公开(公告)号：US08168518B2

公开(公告)日：2012-05-01

申请号：US12600595

申请日：2008-04-30

申请人： Nobuhiko Umezu ,  Koichi Tsukihara ,  Goh Matsunobu ,  Yoshio Inagaki ,  Koichi Tatsuki ,  Shin Hotta ,  Katsuya Shirai

发明人： Nobuhiko Umezu ,  Koichi Tsukihara ,  Goh Matsunobu ,  Yoshio Inagaki ,  Koichi Tatsuki ,  Shin Hotta ,  Katsuya Shirai

IPC分类号： H01L21/20

CPC分类号： H01L29/66765 ,  H01L21/02532 ,  H01L21/02683 ,  H01L27/1281 ,  H01L27/1285

摘要： A gate insulating film (13) is formed on a substrate (1) so as to cover a gate electrode (11), and an amorphous silicon film (semiconductor thin film) (15) is further formed. A light absorption layer (19) is formed thereon through a buffer layer (17). Energy lines Lh are applied to the light absorption layer (19) from a continuous-wave laser such as a semiconductor laser. This oxidizes only a surface side of the light absorption layer Lh and produces a beautiful crystalline silicon film (15a) obtained by crystallizing the amorphous silicon film (15) using heat generated by thermal conversion of the energy lines Lh at the light absorption layer (19) and heat of the oxidation reaction. This provides a method for crystallizing a thin film with good controllability at low costs achieved with simpler process.

摘要翻译： 在基板（1）上形成栅极绝缘膜（13）以覆盖栅电极（11），并且进一步形成非晶硅膜（半导体薄膜）（15）。 通过缓冲层（17）在其上形成光吸收层（19）。 能量线Lh由诸如半导体激光器的连续波激光器施加到光吸收层（19）。 这仅氧化光吸收层Lh的表面侧，并且产生通过使用在光吸收层（19）处的能量线Lh的热转换产生的热而使非晶硅膜（15）结晶而获得的美丽的晶体硅膜（15a） ）和氧化反应的热量。 这提供了一种以较简单的工艺以低成本使具有良好可控性的薄膜结晶的方法。

公开(公告)号：US20100159619A1

公开(公告)日：2010-06-24

申请号：US12600595

申请日：2008-04-30

申请人： Nobuhiko Umezu ,  Koichi Tsukihara ,  Goh Matsunobu ,  Yoshio Inagaki ,  Koichi Tatsuki ,  Shin Hotta ,  Katsuya Shirai

发明人： Nobuhiko Umezu ,  Koichi Tsukihara ,  Goh Matsunobu ,  Yoshio Inagaki ,  Koichi Tatsuki ,  Shin Hotta ,  Katsuya Shirai

IPC分类号： H01L33/00 ,  H01L21/20 ,  H01L21/336 ,  H01L21/30

CPC分类号： H01L29/66765 ,  H01L21/02532 ,  H01L21/02683 ,  H01L27/1281 ,  H01L27/1285

摘要： A gate insulating film (13) is formed on a substrate (1) so as to cover a gate electrode (11), and an amorphous silicon film (semiconductor thin film) (15) is further formed. A light absorption layer (19) is formed thereon through a buffer layer (17). Energy lines Lh are applied to the light absorption layer (19) from a continuous-wave laser such as a semiconductor laser. This oxidizes only a surface side of the light absorption layer Lh and produces a beautiful crystalline silicon film (15a) obtained by crystallizing the amorphous silicon film (15) using heat generated by thermal conversion of the energy lines Lh at the light absorption layer (19) and heat of the oxidation reaction. This provides a method for crystallizing a thin film with good controllability at low costs achieved with simpler process.

摘要翻译： 在基板（1）上形成栅极绝缘膜（13）以覆盖栅电极（11），并且进一步形成非晶硅膜（半导体薄膜）（15）。 通过缓冲层（17）在其上形成光吸收层（19）。 能量线Lh由诸如半导体激光器的连续波激光器施加到光吸收层（19）。 这仅氧化光吸收层Lh的表面侧，并且产生通过使用在光吸收层（19）处的能量线Lh的热转换产生的热而使非晶硅膜（15）结晶而获得的美丽的晶体硅膜（15a） ）和氧化反应的热量。 这提供了一种以较简单的工艺以低成本使具有良好可控性的薄膜结晶的方法。

公开(公告)号：US08518756B2

公开(公告)日：2013-08-27

申请号：US13441556

申请日：2012-04-06

申请人： Nobuhiko Umezu ,  Koichi Tsukihara ,  Goh Matsunobu ,  Yoshio Inagaki ,  Koichi Tatsuki ,  Shin Hotta ,  Katsuya Shirai

发明人： Nobuhiko Umezu ,  Koichi Tsukihara ,  Goh Matsunobu ,  Yoshio Inagaki ,  Koichi Tatsuki ,  Shin Hotta ,  Katsuya Shirai

IPC分类号： H01L21/00

CPC分类号： H01L29/66765 ,  H01L21/02532 ,  H01L21/02683 ,  H01L27/1281 ,  H01L27/1285

摘要： A method for crystallizing a thin film A gate insulating film formed on a substrate so as to cover a gate electrode. A light absorption layer is formed thereon through a buffer layer. Energy lines Lh are applied to the light absorption layer from a continuous-wave laser such as a semiconductor laser. This anneals only a surface side of the light absorption layer Lh and produces a crystalline silicon film obtained by crystallizing the amorphous silicon film using heat generated by thermal conversion of the energy lines Lh at the light absorption layer and heat of the annealing reaction.

摘要翻译： 一种使薄膜结晶的方法在基板上形成的覆盖栅电极的栅极绝缘膜。 通过缓冲层在其上形成光吸收层。 能量线Lh由诸如半导体激光器的连续波激光器施加到光吸收层。 这仅退光到光吸收层Lh的表面侧，并且产生通过使用在光吸收层处的能量线Lh的热转化和退火反应的热而产生的热而使非晶硅膜结晶而获得的结晶硅膜。

公开(公告)号：US20050252894A1

公开(公告)日：2005-11-17

申请号：US11177574

申请日：2005-07-08

申请人： Yutaka Imai ,  Nobuhiko Umezu ,  Akihiko Asano ,  Shin Hotta ,  Koichi Tatsuki ,  Atsushi Fukumoto ,  Shigeo Kubota

发明人： Yutaka Imai ,  Nobuhiko Umezu ,  Akihiko Asano ,  Shin Hotta ,  Koichi Tatsuki ,  Atsushi Fukumoto ,  Shigeo Kubota

IPC分类号： B23K26/06 ,  B23K26/067 ,  H01L21/20 ,  H01L21/268 ,  B23K26/02

CPC分类号： B23K26/0613 ,  B23K26/0604 ,  B23K26/0622 ,  B23K26/067 ,  H01L21/02532 ,  H01L21/02678 ,  H01L21/02686 ,  H01L21/02691 ,  H01L21/268 ,  H01L27/1285

摘要： A laser annealing device (10) includes a laser oscillator (12), radiating a pulsed laser light beam of a preset period, and an illuminating optical system (15) for illuminating a pulsed laser light beam to an amorphous silicon film (1). The illuminating optical system (15) manages control for moving a laser spot so that a plural number of light pulses will be illuminated on the same location on the amorphous silicon film (1). The laser oscillator (12) radiates a laser light beam of a pulse generation period shorter than the reference period. The reference period is a time interval as from the radiation timing of illumination of a pulsed laser light beam on the surface of the film (1) until the timing of reversion of the substrate temperature raised due to the illumination of the laser light beam to the original substrate temperature.

摘要翻译： 激光退火装置（10）包括激光振荡器（12），辐射预设周期的脉冲激光束，以及用于将脉冲激光束照射到非晶硅膜（1）的照明光学系统（15）。 照明光学系统（15）管理用于移动激光光斑的控制，使得多个光脉冲将被照射在非晶硅膜（1）上的相同位置。 激光振荡器（12）辐射比参考周期短的脉冲发生时段的激光束。 参考周期是从在膜（1）的表面上的脉冲激光束的照射的辐射定时直到由于激光束照射到基板温度升高的定时的时间间隔 原始基板温度。

公开(公告)号：US20050269298A1

公开(公告)日：2005-12-08

申请号：US10533948

申请日：2003-10-24

申请人： Shin Hotta ,  Koichi Tsukihara ,  Akifumi Ohshima ,  Takashi Mizusawa ,  Masaaki Abe

发明人： Shin Hotta ,  Koichi Tsukihara ,  Akifumi Ohshima ,  Takashi Mizusawa ,  Masaaki Abe

IPC分类号： B23K26/06 ,  B23K26/08 ,  H01L21/20 ,  H01L21/268

CPC分类号： H01L21/02675 ,  B23K26/064 ,  B23K26/0643 ,  B23K26/0648 ,  B23K26/08 ,  B23K26/082 ,  H01L21/2026 ,  H01L21/268

摘要： A light irradiator used as a laser annealing apparatus is provided which includes a controller (9) which controls a solid-state laser (4) to make pulse-on operation by detecting that the angle of rotation of a rotating shaft (7a) becomes +β after the rotating direction of the rotating shaft (7a) changes from clockwise to counterclockwise and then make pulse-off operation by detecting that the angle of rotation become −β, while controlling the solid-state laser (4) to make the pulse-on operation by detecting that the angle of rotation becomes −β after the rotating direction changes from counterclockwise to clockwise and then make the pulse-off operation by detecting that the angle of rotation becomes +β. Further, the controller (9) controls a moving stage (3) to move at a constant velocity in a constant-velocity moving direction, and move over a predetermined distance in a predetermined-distance moving direction after a to-be-annealed object (2) is irradiated with the light beam on a range from one end thereof to the other end in the constant-velocity moving direction, thereby irradiating the whole surface of the to-be-irradiated object (2) with a uniform energy.

摘要翻译： 提供了一种用作激光退火装置的光照射器，其包括控制器（9），控制器（9）通过检测旋转轴（7a）的旋转角度变为（...），控制固态激光器（4）进行脉冲接通操作 旋转轴（7a）的旋转方向的旋转角度（β）的β+β在顺时针方向向逆时针方向变化，然后通过检测旋转角度变为-beta来进行脉冲关闭操作，同时控制固态激光器 通过检测旋转方向从逆时针方向向顺时针方向变化后的旋转角变为-beta，然后通过检测旋转角度为+β进行脉冲关闭操作，进行脉冲开启操作。 此外，控制器（9）控制移动台（3）以等速移动方向以恒定速度移动，并且在待退火物体之后在预定距离移动方向上移动预定距离（ 2）在恒定速度移动方向的一端至另一端的范围内用光束照射，从而以均匀的能量照射被照射物体（2）的整个表面。

公开(公告)号：US20070178674A1

公开(公告)日：2007-08-02

申请号：US11690232

申请日：2007-03-23

申请人： Yutaka Imai ,  Nobuhito Umezu ,  Akihiko Asano ,  Shin Hotta ,  Koichi Tatsuki ,  Atsushi Fukumoto ,  Shigeo Kubota

发明人： Yutaka Imai ,  Nobuhito Umezu ,  Akihiko Asano ,  Shin Hotta ,  Koichi Tatsuki ,  Atsushi Fukumoto ,  Shigeo Kubota

IPC分类号： H01L21/268

CPC分类号： B23K26/0613 ,  B23K26/0604 ,  B23K26/0622 ,  B23K26/067 ,  H01L21/02532 ,  H01L21/02678 ,  H01L21/02686 ,  H01L21/02691 ,  H01L21/268 ,  H01L27/1285

摘要： A laser annealing device (10) includes a laser oscillator (12), radiating a pulsed laser light beam of a preset period, and an illuminating optical system (15) for illuminating a pulsed laser light beam to an amorphous silicon film (1). The illuminating optical system (15) manages control for moving a laser spot so that a plural number of light pulses will be illuminated on the same location on the amorphous silicon film (1). The laser oscillator (12) radiates a laser light beam of a pulse generation period shorter than the reference period. The reference period is a time interval as from the radiation timing of illumination of a pulsed laser light beam on the surface of the film (1) until the timing of reversion of the substrate temperature raised due to the illumination of the laser light beam to the original substrate temperature.

摘要翻译： 激光退火装置（10）包括激光振荡器（12），辐射预设周期的脉冲激光束，以及用于将脉冲激光束照射到非晶硅膜（1）的照明光学系统（15）。 照明光学系统（15）管理用于移动激光光斑的控制，使得多个光脉冲将被照射在非晶硅膜（1）上的相同位置。 激光振荡器（12）辐射比参考周期短的脉冲发生时段的激光束。 参考周期是从在膜（1）的表面上的脉冲激光束的照射的辐射定时直到由于激光束照射到基板温度升高的定时的时间间隔 原始基板温度。

公开(公告)号：US20130200848A1

公开(公告)日：2013-08-08

申请号：US13879580

申请日：2011-09-08

申请人： Atsushi Ozawa ,  Kazuo Nakamura ,  Shin Hotta ,  Kentaro Marutani ,  Shinichi Uesaka

发明人： Atsushi Ozawa ,  Kazuo Nakamura ,  Shin Hotta ,  Kentaro Marutani ,  Shinichi Uesaka

IPC分类号： H02J7/00

CPC分类号： H02J7/0029 ,  B60L11/1855 ,  B60L2200/26 ,  H01M10/441 ,  H02J7/0019 ,  H02J7/0024 ,  H02J7/045 ,  Y02T10/7005 ,  Y02T10/705

摘要： Provided is a method for charging/discharging a battery pack having an auxiliary charging/discharging device and a battery assembly in which a plurality of secondary battery cell parallel modules, each of which includes a plurality of fasecondary battery cells connected in parallel, are connected in series, the method including, when there is no abnormality in the secondary battery cells during charging/discharging, connecting the auxiliary charging/discharging device in parallel to any of the secondary battery cell parallel modules, and when there is an abnormality in any of the secondary battery cells during charging/discharging, releasing connection to the secondary battery cell at which the abnormality has arisen in the secondary battery cell parallel module including the secondary battery cell at which the abnormality has arisen, and connecting the auxiliary charging/discharging device in parallel to the secondary battery cell parallel module including the secondary battery cell at which the abnormality has arisen.

摘要翻译： 本发明提供一种具有辅助充电/放电装置和电池组件的电池组的充电/放电方法，其中包括并联连接的多个第二电池单元的多个二次电池单元并联模块连接在 该方法包括当在充电/放电期间二次电池单元中没有异常时，将辅助充电/放电装置与任何二次电池单元并联模块并联连接，并且当任何一个 在充放电期间的二次电池单元，在包括产生异常的二次电池的二次电池单元并联模块中发生异常的二次电池单元的连接，并且并联连接辅助充电/放电装置 涉及包括二次电池单元a的二次电池单元并联模块 这产生了异常。

公开(公告)号：US09281702B2

公开(公告)日：2016-03-08

申请号：US13822200

申请日：2011-09-09

申请人： Shin Hotta

发明人： Shin Hotta

IPC分类号： H02J7/00 ,  H01M10/44 ,  B60L11/18 ,  H01M6/42

CPC分类号： H02J7/0052 ,  B60L11/1809 ,  B60L11/1853 ,  B60L11/1877 ,  H01M6/42 ,  H01M10/441 ,  H02J7/0016 ,  H02J7/0019 ,  H02J7/0042 ,  H02J7/0063 ,  H02J7/0065 ,  H02J2007/0067 ,  Y02T10/7005 ,  Y02T10/705 ,  Y02T10/7055 ,  Y02T10/7072 ,  Y02T90/14

摘要： The present invention relates to an electric storage unit group, a charger, an electronic device, an electric vehicle, a method for charging the electric storage unit, a method for discharging the electric storage unit group, a method for supplying and receiving power, and a method for determining a charging/discharging route in the electric storage unit group, which can provide a method for charging the electric storage unit group in which a plurality of electric storage units are connected in a desired form.The method for charging the electric storage unit group is a method for charging a rechargeable battery cell in an electric storage unit group in which a plurality of electric storage units having rechargeable battery cells are linearly or reticulately connected. At an upstream side of the electric storage unit group, the electric storage unit group is connected to a power supply for charging the electric storage units.

摘要翻译： 本发明涉及蓄电单元组，充电器，电子设备，电动车辆，蓄电单元的充电方法，放电单元组的方法，电力供应和接收的方法，以及 一种用于确定蓄电单元组中的充电/放电路径的方法，其可以提供一种对期望形式连接多个蓄电单元的蓄电单元组进行充电的方法。 对蓄电单元组进行充电的方法是对具有可再充电电池单元的多个蓄电单元线性地或网状连接的蓄电单元组中的可再充电电池单元进行充电的方法。 在蓄电单元组的上游侧，蓄电单元组连接到用于对蓄电单元充电的电源。

公开(公告)号：US09947972B2

公开(公告)日：2018-04-17

申请号：US13822534

申请日：2011-09-05

申请人： Atsushi Ozawa ,  Shin Hotta ,  Kentaro Marutani ,  Shinichi Uesaka

发明人： Atsushi Ozawa ,  Shin Hotta ,  Kentaro Marutani ,  Shinichi Uesaka

IPC分类号： H02J7/00 ,  H01M10/42 ,  H01M10/48 ,  H01M10/04 ,  H01M2/10 ,  H01M2/00 ,  G01R31/36 ,  H01M10/0525

CPC分类号： H01M10/482 ,  H01M2/1077 ,  H01M10/0525 ,  H01M10/4207 ,  H01M10/425 ,  H01M2200/00 ,  H01M2220/20

摘要： A battery pack and a method of inspecting a storage state of a secondary battery in the battery pack are provided. In the method of inspecting a storage state of a secondary battery in the battery pack, the battery pack includes (A) a plurality of secondary batteries and (B) a housing, the housing having a plurality of storage sections and containing the secondary batteries in the respective storage sections; a conductive member 30 is attached to an outer surface of each of the secondary batteries made of a non-conductive material; each of the storage sections is provided with at least two detection sections; and depending on a storage state of each of the secondary batteries in each of the storage sections, two detection sections are in contact with the conductive member, or at least one detection section is not in contact with the conductive member.

公开(公告)号：US20130171481A1

公开(公告)日：2013-07-04

申请号：US13823014

申请日：2011-09-05

申请人： Shin Hotta ,  Atsushi Ozawa ,  Kentaro Marutani ,  Shinichi Uesaka

发明人： Shin Hotta ,  Atsushi Ozawa ,  Kentaro Marutani ,  Shinichi Uesaka

IPC分类号： H01M10/42 ,  H01M2/10

CPC分类号： H01M10/4221 ,  H01M2/1022 ,  H01M2/1077 ,  H01M10/0525 ,  H01M10/4207 ,  H01M10/425 ,  H01M10/441 ,  H01M10/482

摘要： A battery pack is provided. The battery pack has a plurality of secondary batteries and an inspection circuit. When the plurality of secondary batteries are classified into a first secondary battery group configured of secondary batteries selected from the plurality of secondary batteries and a second secondary battery group configured of remaining secondary batteries not belonging to the first secondary battery group, the inspection circuit creates a first data string of the secondary batteries configuring the second secondary battery group, based on a predetermined arithmetic rule, from identification marks of the secondary batteries configuring the first secondary battery group, obtains a second data string by examining identification marks of the secondary batteries configuring the second secondary battery group, subsequently compares the first data string with the second data string, and stops a function of the battery pack when the first data string and the second data string do not match.

摘要翻译： 提供电池组。 电池组具有多个二次电池和检查电路。 当多个二次电池被分类为由从多个二次电池中选择的二次电池构成的第一二次电池组和由不属于第一二次电池组的剩余二次电池构成的第二二次电池组时，检查电路产生 通过构成第一二次电池组的二次电池的识别标记，基于预定的算术规则构成第二二次电池组的二次电池的第一数据串，通过检查构成第二二次电池组的二次电池的识别标记， 第二二次电池组，随后将第一数据串与第二数据串进行比较，并且当第一数据串和第二数据串不匹配时，停止电池组的功能。