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    Compact sealed-off excimer laser
    1.
    发明申请
    Compact sealed-off excimer laser 审中-公开
    紧凑型密封准分子激光器

    公开(公告)号：US20080019411A1

    公开(公告)日：2008-01-24

    申请号：US11490386

    申请日：2006-07-20

    申请人： Norbert Niemoeller ,  Igor Bragin ,  Rainer Paetzel ,  Rustem Osmanow ,  Juergen Witt

    发明人： Norbert Niemoeller ,  Igor Bragin ,  Rainer Paetzel ,  Rustem Osmanow ,  Juergen Witt

    IPC分类号： H01S3/22

    CPC分类号： H01S3/225 ,  H01S3/0305 ,  H01S3/036 ,  H01S3/0385

    摘要： An excimer laser is disclosed in which a gas-discharge is formed for exciting an excimer-forming lasing-gas mixture. The gas discharge is formed between an elongated anode electrode and a elongated cathode electrode. The anode is in contact with a dielectric surface and the cathode is supported above the dielectric surface, laterally spaced from and parallel to the anode. The gas-discharge has a surface-discharge or sliding discharge portion extending from the anode over the dielectric surface, and a volume-discharge portion connecting the sliding-discharge portion to the cathode. The volume-discharge excites the lasing-gas mixture. A laser resonator is arranged to generate laser radiation from the excited gas mixture. The sliding-discharge has homogeneous, stable characteristics that are inherited by the volume-discharge. An ion-wind generator provides circulation of the lasing-gas mixture through the volume-discharge.

    摘要翻译： 公开了一种准分子激光器，其中形成气体放电以激发准分子成型激光气体混合物。 气体放电形成在细长的阳极电极和细长的阴极电极之间。 阳极与电介质表面接触，并且阴极被支撑在电介质表面的上方，与阳极横向间隔开并平行。 气体放电具有从电介质表面上的阳极延伸的表面放电或滑动放电部，以及将滑动放电部连接到阴极的容积放电部。 体积放电激发激光气体混合物。 激光谐振器布置成从激发的气体混合物产生激光辐射。 滑动放电具有由体积放电所遗传的均匀，稳定的特性。 离子风发生器通过体积放电提供激光气体混合物的循环。

    System and method for segmented electrode with temporal voltage shifting
    2.
    发明申请
    System and method for segmented electrode with temporal voltage shifting 审中-公开
    具有时间电压偏移的分段电极的系统和方法

    公开(公告)号：US20050058172A1

    公开(公告)日：2005-03-17

    申请号：US10936084

    申请日：2004-09-08

    申请人： Rainer Paetzel ,  Igor Bragin ,  Andreas Targsdorf ,  Vadim Berger ,  Rustem Osmanow

    发明人： Rainer Paetzel ,  Igor Bragin ,  Andreas Targsdorf ,  Vadim Berger ,  Rustem Osmanow

    IPC分类号： H01S3/00 ,  H01S3/038 ,  H01S3/0971 ,  H01S3/22

    CPC分类号： H01S3/0971 ,  H01S3/038 ,  H01S3/09713

    摘要： The stability of a gas discharge in an excimer or molecular fluorine laser system can be improved by generating multiple discharge pulses in the resonator chamber, instead of a single discharge pulse. Each of these discharges can be optimized in both energy transfer and efficient coupling to the gas. The timing of each discharge can be controlled using, for example, a common pulser component along with appropriate circuitry to provide energy pulses to each of a plurality of segmented main discharge electrodes. Applying the energy to the segmented electrodes rather than to a standard discharge electrode pair allows for an optimization of the temporal shape of the resulting superimposed laser pulse. The optimized shape and higher stability can allow the laser system to operate at higher repetition rates, while minimizing the damage to system and/or downstream optics.

    摘要翻译： 可以通过在谐振器腔中产生多个放电脉冲而不是单个放电脉冲来改善准分子或分子氟激光系统中气体放电的稳定性。 这些放电中的每一个可以在能量传递和与气体的有效耦合的两者中进行优化。 可以使用例如公共脉冲发生器部件以及适当的电路来控制每个放电的定时，以向多个分段的主放电电极中的每一个提供能量脉冲。 将能量施加到分段电极而不是标准放电电极对允许优化所得叠加的激光脉冲的时间形状。 优化的形状和更高的稳定性可以允许激光系统以更高的重复率操作，同时最小化对系统和/或下游光学器件的损害。

    Master oscillator/power amplifier excimer laser system with pulse energy and pointing control
    3.
    发明授权
    Master oscillator/power amplifier excimer laser system with pulse energy and pointing control 有权
    具有脉冲能量和指向控制的主振荡器/功率放大器准分子激光系统

    公开(公告)号：US07158553B2

    公开(公告)日：2007-01-02

    申请号：US10776404

    申请日：2004-02-11

    申请人： Sergei V. Govorkov ,  Alexander O. Wiessner ,  Rainer Paetzel ,  Igor Bragin

    发明人： Sergei V. Govorkov ,  Alexander O. Wiessner ,  Rainer Paetzel ,  Igor Bragin

    IPC分类号： H01S3/22

    CPC分类号： H01S3/2366 ,  H01S3/10 ,  H01S3/225 ,  H01S3/2333

    摘要： Pulse parameters of a gas discharge laser system can be optimized and controlled for precision applications such as microlithography. Important laser pulse parameters typically vary in the beginning of a pulse burst, and the directionality of the output beam typically varies throughout the burst. In order to improve the performance of the laser system, the variation at the beginning of a pulse burst can be eliminated by extending the pulse pattern and shuttering the output during periods of significant parameter variation. A fast shutter such as an acousto-optical modulator can be used to prevent output during the burst transition processes. Elements such as acousto-optical cells also can be used in combination with a fast position sensor to steer the direction of the output beam, in order to adjust for variations in the direction of the beam between pulses in a burst.

    摘要翻译： 可以优化和控制气体放电激光系统的脉冲参数，用于精密应用，如微光刻。 重要的激光脉冲参数通常在脉冲脉冲串的开始时变化，并且输出光束的方向性通常在整个脉冲串中变化。 为了提高激光系统的性能，可以通过在显着的参数变化期间延长脉冲模式并对输出进行快门来消除脉冲脉冲串开始时的变化。 诸如声光调制器之类的快门可用于在突发转换过程期间防止输出。 诸如声光单元的元件也可以与快速位置传感器组合使用以控制输出光束的方向，以便调整在脉冲串中的脉冲之间的波束方向上的变化。

    Excimer or molecular fluorine laser with several discharge chambers
    4.
    发明授权
    Excimer or molecular fluorine laser with several discharge chambers 有权
    具有多个放电室的准分子或分子氟激光

    公开(公告)号：US06987790B2

    公开(公告)日：2006-01-17

    申请号：US10776137

    申请日：2004-02-11

    申请人： Sergei V. Govorkov ,  Rainer Paetzel ,  Igor Bragin ,  Rainer Desor ,  Andreas Targsdorf ,  Andriy Knysh

    发明人： Sergei V. Govorkov ,  Rainer Paetzel ,  Igor Bragin ,  Rainer Desor ,  Andreas Targsdorf ,  Andriy Knysh

    IPC分类号： H01S3/22 ,  H01S3/223 ,  H01S3/097

    CPC分类号： H01S3/225 ,  H01S3/09713 ,  H01S3/2366

    摘要： Precise timing control can be obtained for a gas discharge laser, such as an excimer or molecular fluorine laser, using a timed trigger ionization. Instead of using a standard approach to control the timing of the emission or amplification of an optical pulse using the discharge of the main electrodes, the timing of which can only be controlled to within about 10 ns, a trigger ionization pulse applied subsequent to the charging of the main electrodes can be used to control the timing of the discharge, thereby decreasing the timing variations to about 1 ns. Since ionization of the laser gas can consume relatively small amounts of energy, such a circuit can be based on a fast, high-voltage, solid state switch that is virtually free of jitter. Trigger ionization also can be used to synchronize the timing of dual chambers in a MOPA configuration. In one such approach, ionization trigger can include at least a portion of the optical pulse from the oscillator in a MOPA configuration.

    摘要翻译： 使用定时触发电离可以为气体放电激光器（例如准分子激光或分子氟激光）获得准确的时序控制。 代替使用标准方法来控制使用主电极的放电的光脉冲的发射或放大的定时，其定时只能被控制在约10ns内，在充电之后施加的触发电离脉冲 的主电极可以用于控制放电的定时，从而将定时变化减小到大约1ns。 由于激光气体的离子化可以消耗相对少量的能量，所以这种电路可以基于实际上没有抖动的快速，高电压的固态开关。 触发电离也可用于同步MOPA配置中双室的时序。 在一种这样的方法中，电离触发可以包括来自MOPA配置中的来自振荡器的光脉冲的至少一部分。

    Laser system sealing
    5.
    发明申请
    Laser system sealing 审中-公开
    激光系统密封

    公开(公告)号：US20050083984A1

    公开(公告)日：2005-04-21

    申请号：US10963284

    申请日：2004-10-12

    申请人： Igor Bragin ,  Rainer Paetzel ,  Juergen Baumler ,  Heiko Diesing ,  Helmer Beulshausen ,  Ulrich Rebhan

    发明人： Igor Bragin ,  Rainer Paetzel ,  Juergen Baumler ,  Heiko Diesing ,  Helmer Beulshausen ,  Ulrich Rebhan

    IPC分类号： H01S3/03 ,  H01S3/036 ,  H01S3/22 ,  H01S3/225

    CPC分类号： H01S3/036 ,  H01S3/03 ,  H01S3/225

    摘要： The lifetime of the laser gas in a laser system such as an excimer laser can be increased by changing the way in which the laser system is sealed. In addition to primary seals used to seal the reservoir chamber and discharge channel, at least one secondary seal can be used between the primary seals and the surrounding environment in order to further prevent permeation of impurities into the discharge chamber, as well as to create an intermediate gas volume. A controlled atmosphere can be generated in the intermediate gas volume, which can be at a slightly higher pressure than the surrounding environment in order to resist the flow of impurities through the secondary seal(s). Further, a flow of purge gas can be introduced into the controlled atmosphere in order to carry away any impurities that leak through the secondary seal(s).

    摘要翻译： 通过改变激光系统被密封的方式，可以增加诸如准分子激光器之类的激光系统中的激光气体的寿命。 除了用于密封储存室和排出通道的主密封件之外，可以在主密封件和周围环境之间使用至少一个二次密封件，以便进一步防止杂质渗透到排放室中，并且产生 中间气体体积。 可以在中间气体体积中产生受控的气氛，其可以处于比周围环境稍高的压力，以抵抗杂质通过二次密封件的流动。 此外，吹扫气体流可以被引入到受控气氛中，以便携带通过二次密封件泄漏的任何杂质。

    Excimer or molecular fluorine laser system with precision timing
    6.
    发明申请
    Excimer or molecular fluorine laser system with precision timing 有权
    准分子或分子氟激光系统具有精确时序

    公开(公告)号：US20050031004A1

    公开(公告)日：2005-02-10

    申请号：US10699763

    申请日：2003-11-03

    申请人： Dirk Basting ,  Sergei Govorkov ,  Rainer Paetzel ,  Igor Bragin ,  Andreas Targsdorf

    发明人： Dirk Basting ,  Sergei Govorkov ,  Rainer Paetzel ,  Igor Bragin ,  Andreas Targsdorf

    IPC分类号： H01S3/00 ,  H01S3/0971 ,  H01S3/22 ,  H01S3/225 ,  H01S3/23

    CPC分类号： H01S3/225 ,  H01S3/073 ,  H01S3/09702 ,  H01S3/09713 ,  H01S3/2258

    摘要： A Master Oscillator (MO)—Power Amplifier (PA) configuration (MOPA) can be used advantageously in an excimer laser system for micro-lithography applications, where semiconductor manufacturers demand powers of 40 W or more in order to support the throughput requirements of advanced lithography scanner systems. The timing of discharges in discharge chambers of the MO and PA can be precisely controlled using a common pulser to drive the respective chambers. The timing of the discharges further can be controlled through the timing of the pre-ionization in the chambers, or through control of the reset current in the final compression stages of the pulser. A common pulser, or separate pulser circuits, also can be actively controlled in time using a feedback loop, with precision timing being achieved through control of the pre-ionization in each individual discharge chamber. Yet another system provides for real-time compensation of time delay jitter of discharge pulses in the chambers.

    摘要翻译： 主振荡器（MO） - 功率放大器（PA）配置（MOPA）可以有利地用于微光刻应用的准分子激光系统，其中半导体制造商需要40W或更高的功率，以支持先进的吞吐量要求 光刻扫描仪系统。 可以使用公共脉冲发生器来精确地控制MO和PA的放电室中的放电定时以驱动各个室。 放电的时间进一步可以通过室内预电离的定时或通过控制脉冲发生器的最终压缩级中的复位电流来控制。 公共脉冲发生器或单独的脉冲发生器电路也可以使用反馈回路在时间上有效地控制，通过在每个单独的放电室中控制预电离来实现精确时序。 另一个系统提供对腔室中的放电脉冲的时间延迟抖动的实时补偿。

    Excimer or molecular fluorine laser system with precision timing
    7.
    发明授权
    Excimer or molecular fluorine laser system with precision timing 有权
    准分子或分子氟激光系统具有精确时序

    公开(公告)号：US07308013B2

    公开(公告)日：2007-12-11

    申请号：US10699763

    申请日：2003-11-03

    申请人： Dirk Basting ,  Sergei Govorkov ,  Rainer Paetzel ,  Igor Bragin ,  Andreas Targsdorf

    发明人： Dirk Basting ,  Sergei Govorkov ,  Rainer Paetzel ,  Igor Bragin ,  Andreas Targsdorf

    IPC分类号： H01S3/22

    CPC分类号： H01S3/225 ,  H01S3/073 ,  H01S3/09702 ,  H01S3/09713 ,  H01S3/2258

    摘要： A Master Oscillator (MO)—Power Amplifier (PA) configuration (MOPA) can be used advantageously in an excimer laser system for micro-lithography applications, where semiconductor manufacturers demand powers of 40 W or more in order to support the throughput requirements of advanced lithography scanner systems. The timing of discharges in discharge chambers of the MO and PA can be precisely controlled using a common pulser to drive the respective chambers. The timing of the discharges further can be controlled through the timing of the pre-ionization in the chambers, or through control of the reset current in the final compression stages of the pulser. A common pulser, or separate pulser circuits, also can be actively controlled in time using a feedback loop, with precision timing being achieved through control of the pre-ionization in each individual discharge chamber. Yet another system provides for real-time compensation of time delay jitter of discharge pulses in the chambers.

    摘要翻译： 主振荡器（MO） - 功率放大器（PA）配置（MOPA）可以有利地用于微光刻应用的准分子激光系统，其中半导体制造商需要40W或更高的功率，以支持先进的吞吐量要求 光刻扫描仪系统。 可以使用公共脉冲发生器来精确地控制MO和PA的放电室中的放电定时以驱动各个室。 放电的时间进一步可以通过室内预电离的定时或通过控制脉冲发生器的最终压缩级中的复位电流来控制。 公共脉冲发生器或单独的脉冲发生器电路也可以使用反馈回路在时间上有效地控制，通过在每个单独的放电室中控制预电离来实现精确定时。 另一个系统提供对腔室中的放电脉冲的时间延迟抖动的实时补偿。