摘要:
In an ion beam irradiating apparatus for providing a neutralized ion beam to a sample, there are provided an ion source, an accelerating device and an ion beam selecting device to which the accelerated and selection ion beam is irradiated. This irradiating apparatus further includes an ion neutralizer positioned between the selecting device and the sample, and includes: an electron beam emitting source for emitting an electron beam; a first electron scatter preventing electrode for preventing the electron beam emitted from the electron beam emitting source from being scattered outside the ion neutralizer; a second electron scatter preventing electrode for preventing the electron beam induced into the specified ion beam from being scattered in a direction opposite to an ion irradiating direction; and a control electrode for controlling a traveling velocity of the electron beam emitted from the electron emitting source so as to drift the emitted electron beam toward the sample, thereby neutralizing the selected ion beam at a location adjacent to a surface of the sample that is being irradiated.
摘要:
An ion implantation apparatus includes an ion source having an arc chamber generating ions and a drawing electrode drawing ions from the arc chamber, a mass separator transporting only ions desired for implantation, an ion implantation chamber in which the material to be implanted by ions is placed, and a controller means for automatically controlling the distance between the arc chamber and the drawing electrode incrementally in accordance with a theoretical calculation using normalized perveance considering the kind of ions to be implanted, the accelerating voltage, and the ion current and current density distribution.
摘要:
There is disclosed an electron shower apparatus which eliminates the adverse effect of a magnetic field on electrons and which provides electrons in sufficient quantity when primary electrons having low energy are employed. In the apparatus, the magnetic field generated by a filament current is decreased or eliminated by pulsing the filament current or by passing a current opposite in direction to the filament current in the vicinity of the filament current.
摘要:
A three-dimensional model data producing processing apparatus produces three-dimensional model data using design data (CAD data) of an object to be recognized. The three-dimensional model data producing processing includes processing conversion processing, edit processing, and teaching processing. The conversion processing and the edit processing are performed to the design data on a computer. The teaching processing is performed in a practical environment. It is not necessary to image a workpiece model in the three-dimensional model data producing processing.
摘要:
A three-dimensional model data producing processing apparatus produces three-dimensional model data using design data (CAD data) of an object to be recognized. The three-dimensional model data producing processing includes processing conversion processing, edit processing, and teaching processing. The conversion processing and the edit processing are performed to the design data on a computer. The teaching processing is performed in a practical environment. It is not necessary to image a workpiece model in the three-dimensional model data producing processing.
摘要:
This invention aims to ensure accuracy of a three-dimensional model to be registered. With information a of three-dimensional information a, b, c restored by measuring an actual model of a work, which is a target of three-dimensional recognition, from different directions as a reference, other three-dimensional information b, c are coordinate transformed so as to be aligned with the reference three-dimensional information, and three-dimensional information d including all of three-dimensional information b′, c′ after the transformation and the reference three-dimensional information a is created. The three-dimensional information d is temporarily registered as the three-dimensional model. A difference amount among the integrated three-dimensional information a, b′, c′ is calculated, and an evaluation index based on the difference value is displayed with an image view of a contour pattern represented by the three-dimensional model. A user checks the accuracy of the three-dimensional model on this display screen from a degree of variation of the contour line representing the same site and a value of the evaluation index, and determines whether or not to actually register the three-dimensional model d.
摘要:
A welding set and a welding method that suppresses the unnecessary magnetization of a permanent magnet member by a welding current when welding one metal member including a permanent magnet member and the other metal member together are obtained. The welding set is provided with a work retaining part 3 that retains a work 14; a pressure device 4 located over the work retaining part 3 with a work-providing space interposed; a first welding electrode 8 mounted on a moving part 4a of the pressure device 4; a second welding electrode 10; and a welding transformer 11 that supplies a welding current to both of the welding electrodes 8, 10. Both of the welding electrodes 8, 10 are located on one end side of the work 14 with respect to one metal member and the other metal member respectively, as well as are located so that there is no permanent magnet member 18 between respective abutment terminal of one metal member and the other metal member.
摘要:
A polygonal mark M having a shape in which a direction can be uniquely specified is attached to a predetermined area of an actual model WM of a work to be three-dimensionally recognized. A process of changing the orientation of the actual model WM such that a state in which the mark M is contained in the view of each camera is maintained, and then performing the three-dimensional measurement is executed over a plurality of times. A predetermined number of, or two or more pieces of three-dimensional information is selected from the three-dimensional information restored by each measurement, these pieces of three-dimensional information are aligned and integrated, the information corresponding to the mark is deleted or invalidated from the integrated three-dimensional information, and the three-dimensional information after such a process is set as a three-dimensional model.
摘要:
A welding set and a welding method that suppresses the unnecessary magnetization of a permanent magnet member by a welding current when welding one metal member including a permanent magnet member and the other metal member together are obtained. The welding set is provided with a work retaining part 3 that retains a work 14; a pressure device 4 located over the work retaining part 3 with a work-providing space interposed; a first welding electrode 8 mounted on a moving part 4a of the pressure device 4; a second welding electrode 10; and a welding transformer 11 that supplies a welding current to both of the welding electrodes 8, 10. Both of the welding electrodes 8, 10 are located on one end side of the work 14 with respect to one metal member and the other metal member respectively, as well as are located so that there is no permanent magnet member 18 between respective abutment terminal of one metal member and the other metal member.
摘要:
This invention aims to create a three-dimensional model of satisfactory accuracy even when adopting a method of performing three-dimensional measurement by arbitrarily changing a positional relationship between an actual model and a camera, and aligning and integrating three-dimensional information restored by each measurement. A polygonal mark M having a shape in which a direction can be uniquely specified is attached to a predetermined area of an actual model WM of a work to be three-dimensionally recognized. A process of changing the orientation of the actual model WM such that a state in which the mark M is contained in the view of each camera is maintained, and then performing the three-dimensional measurement is executed over a plurality of times. A predetermined number of, or two or more pieces of three-dimensional information is selected from the three-dimensional information restored by each measurement, these pieces of three-dimensional information are aligned and integrated, the information corresponding to the mark is deleted or invalidated from the integrated three-dimensional information, and the three-dimensional information after such a process is set as a three-dimensional model.