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    Method and apparatus for integration of real-time tool data and in-line metrology for fault detection in an advanced process control (APC) framework
    1.
    发明授权
    Method and apparatus for integration of real-time tool data and in-line metrology for fault detection in an advanced process control (APC) framework 有权
    用于在先进过程控制（APC）框架中集成实时工具数据和故障检测的在线计量的方法和装置

    公开(公告)号：US06532555B1

    公开(公告)日：2003-03-11

    申请号：US09430475

    申请日：1999-10-29

    申请人： Michael Lee Miller ,  Qingsu Wang ,  Elfido Coss, Jr.

    发明人： Michael Lee Miller ,  Qingsu Wang ,  Elfido Coss, Jr.

    IPC分类号： G06F1100

    CPC分类号： G05B19/4184 ,  G05B2219/37207 ,  G05B2219/45031 ,  Y02P90/14

    摘要： A method and apparatus for providing near real-time fault detection in a manufacturing process is provided. The apparatus includes a processing tool adapted to manufacture a processing piece and an interface, coupled to the processing tool, for receiving operational data from the processing tool related to the manufacture of the processing piece, and product data defining characteristics of the processing piece. In one embodiment, the processing tool is in the form of semiconductor fabrication equipment and the processing piece is a silicon wafer. A fault detection unit is provided to determine if a fault condition exists with the processing tool from the operational data or with the processing piece from the product data. An Advanced Process Control (APC) framework is further provided to receive the operational and product data from the first interface, and to send the data to the fault detection unit.

    摘要翻译： 提供了一种用于在制造过程中提供近实时故障检测的方法和装置。 该装置包括适于制造加工件和接口的加工工具，该处理件和接口耦合到处理工具，用于接收来自与加工件的制造相关的加工工具的操作数据，以及定义加工件特征的产品数据。 在一个实施例中，处理工具是半导体制造设备的形式，并且处理件是硅晶片。 提供故障检测单元，以从操作数据或来自产品数据的加工件确定处理工具是否存在故障状况。 进一步提供高级过程控制（APC）框架以从第一接口接收操作和产品数据，并将数据发送到故障检测单元。

    Method and apparatus for generating real-time data from static files
    2.
    发明授权
    Method and apparatus for generating real-time data from static files 失效
    用于从静态文件生成实时数据的方法和装置

    公开(公告)号：US06556882B1

    公开(公告)日：2003-04-29

    申请号：US09401089

    申请日：1999-09-22

    申请人： Michael R. Conboy ,  Elfido Coss, Jr. ,  Qingsu Wang

    发明人： Michael R. Conboy ,  Elfido Coss, Jr. ,  Qingsu Wang

    IPC分类号： G06F1900

    CPC分类号： H01L22/20

    摘要： A method and apparatus for performing manufacturing system analysis upon a manufacturing network. Real-time production data is collected. The real-time production data is stored in a static file database. A real-time data flow is emulated using said real-time production data from said static file database. A reactive function analysis is performed.

    摘要翻译： 一种用于在制造网络上执行制造系统分析的方法和装置。 收集实时生产数据。 实时生产数据存储在静态文件数据库中。 使用来自所述静态文件数据库的所述实时生产数据来模拟实时数据流。 进行反应性功能分析。

    Method and apparatus for fault detection of a processing tool in an advanced process control (APC) framework
    3.
    发明授权
    Method and apparatus for fault detection of a processing tool in an advanced process control (APC) framework 有权
    用于高级过程控制（APC）框架中处理工具的故障检测的方法和装置

    公开(公告)号：US06546508B1

    公开(公告)日：2003-04-08

    申请号：US09430476

    申请日：1999-10-29

    申请人： Thomas Sonderman ,  Elfido Coss, Jr. ,  Qingsu Wang

    发明人： Thomas Sonderman ,  Elfido Coss, Jr. ,  Qingsu Wang

    IPC分类号： G06F1100

    CPC分类号： G05B19/4184 ,  G05B2219/31357 ,  G05B2219/45031 ,  Y02P90/14

    摘要： A method and apparatus for providing fault detection in an Advanced Process Control (APC) framework. A first interface receives operational state data of a processing tool related to the manufacture of a processing piece. The state data is sent from the first interface to a fault detection unit. A fault detection unit determines if a fault condition exists with the processing tool based upon the state data. A predetermined action is performed on the processing tool in response to the presence of a fault condition. In accordance with one embodiment, the predetermined action is to shutdown the processing tool so as to prevent further production of faulty wafers.

    摘要翻译： 一种用于在高级过程控制（APC）框架中提供故障检测的方法和装置。 第一接口接收与制造加工件相关的加工工具的操作状态数据。 状态数据从第一接口发送到故障检测单元。 故障检测单元基于状态数据确定处理工具是否存在故障状况。 响应于故障状况的存在，对处理工具执行预定的动作。 根据一个实施例，预定的动作是关闭处理工具，以防止进一步生产故障晶片。

    Automated system for extracting and combining tool trace data and wafer electrical test (WET) data for semiconductor processing
    4.
    发明授权
    Automated system for extracting and combining tool trace data and wafer electrical test (WET) data for semiconductor processing 失效
    自动化系统，用于提取和组合刀具跟踪数据和晶圆电气测试（WET）半导体处理数据

    公开(公告)号：US06968303B1

    公开(公告)日：2005-11-22

    申请号：US09548443

    申请日：2000-04-13

    申请人： Qingsu Wang ,  Elfido Coss, Jr.

    发明人： Qingsu Wang ,  Elfido Coss, Jr.

    IPC分类号： G06F17/50 ,  H01L21/28 ,  H01L21/336

    CPC分类号： G06F17/5068 ,  H01L21/28035 ,  H01L29/6659

    摘要： A method is provided for configuring a final data set to use for modeling a manufacturing process, the method including requesting a real-time data set from a real-time database, requesting an historical data set from an historical database, and defining a required format for the final data set. The method also includes combining the real-time data set from the real-time database with the historical data set from the historical database using the required format for the final data set.

    摘要翻译： 提供了一种用于配置用于建模制造过程的最终数据集的方法，所述方法包括从实时数据库请求实时数据集，从历史数据库请求历史数据集，以及定义所需格式 为最终的数据集。 该方法还包括使用最终数据集的所需格式将来自实时数据库的实时数据集与来自历史数据库的历史数据集相结合。

    Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (APC) framework
    5.
    发明授权
    Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (APC) framework 有权
    用于处理工具的故障检测的方法和装置及其使用先进的过程控制（APC）框架进行控制

    公开(公告)号：US06725402B1

    公开(公告)日：2004-04-20

    申请号：US09629073

    申请日：2000-07-31

    申请人： Elfido Coss, Jr. ,  Qingsu Wang ,  Terrence J. Riley

    发明人： Elfido Coss, Jr. ,  Qingsu Wang ,  Terrence J. Riley

    IPC分类号： G06F1100

    CPC分类号： G05B19/4184 ,  G05B19/41875 ,  G05B2219/32209 ,  G05B2219/32221 ,  Y02P90/02 ,  Y02P90/14 ,  Y02P90/22

    摘要： A method and apparatus for providing fault detection in an Advanced Process Control (APC) framework. A first interface receives operational state data of a processing tool related to the manufacture of a processing piece. The state data is sent from the first interface to a fault detection unit. A fault detection unit determines if a fault condition exists with the processing tool based upon the state data. A predetermined action is performed on the processing tool in response to the presence of a fault condition. In accordance with one embodiment, the predetermined action is to shutdown the processing tool so as to prevent further production of faulty wafers.

    摘要翻译： 一种用于在高级过程控制（APC）框架中提供故障检测的方法和装置。 第一接口接收与制造加工件相关的加工工具的操作状态数据。 状态数据从第一接口发送到故障检测单元。 故障检测单元基于状态数据确定处理工具是否存在故障状况。 响应于故障状况的存在，对处理工具执行预定的动作。 根据一个实施例，预定的动作是关闭处理工具，以防止进一步生产故障晶片。

    Fault notification based on a severity level
    6.
    发明授权
    Fault notification based on a severity level 失效
    基于严重性级别的故障通知

    公开(公告)号：US07200779B1

    公开(公告)日：2007-04-03

    申请号：US10133097

    申请日：2002-04-26

    申请人： Elfido Coss, Jr. ,  Susan Hickey ,  Michael R. Conboy

    发明人： Elfido Coss, Jr. ,  Susan Hickey ,  Michael R. Conboy

    IPC分类号： G06F11/00

    CPC分类号： G06F11/0769 ,  G06F11/0709 ,  G06F11/076 ,  G06F11/0781

    摘要： A method and apparatus is provided for fault notification based on a severity level. The method comprises detecting a fault associated with a processing tool that is adapted to process one or more workpieces, determining a fault severity level of the detected fault and selecting at least one user to notify of the fault based on the severity level of the fault.

    摘要翻译： 基于严重性级别提供了用于故障通知的方法和装置。 该方法包括检测与处理一个或多个工件的处理工具相关联的故障，确定检测到的故障的故障严重性级别，并且基于故障的严重性级别选择至少一个用户通知故障。

    Scheduling method for automated work-cell transfer system
    8.
    发明授权
    Scheduling method for automated work-cell transfer system 失效
    自动化工作单元传输系统的调度方法

    公开(公告)号：US06928333B1

    公开(公告)日：2005-08-09

    申请号：US09387174

    申请日：1999-08-31

    申请人： Michael R. Conboy ,  Patrick J. Ryan ,  Elfido Coss, Jr.

    发明人： Michael R. Conboy ,  Patrick J. Ryan ,  Elfido Coss, Jr.

    IPC分类号： G06F19/00 ,  G06Q10/00

    CPC分类号： G06Q10/06 ,  Y02P90/86

    摘要： According to an example embodiment, the present invention is directed to a new and efficient method for bringing at least two items together from independent locations via separate paths in a computer controlled manufacturing environment. Using the computer, the probabilities for pickup and delivery of each of the two items are generated and used to determine an efficient manner in which to bring the items together via the separate paths.

    摘要翻译： 根据示例性实施例，本发明涉及一种用于在计算机控制的制造环境中通过独立路径将独立位置带入至少两个项目的新的和有效的方法。 使用计算机，产生并且使用两个项目中的每一个的拾取和递送的概率来确定通过分开的路径将项目合在一起的有效方式。

    Predicting process excursions based upon tool state variables
    9.
    发明授权
    Predicting process excursions based upon tool state variables 失效
    基于工具状态变量预测过程偏移

    公开(公告)号：US06905895B1

    公开(公告)日：2005-06-14

    申请号：US10185495

    申请日：2002-06-28

    申请人： Elfido Coss, Jr. ,  Mark K. Sze-To

    发明人： Elfido Coss, Jr. ,  Mark K. Sze-To

    IPC分类号： H01L21/66 ,  G01R31/26 ,  G06F19/00 ,  H01L21/00

    CPC分类号： H01L22/20 ,  H01L2223/54453

    摘要： A method and an apparatus for predicting excursions based upon tool state variables. At least one semiconductor wafer is processed in a processing tool. Tool state data relating to the processing tool is acquired. The tool state data comprises at least one tool state variable. A determination is made whether an excursion of the tool health related to the processing tool has occurred based upon the tool state data. The tool state variable is modified to reduce the excursion of the tool health in response to the determination that the excursion of the tool health has occurred.

    摘要翻译： 一种基于工具状态变量预测偏移的方法和装置。 在处理工具中处理至少一个半导体晶片。 获取与处理工具相关的工具状态数据。 刀具状态数据包括至少一个刀具状态变量。 根据工具状态数据确定是否发生了与处理工具相关的工具健康的偏移。 修改工具状态变量以减少工具健康的偏差，以响应确定工具健康发生偏移的确定。

    Method for requesting trace data reports from FDC semiconductor fabrication processes
    10.
    发明授权
    Method for requesting trace data reports from FDC semiconductor fabrication processes 失效
    从FDC半导体制造工艺请求跟踪数据报告的方法

    公开(公告)号：US06871112B1

    公开(公告)日：2005-03-22

    申请号：US09479852

    申请日：2000-01-07

    申请人： Elfido Coss, Jr. ,  Michael R. Conboy ,  Bryce A. Hendrix

    发明人： Elfido Coss, Jr. ,  Michael R. Conboy ,  Bryce A. Hendrix

    IPC分类号： H01L21/02 ,  H01L21/66 ,  G06F19/00

    CPC分类号： H01L22/20 ,  H01L2924/0002 ,  H01L2924/00

    摘要： The invention is, in its various aspects, a method and apparatus for dynamically generating trace data reports in a semiconductor fabrication process employing fault detection control. The method comprises specifying data including at least one of a parameter, a trigger, and a frequency, for a trace data report; automatically generating from a fault detection controller a request including the specified data to a report generator; formulating the trace data report responsive to the request; and returning the formulated trace data report from the report generator based on the request. The apparatus is a semiconductor fabrication processing system, comprising: a fabrication tool capable of providing at least one of specified data and a trace data report; a fault detection controller capable of automatically generating a request for the trace data report, the request including the specified data; a report generator capable of requesting at least one of the specified data and the trace data report from the fabrication tool and capable of, if the specified data is requested from the fabrication tool, providing the trace data report; and an operator interface for receiving data specified for the trace data report, the specified data including at least one of a parameter, a trigger, and a frequency for the trace data report, and to which the trace data report may be returned from at least one of the report generator and the fabrication tool.

    摘要翻译： 本发明在其各个方面是一种用于在采用故障检测控制的半导体制造过程中动态产生跟踪数据报告的方法和装置。 该方法包括指定用于跟踪数据报告的包括参数，触发和频率中的至少一个的数据; 从故障检测控制器自动生成包括指定数据的请求到报告生成器; 根据请求制定跟踪数据报告; 并根据请求从报告生成器返回已制定的跟踪数据报告。 该装置是半导体制造处理系统，包括：能够提供指定数据和跟踪数据报告中的至少一个的制造工具; 一个故障检测控制器，能够自动产生跟踪数据报告的请求，该请求包括指定的数据; 报告发生器，其能够从所述制造工具请求所述指定数据和跟踪数据报告中的至少一个，并且如果从所述制造工具请求指定的数据，则能够提供所述跟踪数据报告; 以及用于接收为跟踪数据报告指定的数据的操作者界面，所述指定数据包括用于跟踪数据报告的参数，触发和频率中的至少一个，并且跟踪数据报告至少可以从其返回 报告生成器和制作工具之一。