公开(公告)号：US20050141891A1

公开(公告)日：2005-06-30

申请号：US11013784

申请日：2004-12-17

申请人： Michio Tanaka ,  Masami Yamashita

发明人： Michio Tanaka ,  Masami Yamashita

IPC分类号： G01B11/02 ,  G01N21/41 ,  G03F7/20 ,  G03F9/00 ,  H01L21/027 ,  H01L21/66

CPC分类号： G03F7/705 ,  G03F7/70625

摘要： In optical line width measurement performed using the scatterometry technique, the present invention measures the line width formed on a substrate more accurately than in the prior art. After a predetermined pattern is formed in a resist film on a substrate, the refractive index and the extinction coefficient of the resist film are measured. Based on the measured values, calculation is performed to obtain calculated light intensity distributions of reflected light reflected from a plurality of virtual patterns. The calculated light intensity distributions are stored, and their library is created. The substrate for which the refractive index and so on are measured is irradiated with light, and the light intensity distribution of its reflected light is measured. The light intensity distribution is collated with the calculated light intensity distributions in the library, so that the line width of the virtual pattern having a matching light intensity distribution is regarded as the line width of the real pattern. Since the library of the light intensity distributions of the virtual pattern is created based on the actually measured refractive index and so on after the formation of the pattern, an accurate line width matching the pattern state at the time of measuring the line width is measured.

摘要翻译： 在使用散射测量技术进行的光线宽度测量中，本发明比现有技术更准确地测量在衬底上形成的线宽。 在基板上的抗蚀剂膜中形成预定图案之后，测量抗蚀剂膜的折射率和消光系数。 基于测量值，执行计算以获得从多个虚拟图案反射的反射光的计算的光强度分布。 存储计算的光强度分布，并创建它们的库。 用光照射测定折射率等的基板，测定其反射光的光强度分布。 将光强度分布与库中计算的光强度分布进行比较，使得具有匹配的光强度分布的虚拟图案的线宽被视为实曲线的线宽。 由于在形成图案之后，基于实际测量的折射率等创建虚拟图案的光强度分布的库，因此测量与测量线宽度时的图案状态匹配的精确线宽。

公开(公告)号：US20050150451A1

公开(公告)日：2005-07-14

申请号：US11029401

申请日：2005-01-06

申请人： Michio Tanaka ,  Masami Yamashita

发明人： Michio Tanaka ,  Masami Yamashita

IPC分类号： B05D3/00 ,  B05C11/00 ,  B05C11/08 ,  B05C11/10 ,  G03C5/00 ,  H01L21/00 ,  H01L21/027 ,  H01L21/68

CPC分类号： H01L21/67178 ,  B05C11/08 ,  H01L21/6715 ,  H01L21/67184 ,  H01L21/67288 ,  H01L21/681

摘要： According to the present invention, in a coating treatment apparatus comprising a rotary holding member and a coating solution discharge member, positional adjustment of the holding position of the substrate with respect to the rotary holding member and a discharge position of a coating solution discharge member is quickly and accurately performed, so that the time required for the positional adjustment can be shortened. Further, variations in accuracy of the positional adjustment depending on the degree of proficiency of operator can be eliminated, realizing positional adjustment with a high precision at all times.

摘要翻译： 根据本发明，在包括旋转保持构件和涂布液排出构件的涂布处理装置中，基板相对于旋转保持构件的保持位置和涂布液排出构件的排出位置的位置调整是 快速且准确地执行，从而可以缩短位置调整所需的时间。 此外，可以消除根据操作者的熟练程度的位置调整的精度的变化，始终以高精度实现位置调整。

公开(公告)号：US07375831B2

公开(公告)日：2008-05-20

申请号：US11013784

申请日：2004-12-17

申请人： Michio Tanaka ,  Masami Yamashita

发明人： Michio Tanaka ,  Masami Yamashita

IPC分类号： G01B11/02

CPC分类号： G03F7/705 ,  G03F7/70625

摘要： In optical line width measurement performed using the scatterometry technique, the present invention measures the line width formed on a substrate more accurately than in the prior art. After a predetermined pattern is formed in a resist film on a substrate, the refractive index and the extinction coefficient of the resist film are measured. Based on the measured values, calculation is performed to obtain calculated light intensity distributions of reflected light reflected from a plurality of virtual patterns. The calculated light intensity distributions are stored, and their library is created. The substrate for which the refractive index and so on are measured is irradiated with light, and the light intensity distribution of its reflected light is measured. The light intensity distribution is collated with the calculated light intensity distributions in the library, so that the line width of the virtual pattern having a matching light intensity distribution is regarded as the line width of the real pattern. Since the library of the light intensity distributions of the virtual pattern is created based on the actually measured refractive index and so on after the formation of the pattern, an accurate line width matching the pattern state at the time of measuring the line width is measured.

摘要翻译： 在使用散射测量技术进行的光线宽度测量中，本发明比现有技术更准确地测量在衬底上形成的线宽。 在基板上的抗蚀剂膜中形成预定图案之后，测量抗蚀剂膜的折射率和消光系数。 基于测量值，执行计算以获得从多个虚拟图案反射的反射光的计算的光强度分布。 存储计算的光强度分布，并创建它们的库。 用光照射测定折射率等的基板，测定其反射光的光强度分布。 将光强度分布与库中计算的光强度分布进行比较，使得具有匹配的光强度分布的虚拟图案的线宽被视为实曲线的线宽。 由于在形成图案之后，基于实际测量的折射率等创建虚拟图案的光强度分布的库，因此测量与测量线宽度时的图案状态匹配的精确线宽。

公开(公告)号：US07947215B2

公开(公告)日：2011-05-24

申请号：US12788981

申请日：2010-05-27

申请人： Hikaru Ito ,  Shinji Okada ,  Masami Yamashita

发明人： Hikaru Ito ,  Shinji Okada ,  Masami Yamashita

IPC分类号： B05C11/00

CPC分类号： C21D9/00 ,  C21D9/0056 ,  C21D11/00

摘要： An experiment is conducted in advance, for finding a temperature of a cooling plate attained as a result of balancing between a temperature of a substrate after heat treatment and a temperature of the cooling plate at the time of cooling of the substrate. Then, before heat treatment of a first substrate, the cooling plate is moved to a position above a hot plate, the cooling plate is heated to that temperature, and thereafter heat treatment of the substrate is started.

摘要翻译： 预先进行实验，以获得由于热处理后的基板的温度与冷却基板之间的冷却板的温度之间的平衡而获得的冷却板的温度。 然后，在热处理第一基板之前，将冷却板移动到加热板上方的位置，将冷却板加热至该温度，然后开始对基板进行热处理。

公开(公告)号：US07745347B2

公开(公告)日：2010-06-29

申请号：US11734424

申请日：2007-04-12

申请人： Hikaru Ito ,  Shinji Okada ,  Masami Yamashita

发明人： Hikaru Ito ,  Shinji Okada ,  Masami Yamashita

IPC分类号： C21D11/00

CPC分类号： C21D9/00 ,  C21D9/0056 ,  C21D11/00

摘要： An experiment is conducted in advance, for finding a temperature of a cooling plate attained as a result of balancing between a temperature of a substrate after heat treatment and a temperature of the cooling plate at the time of cooling of the substrate. Then, before heat treatment of a first substrate, the cooling plate is moved to a position above a hot plate, the cooling plate is heated to that temperature, and thereafter heat treatment of the substrate is started.

摘要翻译： 预先进行实验，以获得由于热处理后的基板的温度与冷却基板之间的冷却板的温度之间的平衡而获得的冷却板的温度。 然后，在热处理第一基板之前，将冷却板移动到加热板上方的位置，将冷却板加热至该温度，然后开始对基板进行热处理。

公开(公告)号：US07388644B2

公开(公告)日：2008-06-17

申请号：US11439131

申请日：2006-05-24

申请人： Takayuki Ishino ,  Yuji Yamamoto ,  Shinichi Nakata ,  Masami Yamashita

发明人： Takayuki Ishino ,  Yuji Yamamoto ,  Shinichi Nakata ,  Masami Yamashita

IPC分类号： G02F1/13 ,  G02F1/1335

CPC分类号： G02F1/1362 ,  G02F1/133514 ,  G02F2001/13625

摘要： There is provided a liquid crystal display device including a display screen comprised of a plurality of areas in each of which a pixel pattern is formed, wherein any two areas located adjacent to each other, among the areas, have at least two stitches therebetween.

摘要翻译： 提供了一种液晶显示装置，其包括由多个区域构成的显示屏幕，每个区域中形成有像素图案，其中在区域中彼此相邻定位的任何两个区域之间具有至少两个针脚。

公开(公告)号：US20070130068A1

公开(公告)日：2007-06-07

申请号：US10581676

申请日：2004-12-06

申请人： Naohisa Kitazato ,  Masami Yamashita ,  Katsumi Tokuda ,  Hiroki Murakami ,  Masaya Yamamoto ,  Kouji Miura

发明人： Naohisa Kitazato ,  Masami Yamashita ,  Katsumi Tokuda ,  Hiroki Murakami ,  Masaya Yamamoto ,  Kouji Miura

IPC分类号： G06Q99/00

CPC分类号： H04N21/8355 ,  H04N21/2541 ,  H04N21/26606 ,  H04N21/6405 ,  H04N21/835 ,  H04N21/8549

摘要： In an on-Internet multicasting content delivery system, information on each sub license in ECM (Entitlement Control Message) body includes a license ID as sub license identification information, type information indicative of whether a sub license is for preview or actual viewing and a location indicative of a stored position of the sub license in a license part (number of bytes counted from the top of the ECM body). The license part stores sub licenses.

摘要翻译： 在互联网上多播内容传送系统中，ECM（授权控制消息）主体中的每个子许可证的信息包括许可证ID作为子许可证标识信息，指示副许可是用于预览还是实际观看的类型信息和位置 指示许可证部分中的子许可证的存储位置（从ECM主体的顶部计数的字节数）。 许可证部分存储子许可证。

公开(公告)号：US07067764B2

公开(公告)日：2006-06-27

申请号：US10676132

申请日：2003-10-02

申请人： Shinichi Nakata ,  Takayuki Ishino ,  Masami Yamashita

发明人： Shinichi Nakata ,  Takayuki Ishino ,  Masami Yamashita

IPC分类号： B23K26/00 ,  B23K26/14 ,  B23K26/16 ,  B23K26/18

CPC分类号： G03F7/70475 ,  G03F1/00 ,  G03F7/0007 ,  G03F7/203 ,  G03F7/70791

摘要： Light exposure areas 103 and light masking areas 104 in a sole reticle are arrayed in alternation to one another in both the longitudinal and transverse directions. Substrate is exposed to light by multi-domain light exposure using this reticle so that the respective areas of the reticle exposed to light with respective shots A to B, B to C . . . , N to M are not adjacent to one another in the boundary portions of the reticle shifted for executing the respective shots, thus relaxing the difference in illuminance between the respective shots and the difference in finish of the boundary portions of the shots, such differences becoming imperceptible to human eyes upon displaying liquid crystal display apparatus.

摘要翻译： 单个光罩中的曝光区域103和遮光区域104在纵向和横向方向彼此交替地排列。 通过使用该掩模版的多畴光曝光将基板曝光，使得光掩模的各个区域暴露于相应的照射A至B，B至C。 。 。 在分隔板的边界部分中，N到M彼此不相邻，用于执行各个镜头，从而缓和各镜头之间的照度差和镜头边界部分的完成差异，这些差异变成 在显示液晶显示装置时人眼难以察觉。

公开(公告)号：US07060310B2

公开(公告)日：2006-06-13

申请号：US10647484

申请日：2003-08-25

申请人： Teruo Kowata ,  Mitsutake Sato ,  Takeo Shimomura ,  Masami Yamashita

发明人： Teruo Kowata ,  Mitsutake Sato ,  Takeo Shimomura ,  Masami Yamashita

IPC分类号： A23B4/20 ,  A23B4/24 ,  A23L1/314

CPC分类号： A23B4/24 ,  A23B4/08 ,  A23B4/20 ,  A23L13/428 ,  A23L17/70 ,  A23V2002/00 ,  A23V2200/10 ,  A23V2250/642 ,  A23V2250/636 ,  A23V2250/1578

摘要： Disclosed is an inhibitory agent for, kneaded meat and process for producing fish and meat paste products, especially, kamabokos, and fish sausages. The inhibitory agent comprises (i) a member selected from sorbitol, trehalose, mixture thereof, and another saccharide(s) containing sorbitol and/or trehalose; and (ii) a pH-controlling agent which adjusts a kneaded meat to an alkaline pH. The agent effectively inhibits the protein denaturation of kneaded meat, and fish- and meat-paste products without using phosphate.

摘要翻译： 本发明公开了一种用于揉肉的抑制剂和用于生产鱼和肉糊产品的方法，特别是kamabokos和鱼肠。 抑制剂包括（i）选自山梨糖醇，海藻糖，其混合物和含有山梨糖醇和/或海藻糖的另一种糖的成员; 和（ii）将捏合肉调节至碱性pH的pH控制剂。 该试剂有效地抑制了揉肉，鱼肉和肉酱产品的蛋白质变性，而不使用磷酸盐。

公开(公告)号：US5506903A

公开(公告)日：1996-04-09

申请号：US223217

申请日：1994-04-05

申请人： Masami Yamashita

发明人： Masami Yamashita

IPC分类号： H03M13/00 ,  H03M13/15 ,  H03M13/23 ,  H04H20/00 ,  H04H20/74 ,  H04J99/00 ,  H04L1/00 ,  H04L5/14 ,  H04N7/167 ,  H04N7/24 ,  H04N7/52 ,  H04N7/56

CPC分类号： H04H20/74 ,  H03M13/15 ,  H03M13/23 ,  H04L5/1438 ,  H04N21/2383 ,  H04N21/4382 ,  H04N7/1675 ,  H04N7/52 ,  H04N7/56

摘要： A digital multiplex transmission system wherein the rate of convolution codes can be changed over in accordance with an object of a user without changing the transmission rate. A frame for transmitting system data, first preliminary data, second preliminary data, scramble control data, audio data, video data and Reed-Solomon codes is constructed by allocation of them such that a boundary between each adjacent region may make a vertical straight line. Data of such a frame are coded by convolution coding and then transmitted. When the transmission line is in a deteriorated condition, the rate of the convolution codes is reduced to increase the correcting faculty for the convolution codes. In contrast, when the transmission line is in a good condition, the rate of the convolution codes is increased to transmit a large amount of data.

摘要翻译： 一种数字多路复用传输系统，其中可以根据用户的对象在不改变传输速率的情况下改变卷积码的速率。 通过分配它们来构建用于发送系统数据，第一初步数据，第二初步数据，加扰控制数据，音频数据，视频数据和里德 - 所罗门码的帧，使得每个相邻区域之间的边界可以形成垂直的直线。 这样的帧的数据通过卷积编码进行编码，然后发送。 当传输线处于恶化状态时，卷积码的速率减小，以增加卷积码的校正系统。 相反，当传输线处于良好状态时，卷积码的速率增加以传送大量的数据。