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    Method of making a fluid-jet ejection device
    2.
    发明授权
    Method of making a fluid-jet ejection device 失效
    制造流体喷射喷射装置的方法

    公开(公告)号：US06718632B2

    公开(公告)日：2004-04-13

    申请号：US10208331

    申请日：2002-07-29

    申请人： Qin Liu ,  Naoto Kawamura ,  Chien-Hua Chen

    发明人： Qin Liu ,  Naoto Kawamura ,  Chien-Hua Chen

    IPC分类号： B23P1700

    CPC分类号： B41J2/1645 ,  B41J2/1404 ,  B41J2/14145 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1634 ,  B41J2/1635 ,  Y10T29/49 ,  Y10T29/49085 ,  Y10T29/49401

    摘要： A method of creating a fluid ejection device is described. The fluid ejection device has a substrate having a set of thin-film layers disposed on a first surface. A photoresist is applied on the set of thin-film layers, the photoresist has openings defined therein. The set of thin-film layers and substrate in the openings are etched to create deep slots beneath the first surface of the substrate. The photoresist is removed. A protection layer is applied over the set of thin-film layers thereby filling the deep slots in the set of thin-film layers and substrate. A feed channel is created on a second surface of the substrate until the protection layer within the deep slots is exposed. The protection layer is then removed.

    摘要翻译： 描述了一种产生流体喷射装置的方法。 流体喷射装置具有设置在第一表面上的一组薄膜层的基板。 在一组薄膜层上施加光致抗蚀剂，光致抗蚀剂在其中限定开口。 对该组开口中的薄膜层和衬底进行蚀刻以在衬底的第一表面下方形成深槽。 去除光致抗蚀剂。 在该组薄膜层上施加保护层，从而填充该组薄膜层和衬底中的深槽。 在衬底的第二表面上形成馈送通道，直到深槽内的保护层被暴露。 然后去除保护层。

    Fluid-jet ejection device
    3.
    发明授权
    Fluid-jet ejection device 失效
    流体喷射装置

    公开(公告)号：US06481832B2

    公开(公告)日：2002-11-19

    申请号：US09774259

    申请日：2001-01-29

    申请人： Qin Liu ,  Naoto Kawamura ,  Chien-Hua Chen

    发明人： Qin Liu ,  Naoto Kawamura ,  Chien-Hua Chen

    IPC分类号： B41J205

    CPC分类号： B41J2/1645 ,  B41J2/1404 ,  B41J2/14145 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1634 ,  B41J2/1635 ,  Y10T29/49 ,  Y10T29/49085 ,  Y10T29/49401

    摘要： The invention is a fluid ejection device, such as a printhead, that has a substrate with a first surface mating to an orifice layer, preferably through a stack of thin-film layers. The orifice layer defines a fluid chamber interfacing to an orifice opening or nozzle. The substrate has a second surface having a truncated pyramidal structure; either polyhedral or triangular ridge shaped defining an opening through the substrate to the fluid chamber. The substrate further has an ejection element, preferably disposed as a resistor in the stack of thin-film layers. When energy is transferred from the ejection element to the fluid in the fluid chamber, fluid is ejected from the orifice opening. The fluid ejection device may have one or a plurality of fluid chambers and one or a plurality of frustums of a truncated polyhedral, truncated pyramidal, truncated conical or truncated triangular cross-sectional ridge structures defining openings from the second surface of the substrate to the fluid chambers.

    摘要翻译： 本发明是一种流体喷射装置，例如打印头，其具有基底，其具有与孔层相匹配的第一表面，优选地通过一叠薄膜层。 孔口层限定与孔口或喷嘴连接的流体室。 基板具有具有截头棱锥结构的第二表面; 多面体或三角形脊形，限定通过基底的开口到流体室。 衬底还具有优选地设置在薄膜层堆叠中作为电阻器的喷射元件。 当能量从喷射元件转移到流体室中的流体时，流体从孔口排出。 流体喷射装置可以具有一个或多个流体室和一个或多个截头圆锥体，其截断的多面体，截头锥体，截头圆锥形或截头三角形横截面脊结构限定从衬底的第二表面到流体的开口 房间。

    Micro electrical mechanical system
    10.
    发明授权
    Micro electrical mechanical system 有权
    微机电系统

    公开(公告)号：US08497577B2

    公开(公告)日：2013-07-30

    申请号：US11870306

    申请日：2007-10-10

    申请人： Chien-Hua Chen ,  David M. Craig ,  Charles C. Haluzak

    发明人： Chien-Hua Chen ,  David M. Craig ,  Charles C. Haluzak

    IPC分类号： H01L23/12

    CPC分类号： B81B7/007 ,  H01L2924/16235

    摘要： An apparatus includes a Micro Electrical Mechanical System (MEMS) having electrical contacts and a MEMS device in electrical communication with the electrical contacts. A lid is oriented over the MEMS device and not the electrical contacts. The lid has a base region and a top region, the base region being wider in dimension than the top region and oriented in closer proximity to the MEMS device than the top region.

    摘要翻译： 一种装置包括具有电触头的微机电系统（MEMS）和与电触头电连通的MEMS装置。 盖子定位在MEMS器件上，而不是电触头。 盖子具有基部区域和顶部区域，基底区域的尺寸比顶部区域宽，并且被定向成比顶部区域更靠近MEMS装置。