Drive force transmission apparatus
    5.
    发明授权
    Drive force transmission apparatus 失效
    驱动力传动装置

    公开(公告)号:US5899306A

    公开(公告)日:1999-05-04

    申请号:US966244

    申请日:1997-11-07

    IPC分类号: F16D43/284

    CPC分类号: F16D43/284

    摘要: A drive force transmission apparatus includes a housing connected to one of two shafts that are rotatable relative to each other, a rotary shaft rotatably supported by the housing and connected to the other shaft, and a multiple disc clutch composed of a plurality of outer plates engaged with the housing in the rotational direction and a plurality of inner plates engaged with the rotary shaft in the rotational direction. The multiple disc clutch transmits rotational torque between the housing and the rotary shaft through frictional engagement between the outer plates and the inner plates. The apparatus also includes a pressure generation mechanism for generating a pressure corresponding to a rotational-speed difference between the housing and the rotary shaft and for applying the generated force to the multiple disc clutch via a piston. The pressure generating means is composed of a plurality of rotary blades accommodated within a cylindrical space formed between the piston and the housing and rotating together with the rotary shaft, a viscous fluid charged into a plurality of pressure chambers defined by the housing, the piston, and the rotary blades, and a free blade accommodated within at least one pressure chamber. The free blade is freely movable in the circumferential direction between the rotary blades.

    摘要翻译: 驱动力传递装置包括连接到可相对于彼此旋转的两个轴之一的壳体,由壳体可旋转地支撑并连接到另一轴的旋转轴,以及由多个外板接合的多片离合器 其中壳体沿旋转方向,并且多个内板在旋转方向上与旋转轴接合。 多片离合器通过外板和内板之间的摩擦接合在壳体和旋转轴之间传递旋转扭矩。 该装置还包括用于产生对应于壳体和旋转轴之间的转速差的压力并用于经由活塞将生成的力施加到多片离合器的压力产生机构。 压力发生装置由容纳在形成于活塞和壳体之间的圆柱形空间中并与旋转轴一起旋转的多个旋转叶片组成,被填充到由壳体,活塞等限定的多个压力室中的粘性流体, 和旋转叶片,以及容纳在至少一个压力室内的自由叶片。 自由叶片可在旋转叶片之间沿圆周方向自由移动。

    Amorphous carbon film forming method and device
    9.
    发明授权
    Amorphous carbon film forming method and device 有权
    无定形碳膜成膜方法及装置

    公开(公告)号:US07803433B2

    公开(公告)日:2010-09-28

    申请号:US10544674

    申请日:2004-02-12

    摘要: An amorphous carbon film forming apparatus according to the present invention is characterized by being provided with a film forming furnace 11; plural workpiece fixtures 23 for supporting plural plate-like workpieces 22 in a state that the same are piled up vertically in parallel with the interval between facing surfaces of two vertically adjoining of the plate-like workpieces 22 being in a range of 2 to 30 millimeters, the plural workpiece fixtures 23 being arranged within the film forming furnace 11 at a regular angular interval on a circle and being connected to a negative electrode; nozzles 31, 32 provided for supplying a processing gas and including at least one nozzle arranged at a center of the circle on which the plural workpiece fixtures 23 are arranged and plural nozzles arranged at a regular angular interval on another circle which surrounds the workpieces fixtures 23 radially outside thereof; and a plasma power supply connected to at least the workpiece fixtures 23. By controlling the supply gas pressure to be in a range of 13 to 1,330 Pa and a sheath width to be made in a range of 2 to 30 mm, the discharge is kept stably. As a consequence, it can be realized to form amorphous carbon films efficiently at a low cost.

    摘要翻译: 根据本发明的无定形碳膜形成装置的特征在于设置有成膜炉11; 多个用于支撑多个板状工件22的工件夹具23处于2至30毫米的范围内的状态下,垂直于两个垂直相邻的板状工件22的相对表面之间的间隔垂直堆叠。 多个工件固定件23以规定的角度间隔布置在成膜炉11内并连接到负极; 用于供给处理气体的喷嘴31,32,并且包括布置在其上布置有多个工件固定件23的圆的中心处的至少一个喷嘴和在围绕工件固定件23的另一个圆周上以规则的角度间隔布置的多个喷嘴 径向地在其外面; 以及与至少工件夹具23连接的等离子体电源。通过将供给气体压力控制在13〜1330Pa的范围内,将鞘宽度设定在2〜30mm的范围内,进行放电 稳定地 因此,可以实现以低成本有效地形成无定形碳膜。

    Amorphous Carbon Film Forming Method and Device
    10.
    发明申请
    Amorphous Carbon Film Forming Method and Device 有权
    无定形碳膜成型方法及装置

    公开(公告)号:US20080317976A1

    公开(公告)日:2008-12-25

    申请号:US10544674

    申请日:2004-02-12

    IPC分类号: C23C16/26 C23C16/513

    摘要: An amorphous carbon film forming apparatus according to the present invention is characterized by being provided with a film forming furnace 11; plural workpiece fixtures 23 for supporting plural plate-like workpieces 22 in a state that the same are piled up vertically in parallel with the interval between facing surfaces of two vertically adjoining of the plate-like workpieces 22 being in a range of 2 to 30 millimeters, the plural workpiece fixtures 23 being arranged within the film forming furnace 11 at a regular angular interval on a circle and being connected to a negative electrode; nozzles 31, 32 provided for supplying a processing gas and including at least one nozzle arranged at a center of the circle on which the plural workpiece fixtures 23 are arranged and plural nozzles arranged at a regular angular interval on another circle which surrounds the workpieces fixtures 23 radially outside thereof; and a plasma power supply connected to at least the workpiece fixtures 23. By controlling the supply gas pressure to be in a range of 13 to 1,330 Pa and a sheath width to be made in a range of 2 to 30 mm, the discharge is kept stably. As a consequence, it can be realized to form amorphous carbon films efficiently at a low cost.

    摘要翻译: 根据本发明的无定形碳膜形成装置的特征在于设置有成膜炉11; 多个用于支撑多个板状工件22的工件夹具23处于2至30毫米的范围内的状态下,垂直于两个垂直相邻的板状工件22的相对表面之间的间隔垂直堆叠。 多个工件固定件23以规定的角度间隔布置在成膜炉11内并连接到负极; 用于供给处理气体的喷嘴31,32,并且包括布置在其上布置有多个工件固定件23的圆的中心处的至少一个喷嘴和在围绕工件固定件23的另一个圆周上以规则的角度间隔布置的多个喷嘴 径向地在其外面; 以及与至少工件夹具23连接的等离子体电源。通过将供给气体压力控制在13〜1330Pa的范围内,将鞘宽度设定在2〜30mm的范围内,进行放电 稳定地 因此,可以实现以低成本有效地形成无定形碳膜。