-
公开(公告)号：US08690830B2
公开(公告)日：2014-04-08
申请号：US12801162
申请日：2010-05-26
CPC分类号： F04B43/043
摘要： A micromechanical pumping system is formed on a substrate surface. The pumping system uses a pumping element which pumps a fluid through valves which move in a plane substantially parallel to the substrate surface. An electromagnetic actuating mechanism may also be fabricated on the surface of the substrate. Magnetic flux produced by a coil around a permeable core may be coupled to a permeable member affixed to a pumping element. The permeable member and pumping element may be configured to move in a plane parallel to the substrate. The electromagnetic actuating mechanism gives the pumping system a large throw and substantial force, such that the fluid pumped by the pumping system may be pumped through a transdermal cannula to deliver a therapeutic substance to the tissue underlying the skin of a patient.
摘要翻译： 在基板表面上形成微机械泵送系统。 泵送系统使用泵送元件，该元件通过在基本上平行于衬底表面的平面中移动的阀来泵送流体。 也可以在基板的表面上制造电磁致动机构。 线圈围绕可渗透芯体产生的磁通可以耦合到固定到泵送元件的可渗透构件。 可渗透构件和泵送元件可以构造成在平行于衬底的平面中移动。 电磁致动机构使泵送系统产生大的冲击力和相当大的力，使得由泵送系统泵送的流体可以泵送通过透皮插管，以将治疗物质递送到患者皮肤下方的组织。
-
公开(公告)号：US20110295229A1
公开(公告)日：2011-12-01
申请号：US12801162
申请日：2010-05-26
CPC分类号： F04B43/043
摘要： A micromechanical pumping system is formed on a substrate surface. The pumping system uses a pumping element which pumps a fluid through valves which move in a plane substantially parallel to the substrate surface. An electromagnetic actuating mechanism may also be fabricated on the surface of the substrate. Magnetic flux produced by a coil around a permeable core may be coupled to a permeable member affixed to a pumping element. The permeable member and pumping element may be configured to move in a plane parallel to the substrate. The electromagnetic actuating mechanism gives the pumping system a large throw and substantial force, such that the fluid pumped by the pumping system may be pumped through a transdermal cannula to deliver a therapeutic substance to the tissue underlying the skin of a patient.
摘要翻译： 在基板表面上形成微机械泵送系统。 泵送系统使用泵送元件，该元件通过在基本上平行于衬底表面的平面中移动的阀来泵送流体。 也可以在基板的表面上制造电磁致动机构。 线圈围绕可渗透芯体产生的磁通可以耦合到固定到泵送元件的可渗透构件。 可渗透构件和泵送元件可以构造成在平行于衬底的平面中移动。 电磁致动机构使泵送系统产生大的冲击力和相当大的力，使得由泵送系统泵送的流体可以泵送通过透皮插管，以将治疗物质递送到患者皮肤下方的组织。
-
公开(公告)号：US20080191303A1
公开(公告)日：2008-08-14
申请号：US11705739
申请日：2007-02-14
IPC分类号： H01L31/058 , H01L21/00
CPC分类号： H01H1/0036 , H01H61/04 , H01H2001/0047 , H01H2001/0078 , H01H2061/006 , H01H2061/008
摘要： A separated MEMS thermal actuator is disclosed which is largely insensitive to creep in the cantilevered beams of the thermal actuator. In the separated MEMS thermal actuator, a inlaid cantilevered drive beam formed in the same plane, but separated from a passive beam by a small gap. Because the inlaid cantilevered drive beam and the passive beam are not directly coupled, any changes in the quiescent position of the inlaid cantilevered drive beam may not be transmitted to the passive beam, if the magnitude of the changes are less than the size of the gap.
摘要翻译： 公开了一种分离的MEMS热致动器，其对热致动器的悬臂梁中的蠕变基本上不敏感。 在分离的MEMS热致动器中，嵌入的悬臂式驱动梁形成在同一平面上，但与被动梁分开，间隙小。 由于嵌入的悬臂驱动梁和被动梁不直接耦合，镶嵌悬臂驱动梁的静止位置的任何变化可能不会传递到被动梁，如果变化的幅度小于间隙的大小 。
-
公开(公告)号：US07622783B2
公开(公告)日：2009-11-24
申请号：US11705739
申请日：2007-02-14
IPC分类号： H01L29/82
CPC分类号： H01H1/0036 , H01H61/04 , H01H2001/0047 , H01H2001/0078 , H01H2061/006 , H01H2061/008
摘要： A separated MEMS thermal actuator is disclosed which is largely insensitive to creep in the cantilevered beams of the thermal actuator. In the separated MEMS thermal actuator, a inlaid cantilevered drive beam formed in the same plane, but separated from a passive beam by a small gap. Because the inlaid cantilevered drive beam and the passive beam are not directly coupled, any changes in the quiescent position of the inlaid cantilevered drive beam may not be transmitted to the passive beam, if the magnitude of the changes are less than the size of the gap.
摘要翻译： 公开了一种分离的MEMS热致动器，其对热致动器的悬臂梁中的蠕变基本上不敏感。 在分离的MEMS热致动器中，嵌入的悬臂式驱动梁形成在同一平面上，但与被动梁分开，间隙小。 由于嵌入的悬臂驱动梁和被动梁不直接耦合，镶嵌悬臂驱动梁的静止位置的任何变化可能不会传递到被动梁，如果变化的幅度小于间隙的大小 。
-
公开(公告)号：US20090181488A1
公开(公告)日：2009-07-16
申请号：US12382142
申请日：2009-03-10
IPC分类号： H01L21/306
CPC分类号： H01H1/0036 , H01H61/04 , H01H2001/0047 , H01H2001/0078 , H01H2061/006 , H01H2061/008
摘要： A separated MEMS thermal actuator is disclosed which is largely insensitive to creep in the cantilevered beams of the thermal actuator. In the separated MEMS thermal actuator, a inlaid cantilevered drive beam formed in the same plane, but separated from a passive beam by a small gap. Because the inlaid cantilevered drive beam and the passive beam are not directly coupled, any changes in the quiescent position of the inlaid cantilevered drive beam may not be transmitted to the passive beam, if the magnitude of the changes are less than the size of the gap.
-
公开(公告)号：US07759152B2
公开(公告)日：2010-07-20
申请号：US12382142
申请日：2009-03-10
IPC分类号： H01L21/00
CPC分类号： H01H1/0036 , H01H61/04 , H01H2001/0047 , H01H2001/0078 , H01H2061/006 , H01H2061/008
摘要： A separated MEMS thermal actuator is disclosed which is largely insensitive to creep in the cantilevered beams of the thermal actuator. In the separated MEMS thermal actuator, a inlaid cantilevered drive beam formed in the same plane, but separated from a passive beam by a small gap. Because the inlaid cantilevered drive beam and the passive beam are not directly coupled, any changes in the quiescent position of the inlaid cantilevered drive beam may not be transmitted to the passive beam, if the magnitude of the changes are less than the size of the gap.
摘要翻译： 公开了一种分离的MEMS热致动器，其对热致动器的悬臂梁中的蠕变基本上不敏感。 在分离的MEMS热致动器中，嵌入的悬臂式驱动梁形成在同一平面上，但与被动梁分开，间隙小。 由于嵌入的悬臂驱动梁和被动梁不直接耦合，镶嵌悬臂驱动梁的静止位置的任何变化可能不会传递到被动梁，如果变化的幅度小于间隙的大小 。
-
7.发明申请公开(公告)号：US20080250785A1
公开(公告)日：2008-10-16
申请号：US11785119
申请日：2007-04-16
申请人： Gregory A. Carlson , Patrick E. Feierabend , John S. Foster , Daryl W. Grummit , Alok Paranjpye , Paul J. Rubel , Jeffery F. Summers , Douglas L. Thompson
发明人： Gregory A. Carlson , Patrick E. Feierabend , John S. Foster , Daryl W. Grummit , Alok Paranjpye , Paul J. Rubel , Jeffery F. Summers , Douglas L. Thompson
IPC分类号： F01B29/10
CPC分类号： H01H1/0036 , H01H1/023 , H01H1/04 , H01H2001/0052 , H01H2001/0078 , H01H2061/006 , H01H2061/008
摘要： A MEMS switch device is made using a gold alloy as the switch contact material. The increased mechanical hardness of the alloy compared to the pure gold prevents the contacts of the switch from welding together. A scrubbing action which occurs when the switch closes may allow the contact surfaces to come to rest where their surfaces are complementary, thus resulting in higher contact area and low contact resistance, despite the higher sheet resistance of the gold alloy material relative to the pure gold material.
摘要翻译： 使用金合金作为开关触点材料制造MEMS开关装置。 与纯金相比，合金的增加的机械硬度防止开关的接触焊接在一起。 当开关闭合时发生的擦洗动作可允许接触表面在其表面互补的情况下停止，因此导致更高的接触面积和低的接触电阻，尽管金合金材料相对于纯金的较高的薄层电阻 材料。
-
公开(公告)号：US07812703B2
公开(公告)日：2010-10-12
申请号：US11386733
申请日：2006-03-23
IPC分类号： H18H71/18
CPC分类号： H01H1/0036 , C23C28/021 , C23C28/023 , C25D3/562 , C25D5/022 , C25D5/54 , H01H2001/0047 , H01H2061/006
摘要： A material for forming a conductive structure for a MEMS device is described, which is an alloy containing about 0.01% manganese and the remainder nickel. Data shows that the alloy possesses advantageous mechanical and electrical properties. In particular, the sheet resistance of the alloy is actually lower than the sheet resistance of the pure metal. In addition, the alloy may have superior creep and higher recrystallization temperature than the pure metal. It is hypothesized that these advantageous material properties are a result of the larger grain structure existing in the NiMn alloy film compared to the pure nickel metal film. These properties may make the alloy appropriate for applications such as MEMS thermal electrical switches for telecommunications applications.
摘要翻译： 描述了一种用于形成用于MEMS器件的导电结构的材料，其是含有约0.01％锰及其余镍的合金。 数据显示，该合金具有有利的机械和电学性能。 特别地，合金的薄层电阻实际上低于纯金属的薄层电阻。 此外，与纯金属相比，合金具有优异的蠕变和更高的再结晶温度。 假设这些有利的材料性质是与纯镍金属膜相比NiMn合金膜中存在较大的晶粒结构的结果。 这些性能可以使合金适用于诸如用于电信应用的MEMS热电开关的应用。
-
公开(公告)号：US08088651B1
公开(公告)日：2012-01-03
申请号：US12232298
申请日：2008-09-15
CPC分类号： B81C99/004
摘要： A method for providing access to a feature on a device wafer, and located outside an encapsulation region is described. The method includes forming a cavity in the lid wafer, aligning the lid wafer with the device wafer so that the cavity is located substantially above the feature, and removing material substantially uniformly from the bottom surface of the lid wafer, until an aperture is formed at the cavity, over the feature on the device wafer. By removing material from the lid wafer in a substantially uniform manner, difficulties with the prior art procedure of saw cutting, such as alignment and debris generation, are avoided.
摘要翻译： 描述了一种用于提供对设备晶片上的特征的访问并位于封装区域外部的方法。 该方法包括在盖晶片中形成空腔，将盖晶片与器件晶片对准，使得空腔基本上位于特征上方，并且从盖晶片的底表面基本上均匀地移除材料，直到孔形成在 在器件晶圆上的特征之上。 通过以大致均匀的方式从盖晶片去除材料，避免了现有技术的锯切过程（例如对准和碎屑产生）的困难。
-
公开(公告)号：US07687304B2
公开(公告)日：2010-03-30
申请号：US11605312
申请日：2006-11-29
IPC分类号： H01L21/00
CPC分类号： C23C14/3414 , B81B7/0006 , C23C28/021 , C23C28/023 , C23C28/321 , C23C28/322 , C23C28/345 , C25D3/562 , C25D5/022 , C25D5/12 , C25D7/123 , Y10T428/12 , Y10T428/12361
摘要： A material for forming a conductive structure for a micromechanical current-driven device is described, which is an alloy containing about 0.025% manganese and the remainder nickel. Data shows that the alloy possesses advantageous mechanical and electrical properties. In particular, the sheet resistance of the alloy is actually lower and more stable than the sheet resistance of the pure metal. Accordingly, when used for conductive leads in a photonic device, the leads using the NiMn alloy may provide current to heat the photonic device while generating less heat within the leads themselves, and a more stable output.
摘要翻译： 描述了用于形成用于微机电流驱动装置的导电结构的材料，其是含有约0.025％的锰和其余的镍的合金。 数据显示，该合金具有有利的机械和电学性能。 特别地，合金的薄层电阻实际上比纯金属的薄层电阻更低且更稳定。 因此，当用于光子器件中的导电引线时，使用NiMn合金的引线可以提供电流以加热光子器件，同时在引线本身内产生较少的热量，并产生更稳定的输出。
-
-
-
-
-
-
-
-
-
搜索结果
19 条记录 (耗时 0.027 秒)
