公开(公告)号：US20070075322A1

公开(公告)日：2007-04-05

申请号：US10577425

申请日：2004-11-05

申请人： Osamu Nakamura ,  Gen Fujii ,  Fuminori Tateishi

发明人： Osamu Nakamura ,  Gen Fujii ,  Fuminori Tateishi

IPC分类号： H01L33/00

CPC分类号： H01L51/0022 ,  H01L27/12 ,  H01L27/1222 ,  H01L27/124 ,  H01L27/1251 ,  H01L27/1285 ,  H01L27/1292 ,  H01L27/156 ,  H01L27/3262 ,  H01L27/3279 ,  H01L29/42384 ,  H01L29/66765 ,  H01L29/78669 ,  H01L29/78696 ,  H01L51/56 ,  H01L2227/323

摘要： The present invention provides a display device and a manufacturing method thereof that can simplify manufacturing steps and enhance efficiency in the use of materials, and further, a manufacturing method that can enhance adhesiveness of a pattern. One feature of the invention is that at least one or more patterns needed for manufacturing a display panel, such as a conductive layer forming a wiring or an electrode or a mask for forming a desired pattern is/are formed by a method capable of selectively forming a pattern, thereby manufacturing a display panel.

摘要翻译： 本发明提供一种能够简化制造工序，提高材料使用效率的显示装置及其制造方法，进一步提高能够提高图案的粘合性的制造方法。 本发明的一个特征是，通过能够选择性地形成的方法来形成用于制造显示面板所需的至少一个或多个图案，例如形成布线的导电层或用于形成所需图案的电极或掩模 从而制造显示面板。

公开(公告)号：US08519404B2

公开(公告)日：2013-08-27

申请号：US12562162

申请日：2009-09-18

申请人： Osamu Nakamura ,  Gen Fujii ,  Fuminori Tateishi

发明人： Osamu Nakamura ,  Gen Fujii ,  Fuminori Tateishi

IPC分类号： H01L29/04 ,  H01L31/036

CPC分类号： H01L51/0022 ,  H01L27/12 ,  H01L27/1222 ,  H01L27/124 ,  H01L27/1251 ,  H01L27/1285 ,  H01L27/1292 ,  H01L27/156 ,  H01L27/3262 ,  H01L27/3279 ,  H01L29/42384 ,  H01L29/66765 ,  H01L29/78669 ,  H01L29/78696 ,  H01L51/56 ,  H01L2227/323

摘要： The present invention provides a display device and a manufacturing method thereof that can simplify manufacturing steps and enhance efficiency in the use of materials, and further, a manufacturing method that can enhance adhesiveness of a pattern. One feature of the invention is that at least one or more patterns needed for manufacturing a display panel, such as a conductive layer forming a wiring or an electrode or a mask for forming a desired pattern is/are formed by a method capable of selectively forming a pattern, thereby manufacturing a display panel.

公开(公告)号：US07592207B2

公开(公告)日：2009-09-22

申请号：US10577425

申请日：2004-11-05

申请人： Osamu Nakamura ,  Gen Fujii ,  Fuminori Tateishi

发明人： Osamu Nakamura ,  Gen Fujii ,  Fuminori Tateishi

IPC分类号： H01L21/84

CPC分类号： H01L51/0022 ,  H01L27/12 ,  H01L27/1222 ,  H01L27/124 ,  H01L27/1251 ,  H01L27/1285 ,  H01L27/1292 ,  H01L27/156 ,  H01L27/3262 ,  H01L27/3279 ,  H01L29/42384 ,  H01L29/66765 ,  H01L29/78669 ,  H01L29/78696 ,  H01L51/56 ,  H01L2227/323

摘要： The present invention provides a display device and a manufacturing method thereof that can simplify manufacturing steps and enhance efficiency in the use of materials, and further, a manufacturing method that can enhance adhesiveness of a pattern. One feature of the invention is that at least one or more patterns needed for manufacturing a display panel, such as a conductive layer forming a wiring or an electrode or a mask for forming a desired pattern is/are formed by a method capable of selectively forming a pattern, thereby manufacturing a display panel.

摘要翻译： 本发明提供一种能够简化制造工序，提高材料使用效率的显示装置及其制造方法，进一步提高能够提高图案的粘合性的制造方法。 本发明的一个特征是，通过能够选择性地形成的方法来形成用于制造显示面板所需的至少一个或多个图案，例如形成布线的导电层或用于形成所需图案的电极或掩模 从而制造显示面板。

公开(公告)号：US07273773B2

公开(公告)日：2007-09-25

申请号：US11042518

申请日：2005-01-26

申请人： Shunpei Yamazaki ,  Osamu Nakamura ,  Shinji Maekawa ,  Gen Fujii ,  Toshiyuki Isa

发明人： Shunpei Yamazaki ,  Osamu Nakamura ,  Shinji Maekawa ,  Gen Fujii ,  Toshiyuki Isa

IPC分类号： H01L21/84

CPC分类号： H01L51/0022 ,  G09G3/3208 ,  G09G3/3225 ,  G09G2300/0842 ,  G09G2300/0861 ,  G09G2310/0251 ,  H01L27/1285 ,  H01L27/1292 ,  H01L27/3244 ,  H01L51/055 ,  H01L51/529

摘要： The invention provides a display device and a method for manufacturing thereof by increasing a material efficiently as well as simplifying steps. Also, the invention provides a technique for forming a pattern such as a wiring, that is used for forming a display device, to have a predetermined shape with an excellent controllability. The method for manufacturing a display device includes the steps of: forming a lyophobic region; selectively irradiating laser beam in the lyophobic region to form a lyophilic region; selectively discharging a composition, that contains a conductive material, in the lyophilic region to form a gate electrode layer; forming a gate insulating layer and a semiconductor layer over the gate electrode layer; discharging a composition containing a conductive material over the semiconductor layer to form a source electrode layer and a drain electrode layer; and forming a pixel electrode layer on the source or drain electrode layer.

摘要翻译： 本发明提供一种显示装置及其制造方法，其通过有效地增加材料以及简化步骤来制造。 此外，本发明提供了一种用于形成用于形成显示装置的布线等图案以具有优异的可控性的预定形状的技术。 制造显示装置的方法包括以下步骤：形成疏液区域; 选择性地将激光束照射在疏液区域以形成亲液性区域; 选择性地将含有导电材料的组合物在亲液区域中排出以形成栅极电极层; 在栅电极层上形成栅极绝缘层和半导体层; 在半导体层上排出含有导电材料的组合物，以形成源电极层和漏电极层; 以及在源极或漏极电极层上形成像素电极层。

公开(公告)号：US20060027804A1

公开(公告)日：2006-02-09

申请号：US11187988

申请日：2005-07-25

申请人： Shunpei Yamazaki ,  Hironobu Shoji ,  Shinji Maekawa ,  Osamu Nakamura ,  Tatsuya Honda ,  Gen Fujii ,  Yukie Suzuki ,  Ikuko Kawamata

发明人： Shunpei Yamazaki ,  Hironobu Shoji ,  Shinji Maekawa ,  Osamu Nakamura ,  Tatsuya Honda ,  Gen Fujii ,  Yukie Suzuki ,  Ikuko Kawamata

IPC分类号： H01L29/04

CPC分类号： H01L21/02667 ,  G02F1/1368 ,  G02F2202/104 ,  H01L21/2022 ,  H01L21/2026 ,  H01L27/124 ,  H01L27/1277 ,  H01L27/1292 ,  H01L27/3246 ,  H01L27/3248 ,  H01L27/3262 ,  H01L27/3276 ,  H01L51/56

摘要： A manufacturing method of a display device having TFTs capable of high-speed operation with few variations of threshold voltage is provided, in which materials are used with high efficiency and a small number of photomasks is required. The display device of the invention comprises a gate electrode layer and a pixel electrode layer formed over an insulating surface, a gate insulating layer formed over the gate electrode layer, a crystalline semiconductor layer formed over the gate insulating layer, a semiconductor layer having one conductivity type formed in contact with the crystalline semiconductor layer, a source electrode layer and a drain electrode layer formed in contact with the semiconductor layer having one conductivity type, an insulating later formed over the source electrode layer, the drain electrode layer, and the pixel electrode layer, a first opening formed in the insulating layer to reach the source electrode layer or the drain electrode layer, a second opening formed in the gate insulating layer and the insulating layer to reach the pixel electrode layer, and a wiring layer formed in the first opening and the second opening to electrically connect the source electrode layer or the drain electrode layer to the pixel electrode layer.

公开(公告)号：US08518760B2

公开(公告)日：2013-08-27

申请号：US13050117

申请日：2011-03-17

申请人： Shunpei Yamazaki ,  Osamu Nakamura ,  Shinji Maekawa ,  Gen Fujii ,  Toshiyuki Isa

发明人： Shunpei Yamazaki ,  Osamu Nakamura ,  Shinji Maekawa ,  Gen Fujii ,  Toshiyuki Isa

IPC分类号： H01L21/84

CPC分类号： H01L51/0022 ,  G09G3/3208 ,  G09G3/3225 ,  G09G2300/0842 ,  G09G2300/0861 ,  G09G2310/0251 ,  H01L27/1285 ,  H01L27/1292 ,  H01L27/3244 ,  H01L51/055 ,  H01L51/529

摘要： The invention provides a display device and a method for manufacturing thereof by increasing a material efficiently as well as simplifying steps. Also, the invention provides a technique for forming a pattern such as a wiring, that is used for forming a display device, to have a predetermined shape with an excellent controllability. The method for manufacturing a display device includes the steps of: forming a lyophobic region; selectively irradiating laser beam in the lyophobic region to form a lyophilic region; selectively discharging a composition, that contains a conductive material, in the lyophilic region to form a gate electrode layer; forming a gate insulating layer and a semiconductor layer over the gate electrode layer; discharging a composition containing a conductive material over the semiconductor layer to form a source electrode layer and a drain electrode layer; and forming a pixel electrode layer on the source or drain electrode layer.

摘要翻译： 本发明提供一种显示装置及其制造方法，其通过有效地增加材料以及简化步骤来制造。 此外，本发明提供了一种用于形成用于形成显示装置的布线等图案以具有优异的可控性的预定形状的技术。 制造显示装置的方法包括以下步骤：形成疏液区域; 选择性地将激光束照射在疏液区域以形成亲液性区域; 选择性地将含有导电材料的组合物在亲液区域中排出以形成栅极电极层; 在栅电极层上形成栅极绝缘层和半导体层; 在半导体层上排出含有导电材料的组合物，以形成源电极层和漏电极层; 以及在源极或漏极电极层上形成像素电极层。

公开(公告)号：US07939888B2

公开(公告)日：2011-05-10

申请号：US11857729

申请日：2007-09-19

申请人： Shunpei Yamazaki ,  Osamu Nakamura ,  Shinji Maekawa ,  Gen Fujii ,  Toshiyuki Isa

发明人： Shunpei Yamazaki ,  Osamu Nakamura ,  Shinji Maekawa ,  Gen Fujii ,  Toshiyuki Isa

IPC分类号： H01L27/01 ,  H01L27/12 ,  H01L31/0392

CPC分类号： H01L51/0022 ,  G09G3/3208 ,  G09G3/3225 ,  G09G2300/0842 ,  G09G2300/0861 ,  G09G2310/0251 ,  H01L27/1285 ,  H01L27/1292 ,  H01L27/3244 ,  H01L51/055 ,  H01L51/529

摘要： The invention provides a display device and a method for manufacturing thereof by increasing a material efficiently as well as simplifying steps. Also, the invention provides a technique for forming a pattern such as a wiring, that is used for forming a display device, to have a predetermined shape with an excellent controllability. The method for manufacturing a display device includes the steps of: forming a lyophobic region; selectively irradiating laser beam in the lyophobic region to form a lyophilic region; selectively discharging a composition, that contains a conductive material, in the lyophilic region to form a gate electrode layer; forming a gate insulating layer and a semiconductor layer over the gate electrode layer; discharging a composition containing a conductive material over the semiconductor layer to form a source electrode layer and a drain electrode layer; and forming a pixel electrode layer on the source or drain electrode layer.

摘要翻译： 本发明提供一种显示装置及其制造方法，其通过有效地增加材料以及简化步骤来制造。 此外，本发明提供了一种用于形成用于形成显示装置的布线等图案以具有优异的可控性的预定形状的技术。 制造显示装置的方法包括以下步骤：形成疏液区域; 选择性地将激光束照射在疏液区域以形成亲液性区域; 选择性地将含有导电材料的组合物在亲液区域中排出以形成栅极电极层; 在栅电极层上形成栅极绝缘层和半导体层; 在半导体层上排出含有导电材料的组合物，以形成源电极层和漏电极层; 以及在源极或漏极电极层上形成像素电极层。

公开(公告)号：US20090325333A1

公开(公告)日：2009-12-31

申请号：US12552305

申请日：2009-09-02

申请人： Kunihiko Fukuchi ,  Gen Fujii ,  Osamu Nakamura ,  Shinji Maekawa

发明人： Kunihiko Fukuchi ,  Gen Fujii ,  Osamu Nakamura ,  Shinji Maekawa

IPC分类号： H01L33/00

CPC分类号： H01L29/78678 ,  C25D5/022 ,  G02F2001/136295 ,  H01L21/288 ,  H01L21/76802 ,  H01L21/76838 ,  H01L27/12 ,  H01L27/1285 ,  H01L27/1292 ,  H01L27/3244 ,  H01L29/42384 ,  H01L29/66765 ,  H01L29/78696 ,  H01L51/56 ,  H01L2224/73204 ,  H01L2224/73265

摘要： According to one aspect of the present invention, at least one or more of patterns required for manufacturing a display device, such as a conductive layer which forms a wiring or an electrode and a mask, is formed by a droplet discharging method. At that time, a portion of the gate insulating film where is not located under the semiconductor layer is removed during manufacturing steps of the present invention.

摘要翻译： 根据本发明的一个方面，通过液滴喷射法形成制造显示装置所需的至少一种或多种图案，例如形成布线的导电层或电极和掩模。 此时，在本发明的制造工序中，除去不在半导体层下方的栅极绝缘膜的一部分。

公开(公告)号：US20050163938A1

公开(公告)日：2005-07-28

申请号：US11042518

申请日：2005-01-26

申请人： Shunpei Yamazaki ,  Osamu Nakamura ,  Shinji Maekawa ,  Gen Fujii ,  Toshiyuki Isa

发明人： Shunpei Yamazaki ,  Osamu Nakamura ,  Shinji Maekawa ,  Gen Fujii ,  Toshiyuki Isa

IPC分类号： C25B11/00 ,  G09G3/20 ,  G09G3/32 ,  H01L21/77 ,  H01L27/32 ,  H01L51/52 ,  H05B33/08 ,  H05B33/10 ,  H05B33/22

CPC分类号： H01L51/0022 ,  G09G3/3208 ,  G09G3/3225 ,  G09G2300/0842 ,  G09G2300/0861 ,  G09G2310/0251 ,  H01L27/1285 ,  H01L27/1292 ,  H01L27/3244 ,  H01L51/055 ,  H01L51/529

摘要： The invention provides a display device and a method for manufacturing thereof by increasing a material efficiently as well as simplifying steps. Also, the invention provides a technique for forming a pattern such as a wiring, that is used for forming a display device, to have a predetermined shape with an excellent controllability. The method for manufacturing a display device includes the steps of: forming a lyophobic region; selectively irradiating laser beam in the lyophobic region to form a lyophilic region; selectively discharging a composition, that contains a conductive material, in the lyophilic region to form a gate electrode layer; forming a gate insulating layer and a semiconductor layer over the gate electrode layer; discharging a composition containing a conductive material over the semiconductor layer to form a source electrode layer and a drain electrode layer; and forming a pixel electrode layer on the source or drain electrode layer.

摘要翻译： 本发明提供一种显示装置及其制造方法，其通过有效地增加材料以及简化步骤来制造。 此外，本发明提供了一种用于形成用于形成显示装置的布线等图案以具有优异的可控性的预定形状的技术。 制造显示装置的方法包括以下步骤：形成疏液区域; 选择性地将激光束照射在疏液区域以形成亲液性区域; 选择性地将含有导电材料的组合物在亲液区域中排出以形成栅极电极层; 在栅电极层上形成栅极绝缘层和半导体层; 在半导体层上排出含有导电材料的组合物，以形成源电极层和漏电极层; 以及在源极或漏极电极层上形成像素电极层。

公开(公告)号：US07883912B2

公开(公告)日：2011-02-08

申请号：US12552305

申请日：2009-09-02

申请人： Kunihiko Fukuchi ,  Gen Fujii ,  Osamu Nakamura ,  Shinji Maekawa

发明人： Kunihiko Fukuchi ,  Gen Fujii ,  Osamu Nakamura ,  Shinji Maekawa

IPC分类号： H01L21/00

CPC分类号： H01L29/78678 ,  C25D5/022 ,  G02F2001/136295 ,  H01L21/288 ,  H01L21/76802 ,  H01L21/76838 ,  H01L27/12 ,  H01L27/1285 ,  H01L27/1292 ,  H01L27/3244 ,  H01L29/42384 ,  H01L29/66765 ,  H01L29/78696 ,  H01L51/56 ,  H01L2224/73204 ,  H01L2224/73265

摘要： According to one aspect of the present invention, at least one or more of patterns required for manufacturing a display device, such as a conductive layer which forms a wiring or an electrode and a mask, is formed by a droplet discharging method. At that time, a portion of the gate insulating film where is not located under the semiconductor layer is removed during manufacturing steps of the present invention.

摘要翻译： 根据本发明的一个方面，通过液滴喷射法形成制造显示装置所需的至少一种或多种图案，例如形成布线的导电层或电极和掩模。 此时，在本发明的制造工序中，除去不在半导体层下方的栅极绝缘膜的一部分。