公开(公告)号：US20070264105A1

公开(公告)日：2007-11-15

申请号：US11432923

申请日：2006-05-12

申请人： Michel Pharand ,  Klaus Becker ,  Klaus Petry ,  Marvin LaFontaine ,  Michael Mitrano

发明人： Michel Pharand ,  Klaus Becker ,  Klaus Petry ,  Marvin LaFontaine ,  Michael Mitrano

IPC分类号： H01L21/677

CPC分类号： H01L21/67201 ,  H01L21/67265 ,  H01L21/67294 ,  H01L21/67748

摘要： A combination load lock apparatus is provided, wherein a chamber is coupled to two or more valves in selective fluid communication with two or more respective volumes. A support member for supporting a workpiece is disposed within an interior portion of the chamber, wherein a translation apparatus is operably coupled thereto. The translation apparatus is operable to rotate and/or translate the workpiece on the support member about and/or along a first axis, wherein a detection apparatus associated with the chamber is operable to detect one or more characteristics of the workpiece during the rotation and/or translation thereof. The workpiece may be further rotated in a predetermined manner based on the one or more detected characteristics. A recess is further defined in the interior portion of the chamber, wherein the translation apparatus is operable to translate the workpiece into and out of the recess to reduce particulate contamination thereon.

摘要翻译： 提供一种组合式加载锁定装置，其中腔室与两个或更多个相应体积选择性流体连通的两个或更多个阀联接。 用于支撑工件的支撑构件设置在腔室的内部部分内，其中平移装置可操作地联接到其上。 翻译装置可操作以沿着第一轴线旋转和/或平移在支撑构件上的工件，其中与腔室相关联的检测装置可操作以在旋转期间检测工件的一个或多个特性，和/ 或其翻译。 可以基于一个或多个检测到的特性以预定方式进一步旋转工件。 在腔室的内部部分中进一步限定凹部，其中平移装置可操作以将工件平移到凹槽中并减少其中的颗粒污染物。

公开(公告)号：US07560705B2

公开(公告)日：2009-07-14

申请号：US11840888

申请日：2007-08-17

申请人： Ari Eiriksson ,  Donovan Beckel ,  Robert Mitchell ,  Michel Pharand ,  Marvin LaFontaine ,  Ashwin Purohit ,  Steven Weed ,  Wayne Arseneault ,  Shantanu Pathak ,  Joseph Daniel Foley

发明人： Ari Eiriksson ,  Donovan Beckel ,  Robert Mitchell ,  Michel Pharand ,  Marvin LaFontaine ,  Ashwin Purohit ,  Steven Weed ,  Wayne Arseneault ,  Shantanu Pathak ,  Joseph Daniel Foley

IPC分类号： H01J37/317

CPC分类号： H01L21/6831 ,  H01L21/68764

摘要： An ion implantation apparatus, system, and method are provided for connecting and disconnecting a workpiece holder from a scan arm. A twist head is provided, wherein an electrostatic chuck is operable to be mounted, wherein one or more rotating and non-rotating members associated with one or more of the twist head and electrostatic chuck have one or more dynamic electrical and fluid rotary connections associated therewith. The electrostatic chuck is further operable to be removed from the twist head without disconnecting the one or more dynamic fluid seals.

摘要翻译： 提供离子注入装置，系统和方法用于将工件保持器与扫描臂连接和断开。 提供了一种扭转头，其中可操作地安装静电卡盘，其中与一个或多个扭转头和静电卡盘相关联的一个或多个旋转和非旋转构件具有与其相关联的一个或多个动态电动和流体旋转连接 。 静电卡盘还可操作以从扭转头移除而不断开一个或多个动态流体密封件。

公开(公告)号：US20080105836A1

公开(公告)日：2008-05-08

申请号：US11840888

申请日：2007-08-17

申请人： Ari Eiriksson ,  Donovan Beckel ,  Robert Mitchell ,  Michel Pharand ,  Marvin LaFontaine ,  Ashwin Purohit ,  Steven Weed ,  Wayne Arseneault ,  Shantanu Pathak ,  Joseph Foley

发明人： Ari Eiriksson ,  Donovan Beckel ,  Robert Mitchell ,  Michel Pharand ,  Marvin LaFontaine ,  Ashwin Purohit ,  Steven Weed ,  Wayne Arseneault ,  Shantanu Pathak ,  Joseph Foley

IPC分类号： H01J29/02

CPC分类号： H01L21/6831 ,  H01L21/68764

摘要： An ion implantation apparatus, system, and method are provided for connecting and disconnecting a workpiece holder from a scan arm. A twist head is provided, wherein an electrostatic chuck is operable to be mounted, wherein one or more rotating and non-rotating members associated with one or more of the twist head and electrostatic chuck have one or more dynamic electrical and fluid rotary connections associated therewith. The electrostatic chuck is further operable to be removed from the twist head without disconnecting the one or more dynamic fluid seals.

摘要翻译： 提供离子注入装置，系统和方法用于将工件保持器与扫描臂连接和断开。 提供了一种扭转头，其中可操作地安装静电卡盘，其中与一个或多个扭转头和静电卡盘相关联的一个或多个旋转和非旋转构件具有与其相关联的一个或多个动态电动和流体旋转连接 。 静电卡盘还可操作以从扭转头移除而不断开一个或多个动态流体密封件。

公开(公告)号：US20130160704A1

公开(公告)日：2013-06-27

申请号：US13336495

申请日：2011-12-23

申请人： Marvin LaFontaine ,  Keith Vaillancourt ,  Patrick Renard ,  Vorin Hay

发明人： Marvin LaFontaine ,  Keith Vaillancourt ,  Patrick Renard ,  Vorin Hay

IPC分类号： C30B11/02 ,  C03B19/02

CPC分类号： C30B11/02 ,  C30B11/002 ,  Y10T117/1092

摘要： A crystal growth furnace comprising at least three support pedestals supporting a crucible block and at least one means for stabilizing at least two of the support pedestals is disclosed. The stabilizing means can include support pedestals having a carbon-carbon composite outer layer recessed into the crucible block, a pedestal support system comprising at least one brace for securing at least two of the support pedestals to each other, or both.

摘要翻译： 公开了一种晶体生长炉，其包括支撑坩埚块的至少三个支撑基座和用于稳定至少两个支撑基座的至少一个装置。 稳定装置可以包括具有凹入坩埚块中的碳 - 碳复合材料外层的支撑基座，包括用于将至少两个支撑基座固定到彼此或两者的至少一个支架的基座支撑系统。

公开(公告)号：US5838012A

公开(公告)日：1998-11-17

申请号：US822543

申请日：1997-03-19

申请人： Marvin LaFontaine ,  Nobuhiro Tokoro ,  Victor Quattrini ,  Daniel Bissonnette ,  Takao Sakase

发明人： Marvin LaFontaine ,  Nobuhiro Tokoro ,  Victor Quattrini ,  Daniel Bissonnette ,  Takao Sakase

IPC分类号： G21K1/14 ,  H01J37/317 ,  H01J27/00

CPC分类号： H01J37/3171 ,  G21K1/14 ,  H01J2237/08

摘要： A charge exchange cell for ion implanters employing a tandem accelerator has a hollow-wall construction with a heating element inserted inside the hollow wall.

摘要翻译： 用于使用串联加速器的离子注入机的电荷交换单元具有中空壁结构，其中加热元件插入中空壁内。