PROTECTION OF A WAFER-LEVEL CHIP SCALE PACKAGE (WLCSP)
    4.
    发明申请
    PROTECTION OF A WAFER-LEVEL CHIP SCALE PACKAGE (WLCSP) 有权
    保护水平线芯片尺寸包(WLCSP)

    公开(公告)号:US20140138855A1

    公开(公告)日:2014-05-22

    申请号:US13967164

    申请日:2013-08-14

    申请人: NXP B.V.

    IPC分类号: H01L21/782 H01L23/00

    摘要: Consistent with an example embodiment, there is a method for assembling a wafer level chip scale processed (WLCSP) wafer; The wafer has a topside surface and an back-side surface, and a plurality of device die having electrical contacts on the topside surface. The method comprises back-grinding, to a thickness, the back-side surface the wafer. A protective layer of a thickness is molded onto the backside of the wafer. The wafer is mounted onto a sawing foil; along saw lanes of the plurality of device die, the wafer is sawed, the sawing occurring with a blade of a first kerf and to a depth of the thickness of the back-ground wafer. Again, the wafer is sawed along the saw lanes of the plurality of device die, the sawing occurring with a blade of a second kerf, the second kerf narrower than the first kerf, and sawing to a depth of the thickness of the protective layer. The plurality of device die are separated into individual device die. Each individual device die has a protective layer on the back-side, the protective layer having a stand-off distance from a vertical edge of the individual device die.

    摘要翻译: 与示例性实施例一致,存在用于组装晶片级芯片尺寸处理(WLCSP)晶片的方法; 晶片具有顶侧表面和背面表面,以及在顶侧表面上具有电触头的多个器件裸片。 该方法包括对晶片的背面进行背面研磨至厚度。 在晶片的背面上模制厚度保护层。 将晶片安装在锯片上; 沿着多个器件裸片的锯条,晶片被锯切,锯切发生在第一切口的刀片和背面晶片厚度的深度上。 再次,晶片沿着多个器件裸片的锯条被锯切,锯切发生在第二切口的刀片上,第二切口比第一切口窄,并锯切到保护层厚度的深度。 将多个器件裸片分离为单个器件管芯。 每个单独的器件管芯在背面具有保护层,保护层具有与单独器件管芯的垂直边缘的间隔距离。