公开(公告)号：US08023246B2

公开(公告)日：2011-09-20

申请号：US12116631

申请日：2008-05-07

申请人： Norio Shiraiwa ,  Takeshi Kobayashi ,  Yuichi Hata ,  Naoto Watanabe

发明人： Norio Shiraiwa ,  Takeshi Kobayashi ,  Yuichi Hata ,  Naoto Watanabe

IPC分类号： H01L21/683 ,  H01T23/00

CPC分类号： H01L21/6833 ,  B32B37/10 ,  B32B37/12 ,  B32B2309/02 ,  B32B2457/202 ,  H01L21/68757 ,  H02N13/00

摘要： In a method of manufacturing an electrostatic chuck, the method includes: a step of providing an electrostatic chucking portion including an electrode to which a voltage is applied and a film-like insulating layer covering the electrode; a step of bonding an elastomer layer onto the electrostatic chucking portion; a step of bonding a metal base onto the elastomer layer such that recess portions formed on a surface of the metal base face the elastomer layer.

摘要翻译： 在制造静电卡盘的方法中，该方法包括：提供包括施加电压的电极和覆盖电极的膜状绝缘层的静电夹持部的步骤; 将弹性体层粘合到静电吸附部上的步骤; 将金属基底粘合到弹性体层上的步骤，使得形成在金属基体的表面上的凹部面向弹性体层。

公开(公告)号：US20080278883A1

公开(公告)日：2008-11-13

申请号：US12116631

申请日：2008-05-07

申请人： Norio Shiraiwa ,  Takeshi Kobayashi ,  Yuichi Hata ,  Naoto Watanabe

发明人： Norio Shiraiwa ,  Takeshi Kobayashi ,  Yuichi Hata ,  Naoto Watanabe

IPC分类号： H01T23/00 ,  B32B37/10

CPC分类号： H01L21/6833 ,  B32B37/10 ,  B32B37/12 ,  B32B2309/02 ,  B32B2457/202 ,  H01L21/68757 ,  H02N13/00

摘要： In a method of manufacturing an electrostatic chuck, the method includes: a step of providing an electrostatic chucking portion including an electrode to which a voltage is applied and a film-like insulating layer covering the electrode; a step of bonding an elastomer layer onto the electrostatic chucking portion; a step of bonding a metal base onto the elastomer layer such that recess portions formed on a surface of the metal base face the elastomer layer.

摘要翻译： 在制造静电卡盘的方法中，该方法包括：提供包括施加电压的电极和覆盖电极的膜状绝缘层的静电夹持部的步骤; 将弹性体层粘合到静电吸附部上的步骤; 将金属基底粘合到弹性体层上的步骤，使得形成在金属基体的表面上的凹部面向弹性体层。

公开(公告)号：US20080266747A1

公开(公告)日：2008-10-30

申请号：US12109850

申请日：2008-04-25

申请人： Norio Shiraiwa ,  Takeshi Kobayashi ,  Yuichi Hata ,  Naoto Watanabe

发明人： Norio Shiraiwa ,  Takeshi Kobayashi ,  Yuichi Hata ,  Naoto Watanabe

IPC分类号： H01T23/00

CPC分类号： H01L21/6833 ,  B65G49/061 ,  B65G2249/02 ,  H02N13/00

摘要： In an electrostatic chuck for chucking a glass substrate, the electrostatic chuck includes a pair of electrodes embedded in a ceramic material and interlaced with each other, where a volume resistivity of the ceramic material is 1×108 Ωcm to 1×1014 Ωcm, a thickness of the ceramic material on a chucking surface side to cover the pair of electrodes is 100 μm to 200 μm, a pattern width of the pair of electrodes is 0.5 mm to 1 mm, and a minimum distance between the pair of electrodes is 0.5 mm to 1 mm.

摘要翻译： 在用于夹持玻璃基板的静电卡盘中，静电卡盘包括嵌入在陶瓷材料中的一对电极，彼此交织，其中陶瓷材料的体积电阻率为1×10 8Ω至1×10 8 另外，在夹持面侧覆盖一对电极的陶瓷材料的厚度为100μm〜200μm，一对电极的图形宽度为0.5mm〜1mm， 该对电极之间的最小距离为0.5mm至1mm。

公开(公告)号：US07483256B2

公开(公告)日：2009-01-27

申请号：US11857681

申请日：2007-09-19

申请人： Norio Shiraiwa ,  Yuichi Hata ,  Naoto Watanabe

发明人： Norio Shiraiwa ,  Yuichi Hata ,  Naoto Watanabe

IPC分类号： H01L21/683 ,  H01T23/00 ,  H01F13/00 ,  H01H47/00 ,  H01G7/02 ,  H05F3/00

CPC分类号： H01L21/6831

摘要： An electrostatic chuck includes a base plate, an electrode layer having flexibility, covering the surface of the base plate, and a power supply unit for electrically connecting the electrode layer to the power source side. The power supply unit includes a connection piece including a wire, and electrically conductive components to be used in connection to the power source side. The wire is connected to an electrode of the electrode layer, and extends from the side edge of the electrode layer. The electrically conductive component is electrically connected with the wire, and fixes the connection piece bent along the side surface of the base plate to the base plate.

摘要翻译： 静电卡盘包括基板，具有柔性的电极层，覆盖基板的表面，以及用于将电极层电连接到电源侧的电源单元。 电源单元包括连接件，该连接件包括导线，以及用于连接到电源侧的导电部件。 电线连接到电极层的电极，并从电极层的侧边缘延伸。 导电部件与导线电连接，将沿基板侧面弯曲的连接片固定在基板上。

公开(公告)号：US20080080118A1

公开(公告)日：2008-04-03

申请号：US11857681

申请日：2007-09-19

申请人： Norio Shiraiwa ,  Yuichi Hata ,  Naoto Watanabe

发明人： Norio Shiraiwa ,  Yuichi Hata ,  Naoto Watanabe

IPC分类号： H01L21/683

CPC分类号： H01L21/6831

摘要： An electrostatic chuck includes a base plate, an electrode layer having flexibility, covering the surface of the base plate, and a power supply unit for electrically connecting the electrode layer to the power source side. The power supply unit includes a connection piece including a wire, and electrically conductive components to be used in connection to the power source side. The wire is connected to an electrode of the electrode layer, and extends from the side edge of the electrode layer. The electrically conductive component is electrically connected with the wire, and fixes the connection piece bent along the side surface of the base plate to the base plate.

摘要翻译： 静电卡盘包括基板，具有柔性的电极层，覆盖基板的表面，以及用于将电极层电连接到电源侧的电源单元。 电源单元包括连接件，该连接件包括导线，以及用于连接到电源侧的导电部件。 电线连接到电极层的电极，并从电极层的侧边缘延伸。 导电部件与导线电连接，将沿基板侧面弯曲的连接片固定在基板上。

公开(公告)号：US08724289B2

公开(公告)日：2014-05-13

申请号：US13453001

申请日：2012-04-23

申请人： Norio Shiraiwa ,  Yuichi Hata

发明人： Norio Shiraiwa ,  Yuichi Hata

IPC分类号： H02N13/00

CPC分类号： H01L21/67103 ,  H01L21/67109 ,  H01L21/6831

摘要： A disclosed substrate temperature adjusting-fixing device includes an electro static chuck attracting and holding an attractable object onto a base body having a built-in electrode by applying a voltage to the electrode, a base plate fixing the electro static chuck via an adhesive layer, a power supplying portion electrically connected to the electrode, and a retaining portion holding the power supplying portion, wherein the retaining portion includes a main body and a sealing portion, the main body is fixed to the base plate and has recesses opened on an opposite side of the adhesive layer and a through hole penetrating through the main body, the power supplying portion includes an electrode pin and an electric wire, the electric wire is wired inside the adhesive layer, the through hole and the recesses to electrically connect the electrode with the electrode pin, and the sealing portion fills the recesses.

摘要翻译： 所公开的基板温度调节固定装置包括通过向电极施加电压而将吸引物吸引并保持在具有内置电极的基体上的静电卡盘，经由粘合剂层固定静电卡盘的基板， 电连接到所述电极的供电部分和保持所述供电部分的保持部分，其中所述保持部分包括主体和密封部分，所述主体固定到所述基板并且具有在相对侧上开口的凹部 所述供电部包括电极销和电线，所述电线布线在所述粘合剂层内，所述通孔和所述凹部将所述电极与所述电线电连接 电极针，密封部填充凹部。

公开(公告)号：US20120287552A1

公开(公告)日：2012-11-15

申请号：US13453001

申请日：2012-04-23

申请人： Norio SHIRAIWA ,  Yuichi Hata

发明人： Norio SHIRAIWA ,  Yuichi Hata

IPC分类号： H01L21/687

CPC分类号： H01L21/67103 ,  H01L21/67109 ,  H01L21/6831

摘要： A disclosed substrate temperature adjusting-fixing device includes an electro static chuck attracting and holding an attractable object onto a base body having a built-in electrode by applying a voltage to the electrode, a base plate fixing the electro static chuck via an adhesive layer, a power supplying portion electrically connected to the electrode, and a retaining portion holding the power supplying portion, wherein the retaining portion includes a main body and a sealing portion, the main body is fixed to the base plate and has recesses opened on an opposite side of the adhesive layer and a through hole penetrating through the main body, the power supplying portion includes an electrode pin and an electric wire, the electric wire is wired inside the adhesive layer, the through hole and the recesses to electrically connect the electrode with the electrode pin, and the sealing portion fills the recesses.

摘要翻译： 所公开的基板温度调节固定装置包括通过向电极施加电压而将吸引物吸引并保持在具有内置电极的基体上的静电卡盘，经由粘合剂层固定静电卡盘的基板， 电连接到所述电极的供电部分和保持所述供电部分的保持部分，其中所述保持部分包括主体和密封部分，所述主体固定到所述基板并且具有在相对侧上开口的凹部 所述供电部包括电极销和电线，所述电线布线在所述粘合剂层内，所述通孔和所述凹部将所述电极与所述电线电连接 电极针，密封部填充凹部。

公开(公告)号：US20100031777A1

公开(公告)日：2010-02-11

申请号：US12441279

申请日：2007-09-06

申请人： Tomohiro Akiyama ,  Yuichi Hata ,  Sou Hosokai ,  Xinghe Zhang ,  Purwanto Hadi ,  Junichiro Hayashi ,  Yoshiaki Kashiwaya ,  Hiroshi Uesugi

发明人： Tomohiro Akiyama ,  Yuichi Hata ,  Sou Hosokai ,  Xinghe Zhang ,  Purwanto Hadi ,  Junichiro Hayashi ,  Yoshiaki Kashiwaya ,  Hiroshi Uesugi

IPC分类号： C22B5/00 ,  C07F15/02 ,  C07F9/00 ,  C07F5/00 ,  C07F7/28 ,  C07F11/00 ,  C07F7/24 ,  C07F5/06 ,  C07F7/02 ,  B01J8/00 ,  C07F15/04 ,  C22B1/00

CPC分类号： C22B1/00 ,  C10B53/02 ,  C21B5/00 ,  C21B5/007 ,  C21B5/008 ,  C21B13/0066 ,  C21B13/023 ,  C22B5/10 ,  C22B5/12 ,  Y02E50/14

摘要： An ore containing crystal water (bond water) is heated to dehydrate the crystal water in the form of water vapor, thereby rendering the ore porous to generate a porous ore. Next, the porous ore is forced into contact with a dry-distilled gas (organic gas) obtained by dry-distillation of an organic substance such as wood and the like or an organic liquid such as tar and the like. An organic compound such as tar and the like contained in the dry-distilled gas or organic liquid adheres to the surface of the porous ore. Next, the porous ore adhered with an organic compound is heated at 500° C. or higher, to generate an ore in which a part of an oxide of an element such as iron and the like contained is reduced by carbon in the organic compound.

摘要翻译： 将含有结晶水（粘结水）的矿石加热，以水蒸汽的形式使结晶水脱水，从而使矿石多孔以产生多孔矿石。 接下来，多孔矿被强制与通过干燥诸如木材等有机物质或有机液体如焦油等获得的干蒸馏气体（有机气体）接触。 干蒸馏气体或有机液体中所含的焦油等有机化合物附着在多孔矿石的表面。 接着，将有机化合物附着的多孔质矿石加热至500℃以上，生成含有铁等元素的氧化物的一部分被有机化合物中的碳还原的矿石。

公开(公告)号：US5656557A

公开(公告)日：1997-08-12

申请号：US351476

申请日：1995-02-09

申请人： Yuichi Hata ,  Jun Sasaki ,  Mamoru Kawamura ,  Maki Nakamura ,  Kazuya Taki ,  Shuichi Okada

发明人： Yuichi Hata ,  Jun Sasaki ,  Mamoru Kawamura ,  Maki Nakamura ,  Kazuya Taki ,  Shuichi Okada

IPC分类号： B01D53/04 ,  B01D53/26 ,  C01B13/02 ,  C01B21/04 ,  F25J3/04 ,  F25J3/08 ,  H01L21/673 ,  H01L21/677 ,  C01B21/00

CPC分类号： F25J3/04163 ,  C01B13/0288 ,  C01B21/0494 ,  F25J3/04084 ,  F25J3/04157 ,  F25J3/04169 ,  F25J3/0426 ,  F25J3/04284 ,  F25J3/044 ,  F25J3/04478 ,  F25J3/04496 ,  F25J3/04533 ,  F25J3/04612 ,  F25J3/04781 ,  F25J3/04836 ,  F25J3/04969 ,  C01B2210/0004 ,  C01B2210/0006 ,  C01B2210/0009 ,  C01B2210/0014 ,  C01B2210/005 ,  C01B2210/0053 ,  C01B2210/007 ,  F25J2200/72 ,  F25J2205/82 ,  F25J2210/42 ,  F25J2215/40 ,  F25J2215/42 ,  F25J2215/44 ,  F25J2235/04 ,  F25J2250/20 ,  F25J2250/42 ,  F25J2270/90 ,  F25J2290/62 ,  Y02C10/08 ,  Y02P20/152

摘要： Disclosed is a production process and apparatus of high-purity air and various air material gases for semiconductor production factories that, together with enabling the production of high-purity air, also enables the production high-purity nitrogen simultaneous to the production of oxygen-rich air as the finished product. This is accomplished by compressing feed air to a pressure of 3 to 10 kg/cm.sup.2 G, introducing this compressed air into a catalyst tower (8) to convert the carbon monoxide, hydrocarbons and hydrogen contained in the feed air into carbon dioxide and water, and introducing the purified air into an adsorption tower (12a) or (12b) after cooling the heated air following catalytic reaction to remove carbon dioxide, water and other minute amounts of impurities by adsorption. A portion of the resulting purified air is removed as product high-purity air, while the remainder is introduced into a main heat exchanger (18) where it is cooled to substantially the liquefaction temperature. After cooling, the air is introduced into a single rectification tower (19) followed by liquefaction rectification. High-purity nitrogen is then removed from the top of said single rectification tower which is then obtained as product high-purity nitrogen after going through the main heat exchanger (18). On the other hand, oxygen-rich liquefied air is drawn out from the bottom of the single rectification tower (19). This oxygen-rich liquefied air is then introduced into a condenser-evaporator. (24) where it is vaporized and then drawn out. This drawn out air is then introduced into the main heat exchanger (18) where it is heated to an intermediate temperature and then removed. This oxygen-rich air is then introduced into an expansion turbine (35) where it is expanded and lowered in temperature. After generation of cold, the cold is recovered followed by obtaining of the product gas in the form of purified oxygen-rich air.

公开(公告)号：US08920536B2

公开(公告)日：2014-12-30

申请号：US12441279

申请日：2007-09-06

申请人： Tomohiro Akiyama ,  Yuichi Hata ,  Sou Hosokai ,  Xinghe Zhang ,  Purwanto Hadi ,  Junichiro Hayashi ,  Yoshiaki Kashiwaya ,  Hiroshi Uesugi

发明人： Tomohiro Akiyama ,  Yuichi Hata ,  Sou Hosokai ,  Xinghe Zhang ,  Purwanto Hadi ,  Junichiro Hayashi ,  Yoshiaki Kashiwaya ,  Hiroshi Uesugi

IPC分类号： C21B15/00 ,  C22B13/00 ,  C22B5/20 ,  C21B11/10 ,  C22B11/10 ,  C10B53/02 ,  C22B5/10 ,  C21B5/00 ,  C22B1/00 ,  C22B5/12 ,  C21B13/00 ,  C21B13/02

CPC分类号： C22B1/00 ,  C10B53/02 ,  C21B5/00 ,  C21B5/007 ,  C21B5/008 ,  C21B13/0066 ,  C21B13/023 ,  C22B5/10 ,  C22B5/12 ,  Y02E50/14

摘要： An ore containing crystal water (bond water) is heated to dehydrate the crystal water in the form of water vapor, thereby rendering the ore porous to generate a porous ore. Next, the porous ore is forced into contact with a dry-distilled gas (organic gas) obtained by dry-distillation of an organic substance such as wood and the like or an organic liquid such as tar and the like. An organic compound such as tar and the like contained in the dry-distilled gas or organic liquid adheres to the surface of the porous ore. Next, the porous ore adhered with an organic compound is heated at 500° C. or higher, to generate an ore in which a part of an oxide of an element such as iron and the like contained is reduced by carbon in the organic compound.

摘要翻译： 将含有结晶水（粘结水）的矿石加热，以水蒸汽的形式使结晶水脱水，从而使矿石多孔以产生多孔矿石。 接下来，多孔矿被强制与通过干燥诸如木材等有机物质或有机液体如焦油等获得的干蒸馏气体（有机气体）接触。 干蒸馏气体或有机液体中所含的焦油等有机化合物附着在多孔矿石的表面。 接着，将有机化合物附着的多孔质矿石加热至500℃以上，生成含有铁等元素的氧化物的一部分被有机化合物中的碳还原的矿石。