公开(公告)号：US09111977B2

公开(公告)日：2015-08-18

申请号：US13994160

申请日：2011-12-19

申请人： Peter Coxon

发明人： Peter Coxon

IPC分类号： B65G1/133 ,  H01L21/677

CPC分类号： H01L21/67745 ,  H01L21/67742

摘要： A work piece transfer mechanism for use in a chamber has at least one port through which a work piece may be passed along a linear work piece transfer path between a retracted location inside the chamber and an extended location outside the chamber. The chamber has a predetermined internal dimension of given axial extent in the direction of the transfer path, and the transfer mechanism includes a work piece support movable with a linear stroke. The work piece support is driven along the linear stroke by a drive lever pivotally attached to the work piece support by a pivot, and the drive lever is drivable such that the pivot is driven along a linear path to move the work piece support along the linear work piece transfer path. The linear work piece transfer path includes a portion beyond the port of axial extent greater than predetermined internal dimension.

摘要翻译： 用于腔室的工件传送机构具有至少一个端口，工件可以沿着腔室内的缩回位置和室外的延伸位置沿着直线工件传送路径通过该端口。 该腔室具有在传送路径的方向上给定轴向范围的预定内部尺寸，并且传送机构包括可以线性行程移动的工件支撑件。 工件支撑件通过由枢轴枢转地附接到工件支撑件的驱动杆沿着线性行程驱动，并且驱动杆可驱动，使得枢轴沿着线性路径被驱动以沿着线性运动工件支撑件 工件传送路径。 线性工件传送路径包括超过预定内部尺寸的轴向范围之外的部分。

公开(公告)号：US20130266405A1

公开(公告)日：2013-10-10

申请号：US13994160

申请日：2011-12-19

申请人： Peter Coxon

发明人： Peter Coxon

IPC分类号： H01L21/677

CPC分类号： H01L21/67745 ,  H01L21/67742

摘要： A work piece transfer mechanism for use in a chamber has at least one port through which a work piece may be passed along a linear work piece transfer path between a retracted location inside the chamber and an extended location outside the chamber. The chamber has a predetermined internal dimension of given axial extent in the direction of the transfer path, and the transfer mechanism includes a work piece support movable with a linear stroke. The work piece support is driven along the linear stroke by a drive lever pivotally attached to the work piece support by a pivot, and the drive lever is drivable such that the pivot is driven along a linear path to move the work piece support along the linear work piece transfer path. The linear work piece transfer path includes a portion beyond the port of axial extent greater than predetermined internal dimension.

摘要翻译： 用于腔室的工件传送机构具有至少一个端口，工件可以沿着腔室内的缩回位置和室外的延伸位置沿着直线工件传送路径通过该端口。 该腔室具有在传送路径的方向上给定轴向范围的预定内部尺寸，并且传送机构包括可以线性行程移动的工件支撑件。 工件支撑件通过由枢轴枢转地附接到工件支撑件的驱动杆沿着线性行程驱动，并且驱动杆可驱动，使得枢轴沿着线性路径被驱动以沿着线性运动工件支撑件 工件传送路径。 线性工件传送路径包括超过预定内部尺寸的轴向范围之外的部分。

公开(公告)号：US6104029A

公开(公告)日：2000-08-15

申请号：US139198

申请日：1998-08-25

申请人： Peter Coxon ,  Bryan Barnard ,  H. Sebastian Von Harrach

发明人： Peter Coxon ,  Bryan Barnard ,  H. Sebastian Von Harrach

IPC分类号： H01J49/40 ,  H01J47/00

CPC分类号： H01J49/46 ,  G01N23/2273 ,  H01J49/067 ,  G01N2223/085

摘要： A spectrometer and method of spectroscopy are provided for surface analysis. The spectrometer comprises an energy analyser for analysing the energies of charged particles liberated from a sample, a lens arranged to project a diffraction image of the analysis area at the image plane of the lens and a detector for detecting the charged particles. The analyser and lens are arranged to generate an image at the detector in which the charged particles are distributed along a first direction according to their emission angles and are distributed along another direction according to their energies. The detector is arranged to detect the distribution of charged particles in the image along the first direction to provide angle resolved energy spectra.

摘要翻译： 提供光谱仪和光谱学方法进行表面分析。 光谱仪包括用于分析从样品释放的带电粒子的能量的能量分析器，布置成在透镜的像面投影分析区域的衍射图像的透镜和用于检测带电粒子的检测器。 分析器和透镜被布置成在检测器处产生图像，其中带电粒子根据其发射角沿第一方向分布，并且根据其能量沿另一方向分布。 检测器设置成沿着第一方向检测图像中带电粒子的分布，以提供角度分辨的能谱。

公开(公告)号：US5506414A

公开(公告)日：1996-04-09

申请号：US218132

申请日：1994-03-25

申请人： Peter Coxon

发明人： Peter Coxon

IPC分类号： H01J37/06 ,  H01J37/252 ,  H01J37/285 ,  H01J49/48 ,  H01J47/00

CPC分类号： H01J49/484 ,  H01J37/06 ,  H01J37/252 ,  H01J37/285 ,  H01J2237/04926 ,  H01J2237/2522 ,  H01J2237/2855

摘要： The invention provides apparatus and methods for investigating a small selected area of the surface of a specimen. The specimen is irradiated by a primary beam of X-rays or electrons to cause it to emit electrons. These are collected by a novel electron-optical arrangement and are used to create an image of the selected area of the surface using only those electrons emitted with energies lying in a specified range. Apparatus according to the invention has greater sensitivity and spatial resolution than previously known apparatus.

摘要翻译： 本发明提供了用于研究样本表面的小选区的装置和方法。 样品被X射线或电子束照射，使其发射电子。 这些通过新颖的电子 - 光学装置收集，并且用于仅使用以能量位于指定范围内发射的电子来创建表面的选定区域的图像。 根据本发明的装置具有比先前已知的装置更大的灵敏度和空间分辨率。

公开(公告)号：US5451783A

公开(公告)日：1995-09-19

申请号：US218115

申请日：1994-03-25

申请人： Peter Coxon ,  Bruce J. McIntosh

发明人： Peter Coxon ,  Bruce J. McIntosh

IPC分类号： H01J37/02 ,  H01J37/285 ,  H01J49/48 ,  H01J49/44

CPC分类号： H01J37/026 ,  H01J37/285 ,  H01J49/484 ,  H01J2237/0044 ,  H01J2237/04926 ,  H01J2237/2855

摘要： A charged particle analyzer which irradiates a specimen and analyzes charged particles emitted therefrom, for example a photo electron spectrometer, having a flood-source which emits charged particles to neutralize the charge which develops on a specimen. The analyzer is provided with electrostatic and magnetic lenses which may be used separately or in combination. The flood source is provided within the lens column of the analyzer and is arranged such that when the electrostatic lens is in use, the charged particles emitted by the flood source pass around the outside of the objective electrostatic lens element, whereas when the magnetic lens is in use, or when both lenses are in use, they pass through that element.

摘要翻译： 一种带电粒子分析仪，其照射样本并分析从其发射的带电粒子，例如光电子能谱仪，其具有发射带电粒子的泛洪源，以中和样品上产生的电荷。 分析仪具有可以单独使用或组合使用的静电和磁性透镜。 洪水源设置在分析仪的透镜柱内，并且布置成使得当使用静电透镜时，由洪水源发射的带电粒子通过目标静电透镜元件的外侧，而当磁透镜为 在使用中，或当两个镜头都在使用时，它们通过该元件。