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    Conductive contacts and methods for fabricating conductive contacts for elctrochemical planarization of a work piece
    3.
    发明授权
    Conductive contacts and methods for fabricating conductive contacts for elctrochemical planarization of a work piece 有权
    用于制造用于工件的化学平整化的导电触点的导电触点和方法

    公开(公告)号：US07391086B1

    公开(公告)日：2008-06-24

    申请号：US11478150

    申请日：2006-06-28

    申请人： John Drewery ,  Francisco Juarez ,  Henner Meinhold

    发明人： John Drewery ,  Francisco Juarez ,  Henner Meinhold

    IPC分类号： H01L29/76 ,  H01L29/94 ,  H01L31/062 ,  H01L31/113 ,  H01L31/119

    CPC分类号： B24B37/24 ,  B23H5/08 ,  B24B37/046

    摘要： Conductive contacts and methods for fabricating conductive contacts for electrochemical mechanical planarization are provided. A conductive contact in accordance with an exemplary embodiment of the invention includes, but is not limited to, a first conductive surface formed of a flexible material, a conductive element that is disposed remote from the first conductive surface and that is configured for electrical coupling to an external circuit, and an intermediate portion that electrically couples the first conductive surface and the conductive element.

    摘要翻译： 提供用于制造用于电化学机械平面化的导电触头的导电触头和方法。 根据本发明的示例性实施例的导电接触包括但不限于由柔性材料形成的第一导电表面，远离第一导电表面设置的导电元件，其被配置用于电耦合到 外部电路和电耦合第一导电表面和导电元件的中间部分。

    Spin bowl having fluid seal for preventing air from flowing into the bowl during spinning
    4.
    发明授权
    Spin bowl having fluid seal for preventing air from flowing into the bowl during spinning 有权
    具有流体密封的旋转碗，用于在旋转期间防止空气流入碗中

    公开(公告)号：US06767403B1

    公开(公告)日：2004-07-27

    申请号：US09713846

    申请日：2000-11-15

    申请人： Fred J. Chetcuti ,  Henner Meinhold

    发明人： Fred J. Chetcuti ,  Henner Meinhold

    IPC分类号： B05C1102

    CPC分类号： H01L21/6715

    摘要： A spin bowl includes a base and a sidewall that extends from the base. The base has an upper portion for supporting a substrate in a horizontal plane and a lower portion that intersects with the sidewall. The lower portion of the base has a plurality of drain holes formed therein proximate to the sidewall. Each of the plurality of drain holes is configured to trap fluid therein during spinning of the spin bowl to thereby form a fluid seal that prevents air from flowing therethrough. In one embodiment, each of the drain holes is V-shaped. In another embodiment, the fluid seal is formed by the intersection of a straight drain hole with an external fluid catch area. An apparatus and method for spin coating a film over a substrate also are described.

    摘要翻译： 旋转碗包括从基部延伸的基部和侧壁。 基部具有用于在水平面中支撑基板的上部和与侧壁相交的下部。 基部的下部具有形成在其中的靠近侧壁的多个排出孔。 多个排水孔中的每一个构造成在旋转筒中旋转期间捕获流体，从而形成防止空气流过其中的流体密封。 在一个实施例中，每个排水孔是V形的。 在另一个实施例中，流体密封件由直排放孔与外部流体捕获区域的相交形成。 还描述了一种用于在衬底上旋涂膜的设备和方法。

    Conductive planarization assembly for electrochemical mechanical planarization of a work piece
    6.
    发明授权
    Conductive planarization assembly for electrochemical mechanical planarization of a work piece 失效
    用于工件电化学机械平面化的导电平面化组件

    公开(公告)号：US07695597B1

    公开(公告)日：2010-04-13

    申请号：US11393581

    申请日：2006-03-29

    申请人： John Drewery ,  Francisco Juarez ,  Henner Meinhold

    发明人： John Drewery ,  Francisco Juarez ,  Henner Meinhold

    IPC分类号： C25B9/00 ,  C25D17/00

    CPC分类号： C25F7/00 ,  B23H5/08

    摘要： A conductive planarization assembly for use in electrochemical mechanical planarization is provided. A conductive planarization assembly in accordance with an exemplary embodiment of the invention comprises a first insulating member and a second insulating member overlying the first insulating member and having a plurality of first holes. A conductive member is interposed between the first insulating member and the second insulating member and is electrically coupled to an external circuit. The conductive member comprises a plurality of cathode regions that are exposed by the plurality of first holes of the second insulating member.

    摘要翻译： 提供了一种用于电化学机械平面化的导电平面化组件。 根据本发明的示例性实施例的导电平面化组件包括覆盖在第一绝缘构件上并具有多个第一孔的第一绝缘构件和第二绝缘构件。 导电构件插入在第一绝缘构件和第二绝缘构件之间，并且电耦合到外部电路。 导电构件包括由第二绝缘构件的多个第一孔露出的多个阴极区域。

    Circuit for protecting storage cells
    7.
    发明授权
    Circuit for protecting storage cells 失效
    保护存储单元的电路

    公开(公告)号：US4303877A

    公开(公告)日：1981-12-01

    申请号：US35270

    申请日：1979-05-01

    申请人： Henner Meinhold

    发明人： Henner Meinhold

    IPC分类号： H01M10/44 ,  H02J7/00 ,  H02J7/04

    CPC分类号： H01M10/441 ,  H02J7/0024 ,  H02J7/0026 ,  H02J7/008

    摘要： Battery formed of electrochemical storage cells of the alkali metal and chalcogen type in series or groups of several parallel-connected storage cells connected in series. To assure uniform charging and discharging of the storage cells, each series-connected cell or each group of parallel-connected cells, has parallel-connected to the cell or group of cells, a protective circuit. Upon reaching a given maximum charge or discharge, a cell or group of cells, the circuit acts to bridge i.e. short the cell or group of cells which has reached a maximum charge or discharge, and prevent further charge or discharge of such cell or group of cells. The circuit is functionally connected to a switch which is conductively connectible directly to the negative and positive electrodes of the cells and to the electric terminals. The protective circuit is directly connected to both terminals and the storage cell to at least one of the two terminals via the switch.

    摘要翻译： 由碱金属和硫属元素型的电化学储存电池串联或串联连接的多个并联连接的存储单元的电池组成的电池。 为了确保存储单元的均匀充电和放电，每个串联连接的单元或每组并联电池均并联到电池或电池组，保护电路。 在达到给定的最大充电或放电时，电池或电池组，电路起到桥接作用，即使达到最大充电或放电的电池或电池组短，并且防止进一步充电或放电这样的电池或组 细胞。 电路功能上连接到可直接导电连接到电池的负电极和正电极的开关和电端子上。 保护电路通过开关直接连接到两个端子和存储单元至两个端子中的至少一个。

    System and method for coating substrates using ink jet technology
    9.
    发明授权
    System and method for coating substrates using ink jet technology 有权
    使用喷墨技术涂覆基材的系统和方法

    公开(公告)号：US06436843B1

    公开(公告)日：2002-08-20

    申请号：US09823721

    申请日：2001-03-30

    申请人： Henner Meinhold ,  Fred J. Chetcuti ,  Judy Huang

    发明人： Henner Meinhold ,  Fred J. Chetcuti ,  Judy Huang

    IPC分类号： H01L2131

    CPC分类号： H01L21/6715 ,  B05C5/0212 ,  B05C5/0291 ,  H01L51/0005

    摘要： In a method for applying a coating material on a substrate, a print head is disposed over a substrate. Drops of a coating material are controllably dispensed from the print head to form a wide area film on the substrate. A system for coating a wafer includes a housing, and a chuck for supporting the wafer and a print head are disposed in the housing. A source of a coating material is coupled to the print head. A digital signal processor provides control signals for controlling process parameters for dispensing drops of the coating material and for controlling the relative position of the print head and the chuck. The relative position of the print head and the chuck (and hence the wafer supported thereon) may be controlled by moving the print head by itself, by moving the chuck by itself, or by moving both the print head and the chuck.

    摘要翻译： 在将涂料施加在基材上的方法中，将印刷头设置在基材上。 从打印头可控地分配涂料的液滴，以在基材上形成广泛的膜。 用于涂覆晶片的系统包括壳体和用于支撑晶片的卡盘，并且打印头设置在壳体中。 涂料的源连接到打印头。 数字信号处理器提供用于控制处理参数的控制信号，用于分配涂料的液滴并用于控制打印头和卡盘的相对位置。 可以通过使打印头本身移动，通过自身移动卡盘或通过移动打印头和卡盘来控制打印头和卡盘（以及因此支撑在其上的晶片）的相对位置（并且因此支撑在其上的晶片）。

    High-temperature battery
    10.
    发明授权
    High-temperature battery 失效
    高温电池

    公开(公告)号：US4443524A

    公开(公告)日：1984-04-17

    申请号：US375967

    申请日：1982-05-07

    申请人： Henner Meinhold ,  Dieter Hasenauer

    发明人： Henner Meinhold ,  Dieter Hasenauer

    IPC分类号： H01M10/39 ,  H01M2/10 ,  H01M10/613 ,  H01M10/6566 ,  H01M10/658

    CPC分类号： H01M2/1088 ,  H01M10/613 ,  H01M10/6566 ,  H01M10/658 ,  H01M10/615

    摘要： High-temperature battery with at least one electrochemical storage cell which is surrounded by thermal insulation as well as by feed and discharge lines for the cooling air. At least one module which can be inserted into the high-temperature battery, contains the storage cells. The module has a feedline for cooling air and a discharge for the cooling air which are arranged so that the cooling air can be introduced into the module against the force of gravity and discharged from the module with the force of gravity.

    摘要翻译： 具有至少一个电化学蓄电池的高温电池，其被绝热以及用于冷却空气的进料和排出管线包围。 可插入高温电池的至少一个模块包含存储单元。 模块具有用于冷却空气的馈送线和用于冷却空气的排出口，其布置成使得冷却空气能够克服重力而被引入模块中并且随着重力从模块中排出。