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    Solid-state image sensor and a manufacturing method thereof
    2.
    发明申请
    Solid-state image sensor and a manufacturing method thereof 审中-公开
    固态图像传感器及其制造方法

    公开(公告)号：US20050045805A1

    公开(公告)日：2005-03-03

    申请号：US10927278

    申请日：2004-08-27

    申请人： Hiroshi Sakoh ,  Michiyo Ichikawa ,  Yoshiaki Nishi

    发明人： Hiroshi Sakoh ,  Michiyo Ichikawa ,  Yoshiaki Nishi

    IPC分类号： G02B5/20 ,  G02B3/00 ,  H01L27/00 ,  H01L27/14 ,  H01L27/146 ,  H01L31/10 ,  H04N5/335 ,  H04N5/369

    CPC分类号： H01L27/14685 ,  H01L27/14621 ,  H01L27/14627

    摘要： The solid-state image-sensor in the present invention is made by stacking a flattened transparent insulating film 2 made out of material such as boron phosphate silicate glass (BPSG), a convex-topped high refractive index (n>1.8) in-layer lens 3, a color filter layer 5 made out of a color resist containing a dye or pigment, a transparent film 6 made out of an acrylic transparent resin, and a micro-lens (also known as a top lens) 7, on top of a photodiode 1 formed on a silicon semiconductor substrate 10, where the color filter layer 5 is directly applied on the in-layer lens 3.

    摘要翻译： 本发明的固态图像传感器是通过层叠由磷酸硅酸盐玻璃（BPSG），凸顶高折射率（n≥1.8）的层内的材料制成的平坦化的透明绝缘膜2 透镜3，由含有染料或颜料的彩色抗蚀剂制成的滤色器层5，由丙烯酸类透明树脂制成的透明膜6和微透镜（也称为顶部透镜）7，位于 形成在硅半导体基板10上的光电二极管1，其中滤色器层5直接施加在层内透镜3上。

    SOLID-STATE IMAGING DEVICE
    3.
    发明申请
    SOLID-STATE IMAGING DEVICE 失效
    固态成像装置

    公开(公告)号：US20080210983A1

    公开(公告)日：2008-09-04

    申请号：US11854077

    申请日：2007-09-12

    申请人： Tohru Yamada ,  Michiyo Ichikawa ,  Mamoru Honjo ,  Atsuo Nakagawa

    发明人： Tohru Yamada ,  Michiyo Ichikawa ,  Mamoru Honjo ,  Atsuo Nakagawa

    IPC分类号： H01L27/148

    CPC分类号： H01L27/14837 ,  H01L27/14812

    摘要： A solid-state imaging device including: a plurality of photodiode parts (1); a plurality of vertical charge transfer parts (2) each of which reads out a signal charge and transfers the signal charge in a vertical direction; and a plurality of shade films (5) that have conductivity, which supplies a transfer pulse via the shade film (5), is used. The vertical charge transfer parts (2) respectively have transfer channels (13) and transfer electrodes (3). The shade film (5) is formed above the corresponding vertical charge transfer part (2) via an insulation layer (21) that insulates the shade film (5) from the transfer electrodes (3). The insulation layer (21) has a thick part (8) in a part of the insulation layer (21) where the shade film (5) is overlapped on a side of the photodiode part (1) that is a subject to be read out by the vertical charge transfer part (2).

    摘要翻译： 一种固态成像装置，包括：多个光电二极管部分（1）; 多个垂直电荷转移部分（2），每个垂直电荷转移部分（2）读出信号电荷并在垂直方向上传送信号电荷; 并且使用具有导电性的多个遮光膜（5），其通过遮光膜（5）提供转印脉冲。 垂直电荷转移部分（2）分别具有转移通道（13）和转移电极（3）。 遮光膜（5）通过使遮光膜（5）与转印电极（3）绝缘的绝缘层（21）形成在相应的垂直电荷转移部分（2）的上方。 绝缘层（21）在绝缘层（21）的一部分中具有厚度部分（8），其中遮光膜（5）重叠在作为待读取对象的光电二极管部分（1）的一侧 通过垂直电荷转移部分（2）。

    Solid-state imaging device
    4.
    发明授权
    Solid-state imaging device 失效
    固态成像装置

    公开(公告)号：US07541631B2

    公开(公告)日：2009-06-02

    申请号：US11854077

    申请日：2007-09-12

    申请人： Tohru Yamada ,  Michiyo Ichikawa ,  Mamoru Honjo ,  Atsuo Nakagawa

    发明人： Tohru Yamada ,  Michiyo Ichikawa ,  Mamoru Honjo ,  Atsuo Nakagawa

    IPC分类号： H01L31/062 ,  H01L31/113

    CPC分类号： H01L27/14837 ,  H01L27/14812

    摘要： A solid-state imaging device including: a plurality of photodiode parts (1); a plurality of vertical charge transfer parts (2) each of which reads out a signal charge and transfers the signal charge in a vertical direction; and a plurality of shade films (5) that have conductivity, which supplies a transfer pulse via the shade film (5), is used. The vertical charge transfer parts (2) respectively have transfer channels (13) and transfer electrodes (3). The shade film (5) is formed above the corresponding vertical charge transfer part (2) via an insulation layer (21) that insulates the shade film (5) from the transfer electrodes (3). The insulation layer (21) has a thick part (8) in a part of the insulation layer (21) where the shade film (5) is overlapped on a side of the photodiode part (1) that is a subject to be read out by the vertical charge transfer part (2).

    摘要翻译： 一种固态成像装置，包括：多个光电二极管部分（1）; 多个垂直电荷转移部分（2），每个垂直电荷转移部分（2）读出信号电荷并在垂直方向上传送信号电荷; 并且使用具有导电性的多个遮光膜（5），其通过遮光膜（5）提供转印脉冲。 垂直电荷转移部分（2）分别具有转移通道（13）和转移电极（3）。 遮光膜（5）通过使遮光膜（5）与转印电极（3）绝缘的绝缘层（21）形成在相应的垂直电荷转移部分（2）的上方。 绝缘层（21）在绝缘层（21）的一部分中具有厚度部分（8），其中遮光膜（5）重叠在作为待读取对象的光电二极管部分（1）的一侧 通过垂直电荷转移部分（2）。

    Lens array
    5.
    发明授权
    Lens array 有权
    镜头阵列

    公开(公告)号：US06606198B2

    公开(公告)日：2003-08-12

    申请号：US09817772

    申请日：2001-03-26

    申请人： Tomohiko Sasano ,  Yasuhiro Tanaka ,  Michihiro Yamagata ,  Yoshikazu Sano ,  Tomoko Komatsu ,  Michiyo Ichikawa ,  Sumio Terakawa ,  Hiromitu Aoki

    发明人： Tomohiko Sasano ,  Yasuhiro Tanaka ,  Michihiro Yamagata ,  Yoshikazu Sano ,  Tomoko Komatsu ,  Michiyo Ichikawa ,  Sumio Terakawa ,  Hiromitu Aoki

    IPC分类号： G02B2710

    CPC分类号： G02B3/0018 ,  G02B3/0056 ,  H01L27/14627 ,  H01L27/14685

    摘要： In a lens array, a multiplicity of condenser lenses, each in a convex lens form, are arrayed in vertical and horizontal directions so as to correspond to pixel regions, respectively, and each condenser lens, when viewed from a direction perpendicular to a condenser lens-arrayed plane, takes a planar shape formed with a four straight sides along four sides of the pixel region and four circular arcs extending between the respective straight sides. A center of the four circular arcs substantially coincides with a center of the corresponding pixel region. This ensures an increase in area covered with the condenser lens in the pixel region, thereby causing more light rays to enter the condenser lens. In addition, a radius of curvature necessary for collecting can be obtained more easily. Consequently, light rays can be efficiently collected and guided to light receiving sections or the like provided in the pixel regions. Accordingly, sensitivity is improved when such a lens array is used in a solid-state imaging element, while luminance of a screen is improved when it is used in a panel display element. Besides, such a lens array is easily manufactured.

    摘要翻译： 在透镜阵列中，分别以凸透镜形式的多个聚光透镜分别沿着垂直于聚光透镜的方向从垂直方向排列成与像素区对应的聚焦透镜，并且每个聚光透镜 在平面形状的四边形状的四边形状的平面形状，四个圆弧在各个直边之间延伸。 四个圆弧的中心基本上与相应像素区域的中心重合。 这确保了像素区域中的聚光透镜覆盖的面积的增加，从而导致更多的光线进入聚光透镜。 此外，可以更容易地获得收集所需的曲率半径。 因此，可以将光线有效地收集并引导到设置在像素区域中的受光部等。 因此，当在固态成像元件中使用这种透镜阵列时，在面板显示元件中使用屏幕的亮度时，提高了灵敏度。 此外，这种透镜阵列容易制造。

    Solid state imaging device and production method for the same
    7.
    发明授权
    Solid state imaging device and production method for the same 失效
    固态成像装置及其制作方法相同

    公开(公告)号：US5976907A

    公开(公告)日：1999-11-02

    申请号：US5048

    申请日：1998-01-09

    申请人： Yoko Shigeta ,  Michiyo Ichikawa ,  Akira Tsukamoto

    发明人： Yoko Shigeta ,  Michiyo Ichikawa ,  Akira Tsukamoto

    IPC分类号： H01L31/0216 ,  H01L31/0232 ,  H01L31/036 ,  H01L79/04

    CPC分类号： H01L31/0232 ,  H01L27/14627 ,  H01L31/02162

    摘要： The invention provides a solid state imaging device with high photosensitivity. A lens resin coated on the surface of the device is subjected to an exposing treatment using lens masks and a developing treatment, thereby forming lens patterns. After improving the light transmittance of the lens patterns through irradiation of UV, the lens patterns are heated so as to form micro lenses each in the shape of a hemisphere. At this point, the heating temperature is set at a temperature lower than a temperature at which the lens patterns are completely melted. As a result, the lens patterns are prevented from flowing out, and a distance between the adjacent micro lenses becomes equal to a distance between the adjacent lens patterns. Accordingly, by making small the distance between the adjacent lens patterns, the light receiving area of each micro lens can be enlarged.

    摘要翻译： 本发明提供具有高光敏性的固态成像装置。 使用透镜掩模和显影处理对涂覆在器件表面上的透镜树脂进行曝光处理，从而形成透镜图案。 在通过照射UV改善透镜图案的透光率之后，透镜图案被加热以形成每个半球形状的微透镜。 此时，将加热温度设定为低于透镜图案完全熔融的温度的温度。 结果，防止透镜图案流出，并且相邻微透镜之间的距离变得等于相邻透镜图案之间的距离。 因此，通过使相邻透镜图案之间的距离变小，可以扩大每个微透镜的光接收面积。

    Solid state imaging device having a flattening layer and optical lenses
    9.
    发明授权
    Solid state imaging device having a flattening layer and optical lenses 失效
    具有平坦化层和光学透镜的固态成像装置

    公开(公告)号：US5739548A

    公开(公告)日：1998-04-14

    申请号：US640050

    申请日：1996-04-30

    申请人： Yoko Shigeta ,  Michiyo Ichikawa ,  Akira Tsukamoto

    发明人： Yoko Shigeta ,  Michiyo Ichikawa ,  Akira Tsukamoto

    IPC分类号： H01L31/0216 ,  H01L31/0232 ,  H01L31/036 ,  H01L79/04

    CPC分类号： H01L31/0232 ,  H01L27/14627 ,  H01L31/02162

    摘要： The invention provides a solid state imaging device with high photosensitivity. A lens resin coated on the surface of the device is subjected to an exposing treatment using lens masks and a developing treatment, thereby forming lens patterns. After improving the light transmittance of the lens patterns through irradiation of UV, the lens patterns are heated so as to form micro lenses each in the shape of a hemisphere. At this point, the heating temperature is set at a temperature lower than a temperature at which the lens patterns are completely melted. As a result, the lens patterns are prevented from flowing out, and a distance between the adjacent micro lenses becomes equal to a distance between the adjacent lens patterns. Accordingly, by making small the distance between the adjacent lens patterns, the light receiving area of each micro lens can be enlarged.

    摘要翻译： 本发明提供具有高光敏性的固态成像装置。 使用透镜掩模和显影处理对涂覆在器件表面上的透镜树脂进行曝光处理，从而形成透镜图案。 在通过照射UV改善透镜图案的透光率之后，透镜图案被加热以形成每个半球形状的微透镜。 此时，将加热温度设定为低于透镜图案完全熔融的温度的温度。 结果，防止透镜图案流出，并且相邻微透镜之间的距离变得等于相邻透镜图案之间的距离。 因此，通过使相邻透镜图案之间的距离变小，可以扩大每个微透镜的光接收面积。