Piezoelectric/electrostrictive device
    4.
    发明授权
    Piezoelectric/electrostrictive device 有权
    压电/电致伸缩器件

    公开(公告)号:US07183694B2

    公开(公告)日:2007-02-27

    申请号:US11282013

    申请日:2005-11-17

    IPC分类号: B41J2/045

    CPC分类号: H01L41/098

    摘要: A piezoelectric/electrostrictive device includes: a ceramic substrate having a frame-like thick portion, a thin diaphragm portion, and a cavity formed by the thick portion and the thin diaphragm portion to communicate with the outside; and a piezoelectric/electrostrictive element having a layered structure including a lower electrode, a piezoelectric/electrostrictive film, and an upper electrode. Furthermore, the thin diaphragm portion is provided with an outward protruding arch shape, and in the piezoelectric/electrostrictive element, there remains a tensile stress parallel to a fixed surface of the element to the thin diaphragm portion. The piezoelectric/electrostrictive device is superior in response, and in the device high-precision (high-resolution, high-sensitivity) detection is possible, while effectively preventing decay of vibration of a thin diaphragm portion and maintaining displacement (amplitude) to be high.

    摘要翻译: 压电/电致伸缩器件包括:具有框状厚部的陶瓷基板,薄膜部,以及由厚壁部和薄膜部构成的与外部连通的空腔; 以及具有包括下电极,压电/电致伸缩膜和上电极的层状结构的压电/电致伸缩元件。 此外,薄膜部分设置有向外突出的拱形形状,并且在压电/电致伸缩元件中,与薄膜部分的元件的固定表面平行的拉伸应力保持不变。 压电/电致伸缩器件的响应性优异,在器件中可以进行高精度(高分辨率,高灵敏度)检测,同时有效防止薄膜部分的振动衰减,并保持位移(振幅)高 。

    Piezoelectric/electrostrictive device
    6.
    发明授权
    Piezoelectric/electrostrictive device 失效
    压电/电致伸缩器件

    公开(公告)号:US07221075B2

    公开(公告)日:2007-05-22

    申请号:US11281645

    申请日:2005-11-17

    IPC分类号: B41J2/45

    CPC分类号: H01L41/098 H01L41/187

    摘要: A piezoelectric/electrostrictive device includes: a ceramic substrate having a thick portion and a thin diaphragm portion; and a piezoelectric/electrostrictive element having a layered structure including a lower electrode, a piezoelectric/electrostrictive film, and an upper electrode, and the thin diaphragm portion of the ceramic substrate is constituted to vibrate in conjunction with the driving of the piezoelectric/electrostrictive element. Furthermore, shape and dimension relations defined in the following (A) to (C) are satisfied: (A) a shape of the thin diaphragm portion 12 is an outward protruding arch shape, and an outward protrusion height of the arch shape is in a range of 5 to 50 μm; (B) a mounting width of the thin diaphragm portion is in a range of 600 to 2000 μm; and (C) a ratio (height/width) of the height to the width of the thick portion is in a range of 0.25 to 3. According to the piezoelectric/electrostrictive device, vibration of a thin diaphragm portion is effectively prevented from being damped, and the device maintains displacement (amplitude) to be high and is superior in response and highprecision (highresolution, high-sensitivity) detection is possible.

    摘要翻译: 压电/电致伸缩器件包括:具有厚壁部分和薄膜部分的陶瓷基片; 以及具有包括下电极,压电/电致伸缩膜和上电极的层状结构的压电/电致伸缩元件,并且陶瓷基板的薄膜部分被构造成与压电/电致伸缩元件的驱动相结合而振动 。 此外,满足以下(A)〜(C)中定义的形状和尺寸关系:(A)薄膜部12的形状为向外突出的拱形,拱形的向外突出高度为 范围5至50 mum; (B)薄膜部分的安装宽度在600〜2000μm的范围内; 和(C)高度与厚部的宽度的比(高/宽)在0.25〜3的范围内。根据压电/电致伸缩装置,能够有效地防止薄膜部的振动被阻尼 ,并且器件将位移(振幅)保持为高并且响应高且精度高(高分辨率,高灵敏度)检测是可能的。

    Piezoelectric/electrostrictive device
    7.
    发明申请
    Piezoelectric/electrostrictive device 有权
    压电/电致伸缩器件

    公开(公告)号:US20060108897A1

    公开(公告)日:2006-05-25

    申请号:US11282013

    申请日:2005-11-17

    IPC分类号: H01L41/04

    CPC分类号: H01L41/098

    摘要: A piezoelectric/electrostrictive device includes: a ceramic substrate having a frame-like thick portion, a thin diaphragm portion, and a cavity formed by the thick portion and the thin diaphragm portion to communicate with the outside; and a piezoelectric/electrostrictive element having a layered structure including a lower electrode, a piezoelectric/electrostrictive film, and an upper electrode. Furthermore, the thin diaphragm portion is provided with an outward protruding arch shape, and in the piezoelectric/electrostrictive element, there remains a tensile stress parallel to a fixed surface of the element to the thin diaphragm portion. The piezoelectric/electrostrictive device is superior in response, and in the device high-precision (high-resolution, high-sensitivity) detection is possible, while effectively preventing decay of vibration of a thin diaphragm portion and maintaining displacement (amplitude) to be high.

    摘要翻译: 压电/电致伸缩器件包括:具有框状厚部的陶瓷基板,薄膜部,以及由厚壁部和薄膜部构成的与外部连通的空腔; 以及具有包括下电极,压电/电致伸缩膜和上电极的层状结构的压电/电致伸缩元件。 此外,薄膜部分设置有向外突出的拱形形状,并且在压电/电致伸缩元件中,与薄膜部分的元件的固定表面平行的拉伸应力保持不变。 压电/电致伸缩器件的响应性优异,在器件中可以进行高精度(高分辨率,高灵敏度)检测,同时有效防止薄膜部分的振动衰减,并保持位移(振幅)高 。

    Piezoelectric/electrostrictive film type device and method of manufacturing the same
    8.
    发明申请
    Piezoelectric/electrostrictive film type device and method of manufacturing the same 有权
    压电/电致伸缩薄膜型器件及其制造方法

    公开(公告)号:US20060066176A1

    公开(公告)日:2006-03-30

    申请号:US11233391

    申请日:2005-09-22

    IPC分类号: H01L41/18

    摘要: There is disclosed a piezoelectric/electrostrictive film type device 1 provided with: a thin substrate 2 made of a ceramic; and a piezoelectric/electrostrictive operating portion 5 disposed on the substrate 2 and constituted by successively laminating a lower electrode film 3a, a piezoelectric/electrostrictive film 4 containing a large number of crystal particles constituted of a piezoelectric/electrostrictive composition, and an upper electrode film 3b. The piezoelectric/electrostrictive composition contains one or more alkali metal elements selected from the group consisting of lithium (Li), potassium (K), and sodium (Na), and one or more metal elements selected from the group consisting of niobium (Nb), tantalum (Ta), antimony (Sb), and silver (Ag) (however, surely containing niobium (Nb), and circle equivalent diameters of 90% or more of the large number of crystal particles are in a range of 0.3 to 50 μm. It is possible to exhibit a superior piezoelectric/electrostrictive characteristic without containing lead (Pb) and obtain an especially large displacement.

    摘要翻译: 公开了一种压电/电致伸缩膜型器件1,其设置有:由陶瓷制成的薄基片2; 以及压电/电致伸缩操作部分5,其设置在基板2上,并且通过连续地层叠下电极膜3a,包含大量由压电/电致伸缩组合物构成的晶体颗粒和上电极的压电/电致伸缩膜4 电影3 b。 压电/电致伸缩组合物含有一种或多种选自锂(Li),钾(K)和钠(Na)的碱金属元素,以及一种或多种选自铌(Nb) ,钽(Ta),锑(Sb)和银(Ag)(然而,确实含有铌(Nb),圆当量直径为90%以上的大量结晶粒子的范围为0.3〜50 可以显示出优异的压电/电致伸缩特性,而不含铅(Pb),并获得特别大的位移。