Method for the pre-treatment of a photoresist layer on a substrate
surface
    1.
    发明授权
    Method for the pre-treatment of a photoresist layer on a substrate surface 失效
    在基板表面上预处理光致抗蚀剂层的方法

    公开(公告)号:US5849467A

    公开(公告)日:1998-12-15

    申请号:US788442

    申请日:1997-01-28

    CPC分类号: G03F7/168

    摘要: The invention proposes an improved method for the pre-treatment of a photoresist layer formed on a substrate surface prior to pattern-wise exposure of the photoresist layer to actinic rays, in which extraneous portions of the resist layer formed by overspreading of the photoresist solution as in the marginal zone of the patterning area and on the peripheral and back surfaces of the substrate, by dissolving away with a cleaning solution. In contrast to the conventional cleaning solutions consisting entirely or mainly of an organic solvent capable of dissolving the photoresist composition, the cleaning solution used in the inventive method is an aqueous alkaline solution containing a water-soluble alkaline compound dissolved in an aqueous medium consisting of water and a limited amount of a water-miscible organic solvent such as monohydric alcohols, alkyleneglycol monoalkyl ethers and aprotic solvents. The cleaning solution may optionally contain an anti-corrosion agent.

    摘要翻译: 本发明提出了一种用于在将光致抗蚀剂层图案化地曝光于光化射线之前,在基板表面上形成的光致抗蚀剂层的预处理的改进方法,其中通过将光致抗蚀剂溶液的过度扩展形成的抗蚀剂层的外部部分 在图案化区域的边缘区域和衬底的周边和背面上,通过用清洁溶液溶解。 与完全或主要由可溶解光致抗蚀剂组合物的有机溶剂组成的常规清洁溶液相反,本发明方法中使用的清洗溶液是含有溶于水中的水溶性碱性化合物的碱性水溶液, 和有限量的水混溶性有机溶剂如一元醇,亚烷基二醇单烷基醚和非质子溶剂。 清洁溶液可以任选地含有防腐蚀剂。

    Method of removing coating from edge of substrate
    2.
    发明授权
    Method of removing coating from edge of substrate 失效
    从基材边缘去除涂层的方法

    公开(公告)号:US6015467A

    公开(公告)日:2000-01-18

    申请号:US859926

    申请日:1997-05-21

    摘要: In a method of removing a coating from an edge of a substrate a solvent reservoir is filled with a solvent to dissolve and remove a photoresist film, the solvent includes one of dipropylene glycol monoalkyl ether, a mixture of this ether and an easily volatile organic solvent (boiling point of 75-130.degree. C., vapor pressure of 5-75 mmHg at 20.degree. C.), and an alkaline aqueous solution, an edge of a substrate W is horizontally inserted in the reservoir, and thereafter, the edge of the substrate W is immersed in the solvent for a period of time, so as to dissolve and remove a coating such as photoresist from the edge of the substrate. The solvent may be filled into the solvent reservoir either before or after the edge of the substrate is inserted therein, and the method may further involve aspirating the solvent from the reservoir after the substrate edge has been inserted therein.

    摘要翻译: 在从基材的边缘去除涂层的方法中,溶剂储存器填充有溶剂以溶解并除去光致抗蚀剂膜,溶剂包括二丙二醇单烷基醚,该醚和易挥发的有机溶剂的混合物 (沸点75-130℃,20℃蒸气压5-75mmHg)和碱性水溶液,将基材W的边缘水平地插入储存器中,然后将边缘 将衬底W浸入溶剂中一段时间​​,从而从衬底的边缘溶解并除去诸如光致抗蚀剂的涂层。 在将基材的边缘插入其中之前或之后,可以将溶剂填充到溶剂容器中,并且该方法还可以包括在衬底边缘已插入其中之后从储存器吸出溶剂。

    Method for manufacturing semiconductor device and semiconductor device
    3.
    发明授权
    Method for manufacturing semiconductor device and semiconductor device 有权
    半导体器件和半导体器件的制造方法

    公开(公告)号:US09076820B2

    公开(公告)日:2015-07-07

    申请号:US13600373

    申请日:2012-08-31

    摘要: According to one embodiment, a method for manufacturing a semiconductor device includes forming a plurality of insulating isolation sections provided so as to extend in a first direction, isolate the stacked body in a second direction, and have a projection projecting from the stacked body. Each insulating isolation section has a side wall including recessed sections and projected sections repeated along the first direction. The method includes forming a sidewall film on a side wall of the projection of the insulating isolation section, and forming a plurality of first holes surrounded by the sidewall film and isolated by the sidewall film in the first direction, between the plurality of insulating isolation sections. The method includes forming a second hole in the stacked body provided under the first hole by etching with the insulating isolation section and the sidewall film used as a mask.

    摘要翻译: 根据一个实施例,一种用于制造半导体器件的方法包括形成多个绝缘隔离部分,其被设置为沿第一方向延伸,使堆叠体沿第二方向隔离,并具有从堆叠体突出的突出部。 每个绝缘隔离部分具有侧壁,该侧壁包括沿着第一方向重复的凹陷部分和突出部分。 该方法包括在绝缘隔离部分的突起的侧壁上形成侧壁膜,并且在多个绝缘隔离部分之间形成由侧壁膜围绕并由第一方向隔离的多个第一孔 。 该方法包括通过用绝缘隔离部分和用作掩模的侧壁膜进行蚀刻,在设置在第一孔下方的层叠体中形成第二孔。

    Input/output connection device, information processing device, and method for inspecting input/output device
    4.
    发明授权
    Input/output connection device, information processing device, and method for inspecting input/output device 有权
    输入/输出连接装置,信息处理装置和检测输入/输出装置的方法

    公开(公告)号:US08867369B2

    公开(公告)日:2014-10-21

    申请号:US13047137

    申请日:2011-03-14

    申请人: Mitsuru Sato

    发明人: Mitsuru Sato

    CPC分类号: G06F13/4295

    摘要: An input/output connection device includes a generating section which generates an inspection packet that has a tag that uniquely identifies the packet, a transmitting section which transmits the inspection packet to the input/output device, a receiving section which receives a packet, a first determining section which determines, on the basis of a tag of the packet received by the receiving section, whether or not the received packet is a packet transmitted in response to the inspection packet transmitted by the transmitting section, and a second determining section which analyzes the received packet and determines whether or not the input/output device is normal when the first determining section determines that the received packet is the packet transmitted in response to the inspection packet.

    摘要翻译: 一种输入/输出连接装置,包括:生成部,其生成具有唯一地识别分组的标签的检查分组;将检查分组发送到输入/输出装置的发送部;接收分组的接收部; 确定部,其基于由所述接收部接收到的分组的标签,确定所接收的分组是否是响应于由所述发送部发送的所述检查分组而发送的分组;以及第二确定部, 并且当第一确定部确定接收到的分组是响应于检查分组而发送的分组时,确定输入/输出设备是否正常。

    Solid-state imaging device
    5.
    发明授权
    Solid-state imaging device 有权
    固态成像装置

    公开(公告)号:US08598640B2

    公开(公告)日:2013-12-03

    申请号:US13211362

    申请日:2011-08-17

    IPC分类号: H01L31/113 H01L27/146

    摘要: A solid-state imaging device with a structure such that an electrode for reading a signal charge is provided on one side of a light-receiving sensor portion constituting a pixel; a predetermined voltage signal V is applied to a light-shielding film formed to cover an image pickup area except the light-receiving sensor portion; a second-conductivity-type semiconductor area is formed in the center on the surface of a first-conductivity-type semiconductor area constituting a photo-electric conversion area of the light-receiving sensor portion; and areas containing a lower impurity concentration than that of the second-conductivity-type semiconductor area is formed on the surface of the first-conductivity-type semiconductor area at the end on the side of the electrode and at the opposite end on the side of a pixel-separation area.

    摘要翻译: 具有这样一种结构的固态成像装置,该结构使得用于读取信号电荷的电极设置在构成像素的光接收传感器部分的一侧; 将预定的电压信号V施加到形成为覆盖除了光接收传感器部分之外的图像拾取区域的遮光膜; 第二导电型半导体区域形成在构成光接收传感器部分的光电转换区域的第一导电型半导体区域的表面上的中心; 并且在第一导电型半导体区域的电极侧的端部的表面上形成比第二导电型半导体区域的杂质浓度低的区域, 像素分离区域。

    Liquid droplet ejection head and liquid droplet ejection apparatus
    7.
    发明授权
    Liquid droplet ejection head and liquid droplet ejection apparatus 有权
    液滴喷射头和液滴喷射装置

    公开(公告)号:US08517519B2

    公开(公告)日:2013-08-27

    申请号:US13104268

    申请日:2011-05-10

    IPC分类号: B41J2/045

    摘要: An ink jet type recording head includes a substrate, a nozzle plate having nozzles, and a sealing sheet, and the substrate and the nozzle plate are bonded to each other through a bonding film, and the substrate and the sealing sheet are bonded to each other through a bonding film. These bonding films are each obtained by drying and/or curing a liquid material containing an epoxy-modified silicone material. Further, by applying energy to each bonding film, the surface thereof is activated, and therefore, each bonding film exhibits a bonding property. By this bonding property, the substrate is bonded to the nozzle plate and to the sealing sheet.

    摘要翻译: 喷墨型记录头包括基板,具有喷嘴的喷嘴板和密封片,并且基板和喷嘴板通过接合膜彼此接合,并且基板和密封片彼此接合 通过粘合膜。 这些接合膜各自通过干燥和/或固化含有环氧改性的有机硅材料的液体材料而获得。 此外,通过向每个接合膜施加能量,其表面被激活,因此每个接合膜都具有接合性。 通过这种粘合特性,将基板粘合到喷嘴板和密封片上。

    Method and apparatus for manufacturing brake, and method and apparatus for inspecting brake
    8.
    发明授权
    Method and apparatus for manufacturing brake, and method and apparatus for inspecting brake 有权
    制动器的制造方法和装置以及用于检查制动器的方法和装置

    公开(公告)号:US08490265B2

    公开(公告)日:2013-07-23

    申请号:US12484448

    申请日:2009-06-15

    IPC分类号: B23Q17/00

    摘要: A brake includes an annular boot which can be expanded and contracted according to movements of a piston and is assembled to an opening part of a cylinder and to an annular groove on an outer peripheral face of the piston. The boot is assembled by: engaging one end of the boot with the opening part of the cylinder in a state where the piston is contained in the cylinder; moving the piston so that at least a part of the piston is withdrawn from the cylinder and that the other end of the boot is pressed by a pressing face of the piston; and fitting the other end of the boot into the annular groove of the piston, while a movable range of the other end of the boot is restricted by an expanding allowance of the boot whose one end is engaged with the opening part of the cylinder.

    摘要翻译: 制动器包括可根据活塞的运动而膨胀和收缩的环形护罩,并组装到气缸的开口部分和活塞的外周面上的环形槽。 靴子通过以下方式组装:在活塞被容纳在气缸中的状态下,将靴子的一端与气缸的开口部分接合; 移动所述活塞使得所述活塞的至少一部分从所述气缸中退出,并且所述护罩的另一端被所述活塞的按压面按压; 并且将靴子的另一端装配到活塞的环形槽中,同时,靴的另一端的可移动范围通过一端与缸的开口部接合的靴的扩张容限来限制。

    Power supply design
    9.
    发明授权
    Power supply design 失效
    电源设计

    公开(公告)号:US08321827B2

    公开(公告)日:2012-11-27

    申请号:US12693439

    申请日:2010-01-25

    申请人: Mitsuru Sato

    发明人: Mitsuru Sato

    IPC分类号: G06F17/50

    CPC分类号: G06F17/50 G06F2217/78

    摘要: In one embodiment, there is provided a method for a computer aiding a design of a power supply that includes extracting data of one of a plurality of power supplies of an apparatus from product data about the apparatus, extracting data of a power supply system from power supply system data, the one of the plurality power supplies system is not allocated to any of the plurality of power supplies of the apparatus and associating the extracted data of the power supply with the extracted data of the power supply system in power supply allocation result data.

    摘要翻译: 在一个实施例中,提供了一种用于计算机辅助电源设计的方法,该方法包括从关于该设备的产品数据提取设备的多个电源中的一个电源的数据,从电力提取电源系统的数据 供电系统数据,多个电力供应系统中的一个不分配给设备的多个电源中的任一个,并且将提取的电源数据与电源系统的提取数据在电源分配结果数据中相关联 。

    Warning device and warning method
    10.
    发明授权
    Warning device and warning method 有权
    警告装置和警告方法

    公开(公告)号:US08171439B2

    公开(公告)日:2012-05-01

    申请号:US12396722

    申请日:2009-03-03

    申请人: Mitsuru Sato

    发明人: Mitsuru Sato

    IPC分类号: G06F9/455 G06F17/50

    CPC分类号: G06F17/5081

    摘要: A warning device checks for errors in design object data and issues a warning for detected errors by storing allowance information, which allows issuance of warning prevention, cancel information, which cancels relevant allowance information to permit issuance of warning for each error identification, and instruction identification, which identifies an edit command for editing generated design object data for error identification. When said edit command is accepted, the error identification for the instruction identification of edit command is acquired. Cancel information can be registered for error identification. Respective errors corresponding to error identifications are checked, when an operation for checking the design object data is accepted, and when a type of an error is identified, whether to issue a warning based on the allowance information and cancel information for relevant error identification is determined.

    摘要翻译: 警告装置检查设计对象数据中的错误,并通过存储允许信息发出警告,发出警告预防,取消信息,取消相关津贴信息,以便发出每个错误标识的警告,并指示识别 ,其标识用于编辑用于错误识别的生成的设计对象数据的编辑命令。 当接受编辑命令时,获取编辑命令的指令识别的错误识别。 可以注册取消信息进行错误识别。 检查对应于错误识别的各个错误,当接受用于检查设计对象数据的操作时,并且当识别出类型的错误时,确定是否基于允许信息发出警告和相关错误识别的取消信息 。