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1.发明授权Method and apparatus for integration of real-time tool data and in-line metrology for fault detection in an advanced process control (APC) framework 有权用于在先进过程控制（APC）框架中集成实时工具数据和故障检测的在线计量的方法和装置公开(公告)号：US06532555B1
公开(公告)日：2003-03-11
申请号：US09430475
申请日：1999-10-29
IPC分类号： G06F1100
CPC分类号： G05B19/4184 , G05B2219/37207 , G05B2219/45031 , Y02P90/14
摘要： A method and apparatus for providing near real-time fault detection in a manufacturing process is provided. The apparatus includes a processing tool adapted to manufacture a processing piece and an interface, coupled to the processing tool, for receiving operational data from the processing tool related to the manufacture of the processing piece, and product data defining characteristics of the processing piece. In one embodiment, the processing tool is in the form of semiconductor fabrication equipment and the processing piece is a silicon wafer. A fault detection unit is provided to determine if a fault condition exists with the processing tool from the operational data or with the processing piece from the product data. An Advanced Process Control (APC) framework is further provided to receive the operational and product data from the first interface, and to send the data to the fault detection unit.
摘要翻译： 提供了一种用于在制造过程中提供近实时故障检测的方法和装置。 该装置包括适于制造加工件和接口的加工工具，该处理件和接口耦合到处理工具，用于接收来自与加工件的制造相关的加工工具的操作数据，以及定义加工件特征的产品数据。 在一个实施例中，处理工具是半导体制造设备的形式，并且处理件是硅晶片。 提供故障检测单元，以从操作数据或来自产品数据的加工件确定处理工具是否存在故障状况。 进一步提供高级过程控制（APC）框架以从第一接口接收操作和产品数据，并将数据发送到故障检测单元。
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公开(公告)号：US06556882B1
公开(公告)日：2003-04-29
申请号：US09401089
申请日：1999-09-22
申请人： Michael R. Conboy , Elfido Coss, Jr. , Qingsu Wang
发明人： Michael R. Conboy , Elfido Coss, Jr. , Qingsu Wang
IPC分类号： G06F1900
CPC分类号： H01L22/20
摘要： A method and apparatus for performing manufacturing system analysis upon a manufacturing network. Real-time production data is collected. The real-time production data is stored in a static file database. A real-time data flow is emulated using said real-time production data from said static file database. A reactive function analysis is performed.
摘要翻译： 一种用于在制造网络上执行制造系统分析的方法和装置。 收集实时生产数据。 实时生产数据存储在静态文件数据库中。 使用来自所述静态文件数据库的所述实时生产数据来模拟实时数据流。 进行反应性功能分析。
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3.发明授权Method and apparatus for fault detection of a processing tool in an advanced process control (APC) framework 有权用于高级过程控制（APC）框架中处理工具的故障检测的方法和装置公开(公告)号：US06546508B1
公开(公告)日：2003-04-08
申请号：US09430476
申请日：1999-10-29
申请人： Thomas Sonderman , Elfido Coss, Jr. , Qingsu Wang
发明人： Thomas Sonderman , Elfido Coss, Jr. , Qingsu Wang
IPC分类号： G06F1100
CPC分类号： G05B19/4184 , G05B2219/31357 , G05B2219/45031 , Y02P90/14
摘要： A method and apparatus for providing fault detection in an Advanced Process Control (APC) framework. A first interface receives operational state data of a processing tool related to the manufacture of a processing piece. The state data is sent from the first interface to a fault detection unit. A fault detection unit determines if a fault condition exists with the processing tool based upon the state data. A predetermined action is performed on the processing tool in response to the presence of a fault condition. In accordance with one embodiment, the predetermined action is to shutdown the processing tool so as to prevent further production of faulty wafers.
摘要翻译： 一种用于在高级过程控制（APC）框架中提供故障检测的方法和装置。 第一接口接收与制造加工件相关的加工工具的操作状态数据。 状态数据从第一接口发送到故障检测单元。 故障检测单元基于状态数据确定处理工具是否存在故障状况。 响应于故障状况的存在，对处理工具执行预定的动作。 根据一个实施例，预定的动作是关闭处理工具，以防止进一步生产故障晶片。
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4.发明授权Automated system for extracting and combining tool trace data and wafer electrical test (WET) data for semiconductor processing 失效自动化系统，用于提取和组合刀具跟踪数据和晶圆电气测试（WET）半导体处理数据公开(公告)号：US06968303B1
公开(公告)日：2005-11-22
申请号：US09548443
申请日：2000-04-13
申请人： Qingsu Wang , Elfido Coss, Jr.
发明人： Qingsu Wang , Elfido Coss, Jr.
IPC分类号： G06F17/50 , H01L21/28 , H01L21/336
CPC分类号： G06F17/5068 , H01L21/28035 , H01L29/6659
摘要： A method is provided for configuring a final data set to use for modeling a manufacturing process, the method including requesting a real-time data set from a real-time database, requesting an historical data set from an historical database, and defining a required format for the final data set. The method also includes combining the real-time data set from the real-time database with the historical data set from the historical database using the required format for the final data set.
摘要翻译： 提供了一种用于配置用于建模制造过程的最终数据集的方法，所述方法包括从实时数据库请求实时数据集，从历史数据库请求历史数据集，以及定义所需格式 为最终的数据集。 该方法还包括使用最终数据集的所需格式将来自实时数据库的实时数据集与来自历史数据库的历史数据集相结合。
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5.发明授权Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (APC) framework 有权用于处理工具的故障检测的方法和装置及其使用先进的过程控制（APC）框架进行控制公开(公告)号：US06725402B1
公开(公告)日：2004-04-20
申请号：US09629073
申请日：2000-07-31
申请人： Elfido Coss, Jr. , Qingsu Wang , Terrence J. Riley
发明人： Elfido Coss, Jr. , Qingsu Wang , Terrence J. Riley
IPC分类号： G06F1100
CPC分类号： G05B19/4184 , G05B19/41875 , G05B2219/32209 , G05B2219/32221 , Y02P90/02 , Y02P90/14 , Y02P90/22
摘要： A method and apparatus for providing fault detection in an Advanced Process Control (APC) framework. A first interface receives operational state data of a processing tool related to the manufacture of a processing piece. The state data is sent from the first interface to a fault detection unit. A fault detection unit determines if a fault condition exists with the processing tool based upon the state data. A predetermined action is performed on the processing tool in response to the presence of a fault condition. In accordance with one embodiment, the predetermined action is to shutdown the processing tool so as to prevent further production of faulty wafers.
摘要翻译： 一种用于在高级过程控制（APC）框架中提供故障检测的方法和装置。 第一接口接收与制造加工件相关的加工工具的操作状态数据。 状态数据从第一接口发送到故障检测单元。 故障检测单元基于状态数据确定处理工具是否存在故障状况。 响应于故障状况的存在，对处理工具执行预定的动作。 根据一个实施例，预定的动作是关闭处理工具，以防止进一步生产故障晶片。
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6.发明授权Method and apparatus for dynamically monitoring system components in an advanced process control (APC) framework 失效用于在高级过程控制（APC）框架中动态监视系统组件的方法和装置公开(公告)号：US06831555B1
公开(公告)日：2004-12-14
申请号：US10090692
申请日：2002-03-05
IPC分类号： G08B2900
CPC分类号： G05B23/0289
摘要： A method and system for monitoring a performance of at least one system component of a manufacturing system. At least one event that can occur within the system is defined. It is determined whether the at least one event has occurred within the system, and altering a frequency at which the at least one system component is monitored providing the at least one event has occurred within the system.
摘要翻译： 一种用于监视制造系统的至少一个系统部件的性能的方法和系统。 定义了系统内可能发生的至少一个事件。 确定系统中是否发生了至少一个事件，并且在系统内发生了至少一个事件发生时，改变监视至少一个系统组件的频率。
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公开(公告)号：US07200779B1
公开(公告)日：2007-04-03
申请号：US10133097
申请日：2002-04-26
IPC分类号： G06F11/00
CPC分类号： G06F11/0769 , G06F11/0709 , G06F11/076 , G06F11/0781
摘要： A method and apparatus is provided for fault notification based on a severity level. The method comprises detecting a fault associated with a processing tool that is adapted to process one or more workpieces, determining a fault severity level of the detected fault and selecting at least one user to notify of the fault based on the severity level of the fault.
摘要翻译： 基于严重性级别提供了用于故障通知的方法和装置。 该方法包括检测与处理一个或多个工件的处理工具相关联的故障，确定检测到的故障的故障严重性级别，并且基于故障的严重性级别选择至少一个用户通知故障。
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公开(公告)号：US07051250B1
公开(公告)日：2006-05-23
申请号：US10164091
申请日：2002-06-06
IPC分类号： G06F11/00
CPC分类号： G05B19/4184 , G05B2219/31355 , G05B2219/31365 , G05B2219/32243 , G05B2219/32254 , Y02P90/14 , Y02P90/20
摘要： A method and apparatus is provided for routing workpieces based upon detecting a fault. The method comprises routing a workpiece to a first processing tool identified by a dispatch system, detecting a fault condition associated with the first processing tool and notifying the dispatch system of the detected fault condition. The method further comprises routing a second workpiece to a second processing tool in response to the dispatch system being notified of the fault condition.
摘要翻译： 提供了一种基于检测故障来路由工件的方法和装置。 该方法包括将工件路由到由调度系统识别的第一处理工具，检测与第一处理工具相关联的故障状况并通知调度系统检测到的故障状况。 该方法还包括响应于调度系统被通知故障状况而将第二工件路由到第二处理工具。
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公开(公告)号：US06928333B1
公开(公告)日：2005-08-09
申请号：US09387174
申请日：1999-08-31
摘要： According to an example embodiment, the present invention is directed to a new and efficient method for bringing at least two items together from independent locations via separate paths in a computer controlled manufacturing environment. Using the computer, the probabilities for pickup and delivery of each of the two items are generated and used to determine an efficient manner in which to bring the items together via the separate paths.
摘要翻译： 根据示例性实施例，本发明涉及一种用于在计算机控制的制造环境中通过独立路径将独立位置带入至少两个项目的新的和有效的方法。 使用计算机，产生并且使用两个项目中的每一个的拾取和递送的概率来确定通过分开的路径将项目合在一起的有效方式。
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公开(公告)号：US06905895B1
公开(公告)日：2005-06-14
申请号：US10185495
申请日：2002-06-28
申请人： Elfido Coss, Jr. , Mark K. Sze-To
发明人： Elfido Coss, Jr. , Mark K. Sze-To
CPC分类号： H01L22/20 , H01L2223/54453
摘要： A method and an apparatus for predicting excursions based upon tool state variables. At least one semiconductor wafer is processed in a processing tool. Tool state data relating to the processing tool is acquired. The tool state data comprises at least one tool state variable. A determination is made whether an excursion of the tool health related to the processing tool has occurred based upon the tool state data. The tool state variable is modified to reduce the excursion of the tool health in response to the determination that the excursion of the tool health has occurred.
摘要翻译： 一种基于工具状态变量预测偏移的方法和装置。 在处理工具中处理至少一个半导体晶片。 获取与处理工具相关的工具状态数据。 刀具状态数据包括至少一个刀具状态变量。 根据工具状态数据确定是否发生了与处理工具相关的工具健康的偏移。 修改工具状态变量以减少工具健康的偏差，以响应确定工具健康发生偏移的确定。
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