公开(公告)号：US06532555B1

公开(公告)日：2003-03-11

申请号：US09430475

申请日：1999-10-29

申请人： Michael Lee Miller ,  Qingsu Wang ,  Elfido Coss, Jr.

发明人： Michael Lee Miller ,  Qingsu Wang ,  Elfido Coss, Jr.

IPC分类号： G06F1100

CPC分类号： G05B19/4184 ,  G05B2219/37207 ,  G05B2219/45031 ,  Y02P90/14

摘要： A method and apparatus for providing near real-time fault detection in a manufacturing process is provided. The apparatus includes a processing tool adapted to manufacture a processing piece and an interface, coupled to the processing tool, for receiving operational data from the processing tool related to the manufacture of the processing piece, and product data defining characteristics of the processing piece. In one embodiment, the processing tool is in the form of semiconductor fabrication equipment and the processing piece is a silicon wafer. A fault detection unit is provided to determine if a fault condition exists with the processing tool from the operational data or with the processing piece from the product data. An Advanced Process Control (APC) framework is further provided to receive the operational and product data from the first interface, and to send the data to the fault detection unit.

摘要翻译： 提供了一种用于在制造过程中提供近实时故障检测的方法和装置。 该装置包括适于制造加工件和接口的加工工具，该处理件和接口耦合到处理工具，用于接收来自与加工件的制造相关的加工工具的操作数据，以及定义加工件特征的产品数据。 在一个实施例中，处理工具是半导体制造设备的形式，并且处理件是硅晶片。 提供故障检测单元，以从操作数据或来自产品数据的加工件确定处理工具是否存在故障状况。 进一步提供高级过程控制（APC）框架以从第一接口接收操作和产品数据，并将数据发送到故障检测单元。

公开(公告)号：US06968303B1

公开(公告)日：2005-11-22

申请号：US09548443

申请日：2000-04-13

申请人： Qingsu Wang ,  Elfido Coss, Jr.

发明人： Qingsu Wang ,  Elfido Coss, Jr.

IPC分类号： G06F17/50 ,  H01L21/28 ,  H01L21/336

CPC分类号： G06F17/5068 ,  H01L21/28035 ,  H01L29/6659

摘要： A method is provided for configuring a final data set to use for modeling a manufacturing process, the method including requesting a real-time data set from a real-time database, requesting an historical data set from an historical database, and defining a required format for the final data set. The method also includes combining the real-time data set from the real-time database with the historical data set from the historical database using the required format for the final data set.

摘要翻译： 提供了一种用于配置用于建模制造过程的最终数据集的方法，所述方法包括从实时数据库请求实时数据集，从历史数据库请求历史数据集，以及定义所需格式 为最终的数据集。 该方法还包括使用最终数据集的所需格式将来自实时数据库的实时数据集与来自历史数据库的历史数据集相结合。

公开(公告)号：US06725402B1

公开(公告)日：2004-04-20

申请号：US09629073

申请日：2000-07-31

申请人： Elfido Coss, Jr. ,  Qingsu Wang ,  Terrence J. Riley

发明人： Elfido Coss, Jr. ,  Qingsu Wang ,  Terrence J. Riley

IPC分类号： G06F1100

CPC分类号： G05B19/4184 ,  G05B19/41875 ,  G05B2219/32209 ,  G05B2219/32221 ,  Y02P90/02 ,  Y02P90/14 ,  Y02P90/22

摘要： A method and apparatus for providing fault detection in an Advanced Process Control (APC) framework. A first interface receives operational state data of a processing tool related to the manufacture of a processing piece. The state data is sent from the first interface to a fault detection unit. A fault detection unit determines if a fault condition exists with the processing tool based upon the state data. A predetermined action is performed on the processing tool in response to the presence of a fault condition. In accordance with one embodiment, the predetermined action is to shutdown the processing tool so as to prevent further production of faulty wafers.

摘要翻译： 一种用于在高级过程控制（APC）框架中提供故障检测的方法和装置。 第一接口接收与制造加工件相关的加工工具的操作状态数据。 状态数据从第一接口发送到故障检测单元。 故障检测单元基于状态数据确定处理工具是否存在故障状况。 响应于故障状况的存在，对处理工具执行预定的动作。 根据一个实施例，预定的动作是关闭处理工具，以防止进一步生产故障晶片。

公开(公告)号：US06556882B1

公开(公告)日：2003-04-29

申请号：US09401089

申请日：1999-09-22

申请人： Michael R. Conboy ,  Elfido Coss, Jr. ,  Qingsu Wang

发明人： Michael R. Conboy ,  Elfido Coss, Jr. ,  Qingsu Wang

IPC分类号： G06F1900

CPC分类号： H01L22/20

摘要： A method and apparatus for performing manufacturing system analysis upon a manufacturing network. Real-time production data is collected. The real-time production data is stored in a static file database. A real-time data flow is emulated using said real-time production data from said static file database. A reactive function analysis is performed.

摘要翻译： 一种用于在制造网络上执行制造系统分析的方法和装置。 收集实时生产数据。 实时生产数据存储在静态文件数据库中。 使用来自所述静态文件数据库的所述实时生产数据来模拟实时数据流。 进行反应性功能分析。

公开(公告)号：US06546508B1

公开(公告)日：2003-04-08

申请号：US09430476

申请日：1999-10-29

申请人： Thomas Sonderman ,  Elfido Coss, Jr. ,  Qingsu Wang

发明人： Thomas Sonderman ,  Elfido Coss, Jr. ,  Qingsu Wang

IPC分类号： G06F1100

CPC分类号： G05B19/4184 ,  G05B2219/31357 ,  G05B2219/45031 ,  Y02P90/14

摘要： A method and apparatus for providing fault detection in an Advanced Process Control (APC) framework. A first interface receives operational state data of a processing tool related to the manufacture of a processing piece. The state data is sent from the first interface to a fault detection unit. A fault detection unit determines if a fault condition exists with the processing tool based upon the state data. A predetermined action is performed on the processing tool in response to the presence of a fault condition. In accordance with one embodiment, the predetermined action is to shutdown the processing tool so as to prevent further production of faulty wafers.

摘要翻译： 一种用于在高级过程控制（APC）框架中提供故障检测的方法和装置。 第一接口接收与制造加工件相关的加工工具的操作状态数据。 状态数据从第一接口发送到故障检测单元。 故障检测单元基于状态数据确定处理工具是否存在故障状况。 响应于故障状况的存在，对处理工具执行预定的动作。 根据一个实施例，预定的动作是关闭处理工具，以防止进一步生产故障晶片。

公开(公告)号：US06697691B1

公开(公告)日：2004-02-24

申请号：US09476895

申请日：2000-01-03

申请人： Michael L. Miller ,  Terrence J. Riley ,  Qingsu Wang

发明人： Michael L. Miller ,  Terrence J. Riley ,  Qingsu Wang

IPC分类号： G06F1900

CPC分类号： H01L22/20

摘要： The present invention provides for a method and an apparatus for fault model analysis in manufacturing tools. A sequence of semiconductor devices is processed through a manufacturing process. Production data resulting from the processing of the semiconductor devices is acquired. A fault model analysis is performed using the acquired production data.

摘要翻译： 本发明提供了制造工具中的故障模型分析的方法和装置。 通过制造工艺处理一系列半导体器件。 获取由半导体器件的处理产生的生产数据。 使用获取的生产数据进行故障模型分析。

公开(公告)号：US06556959B1

公开(公告)日：2003-04-29

申请号：US09351716

申请日：1999-07-12

申请人： Michael L. Miller ,  Qingsu Wang

发明人： Michael L. Miller ,  Qingsu Wang

IPC分类号： G06F1900

CPC分类号： H01L21/67276 ,  G05B19/41885 ,  G05B2219/45031 ,  H01L22/20 ,  Y02P90/14 ,  Y02P90/26

摘要： The present invention provides a method and apparatus for performing automated development and updating of a manufacturing model for a manufacturing process. An initial manufacturing model is developed. Tolerances of the manufacturing model are expanded using additional production data. The manufacturing model is then re-developed using the expanded tolerances.

摘要翻译： 本发明提供一种用于执行制造过程的制造模型的自动开发和更新的方法和装置。 开发了初始制造模型。 使用额外的生产数据扩展制造模型的公差。 然后使用扩大的公差重新开发制造模型。

公开(公告)号：US06324341B1

公开(公告)日：2001-11-27

申请号：US09559147

申请日：2000-04-26

申请人： Terrence J. Riley ,  Qingsu Wang ,  Michael Miller ,  William Jarrett Campbell ,  Jeff Thompson

发明人： Terrence J. Riley ,  Qingsu Wang ,  Michael Miller ,  William Jarrett Campbell ,  Jeff Thompson

IPC分类号： F26B1900

CPC分类号： H01L21/67115 ,  H01L21/67248

摘要： A method is provided, the method comprising preheating a rapid thermal processing chamber according to a preheating recipe and processing a first plurality of workpieces in the rapid thermal processing chamber. The method also comprises performing first parameter measurements on first and second workpieces of the first plurality of workpieces, the first parameter measurements indicative of first processing differences between the first and second workpieces, and forming a first output signal corresponding to the first parameter measurements. The method further comprises adjusting the preheating recipe based on the first output signal and using the adjusted preheating recipe to preheat the rapid thermal processing chamber for processing a second plurality of workpieces in the rapid thermal processing chamber to reduce second processing differences between first and second workpieces of the second plurality of workpieces.

摘要翻译： 提供了一种方法，该方法包括根据预热配方预热快速热处理室并处理快速热处理室中的第一多个工件。 该方法还包括对第一多个工件的第一和第二工件执行第一参数测量，第一参数测量指示第一和第二工件之间的第一处理差异，以及形成对应于第一参数测量的第一输出信号。 该方法还包括基于第一输出信号调整预热配方并使用经调节的预热配方来预热快速热处理室以处理快速热处理室中的第二多个工件，以减少第一和第二工件之间的第二处理差异 的第二多个工件。

公开(公告)号：US5859964A

公开(公告)日：1999-01-12

申请号：US736919

申请日：1996-10-25

申请人： Qingsu Wang ,  Gerald Barnett ,  R. Michael Greig ,  Yi Cheng

发明人： Qingsu Wang ,  Gerald Barnett ,  R. Michael Greig ,  Yi Cheng

IPC分类号： H01L21/66 ,  G06F11/00

CPC分类号： H01L22/20

摘要： A system and method for detecting faults in wafer fabrication process tools by acquiring real-time process parameter signal data samples used to model the process performed by the process tool. The system includes a computer system including a DAQ device, which acquires the data samples, and a fault detector program which employs a process model program to analyze the data samples for the purpose of detecting faults. The model uses data samples in a reference database acquired from previous known good runs of the process tool. The fault detector notifies a process tool operator of any faults which occur thus potentially avoiding wafer scrap and potentially improving mean time between failures. The fault detector also receives notification of the occurrence of process events from the process tool, such as the start or end of processing a wafer, which the fault detector uses to start and stop the data acquisition, respectively. The fault detector also receives notification of the occurrence of a new process recipe and uses the recipe information to select the appropriate model for modeling the data samples. The fault detector employs a standard data exchange interface, such as DDE, between the fault detector and the model, thus facilitating modular selection of models best suited to the particular fabrication process being modeled. Embodiments are contemplated which use a UPM model, a PCA model, or a neural network model.

摘要翻译： 一种用于通过获取用于对由过程工具执行的过程进行建模的实时过程参数信号数据样本来检测晶片制造工艺工具中的故障的系统和方法。 该系统包括一个计算机系统，它包括一个采集数据样本的DAQ设备，以及一个故障检测程序，该程序采用一个过程模型程序来分析数据样本以检测故障。 该模型使用从先前已知的良好流程工具获取的参考数据库中的数据样本。 故障检测器通知过程工具操作员发生的任何故障，从而潜在地避免晶片废料，并有可能改善故障之间的平均时间。 故障检测器还接收来自处理工具的处理事件的发生的通知，例如处理晶片的开始或结束，故障检测器分别用于启动和停止数据采集。 故障检测器还接收新工艺配方的发生的通知，并使用配方信息来选择用于建模数据样本的适当模型。 故障检测器在故障检测器和模型之间采用标准数据交换接口（如DDE），从而便于模型选择最适合于被建模的特定制造过程。 考虑使用UPM模型，PCA模型或神经网络模型的实施例。

公开(公告)号：US06268270B1

公开(公告)日：2001-07-31

申请号：US09429790

申请日：1999-10-29

申请人： Glen W. Scheid ,  Terrence J. Riley ,  Qingsu Wang ,  Michael Miller ,  Si-Zhao J. Qin

发明人： Glen W. Scheid ,  Terrence J. Riley ,  Qingsu Wang ,  Michael Miller ,  Si-Zhao J. Qin

IPC分类号： H01C21265

CPC分类号： G01J5/0003 ,  G01J1/32

摘要： Methods of optimizing a preheat recipe for rapid thermal processing workpieces are provided. In one aspect, a method of manufacturing is provided that includes preheating a rapid thermal processing chamber according to a preheating recipe and processing a first plurality of workpieces in the rapid thermal processing chamber. Parameter measurements are performed on a first workpiece and a second workpiece of the first plurality of workpieces. The parameter measurements are indicative of processing differences between the first and second workpieces. An output signal is formed corresponding to the parameter measurements and a control signal based on the output signal is used to adjust the preheating recipe for preheating the rapid thermal processing chamber for processing a second plurality of workpieces in the rapid thermal processing chamber to reduce processing differences between first and second workpieces of the second plurality of workpieces.

摘要翻译： 提供了优化用于快速热处理工件的预热配方的方法。 一方面，提供一种制造方法，其包括根据预热配方预热快速热处理室并在快速热处理室中处理第一多个工件。 在第一工件和第一工件的第二工件上执行参数测量。 参数测量表示第一和第二工件之间的加工差异。 对应于参数测量形成输出信号，并且使用基于输出信号的控制信号来调节用于预热快速热处理室的预热配方，用于处理快速热处理室中的第二多个工件以减少加工差异 在第二多个工件的第一和第二工件之间。