Substrate processing apparatus, control method for the apparatus, and program for implementing the method
    1.
    发明授权
    Substrate processing apparatus, control method for the apparatus, and program for implementing the method 有权
    基板处理装置,装置的控制方法和实现该方法的程序

    公开(公告)号:US07640072B2

    公开(公告)日:2009-12-29

    申请号:US12125959

    申请日:2008-05-23

    IPC分类号: G06F19/00 H01L21/306 C23F1/00

    摘要: A substrate processing apparatus, according to which inspection of various devices in the substrate processing apparatus can be carried out with improved reliability, while reducing the burden on a user. A processing chamber processes semiconductor wafers therein. A transfer chamber transfers the semiconductor wafers. A FOUP (front opening unified pod) houses a plurality of dummy wafers for inspection of the processing chamber or the transfer chamber. A CPU causes an HDD (hard disk drive) to store a housing state relating to the arrangement of the dummy wafers in the FOUP before replacement of dummy wafers in the FOUP and that after the replacement as dummy wafer setup information.

    摘要翻译: 一种基板处理装置,根据该基板处理装置,可以在提高可靠性的同时进行基板处理装置中的各种装置的检查,同时减轻用户的负担。 处理室在其中处理半导体晶片。 传送室传送半导体晶片。 FOUP(前开口统一吊舱)容纳多个用于检查处理室或传送室的虚拟晶片。 在更换FOUP中的虚拟晶片之前,CPU将硬盘(硬盘驱动器)存储与FOUP中的虚设晶片的布置相关的壳体状态,以及在替换之后的虚拟晶片设置信息。

    Substrate processing apparatus, control method for the apparatus, and program for implementing the method
    2.
    发明授权
    Substrate processing apparatus, control method for the apparatus, and program for implementing the method 有权
    基板处理装置,装置的控制方法和实现该方法的程序

    公开(公告)号:US07455747B2

    公开(公告)日:2008-11-25

    申请号:US10984982

    申请日:2004-11-10

    摘要: A substrate processing apparatus, according to which inspection of various devices in the substrate processing apparatus can be carried out with improved reliability, while reducing the burden on a user. A processing chamber processes semiconductor wafers therein. A transfer chamber transfers the semiconductor wafers. A FOUP (front opening unified pod) houses a plurality of dummy wafers for inspection of the processing chamber or the transfer chamber. A CPU causes an HDD (hard disk drive) to store a housing state relating to the arrangement of the dummy wafers in the FOUP before replacement of dummy wafers in the FOUP and that after the replacement as dummy wafer setup information.

    摘要翻译: 一种基板处理装置,根据该基板处理装置,可以在提高可靠性的同时进行基板处理装置中的各种装置的检查,同时减轻用户的负担。 处理室在其中处理半导体晶片。 传送室传送半导体晶片。 FOUP(前开口统一吊舱)容纳多个用于检查处理室或传送室的虚拟晶片。 在更换FOUP中的虚拟晶片之前,CPU将硬盘(硬盘驱动器)存储与FOUP中的虚设晶片的布置相关的壳体状态,以及在替换之后的虚拟晶片设置信息。

    Substrate processing apparatus, control method for the apparatus, and program for implementing the method
    3.
    发明申请
    Substrate processing apparatus, control method for the apparatus, and program for implementing the method 有权
    基板处理装置,装置的控制方法和实现该方法的程序

    公开(公告)号:US20050124084A1

    公开(公告)日:2005-06-09

    申请号:US10984982

    申请日:2004-11-10

    摘要: A substrate processing apparatus, according to which inspection of various devices in the substrate processing apparatus can be carried out with improved reliability, while reducing the burden on a user. A processing chamber processes semiconductor wafers therein. A transfer chamber transfers the semiconductor wafers. A FOUP (front opening unified pod) houses a plurality of dummy wafers for inspection of the processing chamber or the transfer chamber. A CPU causes an HDD (hard disk drive) to store a housing state relating to the arrangement of the dummy wafers in the FOUP before replacement of dummy wafers in the FOUP and that after the replacement as dummy wafer setup information.

    摘要翻译: 一种基板处理装置,根据该基板处理装置,可以在提高可靠性的同时进行基板处理装置中的各种装置的检查,同时减轻用户的负担。 处理室在其中处理半导体晶片。 传送室传送半导体晶片。 FOUP(前开口统一吊舱)容纳多个用于检查处理室或传送室的虚拟晶片。 在更换FOUP中的虚拟晶片之前,将HDD(硬盘驱动器)存储在与FOUP中的虚设晶片的布置有关的壳体状态,以及在替换之后的虚拟晶片设置信息。

    Method and kit for expressing protein under regulation of the expression from repeated sequence formed by gene amplification, and transformant
    4.
    发明授权
    Method and kit for expressing protein under regulation of the expression from repeated sequence formed by gene amplification, and transformant 有权
    用于通过基因扩增形成的重复序列表达调控表达蛋白质的方法和试剂盒,以及转化体

    公开(公告)号:US08771983B2

    公开(公告)日:2014-07-08

    申请号:US11889512

    申请日:2007-08-14

    申请人: Noriaki Shimizu

    发明人: Noriaki Shimizu

    摘要: A method is disclosed for releasing the transcriptional regulation caused by a repeated sequence in a gene, a kit therefor and so on to thereby establish a system capable of producing a protein in a large amount. At least one embodiment of the method can be achieved by any one or more of the following methods: (a) in the amplification of a gene encoding a target protein, co-amplifying a polynucleotide of 10 kbp or more such as a λ-phage DNA or an insulator sequence; (b) selecting by culturing cells having undergone gene amplification in media containing a drug with a gradual increase in concentration; (c) elevating the promoter activity of inducing the expression of a gene encoding a target protein; (d) excising an amplified gene region from a chromosome with the use of Cre-LoxP System; (e) treating cells having undergone gene amplification with 5-aza-2′-deoxycytidine to thereby lower the methylation degree of DNA; and (f) selecting the mammalian cells having undergone gene amplification on double minute chromosomes.

    摘要翻译: 公开了一种用于释放由基因中的重复序列引起的转录调控的方法,其用于其的试剂盒等,从而建立能够大量产生蛋白质的系统。 该方法的至少一个实施方案可以通过以下任何一种或多种方法来实现:(a)扩增编码靶蛋白的基因,共扩增10kbp以上的多核苷酸,例如λ噬菌体 DNA或绝缘子序列; (b)通过培养在具有逐渐增加浓度的药物的培养基中培养经历基因扩增的细胞进行选择; (c)提高诱导编码靶蛋白的基因表达的启动子活性; (d)使用Cre-LoxP系统从染色体切除扩增的基因区域; (e)处理已经用5-氮杂-2'-脱氧胞苷进行基因扩增的细胞,从而降低DNA的甲基化程度; 和(f)选择在双分子染色体上经历基因扩增的哺乳动物细胞。

    Cylinder discrimination device and cylinder discrimination method of engine
    5.
    发明授权
    Cylinder discrimination device and cylinder discrimination method of engine 有权
    发动机缸体识别装置和气缸鉴别方法

    公开(公告)号:US06483312B2

    公开(公告)日:2002-11-19

    申请号:US09789569

    申请日:2001-02-22

    IPC分类号: F02P1700

    摘要: An internal combustion engine is equipped with a plurality of cam sensors that output cylinder discrimination signals during every uneven crank angle interval, and specific cylinders are discriminated based on said cylinder discrimination signals output from said plurality of cam sensors. Based on the discrimination result of said specific cylinder and said cylinder discrimination signals from cam sensors, the cylinders other than said specific cylinders are discriminated.

    摘要翻译: 内燃机配备有多个凸轮传感器,其在每个不均匀曲柄角间隔期间输出气缸鉴别信号,并且基于从所述多个凸轮传感器输出的所述气缸鉴别信号来辨别特定气缸。 基于所述特定气缸的鉴别结果和来自凸轮传感器的气缸鉴别信号,区分除所述特定气缸以外的气缸。

    METHOD FOR HIGHLY AMPLIFYING TARGET GENE IN MAMMALIAN CELL AND VECTOR THEREFOR
    6.
    发明申请
    METHOD FOR HIGHLY AMPLIFYING TARGET GENE IN MAMMALIAN CELL AND VECTOR THEREFOR 失效
    用于在母体细胞和载体中高效放大靶基因的方法

    公开(公告)号:US20100317060A1

    公开(公告)日:2010-12-16

    申请号:US12438545

    申请日:2007-08-20

    IPC分类号: C12P19/34 C12N15/63 C12N5/10

    摘要: A vector of the present invention is a vector for amplifying a target gene in a mammalian cell, the vector including an amplification-activating fragment, which is a partial fragment of a mammalian replication initiation region and has a gene amplification activity site, and a mammalian nuclear matrix attachment region. In the case where the mammalian replication initiation region as described above derives from a c-myc locus, for example, the above-described partial fragment at least contains a duplex unwinding element and a topoisomerase II-binding domain. The vector as described above improves gene transfer efficiency and gene amplification efficiency compared with the existing high gene amplification systems. Thus, a method whereby a “high gene amplification system” developed by the inventors can amplify a target gene with better gene transfer efficiency and a vector to be used in this method are provided.

    摘要翻译: 本发明的载体是用于扩增哺乳动物细胞中的靶基因的载体,该载体包含作为哺乳动物复制起始区域的部分片段的扩增活化片段,并具有基因扩增活性位点和哺乳动物 核基质附着区。 在如上所述的哺乳动物复制起始区源自c-myc基因座的情况下,例如,上述部分片段至少含有双链体展开元件和拓扑异构酶II结合结构域。 如上所述的载体与现有的高基因扩增系统相比提高了基因转移效率和基因扩增效率。 因此,提供了本发明人开发的“高基因扩增系统”可以扩增具有更好的基因转移效率的靶基因和用于该方法的载体的方法。

    Method And Kit For Expressing Protein Under Regulation Of The Expression From Repeated Sequence Formed By Gene Amplification, And Transformant
    7.
    发明申请
    Method And Kit For Expressing Protein Under Regulation Of The Expression From Repeated Sequence Formed By Gene Amplification, And Transformant 审中-公开
    用于表达蛋白质的方法和试剂盒用于通过基因扩增和转化体形成的重复序列表达调控

    公开(公告)号:US20070298458A1

    公开(公告)日:2007-12-27

    申请号:US11667963

    申请日:2005-11-15

    申请人: Noriaki Shimizu

    发明人: Noriaki Shimizu

    IPC分类号: C12P21/00 C12N5/10

    摘要: A method is disclosed for releasing the transcriptional regulation caused by a repeated sequence in a gene, a kit therefor and so on to thereby establish a system capable of producing a protein in a large amount. At least one embodiment of the method can be achieved by any one or more of the following methods: (a) in the amplification of a gene encoding a target protein, co-amplifying a polynucleotide of 10 kbp or more such as a λ-phage DNA or an insulator sequence; (b) selecting by culturing cells having undergone gene amplification in media containing a drug with a gradual increase in concentration; (c) elevating the promoter activity of inducing the expression of a gene encoding a target protein; (d) excising an amplified gene region from a chromosome with the use of Cre-LoxP System; (e) treating cells having undergone gene amplification with 5-aza-2′-deoxycytidine to thereby lower the methylation degree of DNA; and (f) selecting the mammalian cells having undergone gene amplification on double minute chromosomes.

    摘要翻译: 公开了一种用于释放由基因中的重复序列引起的转录调控的方法,其用于其的试剂盒等,从而建立能够大量产生蛋白质的系统。 该方法的至少一个实施方案可以通过以下任何一种或多种方法实现:(a)扩增编码靶蛋白的基因,共扩增10kbp或更多的多核苷酸,例如λ噬菌体 DNA或绝缘子序列; (b)通过培养在具有逐渐增加浓度的药物的培养基中培养经历基因扩增的细胞进行选择; (c)提高诱导编码靶蛋白的基因表达的启动子活性; (d)使用Cre-LoxP系统从染色体切除扩增的基因区域; (e)处理已经用5-氮杂-2'-脱氧胞苷进行基因扩增的细胞,从而降低DNA的甲基化程度; 和(f)选择在双分子染色体上经历基因扩增的哺乳动物细胞。

    System and method for processing a substrate and program therefor
    8.
    发明申请
    System and method for processing a substrate and program therefor 有权
    用于处理衬底的系统和方法及其程序

    公开(公告)号:US20060149403A1

    公开(公告)日:2006-07-06

    申请号:US10825323

    申请日:2004-04-16

    IPC分类号: G06F19/00

    摘要: [Purpose] The present invention provides a system and method for processing a substrate while reducing the number of works that should be done by a software engineer; and a program for performing the method. [Constitution] A substrate processing system 100 includes a substrate processing apparatus 101; a substrate processing controller 102 for controlling the substrate processing apparatus 101; and a server 103 for storing therein commands, i.e., instructional statements, for defining an operation of each device. The substrate processing controller 102 has a RAM 105 serving as a work space for creating a macro file corresponding to each of processes divided from the whole substrate processing or for changing the content of a macro file; and an executor 108 composed of, e.g., CPU for executing a process sequence macro obtained by a combination of the created macro files. The user creates a macro file describing a sequential operation of each process or changes the content of a macro file by arranging the stored commands.

    摘要翻译: [目的]本发明提供了一种用于处理基板的系统和方法,同时减少了软件工程师应该完成的工作数量; 以及用于执行该方法的程序。 [结构]基板处理系统100包括基板处理装置101; 用于控制基板处理装置101的基板处理控制器102; 以及用于存储用于定义每个设备的操作的命令(即,指令语句)的服务器103。 基板处理控制器102具有作为用于创建对应于从整个基板处理划分的每个处理或用于改变宏文件的内容的宏文件的工作空间的RAM 105; 以及由例如CPU构成的执行器108,用于执行通过所创建的宏文件的组合而获得的处理序列宏。 用户创建描述每个进程的顺序操作的宏文件,或者通过排列所存储的命令来改变宏文件的内容。

    Method for highly amplifying target gene in mammalian cell and vector therefor
    9.
    发明授权
    Method for highly amplifying target gene in mammalian cell and vector therefor 失效
    用于高度扩增哺乳动物细胞中靶基因的方法及其载体

    公开(公告)号:US08137963B2

    公开(公告)日:2012-03-20

    申请号:US12438545

    申请日:2007-08-20

    IPC分类号: C12N15/63 C12N15/85 C12P19/34

    摘要: A vector of the present invention is a vector for amplifying a target gene in a mammalian cell, the vector including an amplification-activating fragment, which is a partial fragment of a mammalian replication initiation region and has a gene amplification activity site, and a mammalian nuclear matrix attachment region. In the case where the mammalian replication initiation region as described above derives from a c-myc locus, for example, the above-described partial fragment at least contains a duplex unwinding element and a topoisomerase II-binding domain. The vector as described above improves gene transfer efficiency and gene amplification efficiency compared with the existing high gene amplification systems. Thus, a method whereby a “high gene amplification system” developed by the inventors can amplify a target gene with better gene transfer efficiency and a vector to be used in this method are provided.

    摘要翻译: 本发明的载体是用于扩增哺乳动物细胞中的靶基因的载体,所述载体包含作为哺乳动物复制起始区域的部分片段的扩增活化片段,并具有基因扩增活性位点和哺乳动物 核基质附着区。 在如上所述的哺乳动物复制起始区源自c-myc基因座的情况下,例如,上述部分片段至少含有双链体展开元件和拓扑异构酶II结合结构域。 如上所述的载体与现有的高基因扩增系统相比提高了基因转移效率和基因扩增效率。 因此,提供了本发明人开发的“高基因扩增系统”可以扩增具有更好的基因转移效率的靶基因和用于该方法的载体的方法。

    Automated semiconductor wafer salvage during processing
    10.
    发明授权
    Automated semiconductor wafer salvage during processing 有权
    加工过程中自动半导体晶圆回收

    公开(公告)号:US07364922B2

    公开(公告)日:2008-04-29

    申请号:US11337464

    申请日:2006-01-24

    申请人: Noriaki Shimizu

    发明人: Noriaki Shimizu

    IPC分类号: H01L21/00

    摘要: The present invention provides a recovery processing method to restore the substrate processing apparatus to an operating state after correcting an abnormality having occurred in the substrate processing apparatus in operation and having resulted in a stop in the operation, comprising a substrate retrieval step in which substrate salvage processing is first executed for a wafer W left in a chamber in the substrate processing apparatus in correspondence to the extent to which the wafer has been processed at the time of the operation stop and the substrate having undergone the substrate salvage processing is then retrieved into the cassette storage container and an apparatus internal state restoration step in which the states inside the individual chambers of the substrate processing apparatus are restored.

    摘要翻译: 本发明提供了一种恢复处理方法,用于在操作中校正在基板处理装置中发生的异常并且导致操作停止之后将基板处理装置恢复到操作状态,包括基板回收步骤,其中基板回收 首先对于在基板处理装置的室中留下的晶片W进行处理,对应于在操作停止时晶片已被处理的程度,然后将经过基板补救处理的基板检索到 盒式存储容器和装置内部状态恢复步骤,其中恢复基板处理装置的各个室内的状态。