公开(公告)号：US20170167995A1

公开(公告)日：2017-06-15

申请号：US15327103

申请日：2015-07-21

Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Jin KAWAKITA ,  Tadashi SHINOHARA ,  Toyohiro CHIKYO ,  Toshihide NABATAME ,  Akihiko OHI ,  Tomoko OHKI

IPC: G01N27/04

CPC classification number: G01N27/048 ,  G01N17/00 ,  G01N17/04 ,  G01N27/045 ,  G01N27/121 ,  G01N27/223

Abstract: The present invention improves the sensitivity and the responsiveness of a dryness/wetness responsive sensor utilizing a galvanic current, allowing for downsizing of the dryness/wetness responsive sensor. Instead of the conventional structure in which an anode electrode and a cathode electrode are stacked with an intervening insulator, the present invention employs a structure in which both electrodes run in juxtaposition with each other on an insulating substrate in the form of, for example, a comb-shaped electrode as shown in the drawing. By utilizing a semiconductor manufacturing process or any other micro/nano-fabrication technology, an inter-electrode distance can be extremely shortened as compared with the conventional sensors, allowing enhancing the sensitivity per unit footprint of the electrodes. Accordingly, a decrease in the size of the dryness/wetness responsive sensor can be easily achieved.

公开(公告)号：US20250130193A1

公开(公告)日：2025-04-24

申请号：US18692013

申请日：2022-09-16

Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Jin KAWAKITA ,  Izumi ICHINOSE

IPC: G01N27/07 ,  G01N27/04 ,  G01N33/487

Abstract: The present invention provides a method for sensing volatile fatty acid with high sensitivity and measuring volatile fatty acid with high accuracy and provides a device for such sensing and measurement. The method for sensing volatile fatty acid of the present invention includes placing a sample in an enclosed space together with a resistance measurement device, wherein the sample is allowed to contain volatile fatty acid, the resistance measurement device measures an electrical characteristic caused by electrical resistance between at least two electrodes disposed to be adjacent to each other at a small spacing on an insulating substrate, and water vapor exists in the enclosed space, measuring the electrical characteristic when a space near the at least two electrodes has a relative humidity satisfying a humidity condition of immediately before occurrence of dew condensation between the at least two electrodes, and comparing an obtained measurement result with reference data obtained under a predetermined condition.

公开(公告)号：US20240295515A1

公开(公告)日：2024-09-05

申请号：US18573066

申请日：2022-06-28

Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Jin KAWAKITA

IPC: G01N27/06 ,  G03F7/16

CPC classification number: G01N27/06 ,  G03F7/161 ,  G03F7/164

Abstract: An object of the present invention is to provide a droplet sensor and a condensation detection device having stable detection properties and a method for manufacturing the same. Even when the droplet sensor and the condensation detection device are mass-produced, the present invention enables reduction of manufacturing variation between the elements and enables high detection accuracy and high electrical output of the elements. A droplet sensor of the present invention includes: an insulating substrate; a first electrode having a first thin wire and a first current collector; and a second electrode having a second thin wire and a second current collector. The first electrode and the second electrode are disposed on the insulating substrate. The first thin wire and the second thin wire are alternately disposed in juxtaposition with each other on the insulating substrate. The droplet sensor senses a galvanic current flowing between the first thin wire and the second thin wire through a conductive droplet. The first thin wire is formed of a first metal-containing material layer having a lower electrical resistivity than platinum. The second thin wire is a composite film of the first metal-containing material layer and a platinum-containing material composed of platinum or a platinum alloy. The platinum-containing material layer has at least a part of a surface exposed to the outside.

公开(公告)号：US20190310213A1

公开(公告)日：2019-10-10

申请号：US16306967

申请日：2017-06-06

Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Jin KAWAKITA ,  Toyohiro CHIKYO

IPC: G01N25/68 ,  G01N27/04

Abstract: The purpose of the present invention is to realize a dew point measurement in which the generation of dew condensation is directly detected and the detection can be performed without using any optical system. In particular, the purpose of the present invention is to realize a dew point measuring device that is compact and has a high sensitivity. According to one embodiment of the present invention, a sudden change in current values before and after the dew point is detected by detecting the dew condensation to detect a galvanic current that flows due to a water droplet attached onto a surface of an insulating substrate on which thin wires of dissimilar metals are juxtaposed, and by controlling the temperature on the surface of the substrate. In this way, the dew point measurement in which the dew point can be directly measured and a measurement with simple configuration and high accuracy can be performed can be realized.

公开(公告)号：US20250107720A1

公开(公告)日：2025-04-03

申请号：US18833133

申请日：2023-03-01

Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Jin KAWAKITA ,  Takeshi KUROSAWA

IPC: A61B5/024 ,  A61B5/0533

Abstract: A heart rate variability measurement system including: a perspiration detection unit; and a signal arithmetic processing unit. The perspiration detection unit includes: a microdroplet detection unit in which a first thin wire and a second thin wire are disposed in juxtaposition with each other on an insulating substrate; and a perspiration signal output unit that measures a change in an electrical characteristic between the first thin wire and the second thin wire and outputs the change as a perspiration signal. The signal arithmetic processing unit includes: a calculation unit; an information storage unit; and a heart rate variation value output unit, while setting time t, a time lag Δt, a value CH(t) of the perspiration signal at the time t, a heart rate factor Y(t+Δt) indicating heart rate variability at time t+Δt, coefficients a and b, and a predetermined constant as α, the calculation unit calculates Y(t+Δt)=a·X(t)+b and X(t)=CH (t)−CH(t−α).

公开(公告)号：US20220003701A1

公开(公告)日：2022-01-06

申请号：US17292947

申请日：2019-11-11

Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Jin KAWAKITA

IPC: G01N25/66 ,  G01N27/30 ,  G01N27/403

Abstract: A condensation detection element comprises a condensation detection unit, the condensation detection unit being formed on a first substrate unit, and a peripheral circuit unit, the peripheral circuit unit being formed on a second substrate unit. The condensation detection unit comprises a thin wire electrode of a first metal and a thin wire electrode of a second metal. The condensation detection unit is configured to detect the presence or absence of water droplet that comes into contact with the thin wire electrode of the first metal and the thin wire electrode of the second metal by a current flowing between the thin wire electrode of the first metal and the thin wire electrode of the second metal. The first substrate unit has a higher thermal conductivity and a lower heat capacity than the second substrate unit.

公开(公告)号：US20200053837A1

公开(公告)日：2020-02-13

申请号：US16483815

申请日：2018-02-02

Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Jin KAWAKITA ,  Toyohiro CHIKYO

IPC: H05B3/84 ,  G01N27/416

Abstract: The present invention is to provide a prevention method and a prevention system for preventing dew condensation and light scattering due to the dew condensation. According to one embodiment of the present invention, a fine liquid droplet capable of causing dew condensation is detected by a detection means for detecting a fine liquid droplet, and then the fine liquid droplet is removed on the basis of the detection. The detection means comprises a first thin wire made of a first metal, and a second thin wire made of a second metal or a semiconductor, the second metal is different from the first metal, the first thin wire and the second thin wire are dispose d in juxtaposition with each other on an insulating substrate, and a spacing between the first thin wire and the second thin wire is in a range of 20 nm or more and 10000 nm or less. Further, provided is a prevention system including a detection means for detecting a fine liquid droplet, a removing means for removing the fine liquid droplet, and a control means for controlling the removing means on the basis of information from the detection means.

公开(公告)号：US20170084538A1

公开(公告)日：2017-03-23

申请号：US15310898

申请日：2015-05-14

Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Jin KAWAKITA ,  Barbara HORVATH ,  Toyohiro CHIKYO

IPC: H01L23/538 ,  H01L21/768 ,  H01L25/065 ,  C01B21/082 ,  C08K3/08

CPC classification number: H01L23/5384 ,  C01B21/0823 ,  C01P2006/40 ,  C08G61/124 ,  C08G2261/3221 ,  C08G2261/51 ,  C08K3/08 ,  C08K2003/0806 ,  C08L65/00 ,  H01L21/76831 ,  H01L21/76846 ,  H01L21/76879 ,  H01L21/76898 ,  H01L23/481 ,  H01L23/53242 ,  H01L23/5386 ,  H01L25/065 ,  H01L25/0657 ,  H01L25/07 ,  H01L25/18 ,  H01L28/00 ,  H01L29/792 ,  H01L2225/06544 ,  H01L2924/0002 ,  H01L2924/00

Abstract: By using silicon oxynitride with an oxygen content of 4.2 to 37.5 at % as a material for a barrier layer, adhesiveness similar to that of silicon oxide and an Ag diffusion prevention property similar to that of silicon nitride can be realized. In particular, in a semiconductor device in which a plurality of silicon chips is vertically stacked by through-silicon vias, Ag is prevented from being diffused into Si and adhesiveness to Si becomes favorable when an Ag/polypyrrole complex is used as a conductive filling material used for the formation of a barrier layer provided on the inner surface of the via.

公开(公告)号：US20200249185A1

公开(公告)日：2020-08-06

申请号：US16640421

申请日：2018-08-23

Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Jin KAWAKITA ,  Akihiko OHI ,  Tomoko OHKI ,  Naoki IKEDA ,  Toshihide NABATAME ,  Toyohiro CHIKYO

IPC: G01N27/04

Abstract: The present invention is to provide a small-sized dryness/wetness responsive sensor that detects a galvanic current with a high sensitivity as a principle of operation. According to one embodiment of the present invention, a dryness/wetness responsive sensor comprises a thin wire made of a first metal and a thin wire made of a second metal, the second metal is different from the first metal, the thin wire of the first metal and the thin wire of the second metal are disposed in juxtaposition with each other on an insulating substrate, and a surface state of a part between the thin wire of the first metal and the thin wire of the second metal is hydrophilic or hydrophobic.

公开(公告)号：US20190178621A1

公开(公告)日：2019-06-13

申请号：US16300164

申请日：2017-05-11

Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Jin KAWAKITA ,  Toyohiro CHIKYO

IPC: G01B7/12

Abstract: The purpose of the present invention is to measure a size of a liquid droplet easily and in a short period of time by combining outputs of multiple types of liquid droplet detectors having different size dependencies of a liquid droplet of detection signals. In one embodiment of the present invention, in the detector having a narrow gap width shown in FIG. 5(a), the electrodes are electrically conducted by the attachment of a small liquid droplet. On the other hand, in the detectors with a wide gap width shown in FIGS. 5(b) and 5(c), the electrodes are not electrically conducted unless a liquid droplet having a larger size is attached. By utilizing this, the size of a liquid droplet is determined. In a case where the liquid droplet is water, as a liquid droplet detector, for example, a detector of a type that detects a galvanic current by a cell formed by the attachment of water between the electrodes made of different kinds of metals may be used.