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公开(公告)号：US07244935B2
公开(公告)日：2007-07-17
申请号：US10551425
申请日：2004-04-16
IPC分类号： G01J5/00
CPC分类号： G01J5/02 , B81B3/0081 , B81B2201/0278 , B81C2201/0115 , G01J5/0235 , G01J5/10 , H01L2924/0002 , H01L2924/00
摘要： An absorbent membrane (1) is fixed in suspension onto a front face of a substrate (2), in a direction substantially parallel to the substrate (2), by at least one alveolate structure thermally insulating the membrane from the substrate (2) and arranged in a plane substantially perpendicular to the substrate (2). The detector can comprise arms (3) fixedly secured to the absorbent membrane (1). The alveolate structures can be respectively arranged between one of the arms (3) and the substrate (2). The alveolate structure can be formed by a plurality of superposed thin layers (6) separated by spacers (7) or by superposed rows of arcades formed by thin layers. The alveolate structure can comprise a porous pad.
摘要翻译： 吸收膜（1）通过将膜与基板（2）热绝缘的至少一个肺泡结构以基本上平行于基底（2）的方向悬挂在基底（2）的正面上，以及 布置在基本上垂直于基底（2）的平面中。 检测器可以包括固定在吸收膜（1）上的臂（3）。 蜂窝结构可以分别布置在臂（3）中的一个和基底（2）之间。 蜂窝结构可以由多个由间隔物（7）分隔开的叠置的薄层（6）或由薄层形成的叠层的叠层形成。 泡沫结构可以包括多孔垫。
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公开(公告)号：US20060273256A1
公开(公告)日：2006-12-07
申请号：US10551425
申请日：2004-04-16
IPC分类号： G01J5/00
CPC分类号： G01J5/02 , B81B3/0081 , B81B2201/0278 , B81C2201/0115 , G01J5/0235 , G01J5/10 , H01L2924/0002 , H01L2924/00
摘要： An absorbent membrane (1) is fixed in suspension onto a front face of a substrate (2), in a direction substantially parallel to the substrate (2), by at least one alveolate structure thermally insulating the membrane from the substrate (2) and arranged in a plane substantially perpendicular to the substrate (2). The detector can comprise arms (3) fixedly secured to the absorbent membrane (1). The alveolate structures can be respectively arranged between one of the arms (3) and the substrate (2). The alveolate structure can be formed by a plurality of superposed thin layers (6) separated by spacers (7) or by superposed rows of arcades formed by thin layers. The alveolate structure can comprise a porous pad.
摘要翻译： 吸收膜（1）通过将膜与基板（2）热绝缘的至少一个肺泡结构以基本上平行于基底（2）的方向悬挂在基底（2）的正面上，以及 布置在基本上垂直于基底（2）的平面中。 检测器可以包括固定在吸收膜（1）上的臂（3）。 蜂窝结构可以分别布置在臂（3）中的一个和基底（2）之间。 蜂窝结构可以由多个由间隔物（7）分隔的叠置的薄层（6）或由薄层形成的叠层的叠层形成。 泡沫结构可以包括多孔垫。
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3.发明授权Thermal electromagnetic radiation detector comprising an absorbent membrane fixed in suspension 失效热电磁辐射检测器，包括固定在悬浮液中的吸收膜公开(公告)号：US07294836B2
公开(公告)日：2007-11-13
申请号：US11206801
申请日：2005-08-19
申请人： Jean-Jacques Yon , Astrid Astier , Michel Vilain
发明人： Jean-Jacques Yon , Astrid Astier , Michel Vilain
摘要： The absorbent membrane of the detector is fixed in suspension by at least one thermally insulating support part onto a front face of a substrate comprising at least two electric connection terminals electrically connected to the membrane, for example by means of conducting layers. The support part has at least one base end and a raised zone. The base end is fixed to a top part of a conducting pillar having a base fixedly secured to one of the electric connection terminals. A substantially flat zone of a bottom face of the membrane is directly in contact with the raised zone of the support part. The support part is preferably formed by a bridge having a second base end fixed to a top part of a second pillar, the raised zone being formed by a flat middle part of the bridge.
摘要翻译： 检测器的吸收膜通过至少一个隔热支撑部件悬挂固定在基板的正面上，该基板包括至少两个电连接端子，电连接端子例如通过导电层电连接到膜。 支撑部分具有至少一个基端和凸起区域。 基端固定到导柱的顶部，导电柱具有牢固地固定到电连接端子之一的基座。 膜的底面的基本上平坦的区域直接与支撑部分的升高区域接触。 支撑部优选地由具有固定到第二柱的顶部的第二基端的桥构成，所述凸起区由桥的平坦的中间部形成。
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4.发明申请Thermal electromagnetic radiation detector comprising an absorbent membrane fixed in suspension 失效热电磁辐射检测器，包括固定在悬浮液中的吸收膜公开(公告)号：US20060054823A1
公开(公告)日：2006-03-16
申请号：US11206801
申请日：2005-08-19
申请人： Jean-Jacques Yon , Astrid Astier , Michel Vilain
发明人： Jean-Jacques Yon , Astrid Astier , Michel Vilain
IPC分类号： H01L27/14
摘要： The absorbent membrane of the detector is fixed in suspension by at least one thermally insulating support part onto a front face of a substrate comprising at least two electric connection terminals electrically connected to the membrane, for example by means of conducting layers. The support part has at least one base end and a raised zone. The base end is fixed to a top part of a conducting pillar having a base fixedly secured to one of the electric connection terminals. A substantially flat zone of a bottom face of the membrane is directly in contact with the raised zone of the support part. The support part is preferably formed by a bridge having a second base end fixed to a top part of a second pillar, the raised zone being formed by a flat middle part of the bridge.
摘要翻译： 检测器的吸收膜通过至少一个隔热支撑部件悬挂固定在基板的正面上，该基板包括至少两个电连接端子，电连接端子例如通过导电层电连接到膜。 支撑部分具有至少一个基端和凸起区域。 基端固定到导柱的顶部，导电柱具有牢固地固定到电连接端子之一的基座。 膜的底面的基本上平坦的区域直接与支撑部分的升高区域接触。 支撑部优选地由具有固定到第二柱的顶部的第二基端的桥构成，所述凸起区由桥的平坦的中间部形成。
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5.发明申请Method for production of a device for thermal detection of radiation comprising an active microbolometer and a passive microbolometer 失效用于生产用于辐射的热检测的装置的方法，包括主动微热辐射计和被动微电热计公开(公告)号：US20070194238A1
公开(公告)日：2007-08-23
申请号：US10591579
申请日：2005-03-04
IPC分类号： G01J5/00
CPC分类号： G01J5/10 , G01J5/02 , G01J5/024 , G01J5/06 , G01J5/20 , G01J2005/066 , G01J2005/068
摘要： The invention relates to a passive microbolometer (12), comprising a reflective screen (17) and a suspended membrane with the function of radiation absorber, thermometer and electrical connection. The membrane is supported by at least two anchor elements (15) fixed to a support substrate (16). The reflective screen (17) may be embodied by at least one layer (18) of metallic material with a thickness of the order of 500 Å to 2000 Å. The screen (17) is arranged beneath the membrane in electrical contact with the membrane absorber element (13) such as to reduce the area resistance of the unit made up of the screen (17) and the absorbing element (13) and to avoid the absorption of radiation by the latter.
摘要翻译： 本发明涉及一种被动微电热计（12），包括反射屏（17）和具有辐射吸收器，温度计和电连接功能的悬浮膜。 膜由固定到支撑衬底（16）的至少两个锚定元件（15）支撑。 反射屏（17）可以由至少一层厚度为500埃至2000埃的金属材料层（18）来实现。 屏幕（17）布置在膜下面与膜吸收体元件（13）电接触，以减小由屏幕（17）和吸收元件（13）组成的单元的面积电阻，并避免 后者吸收辐射。
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6.发明授权Method for production of a device for thermal detection of radiation comprising an active microbolometer and a passive microbolometer 失效用于生产用于辐射的热检测的装置的方法，包括主动微热辐射计和被动微电热计公开(公告)号：US07541582B2
公开(公告)日：2009-06-02
申请号：US10591579
申请日：2005-03-04
IPC分类号： G01J5/00
CPC分类号： G01J5/10 , G01J5/02 , G01J5/024 , G01J5/06 , G01J5/20 , G01J2005/066 , G01J2005/068
摘要： The invention relates to a passive microbolometer (12), comprising a reflective screen (17) and a suspended membrane with the function of radiation absorber, thermometer and electrical connection. The membrane is supported by at least two anchor elements (15) fixed to a support substrate (16). The reflective screen (17) may be embodied by at least one layer (18) of metallic material with a thickness of the order of 500 Å to 2000 Å. The screen (17) is arranged beneath the membrane in electrical contact with the membrane absorber element (13) such as to reduce the area resistance of the unit made up of the screen (17) and the absorbing element (13) and to avoid the absorption of radiation by the latter.
摘要翻译： 本发明涉及一种被动微电热计（12），包括反射屏（17）和具有辐射吸收器，温度计和电连接功能的悬浮膜。 膜由固定到支撑衬底（16）的至少两个锚定元件（15）支撑。 反射屏（17）可以由至少一层厚度为500埃至2000埃的金属材料层（18）来实现。 屏幕（17）布置在膜下面与膜吸收体元件（13）电接触，以减小由屏幕（17）和吸收元件（13）组成的单元的面积电阻，并避免 后者吸收辐射。
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公开(公告)号：US06320189B1
公开(公告)日：2001-11-20
申请号：US09352232
申请日：1999-07-13
IPC分类号： H01L27142
CPC分类号： G01J5/08 , G01J5/0846 , G01J5/20 , H01L27/14669 , H04N5/332
摘要： A device for the detection of multi-spectral infrared and visible radiation using a bolometric detector having at least one active layer and two control electrodes for the detection of both infrared and visible radiation, and also using at least one photodetector having at least two active layers and two control electrodes for detecting solely visible radiation. The device is uncooled, and the two detectors are superimposed and combined with one-another for forming the same sensitive element.
摘要翻译： 一种用于使用具有至少一个有源层和两个控制电极的测温检测器来检测多光谱红外和可见辐射的装置，用于检测红外和可见光辐射，并且还使用至少一个具有至少两个有源层的光电检测器 以及用于仅检测可见光的两个控制电极。 该装置是非冷却的，并且两个检测器被叠加并且彼此组合以形成相同的敏感元件。
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8.发明授权Bolometric detector with intermediate electrical insulation and manufacturing process for this detector 有权用于该检测器的中间电绝缘和制造工艺的测温探测器公开(公告)号：US06426539B1
公开(公告)日：2002-07-30
申请号：US09604916
申请日：2000-06-28
申请人： Michel Vilain , Jean-Jacques Yon
发明人： Michel Vilain , Jean-Jacques Yon
IPC分类号： H01L4300
CPC分类号： G01J5/20
摘要： Bolometric detector with intermediate electrical insulation and manufacturing process for this detector. According to the invention, at least two electrodes are formed facing the same face of a layer of bolometric material (5) and starting from the same layer of conducting material (8). Areas (8A, 8B) belonging to the two electrodes are electrically isolated from each other and electrically isolated from the layer of bolometric material, while other areas (7A, 7B) belonging to the two electrodes are separated from each other and are in electrical contact with this layer. The invention is particularly applicable to infrared imagery.
摘要翻译： 根据本发明，至少两个电极被形成为面向与一层的热辐射材料（5）相同的面，并且从相同的导电材料层（8）开始。 属于两个电极的区域（8A，8B）彼此电隔离并且与热应变材料层电隔离，而属于两个电极的其它区域（7A，7B）彼此分离并且电接触 与这层。 本发明特别适用于红外图像。
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公开(公告)号：US5912464A
公开(公告)日：1999-06-15
申请号：US905059
申请日：1997-08-01
申请人： Michel Vilain , Jean-Jacques Yon
发明人： Michel Vilain , Jean-Jacques Yon
IPC分类号： G01J1/02 , G01J5/02 , G01J5/20 , H01L27/146 , H01L31/09 , H01L37/00 , H01C17/075
CPC分类号： G01J5/20 , H01L27/14669 , H01L31/09
摘要： An infrared detector includes a sensitive part having a sensitive element and conducting elements. The sensitive element includes a layer of material in which the resistivity varies with the temperature. The conducting elements perform the functions of electrodes for the detector and infrared absorber. At least one support element for the sensitive part is capable of positioning the sensitive part, electrically connecting the sensitive part to a readout circuit, and thermally insulating the sensitive part from the rest of the structure. All conducting elements are places on the same surface of the layer of temperature sensitive material. The detector is manufactured according to a forming and etching process.
摘要翻译： 红外检测器包括具有敏感元件和导电元件的敏感部件。 敏感元件包括电阻率随温度变化的材料层。 导电元件执行检测器和红外线吸收器的电极功能。 用于敏感部件的至少一个支撑元件能够定位敏感部件，将敏感部件电连接到读出电路，并将敏感部件与结构的其余部分热绝缘。 所有导电元件都是温度敏感材料层相同表面上的位置。 检测器根据成型和蚀刻工艺制造。
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10.发明申请DEVICE AND METHOD FOR DETECTING INFRARED RADIATION THROUGH A RESISTIVE BOLOMETER MATRIX 有权通过电阻式BOLOMETER矩阵检测红外辐射的装置和方法公开(公告)号：US20120211657A1
公开(公告)日：2012-08-23
申请号：US13416244
申请日：2012-03-09
IPC分类号： G01J5/10
CPC分类号： G01J5/24 , G01J5/20 , G01J5/22 , H04N5/3651
摘要： An infrared radiation detection device comprising: a substrate; a matrix of at least one line of elements for detecting said radiation, each comprising a resistive imaging bolometer, said matrix being formed above the substrate; means for reading the bolometers of the matrix, means for measuring the temperature in at least one point of the substrate; and means for correcting the signal formed from each bolometer as a function of the temperature measured in at least one point of the substrate. The correcting means are capable of correcting the signal formed from the imaging bolometer by means of a predetermined physical model of the temperature behaviour of said signal.
摘要翻译： 一种红外辐射检测装置，包括：基板; 用于检测所述辐射的至少一行元件的矩阵，每个元件包括电阻成像测辐射热计，所述矩阵形成在所述衬底上; 用于读取基质的辐射热测量仪的装置，用于测量衬底的至少一个点的温度的装置; 以及用于根据在基板的至少一个点测量的温度来校正由每个测辐射热计形成的信号的装置。 校正装置能够通过所述信号的温度特性的预定物理模型校正由成像测辐射热谱仪形成的信号。
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