excitation-emission device allows an electromagnetic excitation and emission to pass through an objective in optical communication with the sample. An electromagnetic detector receives the output of the optical interferometer and the excitation-emission device to render a magnified image of the sample. A digital delay generator synchronizes the optical interferometer and excitation-emission device to operate in substantially unison to generate a noninvasive depth of field of the portion of the sample that corrects a plurality of optical aberrations in real-time.
摘要翻译： 光学系统包括光学干涉仪，其产生光波之间的干涉现象，以测量样品的多个距离，厚度和折射率。 激发发射装置允许电磁激发和发射通过与样品光学通信的物镜。 电磁检测器接收光干涉仪和激发发射装置的输出，以呈现样品的放大图像。 数字延迟发生器使光学干涉仪和激发发射装置同步，以基本上一致地操作，以便实时地产生校正多个光学像差的样本部分的非侵入式景深。
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公开(公告)号：US20100231918A1
公开(公告)日：2010-09-16
申请号：US12381758
申请日：2009-03-16
CPC分类号： G01B9/021 , G01B11/0675 , G01B11/2441 , G03H1/0443 , G03H1/0866 , G03H2001/0038 , G03H2001/0456 , G03H2001/0875 , G03H2222/13
摘要： An optical system includes more than two optical interferometers that generate interference phenomena between optical waves to measure a plurality of distances, a plurality of thicknesses, and a plurality of indices of refraction of a sample. An electromagnetic detector receives an output of the optical interferometers to render a magnified image of at least a portion of the sample. A controller reduces or eliminates undesired optical signals through a hierarchical phase unwrapping of the output of the electromagnetic detector.
摘要翻译： 光学系统包括两个以上的光学干涉仪，其在光波之间产生干涉现象，以测量样品的多个距离，多个厚度和多个折射率。 电磁检测器接收光学干涉仪的输出，以呈现样品的至少一部分的放大图像。 控制器通过电磁检测器的输出的分层相位展开来减少或消除不期望的光信号。
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公开(公告)号：US07978336B2
公开(公告)日：2011-07-12
申请号：US12381758
申请日：2009-03-16
CPC分类号： G01B9/021 , G01B11/0675 , G01B11/2441 , G03H1/0443 , G03H1/0866 , G03H2001/0038 , G03H2001/0456 , G03H2001/0875 , G03H2222/13
摘要： An optical system includes more than two optical interferometers that generate interference phenomena between optical waves to measure a plurality of distances, a plurality of thicknesses, and a plurality of indices of refraction of a sample. An electromagnetic detector receives an output of the optical interferometers to render a magnified image of at least a portion of the sample. A controller reduces or eliminates undesired optical signals through a hierarchical phase unwrapping of the output of the electromagnetic detector.
摘要翻译： 光学系统包括两个以上的光学干涉仪，其在光波之间产生干涉现象，以测量样品的多个距离，多个厚度和多个折射率。 电磁检测器接收光学干涉仪的输出，以呈现样品的至少一部分的放大图像。 控制器通过电磁检测器的输出的分层相位展开来减少或消除不期望的光信号。
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公开(公告)号：US20100231896A1
公开(公告)日：2010-09-16
申请号：US12405089
申请日：2009-03-16
CPC分类号： G01B9/021 , G01B11/0675 , G01B11/2441 , G01N21/4133 , G02B21/0056
摘要： An optical system includes an optical interferometer that generates interference phenomena between optical waves to measure multiple distances, thicknesses, and indices of refraction of a sample. An excitation-emission device allows an electromagnetic excitation and emission to pass through an objective in optical communication with the sample. An electromagnetic detector receives the output of the optical interferometer and the excitation-emission device to render a magnified image of the sample. A digital delay generator synchronizes the optical interferometer and excitation-emission device to operate in substantially unison to generate a noninvasive depth of field of the portion of the sample that corrects a plurality of optical aberrations in real-time.
摘要翻译： 光学系统包括光学干涉仪，其产生光波之间的干涉现象，以测量样品的多个距离，厚度和折射率。 激发发射装置允许电磁激发和发射通过与样品光学通信的物镜。 电磁检测器接收光干涉仪和激发发射装置的输出，以呈现样品的放大图像。 数字延迟发生器使光学干涉仪和激发发射装置同步，以基本上一致地操作，以便实时地产生校正多个光学像差的样本部分的非侵入式景深。
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7.发明授权Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure 失效多层材料结构的多目标物理气相沉积的装置和方法公开(公告)号：US06905578B1
公开(公告)日：2005-06-14
申请号：US09067143
申请日：1998-04-27
申请人： Mehrdad M. Moslehi , Cecil J. Davis , Christopher J. Mann , Dwain R. Jakubik , Ajit P. Paranjpe
发明人： Mehrdad M. Moslehi , Cecil J. Davis , Christopher J. Mann , Dwain R. Jakubik , Ajit P. Paranjpe
CPC分类号： C23C14/568
摘要： An apparatus and method for depositing plural layers of materials on a substrate within a single vacuum chamber allows high-throughput deposition of structures such as these for GMR and MRAM application. An indexing mechanism aligns a substrate with each of plural targets according to the sequence of the layers in the structure. Each target deposits material using a static physical-vapor deposition technique. A shutter can be interposed between a target and a substrate to block the deposition process for improved deposition control. The shutter can also preclean a target or the substrate and can also be used for mechanical chopping of the deposition process. In alternative embodiments, plural substrates may be aligned sequentially with plural targets to allow simultaneous deposition of plural structures within the single vacuum chamber. A monitoring and control device can be wed to optimize equipment state, process state, and wafer state parameters by sensing each respective state during or after the deposition process.
摘要翻译： 用于在单个真空室内的衬底上沉积多层材料的装置和方法允许诸如这些结构的高通量沉积用于GMR和MRAM应用。 分度机构根据结构中的层序列将衬底与多个靶中的每一个对准。 每个目标使用静态物理气相沉积技术沉积材料。 可以在目标和基板之间插入快门以阻止沉积工艺以改善沉积控制。 快门还可以预清洁目标物或基底，并且还可用于沉积过程的机械切割。 在替代实施例中，多个基板可以与多个靶顺序对准，以允许在单个真空室内同时沉积多个结构。 可以通过在沉积过程中或之后感测每个相应的状态来优化设备状态，过程状态和晶片状态参数的监控和控制设备。
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公开(公告)号：US09027797B2
公开(公告)日：2015-05-12
申请号：US13804821
申请日：2013-03-14
申请人： Christopher J. Mann , Shelby Jay Buell , Touby Khamphilapanyo , Robert L. Quinlan , Richard E. Corney
发明人： Christopher J. Mann , Shelby Jay Buell , Touby Khamphilapanyo , Robert L. Quinlan , Richard E. Corney
CPC分类号： A47K5/1211 , A47K5/12 , A47K5/1205 , A47K5/1207 , A47K5/1217 , B05B11/00 , B65D47/40
摘要： A shield for a fluid dispenser includes a mount structure and a fluid-deflecting structure defining an interior flow passage. The mount structure is configured to be attached to an actuator of a fluid dispenser. Fluid dispensers and fluid dispenser systems are also disclosed.
摘要翻译： 用于流体分配器的屏蔽件包括安装结构和限定内部流动通道的流体偏转结构。 安装结构构造成附接到流体分配器的致动器。 还公开了流体分配器和流体分配器系统。
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公开(公告)号：US20130015209A1
公开(公告)日：2013-01-17
申请号：US13181083
申请日：2011-07-12
CPC分类号： B05B11/303 , A47K5/1208 , B05B11/0027 , B05B11/0064 , B05B11/0072 , B05B11/3094
摘要： A shut-off system for a dispenser includes a pinch member that moves relative to a guide and which is normally biased against a flexible outlet tube that is disposed therebetween. The flexible outlet tube that carries material, such as soap, supplied from a pump to an outlet nozzle. The pump and the pinch member are in operative engagement with an actuator, such that when the actuator is not engaged, the pinch member closes the outlet tube to prevent residual material retained in the outlet tube from flowing or drooling out of the outlet nozzle. Correspondingly, when the actuator is engaged, the pump is compressed, and the pinch member is moved away from the outlet tube, allowing the material to be pumped through the outlet tube and dispensed from the outlet nozzle.
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公开(公告)号：US20140261799A1
公开(公告)日：2014-09-18
申请号：US13830565
申请日：2013-03-14
IPC分类号： B67D3/00
CPC分类号： B05B11/0062 , A47K5/1204 , B05B7/0037 , B05B11/0059 , B05B11/007 , B05B11/3002 , B05B11/3088 , Y10T137/85978
摘要： Exemplary simplified outlet valves, pumps and refill units are disclosed herein. An exemplary inverted refill unit for a dispenser includes a container and a pump secured to the bottom of container. The pump has a liquid inlet valve and a liquid outlet having an annular housing. One or more liquid outlet passages are located within the annular housing. A valve seat is located proximate the liquid outlet passages. A liquid outlet valve is also included. The liquid outlet valve includes an annular body and a resilient disc located on the interior of the annular body. The resilient disc has an opening in the center and seals against the valve seat to seal the one or more liquid outlet passages in a normal state. The resilient disc deflects from the valve seat under pressure so that liquid flows through the liquid outlet passages and through the center of the resilient disc.
摘要翻译： 本文公开了示例性的简化出口阀，泵和补充单元。 用于分配器的示例性倒置补充单元包括容器和固定到容器底部的泵。 泵具有液体入口阀和具有环形壳体的液体出口。 一个或多个液体出口通道位于环形壳体内。 阀座靠近液体出口通道定位。 还包括液体出口阀。 液体出口阀包括环形体和位于环形体内部的弹性盘。 弹性盘在中心具有开口并且密封抵靠阀座以在正常状态下密封一个或多个液体出口通道。 弹性盘在压力下从阀座偏转，使得液体流过液体出口通道并穿过弹性盘的中心。
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