摘要:
Electronic devices are provided with electrically conductive interconnections which are formed on the insulator material. Such electronic devices include, for example, thin film semiconductor devices (TFT), metal-insulator-metallic type non-wiring elements (MIM), solar cells, Large Scale Integration devices (LSI) or printed-wiring boards. At least a part of the electrically conductive interconnections are made of .alpha.-structure tantalum (Ta) which contains hydrogen. The .alpha.-structure tantalum does not have cubical crystals in its crystal system, but rather has body-centered cubes (bcc). The resistivity of the .alpha.-structure tantalum is from about 20 .mu..OMEGA. centimeters to about 60 .mu..OMEGA. centimeters. When hydrogen is included within this .alpha.-structure tantalum film, small amounts of nitrogen may be contained along with the hydrogen in the film. When a semiconductor layer is directly formed on the lower conductive layer, the upper conductive layer contains, as a primary component, the hydrogen contained .alpha.-structure tantalum.
摘要:
In the formation of a thin-film transistor (620) capable of improving the OFF current characteristic, first, all ions (arrow Ion-1) generated from a mixed gas (doping gas) containing 5% PH.sub.3 with the remainder being H.sub.2 gas are implanted to a polycrystalline silicon film (604) at an approximately 80 keV energy level to achieve a P.sup.+ ion dose in the range from 3.times.10.sup.13 /cm.sup.2 to 1.times.10.sup.14 /cm.sup.2 in the process forming low concentration source-drain areas (602, 603). Next, all ions generated from a doping gas of pure hydrogen (arrow Ion-2) are implanted to the low concentration area (604a) at an approximately 20 keV energy level to achieve an H.sup.+ ion dose from 1.times.10.sup.14 /cm.sup.2 to 1.times.10.sup.15 /cm.sup.2. Then, the impurity is activated by heat treatment of the low concentration area (604a) implanted with impurity for approximately one hour at approximately 300.degree. C. in a nitrogen atmosphere.
摘要翻译:在形成能够提高截止电流特性的薄膜晶体管(620)的情况下,首先,从含有5%PH 3,剩余部分为氢气的混合气体(掺杂气体)产生的所有离子(箭头Ion-1)为 以大约80keV能级注入多晶硅膜(604),以在形成低浓度源极 - 漏极区域(602,603)的工艺中实现3×10 13 / cm 2至1×10 14 / cm 2范围内的P +离子剂量。 接下来,从纯氢(箭头Ion-2)的掺杂气体产生的所有离子以大约20keV能级注入低浓度区域(604a),以实现从1×10 14 / cm 2到1×10 15 / cm 2的H +离子剂量。 然后,在氮气气氛中,在大约300℃下,通过对注入杂质的低浓度区域(604a)进行约1小时的热处理来激活杂质。
摘要:
In the formation of a thin-film transistor (620) capable of improving the OFF current characteristic, first, all ions (arrow Ion-1) generated from a mixed gas (doping gas) containing 5% PH.sub.3 with the remainder being H.sub.2 gas are implanted to a polycrystalline silicon film (604) at an approximately 80 keV energy level to achieve a P.sup.+ ion dose in the range from 3.times.10.sup.13 /cm.sup.2 to 1.times.10.sup.14 /cm.sup.2 in the process forming low concentration source-drain areas (602, 603). Next, all ions generated from a doping gas of pure hydrogen (arrow Ion-2) are implanted to the low concentration area (604a) at an approximately 20 keV energy level to achieve an H.sup.+ ion dose from 1.times.10.sup.14 /cm.sup.2 to 1.times.10.sup.15 /cm.sup.2. Then, the impurity is activated by heat treatment of the low concentration area (604a) implanted with impurity for approximately one hour at approximately 300.degree. C. in a nitrogen atmosphere.
摘要:
A hot-water heat pump that is capable of reducing installation costs and installation space and also reducing the heating time of a hot-water route, and a method of controlling the same are provided. The hot-water heat pump (1) is provided with a hot-water-heat-pump main unit (2) that includes a thermal output heat exchanger that absorbs heat from a heat-source route and outputs heat; hot-water route (5 and 6) that receive heat outputted from the thermal output heat exchanger; a three-way valve (4) provided in the outlet-side hot-water route (6); and a controller that controls the hot-water-heat-pump main unit (2) and the three-way valve (4), wherein the controller controls the size of openings of the three-way valve (4) so that a portion of the outlet-side hot-water route (6) leading out of the thermal output heat exchanger is guided to an upstream side of the thermal output heat exchanger.
摘要:
In a method for evaluating a fixing member to fix a toner having a surface layer, a hardness test is carried out by applying a pressure deformation from the surface side of the fixing member, and when a deformation of the surface layer by the pressure deformation is within an elastic range, the fixing member is regarded as a standard product.
摘要:
Disclosed is an intermediate transferring belt utilized in order to transfer a toner image formed by developing a latent image on an image bearing member by means of a toner, wherein the intermediate transferring belt comprises a matrix and conductive fine particles, the conductive fine particles are dispersed into the matrix, and the surface resistivity ρs of the outer surface of the intermediate transferring belt is 1.0×109 ohm/square to 1.0×1013 ohm/square, and wherein the intermediate transferring belt is applied to an image forming apparatus of which transferring electric field is controlled to 15 MV/m or less when the toner image on the image bearing member is primarily transferred to the intermediate transferring belt.
摘要:
A corona charging method of charging a chargeable material by corona charging in an ozone-generation hindering atmosphere including a non-ozone-generating gas, such as carbon dioxide. The corona charging method can be used, for example, in an image formation apparatus, in at least in one of a charging process, an image transfer process, or a charge quenching process for use therein.
摘要:
An image formation apparatus includes an image fixing roller for performing thermal image fixing, which image fixing roller includes an exothermic phase transition layer capable of performing reversible phase transition from an amorphous state to a crystalline state and vice versa, with liberation of crystallization heat at the phase transition from the amorphous state to the crystalline state, and the crystallization heat is used for increasing the temperature elevation rate for the image fixing roller.
摘要:
An image formation apparatus includes an image bearing member which is capable of forming a latent electrostatic image thereon, a contact charging member which charges a surface of the image bearing member with the application of electric charges thereto, with the image bearing member and the charging member being in rotation contact, and a non-ozone-generating gas supply device for supplying a non-ozone-generating gas to a chargeable space which extends from a contact position of the contact charging member with the image bearing member and is positioned between (a) a surface of the contact charging memeber and (b) a surface of the image bearing member, with the surfaces facing each other, on an upstream side of the contact position with respect to a rotating direction of the contact charging member, the non-ozone-generating gas being capable of hindering the generation of ozone which is generated in the course of the application of electric charges to the surface of the image bearing member by the contact charging member.
摘要:
Disclosed herein is an electrophotographic photoreceptor comprising a charge generation layer and a charge transport layer disposed in lamination on a substrate, in which at least one of said charge generation layer and said charge transport layer is a vacuum vapor deposition film containing a binding polymer.