公开(公告)号：US06395064B1

公开(公告)日：2002-05-28

申请号：US09426875

申请日：1999-10-26

申请人： Mindi Xu ,  Richard Udischas ,  Carol Schnepper ,  Joseph Paganessi

发明人： Mindi Xu ,  Richard Udischas ,  Carol Schnepper ,  Joseph Paganessi

IPC分类号： B01D116

CPC分类号： B01D53/0446 ,  B01D3/06 ,  B01D53/053 ,  B01D2258/0216 ,  B01D2259/404 ,  B01D2259/406 ,  F17C7/04 ,  F17C9/02 ,  F17C2221/05 ,  F17C2223/0123 ,  F17C2223/0153 ,  F17C2227/0135 ,  F17C2265/05 ,  F17C2270/0518 ,  Y02C20/10 ,  Y02E60/321

摘要： Provided is a novel system for vaporizing and purifying a gas to produce ultrapure chemical gases employed at a semiconductor processing facility. The system includes a liquified gas source, a vaporization purification bed, and a buffer tank. The liquefied gas source is in communication with the vaporization purification bed to provide a liquefied gas to the bed with an ultra-pure chemical gas generated in the purification bed. The purified gas is subsequently routed to a buffer tank and to a point of use therefrom.

摘要翻译： 提供了一种用于蒸发和净化气体以产生在半导体处理设备中使用的超纯化学气体的新型系统。 该系统包括液化气源，蒸发净化床和缓冲罐。 液化气源与蒸发净化床连通，以在净化床中产生的超纯化学气体向床提供液化气体。 净化的气体随后被引导到缓冲罐并到达使用点。

公开(公告)号：US09034105B2

公开(公告)日：2015-05-19

申请号：US12351723

申请日：2009-01-09

申请人： Trapti Chaubey ,  Mindi Xu

发明人： Trapti Chaubey ,  Mindi Xu

IPC分类号： C23C16/00 ,  C23C16/448

CPC分类号： C23C16/4481

摘要： An apparatus and method for holding a solid precursor in a sublimator such that the solid precursor can be vaporized for saturating a carrier gas. The apparatus may include alternating disks or shelves that form inner and outer passages, as well as spaces between the disks for fluidicly coupling the passages to create a winding, tortuous fluid flow path through the sublimator for optimizing solid vapor saturation. The method may include directing a carrier gas into a sublimation chamber, around the first shelf in the outer passage, over the first shelf in the space, around the second shelf in the inner passage, and back out of the sublimation chamber.

摘要翻译： 一种用于在升华器中保持固体前体的装置和方法，使得固体前体可以蒸发以使载气饱和。 该装置可以包括形成内部和外部通道的交替的盘或架，以及盘之间的空间，用于流体地联接通道，以产生通过升华器的绕曲曲折的流体流动路径，以优化固体蒸气饱和度。 该方法可以包括将载气引导到在外部通道中的第一搁板周围的空间中的第一搁板周围的升华室中，围绕内部通道中的第二搁板，并且从升华室返回。

公开(公告)号：US20060005704A1

公开(公告)日：2006-01-12

申请号：US11009510

申请日：2004-12-13

申请人： Derong Zhou ,  John Borzio ,  Mindi Xu ,  Hwa-Chi Wang ,  Tran Vuong

发明人： Derong Zhou ,  John Borzio ,  Mindi Xu ,  Hwa-Chi Wang ,  Tran Vuong

IPC分类号： B01D53/02

CPC分类号： B01D53/261 ,  B01D53/02 ,  C01C1/024 ,  Y10S203/17

摘要： An ammonia purification system includes a hydrocarbon removal station that removes hydrocarbons from gaseous ammonia via adsorption, a moisture removal station that removes water from gaseous ammonia via adsorption, and a distillation station including a distillation column connected with a condenser to facilitate removal of impurities from ammonia and condensation of gaseous ammonia to form a purified liquid ammonia product. The system further includes a storage tank to receive purified ammonia, a remote station connected with the storage tank, and a vaporizer connected with the storage tank. The vaporizer is configured to receive and vaporize liquid ammonia from the storage tank and deliver gaseous ammonia back to the storage tank so as to facilitate pumping of the ammonia to the remote station based upon a vapor pressure established within the storage tank.

摘要翻译： 氨净化系统包括通过吸附从气态氨除去烃的除烃站，通过吸附从气态氨除去水的除湿站，以及包括与冷凝器连接的蒸馏塔以便于从氨除去杂质的蒸馏站 和气态氨的缩合形成纯化的液氨产物。 该系统还包括用于接收净化氨的储罐，与储罐连接的远程站以及与储存罐连接的蒸发器。 蒸发器被配置为从储罐接收和蒸发液氨，并将气态氨返回到储罐，以便于基于在储罐内建立的蒸汽压力将氨泵送到远程站。

公开(公告)号：US06168048A

公开(公告)日：2001-01-02

申请号：US09158740

申请日：1998-09-22

申请人： Mindi Xu ,  Xavier Vigor

发明人： Mindi Xu ,  Xavier Vigor

IPC分类号： G01F1100

CPC分类号： B67D7/025 ,  B67D1/045 ,  Y02E60/34

摘要： Briefly, this invention uses one or more pressure vessels having installed therein on its inside a balloon of flexible and non-expandable wall to smoothly and continuously deliver a chemical to any end user without contamination and gas dissolution. Since the balloon installed inside the pressure vessel isolates a high pressure gas from the chemicals, gas dissolution in the chemical and the resulted gas bubble problems are effectively eliminated. Further, contaminants in the high pressure gas which fills the balloon will not be transferred into the chemical and the extremely toxic chemical will not be transferred into the gas to be exhausted as a serious environmental issue. Unlike the vacuum/pressure system, the contamination by the ambient air leaking into the system is avoided because the disclosed delivery system is always with the pressure higher or equal to the ambient pressure.

摘要翻译： 简而言之，本发明使用一个或多个压力容器，其内部安装有柔性和不可膨胀壁的气球，以平稳且连续地将化学品输送到任何最终用户，而不会污染和气体溶解。 由于安装在压力容器内的气囊将化学物质中的高压气体隔离，因此气体溶解在化学物质中并导致气泡问题得到有效的消除。 此外，填充气球的高压气体中的污染物将不会转移到化学品中，并且极其有毒的化学物质将不会作为严重的环境问题转移到待排出的气体中。 与真空/压力系统不同，避免了泄漏到系统中的环境空气的污染，因为所公开的输送系统总是具有高于或等于环境压力的压力。

公开(公告)号：US07334708B2

公开(公告)日：2008-02-26

申请号：US10064220

申请日：2002-06-21

申请人： Mindi Xu ,  Tay Sayasane ,  Joseph E. Paganessi ,  Gregory M. Jursich ,  Naoyuki Nakamoto ,  Yukinobu Nishikawa ,  Herve E. Dulphy ,  Guillaume Rameau ,  Lorrin Honda

发明人： Mindi Xu ,  Tay Sayasane ,  Joseph E. Paganessi ,  Gregory M. Jursich ,  Naoyuki Nakamoto ,  Yukinobu Nishikawa ,  Herve E. Dulphy ,  Guillaume Rameau ,  Lorrin Honda

IPC分类号： B67D5/58

CPC分类号： B08B9/032 ,  C03B19/1415 ,  C03B37/01413 ,  C03B2207/32 ,  C23C16/448 ,  C23C16/45561 ,  F17C9/02 ,  F17C2205/0332 ,  F17C2205/0338 ,  F17C2221/014 ,  F17C2221/016 ,  F17C2221/017 ,  F17C2221/05 ,  F17C2223/0123 ,  F17C2223/033 ,  F17C2227/044 ,  F17C2227/045 ,  F17C2270/0518

摘要： Integral blocks, chemical delivery systems and methods for delivering an ultrapure chemical to a point of use or to another integral block are provided. More particularly, the integral blocks include a recharge container block, a pressurization gas block, a purge gas block, a waste recovery block, a vacuum block, a solvent supply block, a degas block, a control block, and a filtration block. Various integral blocks may be selected to form a chemical delivery system, which is particularly suited for a given application. A chemical delivery system will typically comprise a chemical container block, a chemical delivery block, and a point of use in line with the chemical container block and chemical delivery block, as well as one or more integral blocks. The invention also relates to a method for delivering an ultrapure chemical from a chemical container to a point of use, by connecting a chemical container block, containing an ultrapure chemical, to a chemical delivery block and introducing the ultrapure chemical to a point of use. The methods may also include the use of one or more integral blocks. The chemical delivery systems and methods of the invention may be used in a variety of applications. In particular, the invention may be used in electronics fabrication, optical fiber manufacture or semiconductor manufacture.

摘要翻译： 提供了一体化块，化学传递系统和将超纯化学品输送到使用点或另一整体块的方法。 更具体地，积分块包括再充电容器块，加压气体块，吹扫气体块，废物回收块，真空块，溶剂供应块，脱气块，控制块和过滤块。 可以选择各种积分块以形成特别适用于给定应用的化学物质输送系统。 化学品输送系统通常将包括化学容器块，化学物质输送块和符合化学容器块和化学物质输送块的使用点以及一个或多个整体块。 本发明还涉及通过将含有超纯化学品的化学容器块连接到化学物质输送块并将超纯化学品引入到使用点，将超纯化学品从化学容器输送到使用点的方法。 所述方法还可以包括使用一个或多个积分块。 本发明的化学输送系统和方法可以用于各种应用中。 特别地，本发明可用于电子制造，光纤制造或半导体制造。

公开(公告)号：US20050256335A1

公开(公告)日：2005-11-17

申请号：US11095656

申请日：2005-04-01

申请人： Ovidiu Marin ,  Manuel Binoist ,  Mindi Xu

发明人： Ovidiu Marin ,  Manuel Binoist ,  Mindi Xu

IPC分类号： F25J3/04 ,  C07C51/255 ,  F28D21/00

CPC分类号： F25J3/04018 ,  F25J3/04115 ,  F25J3/04133 ,  F25J3/04527 ,  F25J3/04563 ,  F25J3/04581 ,  F25J3/046 ,  F25J2210/04 ,  F25J2240/02 ,  F25J2245/02 ,  F25J2245/40

摘要： A chemical manufacturing system includes an air compressor configured to receive and pressurize a stream of air to a selected pressure, an air separation unit configured to receive pressurized air from the air compressor and generate a stream of oxygen and a stream of nitrogen at selected purity levels from the pressurized air, a chemical generation system configured to receive at least the stream of oxygen from the air separation unit, and a reactant supply to provide a reactant to the chemical generation system. During system operation, the reactant is oxidized to form a product within the chemical generation system. In one embodiment, the reactant is paraxylene, and the chemical generation system produces a terephthalic acid product.

摘要翻译： 化学制造系统包括被配置为将空气流接收并加压到选定压力的空气压缩机，空气分离单元，其构造成从空气压缩机接收加压空气，并产生氧气流和选定纯度水平的氮气流 来自加压空气的构造成从空气分离单元接收至少一氧气流的化学生成系统以及向化学发生系统提供反应物的反应物供应源。 在系统运行过程中，反应物被氧化形成化学发生系统内的产物。 在一个实施方案中，反应物是对二甲苯，化学发生系统产生对苯二甲酸产物。

公开(公告)号：US06899116B2

公开(公告)日：2005-05-31

申请号：US10830953

申请日：2004-04-23

申请人： Mindi Xu ,  Hwa-Chi Wang ,  Herve E. Dulphy

发明人： Mindi Xu ,  Hwa-Chi Wang ,  Herve E. Dulphy

IPC分类号： B24B37/04 ,  B24B57/02 ,  C12N15/12 ,  F04F1/06 ,  H01L21/304

CPC分类号： B24B37/04 ,  B24B57/02 ,  Y10T137/0396 ,  Y10T137/3124 ,  Y10T137/3127 ,  Y10T137/3133

摘要： Apparatus and processes are presented to contact a dry, preferably high purity inert gas with a chemical composition in a pressure vessel, or a wetting composition, to form a wet inert gas, which is then used to pressurize the chemical composition out of the pressure vessel. No additional space is needed for an external humidifier. Since a very small amount of vapor is needed to form a wet inert gas, the composition of chemical composition will not be significantly affected.

摘要翻译： 提供了装置和方法，以将干燥的，优选高纯度的惰性气体与压力容器或润湿组合物中的化学组成接触，以形成湿惰性气体，然后将其用于将化学组合物从压力容器 。 外部加湿器不需要额外的空间。 由于需要非常少量的蒸气来形成湿惰性气体，所以化学成分的组成不会受到显着的影响。

公开(公告)号：US20050054211A1

公开(公告)日：2005-03-10

申请号：US10879530

申请日：2004-06-30

申请人： Mindi Xu ,  Tay Sayasane ,  Jean-Marc Girard

发明人： Mindi Xu ,  Tay Sayasane ,  Jean-Marc Girard

IPC分类号： C01B33/107 ,  C07F7/20 ,  H01L21/311 ,  H01L21/302 ,  H01L21/461

CPC分类号： C01B33/10784 ,  C07F7/20

摘要： Systems and methods of purifying a silicon-containing material include the step of directing the silicon-containing material in a liquid state through an adsorption unit including an adsorbent material to facilitate adsorption of at least one component from the silicon-containing material. Alternatively, the silicon-containing material is directed, in liquid state and/or gaseous state, through two or more purification units, including an adsorption unit, a vaporization unit, a filter unit and a condenser. The silicon-containing material can be a low-k silicon-containing material such as trimethylsilane, tetramethylsilane, dimethyldimethoxysilane, tetramethylcyclotetrasiloxane, octamethylcyclotetrasiloxane, dimethylphenyl silane, and dimethyldivinyl silane.

摘要翻译： 纯化含硅材料的系统和方法包括将含硅材料以液态引导通过包括吸附材料的吸附单元以便于从含硅材料吸附至少一种组分的步骤。 或者，含硅材料以液态和/或气态通过包括吸附单元，蒸发单元，过滤器单元和冷凝器的两个或更多个净化单元。 含硅材料可以是低k含硅材料，如三甲基硅烷，四甲基硅烷，二甲基二甲氧基硅烷，四甲基环四硅氧烷，八甲基环四硅氧烷，二甲基苯基硅烷和二甲基二乙烯基硅烷。

公开(公告)号：US07812188B2

公开(公告)日：2010-10-12

申请号：US11608096

申请日：2006-12-07

申请人： Mindi Xu ,  Trapti Chaubey

发明人： Mindi Xu ,  Trapti Chaubey

IPC分类号： C07F7/04

CPC分类号： C07F7/20 ,  C07F7/21

摘要： A method for purifying organosilicon precursor compounds is provided. It includes preparation of the adsorbent with a treating compound. The thus-treated adsorbents can be used to remove impurities such as organic impurities and moisture from a composition containing an organosilicon containing compound. In this manner, it is able to purify organosilicon precursors (or solutions containing organosilicon precursors) without inducing decomposition of the organosilicon precursor.

摘要翻译： 提供了一种纯化有机硅前体化合物的方法。 它包括用处理化合物制备吸附剂。 这样处理的吸附剂可用于从含有机硅化合物的组合物中除去有机杂质和水分等杂质。 以这种方式，能够纯化有机硅前体（或含有机硅前体的溶液）而不引起有机硅前体的分解。

公开(公告)号：US07297181B2

公开(公告)日：2007-11-20

申请号：US11009510

申请日：2004-12-13

申请人： Derong Zhou ,  John P. Borzio ,  Mindi Xu ,  Hwa-Chi Wang ,  Tran Vuong

发明人： Derong Zhou ,  John P. Borzio ,  Mindi Xu ,  Hwa-Chi Wang ,  Tran Vuong

IPC分类号： C01C1/02 ,  B01D53/04

CPC分类号： B01D53/261 ,  B01D53/02 ,  C01C1/024 ,  Y10S203/17

摘要： An ammonia purification system includes a hydrocarbon removal station that removes hydrocarbons from gaseous ammonia via adsorption, a moisture removal station that removes water from gaseous ammonia via adsorption, and a distillation station including a distillation column connected with a condenser to facilitate removal of impurities from ammonia and condensation of gaseous ammonia to form a purified liquid ammonia product. The system further includes a storage tank to receive purified ammonia, a remote station connected with the storage tank, and a vaporizer connected with the storage tank. The vaporizer is configured to receive and vaporize liquid ammonia from the storage tank and deliver gaseous ammonia back to the storage tank so as to facilitate pumping of the ammonia to the remote station based upon a vapor pressure established within the storage tank.

摘要翻译： 氨净化系统包括通过吸附从气态氨除去烃的除烃站，通过吸附从气态氨除去水的除湿站，以及包括与冷凝器连接的蒸馏塔以便于从氨除去杂质的蒸馏站 和气态氨的缩合形成纯化的液氨产物。 该系统还包括用于接收净化氨的储罐，与储罐连接的远程站以及与储存罐连接的蒸发器。 蒸发器被配置为从储罐接收和蒸发液氨，并将气态氨返回到储罐，以便于基于在储罐内建立的蒸汽压力将氨泵送到远程站。