公开(公告)号：US5767962A

公开(公告)日：1998-06-16

申请号：US755352

申请日：1996-11-25

申请人： Masayuki Suzuki ,  Noriyuki Nose ,  Minoru Yoshii ,  Kyoichi Miyazaki ,  Toshihiko Tsuji ,  Seiji Takeuchi

发明人： Masayuki Suzuki ,  Noriyuki Nose ,  Minoru Yoshii ,  Kyoichi Miyazaki ,  Toshihiko Tsuji ,  Seiji Takeuchi

IPC分类号： G01N21/88 ,  G01B11/30 ,  G01N21/94 ,  G01N21/956 ,  G03F1/84 ,  H01L21/66 ,  G01N21/00

CPC分类号： G01N21/94

摘要： An inspection system includes a light source, a scanning device for scanning a surface to be inspected, with light from the light source, wherein the scanning device includes an optical member disposed with inclination with respect to a primary scan direction, the optical member being adapted to provide a convergent light being converged to form a spot at a distance changeable with the position of a scan, and a light receiving device for receiving scattered light from the surface.

摘要翻译： 检查系统包括光源，用于扫描来自光源的光的扫描装置，其中所述扫描装置包括相对于主扫描方向倾斜设置的光学构件，所述光学构件适于 以提供会聚的光会聚在一起形成与扫描位置可变的距离的光点，以及用于接收来自表面的散射光的光接收装置。

公开(公告)号：US5861952A

公开(公告)日：1999-01-19

申请号：US984509

申请日：1992-12-02

申请人： Toshihiko Tsuji ,  Kyoichi Miyazaki ,  Seiji Takeuchi ,  Minoru Yoshii ,  Noriyuki Nose

发明人： Toshihiko Tsuji ,  Kyoichi Miyazaki ,  Seiji Takeuchi ,  Minoru Yoshii ,  Noriyuki Nose

IPC分类号： G01N21/94 ,  G01B9/02 ,  G01N21/88

CPC分类号： G01N21/94

摘要： A light source portion having an acousto-optic element produces a laser beam of two light components having a frequency difference .DELTA.w and having registered polarization directions. The laser beam is subsequently divided by a half mirror. One of the divided laser beams is detected by a photoelectric detector as reference light, and a corresponding signal is applied to a synchronism detector. The other laser beam is projected by a scanning optical system to the surface of, e.g., an original to be examined to scan the same. At the position on the surface irradiated by the scanning light spot, the laser beam is modulated at a beat frequency .DELTA.w on the basis of optical heterodyne interference. A synchronism detector detects a signal corresponding to the scattered light from a particle or defect on the surface being examined, in synchronism with the frequency of the reference light, whereby the particle or defect can be detected with a good signal-to-noise ratio.

摘要翻译： 具有声光元件的光源部分产生具有频差DELTA w并具有记录的偏振方向的两个光分量的激光束。 激光束随后被半反射镜分开。 其中一个激光束被光电检测器作为参考光检测，相应的信号被施加到同步检测器。 另一个激光束由扫描光学系统投影到例如要检查的原件的表面以扫描它。 在由扫描光点照射的表面上的位置处，基于光学外差干扰以激光束以拍频DELTA w进行调制。 同步检测器与参考光的频率同步地检测与被检查的表面上的颗粒或缺陷相对应的散射光的信号，从而可以以良好的信噪比检测颗粒或缺陷。

公开(公告)号：US5610715A

公开(公告)日：1997-03-11

申请号：US412309

申请日：1995-03-29

申请人： Minoru Yoshii ,  Kyoichi Miyazaki ,  Seiji Takeuchi

发明人： Minoru Yoshii ,  Kyoichi Miyazaki ,  Seiji Takeuchi

IPC分类号： G01B11/00 ,  G03F7/20 ,  G03F9/00 ,  H01L21/027 ,  H01L21/68 ,  G01B9/02

CPC分类号： G03F7/70775 ,  G03F9/70

摘要： A displacement detecting system includes a scale provided on a surface of a movable object and having a diffraction grating formed along a predetermined direction, a head unit disposed above the surface of the movable object and having a plurality of detection heads, for detecting displacement of the scale in the predetermined direction, the detection heads being disposed along a direction different from the predetermined direction, and a selecting device for selecting at least one detection head out of the detection heads, for detection of a displacement of the scale in the predetermined direction.

摘要翻译： 位移检测系统包括设置在可移动物体的表面上并具有沿着预定方向形成的衍射光栅的标尺，头单元，其设置在可移动物体的表面上方并具有多个检测头，用于检测位移 检测头沿着与预定方向不同的方向设置，以及选择装置，用于从检测头中选择至少一个检测头，以检测标尺在预定方向上的位移。

公开(公告)号：US5486919A

公开(公告)日：1996-01-23

申请号：US76951

申请日：1993-06-15

申请人： Toshihiko Tsuji ,  Seiji Takeuchi ,  Kyoichi Miyazaki ,  Minoru Yoshii ,  Noriyuki Nose ,  Tetsuzo Mori

发明人： Toshihiko Tsuji ,  Seiji Takeuchi ,  Kyoichi Miyazaki ,  Minoru Yoshii ,  Noriyuki Nose ,  Tetsuzo Mori

IPC分类号： G01J9/02 ,  G01J9/04 ,  G01N21/88 ,  G01N21/94 ,  G03F7/20 ,  G01B9/02

CPC分类号： G03F7/70616 ,  G01N21/88 ,  G01N21/94 ,  G03F7/7065 ,  G03F7/70916 ,  G01J2009/0261 ,  G01J9/04 ,  G01N2021/4792 ,  G01N21/8806

摘要： Disclosed is an inspection method and apparatus: wherein (i) first light having a first state of polarization and a first wavelength, and (ii) second light having a second state of polarization, different from the first state of polarization, and a second wavelength, different from the first wavelength are produced; at least the first light is projected to a position of inspection; and heterodyne interference light produced on the basis of the second light and light scattered at the inspection position and having its state of polarization changed, by the scattering, from the first state of polarization, is detected.

摘要翻译： 公开了一种检查方法和装置：其中（i）具有第一偏振状态和第一波长的第一光，以及（ii）具有与第一偏振态不同的第二极化状态的第二光，以及第二波长 ，与第一波长不同; 至少第一个光被投射到检查的位置; 并且检测基于第二光产生的外差干涉光和在检查位置上散射并且具有从第一极化状态通过散射改变其偏振状态的光。

公开(公告)号：US5777744A

公开(公告)日：1998-07-07

申请号：US648417

申请日：1996-05-15

申请人： Minoru Yoshii ,  Masanobu Hasegawa ,  Kyoichi Miyazaki ,  Seiji Takeuchi

发明人： Minoru Yoshii ,  Masanobu Hasegawa ,  Kyoichi Miyazaki ,  Seiji Takeuchi

IPC分类号： G03F7/20 ,  G01B11/00

CPC分类号： G03F7/70558 ,  G03F7/70641 ,  G03F7/70675

摘要： A state-of-formation detecting system for detecting a state of formation of a periodic pattern formed, through exposure light, upon an object with a photosensitive material applied thereto, includes a light projecting device for projecting input light onto the periodic pattern, and a determining device for receiving signal light from the periodic pattern and for detecting a change in the input light, to determine the state of formation of the periodic pattern on the basis of the change in the input light.

摘要翻译： 一种用于检测通过曝光光形成的周期性图案的形成状态的状态检测系统，包括用于将输入光投射到周期性图案上的投光装置，以及 确定装置，用于接收来自周期性图案的信号光并用于检测输入光的变化，以基于输入光的变化确定周期性图案的形成状态。

公开(公告)号：US5652657A

公开(公告)日：1997-07-29

申请号：US467922

申请日：1995-06-06

申请人： Minoru Yoshii ,  Michio Kohno ,  Seiya Miura ,  Kyoichi Miyazaki ,  Toshihiko Tsuji ,  Seiji Takeuchi

发明人： Minoru Yoshii ,  Michio Kohno ,  Seiya Miura ,  Kyoichi Miyazaki ,  Toshihiko Tsuji ,  Seiji Takeuchi

IPC分类号： G01N21/88 ,  G01N21/94 ,  G01N21/956 ,  G03F1/62 ,  G03F1/84 ,  H01L21/027 ,  G01B11/00

CPC分类号： G01N21/94

摘要： An inspection system inspecting an original with a pellicle, which system includes a light source for providing a light beam, a first detecting device for receiving light produced as a result of passage of the light beam through the pellicle, a second detecting device for receiving light produced as a result of non-passage of the light beam through the pellicle, and a processing system for determining information related to transmissivity of the pellicle, on the basis of outputs of the first and second detecting devices.

摘要翻译： 一种用防护薄膜组件检查原件的检查系统，该系统包括用于提供光束的光源，用于接收由于光束通过防护薄膜的结果而产生的光的第一检测装置，用于接收光的第二检测装置 由于不通过光束通过防护薄膜组件而产生的结果，以及用于根据第一和第二检测装置的输出确定与防护薄膜组件的透射率有关的信息的处理系统。

公开(公告)号：US5461474A

公开(公告)日：1995-10-24

申请号：US266512

申请日：1994-06-27

申请人： Minoru Yoshii ,  Noriyuki Nose ,  Masayuki Suzuki ,  Kyoichi Miyazaki ,  Toshihiko Tsuji ,  Seiji Takeuchi

发明人： Minoru Yoshii ,  Noriyuki Nose ,  Masayuki Suzuki ,  Kyoichi Miyazaki ,  Toshihiko Tsuji ,  Seiji Takeuchi

IPC分类号： G01N21/88 ,  G01N21/94 ,  G01N21/956 ,  H01L21/66

CPC分类号： G01N21/956 ,  G01N21/94

摘要： When inspecting the presence of foreign matter on a surface to be inspected by scanning the surface with a light beam from a light source utilizing a scanning system, and receiving scattered light from the surface by a detector, a correlation is utilized between a signal representing first scattered light obtained from the detector when the light beam scans a first line on the surface, and a signal representing second scattered light obtained from the detector when the light beam scans a second line displaced from the first line by a predetermined amount in a direction orthogonal to the direction of the first line.

摘要翻译： 当通过利用扫描系统的来自光源的光束扫描表面并通过检测器接收来自表面的散射光来检查要检查的表面上的异物的存在时，在表示第一 当光束扫描表面上的第一条线时，从检测器获得的散射光，以及当光束沿正交方向扫描从第一条线移位预定量的第二条线时，从检测器获得的第二散射光的信号 到第一行的方向。

公开(公告)号：US5742386A

公开(公告)日：1998-04-21

申请号：US799879

申请日：1997-02-13

申请人： Noriyuki Nose ,  Minoru Yoshii ,  Kyoichi Miyazaki ,  Toshihiko Tsuji ,  Seiji Takeuchi

发明人： Noriyuki Nose ,  Minoru Yoshii ,  Kyoichi Miyazaki ,  Toshihiko Tsuji ,  Seiji Takeuchi

IPC分类号： G01N21/88 ,  G01N21/47 ,  G01N21/94 ,  G01N21/956 ,  G03F7/20 ,  H01L21/027 ,  G01N21/00

CPC分类号： G01N21/4738 ,  G01N21/94 ,  G01N21/956

摘要： An apparatus for detecting foreign matter on a substrate includes an optical system for projecting a light beam onto a pellicle and a pattern surface, a first detector for detecting scattered light from foreign matter on the pattern surface, a second detector for detecting information relating to the reflectivity or the transmittance of the pellicle by detecting a light beam reflected by the pellicle, and a correction unit for correcting an output signal from the first detector using an output signal from the second detector.

摘要翻译： 用于检测基板上的异物的装置包括：用于将光束投射到防护薄膜组件和图案表面上的光学系统;用于检测来自图案表面上异物的散射光的第一检测器，用于检测与图案表面有关的信息的第二检测器; 通过检测由防护薄膜组件反射的光束来检测防护薄膜组件的反射率或透射率;以及校正单元，用于使用来自第二检测器的输出信号来校正来自第一检测器的输出信号。

公开(公告)号：US5834767A

公开(公告)日：1998-11-10

申请号：US790798

申请日：1997-01-30

申请人： Masanobu Hasegawa ,  Minoru Yoshii ,  Kyoichi Miyazaki

发明人： Masanobu Hasegawa ,  Minoru Yoshii ,  Kyoichi Miyazaki

IPC分类号： G01B11/00 ,  G01B11/26 ,  G03F7/20 ,  G03F9/00 ,  H01L21/027

CPC分类号： G03F9/7026

摘要： A detecting system for detecting a surface position of an object, includes a light source, a first grating having a light collecting function, wherein the first grating is illuminated with light from the light source, a second grating having a light collecting function, a first optical system for imaging the first grating onto the object in a direction oblique to the surface of the object, a second optical system for re-imaging the image of the first grating, on the surface of the object, onto the second grating, wherein a moire fringe is produced by the second grating and the re-imaged image of the first grating, and a photodetector for detecting a position of a converged point of convergent light as produced by the moire fringe, wherein the surface position information of the object is determined on the basis of information related to the converged point position as detected by the photodetector.

摘要翻译： 一种用于检测物体的表面位置的检测系统，包括光源，具有聚光功能的第一光栅，其中第一光栅被来自光源的光照射，具有光收集功能的第二光栅，第一光栅 光学系统，用于将物体上的第一光栅成像到物体表面上的方向上;第二光学系统，用于将物体表面上的第一光栅的图像重新成像到第二光栅上，其中， 莫尔条纹由第二光栅和第一光栅的再成像图像产生，以及光电检测器，用于检测由莫尔条纹产生的会聚光的会聚点的位置，其中确定物体的表面位置信息 基于与由光检测器检测到的会聚点位置有关的信息。

公开(公告)号：US6124601A

公开(公告)日：2000-09-26

申请号：US766755

申请日：1996-12-13

申请人： Minoru Yoshii ,  Masanobu Hasegawa ,  Kyoichi Miyazaki

发明人： Minoru Yoshii ,  Masanobu Hasegawa ,  Kyoichi Miyazaki

IPC分类号： G03F7/20 ,  G03F9/00 ,  H01L21/027 ,  G01N21/86

CPC分类号： G03F9/7026

摘要： A position detecting apparatus for detecting the position of a substrate in an interval direction in which the substrate is spaced by an interval form a pattern-printing projection optical system for printing pattern on the substrate includes first and second luminous flux projecting and receiving systems and a detector. The first luminous flux projecting system projects a first luminous flux to the substrate form a direction oblique to the interval direction. The first luminous flux receiving system receives a first luminous flux after the first luminous flux is reflected form the substrate. The second luminous flux projecting system projects a second luminous flux to a reflection member secured to the bottom end of the pattern-printing projection optical system. The second luminous flux receiving system receives the second luminous flux after the second luminous flux is reflected by the reflection member. The detection detects the position of the substrate in the interval direction by detecting the position at which the first luminous flux receiving system receives the first luminous flux and by detecting the position at which the second luminous flux receiving system receives the second luminous flux.

摘要翻译： 一种位置检测装置，用于在衬底间隔开的间隔方向上检测衬底的位置，形成用于在衬底上印刷图案的图案印刷投影光学系统，包括第一和第二光束投射和接收系统，以及 探测器。 第一光通量投影系统将第一光束投射到基板，形成与间隔方向相反的方向。 第一光束接收系统在从基板反射第一光通量之后接收第一光通量。 第二光通量投影系统将第二光束投射到固定到图案印刷投影光学系统的底端的反射构件。 第二光束接收系统在第二光束被反射构件反射之后接收第二光束。 该检测通过检测第一光束接收系统接收到第一光通量的位置，并且通过检测第二光束接收系统接收到第二光束的位置来检测基板在间隔方向上的位置。