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公开(公告)号：US20110068265A1
公开(公告)日：2011-03-24
申请号：US12992788
申请日：2009-05-15
申请人： Noriaki Arai , Hideyuki Kazumi
发明人： Noriaki Arai , Hideyuki Kazumi
IPC分类号： G01N23/00
CPC分类号： H01J37/026 , H01J3/027 , H01J37/04 , H01J37/28 , H01J2237/0041 , H01J2237/0048 , H01J2237/30 , H01J2237/31749
摘要： A high-resolution sample image is acquired by eliminating both of charge over an entire sample (global charge) and charge in a local region irradiated with a primary charged particle beam (local charge). An electrode unit (50) according to the present invention is used in a charged particle beam device. The electrode unit (50) includes a plate electrode disposed facing an insulator sample between an objective lens and the sample, and further includes: a first charge-neutralization charged particle beam source which emits a first charged particle beam to eliminate local charge on the sample; and a second charge-neutralization charged particle beam source (25) which emits a second charged particle beam to eliminate global charge on the sample. A first hole (53) through which a primary charged particle beam passes, and a second hole through which the second charged particle beam is emitted are provided in the plate electrode, and the first and second charge-neutralization charged particle beam sources are disposed at such positions as not to interfere with each other. The charged particle beam emitted from the first charge-neutralization charged particle beam source is introduced in the vicinity of the first hole (53).
摘要翻译： 通过在整个样品（全局电荷）上消除电荷并在用初级带电粒子束（局部电荷）照射的局部区域中的电荷获得高分辨率采样图像。 根据本发明的电极单元（50）用于带电粒子束装置。 电极单元（50）包括面对物镜和样品之间的绝缘体样品的平板电极，还包括：第一电荷中和带电粒子束源，其发射第一带电粒子束以消除样品上的局部电荷 ; 以及发射第二带电粒子束以消除样品上的全局电荷的第二电荷中和带电粒子束源（25）。 初级带电粒子束通过的第一孔53和第二带电粒子束发射的第二孔设置在板电极中，第一和第二电荷中和带电粒子束源设置在 这样的位置不会相互干扰。 从第一电荷中和带电粒子束源发射的带电粒子束被引入第一孔（53）附近。
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公开(公告)号：US08153966B2
公开(公告)日：2012-04-10
申请号：US12992788
申请日：2009-05-15
申请人： Noriaki Arai , Hideyuki Kazumi
发明人： Noriaki Arai , Hideyuki Kazumi
IPC分类号： H01J37/244
CPC分类号： H01J37/026 , H01J3/027 , H01J37/04 , H01J37/28 , H01J2237/0041 , H01J2237/0048 , H01J2237/30 , H01J2237/31749
摘要： A high-resolution sample image is acquired by eliminating both of charge over an entire sample (global charge) and charge in a local region irradiated with a primary charged particle beam (local charge). An electrode unit (50) according to the present invention is used in a charged particle beam device. The electrode unit (50) includes a plate electrode disposed facing an insulator sample between an objective lens and the sample, and further includes: a first charge-neutralization charged particle beam source which emits a first charged particle beam to eliminate local charge on the sample; and a second charge-neutralization charged particle beam source (25) which emits a second charged particle beam to eliminate global charge on the sample. A first hole (53) through which a primary charged particle beam passes, and a second hole through which the second charged particle beam is emitted are provided in the plate electrode, and the first and second charge-neutralization charged particle beam sources are disposed at such positions as not to interfere with each other. The charged particle beam emitted from the first charge-neutralization charged particle beam source is introduced in the vicinity of the first hole (53).
摘要翻译： 通过在整个样品（全局电荷）上消除电荷并在用初级带电粒子束（局部电荷）照射的局部区域中的电荷获得高分辨率采样图像。 根据本发明的电极单元（50）用于带电粒子束装置。 电极单元（50）包括面对物镜和样品之间的绝缘体样品的平板电极，还包括：第一电荷中和带电粒子束源，其发射第一带电粒子束以消除样品上的局部电荷 ; 以及发射第二带电粒子束以消除样品上的全局电荷的第二电荷中和带电粒子束源（25）。 初级带电粒子束通过的第一孔53和第二带电粒子束发射的第二孔设置在板电极中，第一和第二电荷中和带电粒子束源设置在 这样的位置不会相互干扰。 从第一电荷中和带电粒子束源发射的带电粒子束被引入第一孔（53）附近。
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公开(公告)号：US09640366B2
公开(公告)日：2017-05-02
申请号：US13580288
申请日：2011-02-09
CPC分类号： H01J37/28 , H01J37/026 , H01J37/266 , H01J37/268 , H01J2237/0048 , H01J2237/24564 , H01J2237/2594
摘要： The present invention has for its object to provide a charged particle beam irradiation method and a charged particle beam apparatus which can suppress unevenness of electrification even when a plurality of different kinds of materials are contained in a pre-dosing area or degrees of density of patterns inside the pre-dosing area differs with positions.To accomplish the above object, a charged particle beam irradiation method and a charged particle beam apparatus are provided according to which the pre-dosing area is divided into a plurality of divisional areas and electrifications are deposited to the plural divisional areas by using a beam under different beam irradiation conditions. With the above construction, the electrifications can be deposited to the pre-dosing area on the basis of such an irradiation condition that the differences in electrification at individual positions inside the pre-dosing area can be suppressed and consequently, an influence an electric field has upon the charged particle beam and electrons given off from the sample can be suppressed.
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4.发明授权Charged particle beam device and a method of improving image quality of the same 有权带电粒子束装置及其提高图像质量的方法公开(公告)号：US09019362B2
公开(公告)日：2015-04-28
申请号：US13513280
申请日：2010-11-08
申请人： Jie Bai , Kenji Nakahira , Atsushi Miyamoto , Chie Shishido , Hideyuki Kazumi
发明人： Jie Bai , Kenji Nakahira , Atsushi Miyamoto , Chie Shishido , Hideyuki Kazumi
IPC分类号： H04N7/18 , G01N23/00 , G21K7/00 , G06K9/00 , G06K9/46 , G06K9/66 , H01J37/28 , H01J37/244 , H01L21/66
CPC分类号： H01J37/28 , H01J37/244 , H01J2237/24495 , H01J2237/2809 , H01J2237/2817 , H01L22/12
摘要： The invention relates to a technique of improving a contrast of a lower-layer pattern in a multi layer by synthesizing detected signals from a plurality of detectors by using an appropriate allocation ratio in accordance with pattern arrangement. In a charged particle beam device capable of improving image quality by using detected images obtained from a plurality of detectors and in a method of improving the image quality, a method of generating one or more output images from detected images corresponding to respective outputs of the detectors that are arranged at different locations is controlled by using information of a pattern direction, an edge strength, or others calculated from a design data or the detected image. In this manner, a detection area of the detected signals can be expanded by using the plurality of detectors, and the image quality such as the contrast can be improved by synthesizing the detected signals by using the pattern direction or the edge strength calculated from the design data or the detected images.
摘要翻译： 本发明涉及一种通过根据图案布置使用合适的分配比例来合成来自多个检测器的检测信号来提高多层下层图案的对比度的技术。 在能够通过使用从多个检测器获得的检测图像来提高图像质量的带电粒子束装置中，以及提高图像质量的方法中，提供一种从与检测器的各个输出对应的检测图像生成一个或多个输出图像的方法 通过使用从设计数据或检测到的图像计算的图案方向，边缘强度或其他的信息来控制布置在不同位置处的位置。 以这种方式，可以通过使用多个检测器来扩展检测信号的检测区域，并且可以通过使用从设计计算出的图案方向或边缘强度合成检测信号来提高诸如对比度的图像质量 数据或检测到的图像。
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公开(公告)号：US08481935B2
公开(公告)日：2013-07-09
申请号：US13190153
申请日：2011-07-25
IPC分类号： H01J37/26
CPC分类号： H01J37/244 , H01J37/21 , H01J37/28 , H01J37/3045 , H01J2237/24564 , H01J2237/2594 , H01J2237/28 , H01J2237/2816 , H01J2237/30461
摘要： A scanning electron microscope having a charged particle beam that when in a state being irradiated toward a sample, a voltage is applied to the sample so that the charged particle beam does not reach the sample. The scanning electron microscope also detects information on a potential of a sample using a signal obtained, and a device for automatically adjusting conditions based on the result of measuring.
摘要翻译： 一种具有带电粒子束的扫描电子显微镜，其在朝向样品照射的状态下，向样品施加电压，使得带电粒子束未到达样品。 扫描电子显微镜还使用所获得的信号检测样品的电位信息，以及根据测定结果自动调整条件的装置。
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公开(公告)号：US07989768B2
公开(公告)日：2011-08-02
申请号：US12188870
申请日：2008-08-08
CPC分类号： H01J37/244 , H01J37/21 , H01J37/28 , H01J37/3045 , H01J2237/24564 , H01J2237/2594 , H01J2237/28 , H01J2237/2816 , H01J2237/30461
摘要： A scanning electron microscope having a charged particle beam that when in a state being irradiated toward a sample, a voltage is applied to the sample so that the charged particle beam does not reach the sample. The scanning electron microscope also detects information on a potential of a sample using a signal obtained, and a device for automatically adjusting conditions based on the result of measuring.
摘要翻译： 一种具有带电粒子束的扫描电子显微镜，其在朝向样品照射的状态下，向样品施加电压，使得带电粒子束未到达样品。 扫描电子显微镜还使用所获得的信号检测样品的电位信息，以及根据测定结果自动调整条件的装置。
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7.发明申请Method for Detecting Information of an Electric Potential on a Sample and Charged Particle Beam Apparatus 有权用于检测样品和带电粒子束装置上的电位信息的方法公开(公告)号：US20090272899A1
公开(公告)日：2009-11-05
申请号：US11958625
申请日：2007-12-18
申请人： Minoru YAMAZAKI , Akira Ikegami , Hideyuki Kazumi , Osamu Nasu
发明人： Minoru YAMAZAKI , Akira Ikegami , Hideyuki Kazumi , Osamu Nasu
IPC分类号： G01N23/00
CPC分类号： G01N23/2251 , G01R29/24 , H01J37/28 , H01J37/292 , H01J2237/221 , H01J2237/244 , H01J2237/24564 , H01J2237/24592 , H01J2237/2594
摘要： An object of the present invention is to provide a method and apparatus for measuring a potential on a surface of a sample using a charged particle beam while restraining a change in the potential on the sample induced by the charged particle beam application, or detecting a compensation value for a change in a condition for the apparatus caused by the sample being electrically charged. In order to achieve the above object, the present invention provides a method and apparatus for applying a voltage to a sample so that a charged particle beam does not reach the sample (hereinafter, this may be referred to as “mirror state”) in a state in which the charged particle beam is applied toward the sample, and detecting information relating to a potential on the sample using signals obtained by that voltage application.
摘要翻译： 本发明的目的是提供一种方法和装置，用于使用带电粒子束测量样品表面上的电位，同时抑制由带电粒子束施加引起的样品上的电位变化，或检测补偿 用于由样品带电引起的装置的状况改变的值。 为了实现上述目的，本发明提供了一种向样品施加电压使得带电粒子束不能到达样品的方法和装置（以下称为“镜像状态”），其中 将带电粒子束施加到样品的状态，以及使用通过该电压施加获得的信号检测与样品上的电位有关的信息。
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公开(公告)号：US06846363B2
公开(公告)日：2005-01-25
申请号：US10139302
申请日：2002-05-07
申请人： Hideyuki Kazumi , Tsutomu Tetsuka , Ryoji Nishio , Masatsugu Arai , Ken Yoshioka , Tsunehiko Tsubone , Akira Doi , Manabu Edamura , Kenji Maeda , Saburo Kanai
发明人： Hideyuki Kazumi , Tsutomu Tetsuka , Ryoji Nishio , Masatsugu Arai , Ken Yoshioka , Tsunehiko Tsubone , Akira Doi , Manabu Edamura , Kenji Maeda , Saburo Kanai
CPC分类号： H01J37/32174 , H01J37/32009 , H01J37/321
摘要： A plasma is generated by feeding an antenna with radio-frequency electric power generated by a radio-frequency power source, and one end of the antenna is grounded to the earth through a capacitor of variable capacitance. A Faraday shield is electrically isolated from the earth, and the capacitance of the variable capacitor is determined to be such a value that the voltage at the two ends of the antenna may be equal in absolute values and inverted to reduce the partial removal of the wall after the plasma ignition. At the time of igniting the plasma, the capacitance of the capacitor is adjusted to a larger or smaller value than that minimizing the damage of the wall.
摘要翻译： 通过向天线馈送由射频电源产生的射频电力产生等离子体，并且天线的一端通过可变电容的电容器接地到地球。 法拉第屏蔽与地电隔离，可变电容器的电容被确定为这样一个值，即天线两端的电压可以相等于绝对值并反转以减少壁的部分去除 等离子体点火后。 在点燃等离子体时，电容器的电容被调整到比将壁损坏最小化的更大或更小的值。
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公开(公告)号：US06833051B2
公开(公告)日：2004-12-21
申请号：US10139281
申请日：2002-05-07
申请人： Hideyuki Kazumi , Tsutomu Tetsuka , Ryoji Nishio , Masatsugu Arai , Ken Yoshioka , Tsunehiko Tsubone , Akira Doi , Manabu Edamura , Kenji Maeda , Saburo Kanai
发明人： Hideyuki Kazumi , Tsutomu Tetsuka , Ryoji Nishio , Masatsugu Arai , Ken Yoshioka , Tsunehiko Tsubone , Akira Doi , Manabu Edamura , Kenji Maeda , Saburo Kanai
IPC分类号： H05H100
CPC分类号： H01J37/32174 , H01J37/32009 , H01J37/321
摘要： A plasma processing apparatus includes a vacuum chamber having a structure that surrounds a space where plasma is generated, a sample stage disposed in the chamber on which a sample to be processed is placed and coil antenna providing an electric field to the space. The structure has a non-conductive member surrounding the space and a conductive member covering the non-conductive member, both of which are disposed between the antenna and the space. The conductive member is electrically floated at least when the plasma is generated.
摘要翻译： 等离子体处理装置包括具有围绕产生等离子体的空间的结构的真空室，设置在其上放置待处理样品的室中的样品台和向该空间提供电场的线圈天线。 该结构具有围绕空间的非导电构件和覆盖非导电构件的导电构件，两者都设置在天线和空间之间。 至少当产生等离子体时，导电构件电漂浮。
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公开(公告)号：US06481370B2
公开(公告)日：2002-11-19
申请号：US09732307
申请日：2000-12-08
申请人： Hideyuki Kazumi , Tsutomu Tetsuka , Ryoji Nishio , Masatsugu Arai , Ken Yoshioka , Tsunehiko Tsubone , Akira Doi , Manabu Edamura , Kenji Maeda , Saburo Kanai
发明人： Hideyuki Kazumi , Tsutomu Tetsuka , Ryoji Nishio , Masatsugu Arai , Ken Yoshioka , Tsunehiko Tsubone , Akira Doi , Manabu Edamura , Kenji Maeda , Saburo Kanai
IPC分类号： C23C1600
CPC分类号： H01J37/32174 , H01J37/32009 , H01J37/321
摘要： A plasma is generated by feeding an antenna with radio-frequency electric power generated by a radio-frequency power source, and one end of the antenna is grounded to the earth through a capacitor of variable capacitance. A Faraday shield is electrically isolated from the earth, and the capacitance of the variable capacitor is determined to be such a value that the voltage at the two ends of the antenna may be equal in absolute values and inverted to reduce the partial removal of the wall after the plasma ignition. At the time of igniting the plasma, the capacitance of the capacitor is adjusted to a larger or smaller value than that minimizing the damage of the wall.
摘要翻译： 通过向天线馈送由射频电源产生的射频电力产生等离子体，并且天线的一端通过可变电容的电容器接地到地球。 法拉第屏蔽与地电隔离，可变电容器的电容被确定为这样一个值，即天线两端的电压可以相等于绝对值并反转以减少壁的部分去除 等离子体点火后。 在点燃等离子体时，电容器的电容被调整到比将壁损坏最小化的更大或更小的值。
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