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43 条记录 (耗时 0.037 秒)

    Method of remedying deterioration of insulating film
    2.
    发明授权
    Method of remedying deterioration of insulating film 有权
    补救绝缘膜劣化的方法

    公开(公告)号：US08088686B2

    公开(公告)日：2012-01-03

    申请号：US12226422

    申请日：2007-04-18

    申请人： Shuji Nagano ,  Satoshi Hasaka ,  Minoru Inoue ,  Toshinori Shibata

    发明人： Shuji Nagano ,  Satoshi Hasaka ,  Minoru Inoue ,  Toshinori Shibata

    IPC分类号： H01L21/4763

    CPC分类号： H01L21/31633 ,  H01L21/02126 ,  H01L21/02203 ,  H01L21/02274 ,  H01L21/02282 ,  H01L21/02337 ,  H01L21/02343 ,  H01L21/3105

    摘要： The present invention provides a method of remedying deterioration of an insulating film which, during the remedial treatment of an insulating film deteriorated by plasma treatment, does not leave residual remedial agent on the wiring material such as the copper wiring layer, can be conducted using a dry process, and exhibits excellent applicability to mass production. The insulating film that has been deteriorated by plasma treatment is brought into contact with a remedial agent composed of a compound with a molecular structure having at least one of a nitro group and a carbonyl group, and at least one of a hydrocarbon group and a hydrogen group.

    摘要翻译： 本发明提供一种补偿绝缘膜的劣化的方法，其在通过等离子体处理劣化的绝缘膜的补救处理中，不会在诸如铜布线层的布线材料上留下残留的补救剂，可以使用 干法，对大批量生产具有优异的适用性。 通过等离子体处理劣化的绝缘膜与由具有至少一个硝基和羰基的分子结构的化合物组成的补救剂与烃基和氢中的至少一种接触 组。

    Hydrophilic inorganic coating film and composition made from alkoxysilane and silica
    4.
    发明授权
    Hydrophilic inorganic coating film and composition made from alkoxysilane and silica 失效
    亲水性无机涂膜和由烷氧基硅烷和二氧化硅制成的组合物

    公开(公告)号：US06303229B2

    公开(公告)日：2001-10-16

    申请号：US09445350

    申请日：1999-12-08

    申请人： Koichi Takahama ,  Minoru Inoue ,  Junko Ikenaga ,  Shoichi Nakamoto

    发明人： Koichi Takahama ,  Minoru Inoue ,  Junko Ikenaga ,  Shoichi Nakamoto

    IPC分类号： B32B904

    CPC分类号： C09D183/02 ,  Y10T428/31663

    摘要： The present invention provides a process for forming a hydrophilic inorganic coated film on a surface of a base material, the process comprising the steps of: (1) preparing an inorganic coating composition which contains, as a major component, a silicone resin obtained by hydrolyzing and condensation-polymerizing only the tetra-functional alkoxysilane represented by the formula: Si(OR)4 [wherein R represents an alkyl group having carbon atoms up to and including 7 or an aryl group], and has a total solid content of not more than 5% by weight; (2) applying the inorganic coating composition to a surface of the base material to form a coated layer; and (3) drying and curing the coated layer to form a cured coated film having a thickness of 0.01 to 0.5 &mgr;m. The hydrophilic inorganic coated film formed by the process of the present invention is highly hydrophilic just after the film is formed, even in the case that it is not irradiated with ultraviolet rays.

    摘要翻译： 本发明提供了在基材表面形成亲水性无机涂膜的方法，该方法包括以下步骤：（1）制备一种无机涂料组合物，其中以无机涂料组合物为主要成分， 并且仅使由式（Si）（OR）4表示的四官能烷氧基硅烷进行缩聚：[其中，R表示碳原子数为7以上的烷基或芳基]，总固体成分不多 超过5％重量; （2）将无机涂料组合物涂布在基材的表面上以形成涂层; 和（3）干燥和固化涂层以形成厚度为0.01至0.5μm的固化涂膜。 通过本发明的方法形成的亲水性无机涂膜即使在没有用紫外线照射的情况下，在形成膜之后即具有高亲水性。

    Mode coupled tuning fork type quartz crystal vibrator and method of tuning
    7.
    发明授权
    Mode coupled tuning fork type quartz crystal vibrator and method of tuning 失效
    模式耦合音叉式石英晶体振子及其调谐方法

    公开(公告)号：US4377765A

    公开(公告)日：1983-03-22

    申请号：US240045

    申请日：1981-03-03

    申请人： Shigeru Kogure ,  Eishi Momosaki ,  Minoru Inoue

    发明人： Shigeru Kogure ,  Eishi Momosaki ,  Minoru Inoue

    IPC分类号： H03H9/215 ,  H01L41/08

    CPC分类号： H03H9/215 ,  Y10T29/42

    摘要： A mode coupled tuning fork type quartz crystal vibrator utilizing two different vibrational modes is provided. The vibrator includes at least one electrode on each tuning fork arm for adjusting the resonant frequency of the main vibration and an electrode for adjusting the frequency-temperature characteristic of the vibrator. The main vibration is in the flexural mode (F.sub.1) and the sub-vibration is in the torsional mode (T.sub.0). The resonant frequency of the first overtone in the flextural mode is designated by f.sub.F and the resonant frequency of the fundamental vibration in the torsional mode is denoted by f.sub.T. The difference between f.sub.F and f.sub.T defined as .DELTA.f=f.sub.F -f.sub.T determines the frequency-temperature characteristics of the mode coupled vibrator.The electrodes for adjusting f.sub.F are substantially triangular in shape and the electrodes for adjusting f.sub.T are substantially rectangular in shape. These electrodes are disposed at positions near the top of each tuning fork arm and on both principal surfaces of the vibrators. The resonant frequencies are adjusted by removing a portion of electrode material or adding a strip of metal to the electrode. Preselected oscillation frequency and frequency-temperature characteristics in the form of a cubic curve at ambient temperatures are obtained by first adjusting .DELTA.f to a preselected value .DELTA.f.sub.O and then adjusting f.sub.F to a preselected value f.sub.F0 at the same time maintaining .DELTA.f at the value .DELTA.f.sub.0.

    摘要翻译： 提供了利用两种不同振动模式的模式耦合音叉型石英振子。 振子包括用于调节主振动的谐振频率的每个音叉臂上的至少一个电极和用于调节振动器的频率 - 温度特性的电极。 主振动处于弯曲模式（F1），副振动处于扭转模式（T0）。 弯曲模式中第一个泛音的谐振频率由fF表示，扭转模式下的基波振动的谐振频率由fT表示。 定义为DELTA f = fF-fT的fF和fT之间的差异决定了模式耦合振动器的频率 - 温度特性。 用于调节fF的电极的形状基本上是三角形，并且用于调节fT的电极基本上是矩形的。 这些电极设置在靠近每个音叉臂顶部的位置和振动器的两个主表面上。 通过去除电极材料的一部分或向电极添加金属条来调节谐振频率。 通过首先将DELTA f调整为预选值DELTA fO，然后将fF调整到预选值fF0，同时将DELTA f保持在该值，从而获得环境温度下三次曲线形式的预选振荡频率和频率 - 温度特性 DELTA f0。

    Method of manufacturing a semiconductor device and processing apparatus
    8.
    发明申请
    Method of manufacturing a semiconductor device and processing apparatus 有权
    制造半导体器件和处理装置的方法

    公开(公告)号：US20090130860A1

    公开(公告)日：2009-05-21

    申请号：US12216596

    申请日：2008-07-08

    申请人： Hironobu Miya ,  Eisuke Nishitani ,  Yuji Takebayashi ,  Masanori Sakai ,  Hirohisa Yamazaki ,  Toshinori Shibata ,  Minoru Inoue

    发明人： Hironobu Miya ,  Eisuke Nishitani ,  Yuji Takebayashi ,  Masanori Sakai ,  Hirohisa Yamazaki ,  Toshinori Shibata ,  Minoru Inoue

    IPC分类号： H01L21/31 ,  C23C16/00

    CPC分类号： C23C16/4405 ,  H01L21/3141 ,  H01L21/31645

    摘要： To remove the deposit including a high dielectric constant film deposited on an inside of a processing chamber, by using a cleaning gas activated only by heat. The method includes the steps of: loading a substrate or a plurality of substrates into the processing chamber; performing processing to deposit the high dielectric constant film on the substrate by supplying processing gas into the processing chamber; unloading the processed substrate from the inside of the processing chamber; and cleaning the inside of the processing chamber by supplying a halide gas and an oxygen based gas into the processing chamber, and removing the deposit including the high dielectric constant film deposited on the inside of the processing chamber, and in the step of cleaning the inside of the processing chamber, the concentration of the oxygen based gas in the halide gas and the oxygen based gas is set to be less than 7%.

    摘要翻译： 为了除去沉积在处理室内部的高介电常数膜的沉积物，通过使用仅通过加热活化的清洗气体。 该方法包括以下步骤：将衬底或多个衬底装载到处理室中; 进行处理，通过向处理室供给处理气体，将高介电常数膜沉积在基板上; 从处理室的内部卸载经处理的基板; 以及通过向所述处理室中供给卤化物气体和氧气基气体来清洁所述处理室的内部，以及去除包括沉积在所述处理室内部的所述高介电常数膜的沉积物，以及在所述处理室的内部清洁步骤 处理室中的卤化物气体和氧气基气体中的氧基气体的浓度设定为小于7％。

    Vehicle front body structure
    9.
    发明申请
    Vehicle front body structure 失效
    车前体结构

    公开(公告)号：US20070215402A1

    公开(公告)日：2007-09-20

    申请号：US11709121

    申请日：2007-02-22

    申请人： Shin Sasaki ,  Minoru Inoue ,  Takahiro Aonuma ,  Hiroaki Fujii

    发明人： Shin Sasaki ,  Minoru Inoue ,  Takahiro Aonuma ,  Hiroaki Fujii

    IPC分类号： B60K5/00 ,  B60J7/00

    CPC分类号： B62D25/088 ,  B62D21/152 ,  B62D29/008

    摘要： A bridge-shaped frame member is disposed on a front side frame in front of a suspension tower so as to extend vertically and stride over a No. 4 mount. Accordingly, there can be provided a vehicle front body structure that can attain a proper energy absorption of the front side frame with its axial compression can be attained at a vehicle crash.

    摘要翻译： 桥式框架构件设置在悬架的前方的前侧框架上，以便垂直延伸并跨越4号底座。 因此，可以提供一种可以在车辆碰撞时获得能够获得前侧框架的适当能量吸收并且其轴向压缩的车辆前体结构。