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    Actuator and electronic hardware using the same
    1.
    发明授权
    Actuator and electronic hardware using the same 失效
    执行器和电子硬件使用相同

    公开(公告)号：US07830068B2

    公开(公告)日：2010-11-09

    申请号：US12354182

    申请日：2009-01-15

    申请人： Michihiko Nishigaki ,  Toshihiko Nagano ,  Kazuhiko Itaya ,  Takashi Kawakubo

    发明人： Michihiko Nishigaki ,  Toshihiko Nagano ,  Kazuhiko Itaya ,  Takashi Kawakubo

    IPC分类号： H01L41/08

    CPC分类号： H01H57/00 ,  B81B3/0021 ,  B81B2201/032 ,  H01G5/18 ,  H01H2057/006 ,  H01L41/094 ,  H01L41/0973

    摘要： An actuator includes a first beam, a first fixed part, a second beam, a first connective part, and a first fixed electrode. The first beam extends from a first fixed end to a first connective end, and the first fixed part connects the first fixed end and the substrate and supports the first beam above a main surface of the substrate with a gap. The second beam extends from a second connective end to a first action end and is provided in parallel to the first beam, and has a first division part divided by a first slit extending from the first action end toward the second connective end. The first connective part connects the first connective end and the second connective end and holds the second beam above the main surface of the substrate with a gap. The first fixed electrode is provided on the main surface of the substrate being configured to be opposed to a part of the first division part on a side of the first action end.

    摘要翻译： 致动器包括第一光束，第一固定部分，第二光束，第一连接部分和第一固定电极。 第一光束从第一固定端延伸到第一连接端，并且第一固定部分连接第一固定端和衬底，并且将第一光束以间隙支撑在衬底的主表面上方。 第二光束从第二连接端部延伸到第一动作端部并且平行于第一光束提供，并且具有由从第一动作端向第二连接端部延伸的第一狭缝分割的第一分割部分。 第一连接部分连接第一连接端和第二连接端，并且将第二光束以间隙保持在基板的主表面上方。 第一固定电极设置在基板的主表面上，该主表面被配置为与第一动作端侧的第一分割部分的一部分相对。

    Piezoelectric driven MEMS device
    3.
    发明授权
    Piezoelectric driven MEMS device 失效
    压电式MEMS器件

    公开(公告)号：US07732990B2

    公开(公告)日：2010-06-08

    申请号：US11683755

    申请日：2007-03-08

    申请人： Michihiko Nishigaki ,  Toshihiko Nagano ,  Takashi Miyazaki ,  Kazuhiko Itaya ,  Takashi Kawakubo

    发明人： Michihiko Nishigaki ,  Toshihiko Nagano ,  Takashi Miyazaki ,  Kazuhiko Itaya ,  Takashi Kawakubo

    IPC分类号： H01L41/08

    CPC分类号： B81B3/0072 ,  B81B2201/032 ,  H01G5/18 ,  H01H57/00 ,  H01H2057/006 ,  H01L41/094

    摘要： A MEMS device includes: a first actuator having a first fixed end, including a stacked structure of a first lower electrode, a first piezoelectric film, and a first upper electrode, and being able to be operated by applying voltages to the first lower electrode and the first upper electrode; a second actuator having a second fixed end, being disposed in parallel with the first actuator, including a stacked structure of a second lower electrode, a second piezoelectric film, and a second upper electrode, and being able to be operated by applying voltages to the second lower electrode and the second upper electrode; and an electric circuit element having a first action part connected to the first actuator and a second action part connected to the second actuator.

    摘要翻译： MEMS器件包括：第一致动器，具有第一固定端，包括第一下电极，第一压电膜和第一上电极的堆叠结构，并且能够通过向第一下电极施加电压而操作， 第一上电极; 具有第二固定端的第二致动器，与所述第一致动器平行设置，包括第二下电极，第二压电膜和第二上电极的堆叠结构，并且能够通过向所述第二致动器施加电压而被操作 第二下电极和第二上电极; 以及具有连接到第一致动器的第一作用部分和连接到第二致动器的第二作用部分的电路元件。

    ACTUATOR AND ELECTRONIC HARDWARE USING THE SAME
    5.
    发明申请
    ACTUATOR AND ELECTRONIC HARDWARE USING THE SAME 失效
    使用其的执行器和电子硬件

    公开(公告)号：US20090189487A1

    公开(公告)日：2009-07-30

    申请号：US12354182

    申请日：2009-01-15

    申请人： Michihiko Nishigaki ,  Toshihiko Nagano ,  Kazuhiko Itaya ,  Takashi Kawakubo

    发明人： Michihiko Nishigaki ,  Toshihiko Nagano ,  Kazuhiko Itaya ,  Takashi Kawakubo

    IPC分类号： H02N2/00

    CPC分类号： H01H57/00 ,  B81B3/0021 ,  B81B2201/032 ,  H01G5/18 ,  H01H2057/006 ,  H01L41/094 ,  H01L41/0973

    摘要： An actuator includes a first beam, a first fixed part, a second beam, a first connective part, and a first fixed electrode. The first beam extends from a first fixed end to a first connective end, and the first fixed part connects the first fixed end and the substrate and supports the first beam above a main surface of the substrate with a gap. The second beam extends from a second connective end to a first action end and is provided in parallel to the first beam, and has a first division part divided by a first slit extending from the first action end toward the second connective end. The first connective part connects the first connective end and the second connective end and holds the second beam above the main surface of the substrate with a gap. The first fixed electrode is provided on the main surface of the substrate being configured to be opposed to a part of the first division part on a side of the first action end.

    摘要翻译： 致动器包括第一光束，第一固定部分，第二光束，第一连接部分和第一固定电极。 第一光束从第一固定端延伸到第一连接端，并且第一固定部分连接第一固定端和衬底，并且将第一光束以间隙支撑在衬底的主表面上方。 第二光束从第二连接端部延伸到第一动作端部并且平行于第一光束提供，并且具有由从第一动作端向第二连接端部延伸的第一狭缝分割的第一分割部分。 第一连接部分连接第一连接端和第二连接端，并且将第二光束以间隙保持在基板的主表面上方。 第一固定电极设置在基板的主表面上，该主表面被配置为与第一动作端侧的第一分割部分的一部分相对。

    PIEZOELECTRIC DRIVEN MEMS DEVICE
    7.
    发明申请
    PIEZOELECTRIC DRIVEN MEMS DEVICE 失效
    压电驱动MEMS器件

    公开(公告)号：US20070228887A1

    公开(公告)日：2007-10-04

    申请号：US11683755

    申请日：2007-03-08

    申请人： Michihiko Nishigaki ,  Toshihiko Nagano ,  Takashi Miyazaki ,  Kazuhiko Itaya ,  Takashi Kawakubo

    发明人： Michihiko Nishigaki ,  Toshihiko Nagano ,  Takashi Miyazaki ,  Kazuhiko Itaya ,  Takashi Kawakubo

    IPC分类号： H01L41/00

    CPC分类号： B81B3/0072 ,  B81B2201/032 ,  H01G5/18 ,  H01H57/00 ,  H01H2057/006 ,  H01L41/094

    摘要： A MEMS device includes: a first actuator having a first fixed end, including a stacked structure of a first lower electrode, a first piezoelectric film, and a first upper electrode, and being able to be operated by applying voltages to the first lower electrode and the first upper electrode; a second actuator having a second fixed end, being disposed in parallel with the first actuator, including a stacked structure of a second lower electrode, a second piezoelectric film, and a second upper electrode, and being able to be operated by applying voltages to the second lower electrode and the second upper electrode; and an electric circuit element having a first action part connected to the first actuator and a second action part connected to the second actuator.

    摘要翻译： MEMS器件包括：第一致动器，具有第一固定端，包括第一下电极，第一压电膜和第一上电极的堆叠结构，并且能够通过向第一下电极施加电压而操作， 第一上电极; 具有第二固定端的第二致动器，与所述第一致动器平行设置，包括第二下电极，第二压电膜和第二上电极的堆叠结构，并且能够通过向所述第二致动器施加电压而被操作 第二下电极和第二上电极; 以及具有连接到第一致动器的第一作用部分和连接到第二致动器的第二作用部分的电路元件。

    MEMS variable capacitor having a piezoelectric actuation mechanism based on a piezoelectric thin film
    10.
    发明授权
    MEMS variable capacitor having a piezoelectric actuation mechanism based on a piezoelectric thin film 失效
    具有基于压电薄膜的压电致动机构的MEMS可变电容器

    公开(公告)号：US08189319B2

    公开(公告)日：2012-05-29

    申请号：US12400815

    申请日：2009-03-10

    申请人： Takashi Kawakubo ,  Toshihiko Nagano ,  Michihiko Nishigaki ,  Kazuhiko Itaya

    发明人： Takashi Kawakubo ,  Toshihiko Nagano ,  Michihiko Nishigaki ,  Kazuhiko Itaya

    IPC分类号： H01G5/16 ,  H01G7/00

    CPC分类号： H01G5/16 ,  H01G5/18 ,  H01H2057/006

    摘要： A MEMS variable capacitor includes: a first connection beam having one end fixed to a substrate; a first actuation beam connected to the first connection beam; a second actuation beam connected to the first actuation beam and extending in a reverse direction; a second connection beam having one end fixed to the substrate; a third actuation beam connected to the second connection beam; a fourth actuation beam connected to the third actuation beam and extending in a reverse direction; a movable electrode provided between the second and fourth actuation beams; and a fixed electrode provided on the substrate opposed to the movable electrode. The first to fourth actuation beams have a piezoelectric film sandwiched between a lower electrode and an upper electrode, the first and third actuation beams are placed on a line, the second and fourth actuation beams are placed on a line, and the first and second actuation beams and the third and fourth actuation beams are placed symmetrically about a line.

    摘要翻译： MEMS可变电容器包括：第一连接梁，其一端固定到基板; 连接到第一连接梁的第一致动梁; 连接到第一致动光束并沿相反方向延伸的第二致动光束; 第二连接梁，其一端固定到所述基板; 连接到第二连接梁的第三致动梁; 连接到第三致动光束并沿相反方向延伸的第四致动光束; 设置在所述第二和第四致动光束之间的可动电极; 以及设置在与可动电极相对的基板上的固定电极。 第一至第四致动光束具有夹在下电极和上电极之间的压电膜，第一和第三致动光束被放置在一条线上，第二和第四致动光束被放置在一条线上，并且第一和第二致动 梁和第三和第四致动梁围绕线对称放置。