Self aligned wrap around shield for perpendicular magnetic recording
    2.
    发明申请
    Self aligned wrap around shield for perpendicular magnetic recording 有权
    围绕屏蔽的自对准涡卷用于垂直磁记录

    公开(公告)号:US20060044682A1

    公开(公告)日:2006-03-02

    申请号:US11116753

    申请日:2005-04-27

    IPC分类号: G11B5/147

    摘要: A write element for use in perpendicular magnetic recording. The write element including a write pole and a self aligned wrap around shield that can have a trailing shield gap thickness that is different from its side shield gap thickness. The materials making up the trailing shield gap and the side shield gaps can be different materials or can be the same material deposited in two different steps. The side or wrap around portions of the trailing shield can extend down to the level of the leading edge of the write pole or can terminate at some point between the levels of the leading and trailing edge to form a partial wrap around trailing shield.

    摘要翻译: 在垂直磁记录中使用的写元件。 包括写磁极和围绕屏蔽一个自对准包裹,可以有一个尾屏蔽间隙的厚度是从其侧面屏蔽间隙的厚度不同的写元件。 的材料构成的尾屏蔽件间隙和侧屏蔽间隙可以是不同的材料,或者可以是沉积于两个不同的步骤相同的材料。 侧或缠绕在尾屏蔽件的部分可以向下延伸到写入极的前缘的水平或可以在前缘和后缘的电平之间的一些点终止以形成围绕尾屏蔽件的部分包裹。

    Write pole and method of manufacturing the same
    3.
    发明申请
    Write pole and method of manufacturing the same 失效
    写极和制造方法相同

    公开(公告)号:US20060044681A1

    公开(公告)日:2006-03-02

    申请号:US10931649

    申请日:2004-08-31

    IPC分类号: G11B5/127 G11B5/23

    摘要: A magnetic write head and method of fabrication, in accordance with one embodiment of the present invention, includes depositing a first hard mask layer on a layer of magnetic material, depositing a second hard mask layer on the first hard mask layer, depositing a third hard mask layer on the second hard mask layer and forming a soft mask upon the third hard mask layer defining a write pole. The third hard mask layer exposed by the soft mask is etched utilizing a first chemistry, wherein the pattern of the write pole is transferred from the soft mask to the third hard mask. The second and first hard mask layers exposed by the patterned third hard mask are etched utilizing a second chemistry thereby forming a first and second hard mask. The selectivity of the second chemistry favors the first and second hard mask layers over the third hard mask. The layer of magnetic material exposed by the first hard mask is milled such that a beveled write pole is formed. The selectivity of the milling favors the magnetic material over the first hard mask

    摘要翻译: 根据本发明的一个实施例的磁写头和制造方法包括在第一硬掩模层上沉积第一硬掩模层,在第一硬掩模层上沉积第二硬掩模层, 掩模层,并且在限定写入极的第三硬掩模层上形成软掩模。 利用第一化学蚀刻由软掩模曝光的第三硬掩模层,其中写极的图案从软掩模转移到第三硬掩模。 通过图案化的第三硬掩模暴露的第二和第一硬掩模层利用第二化学物质进行蚀刻,从而形成第一和第二硬掩模。 第二化学品的选择性有利于第三硬掩模上的第一和第二硬掩模层。 由第一硬掩模曝光的磁性材料层被研磨成形成斜面的写入极。 铣削的选择性有利于磁性材料超过第一个硬掩模

    Method for fabricating a pole tip in a magnetic transducer
    6.
    发明申请
    Method for fabricating a pole tip in a magnetic transducer 有权
    用于在磁换能器中制造极尖的方法

    公开(公告)号:US20060000795A1

    公开(公告)日:2006-01-05

    申请号:US10882883

    申请日:2004-06-30

    IPC分类号: B44C1/22

    摘要: A method for fabricating a magnetic head with a trapezoidal shaped pole piece tip is described. The body of the main pole piece is deposited, then one or more layers for the pole piece tip are deposited. A bed material is deposited over the pole piece tip material. A void is formed in the bed material over the area for the pole piece tip. The void is filled with an ion-milling resistant material such as alumina preferably using atomic layer deposition or atomic layer chemical vapor deposition. The excess ion-milling resistant material and the bed material are removed. The result is an ion-milling mask formed over the area for the pole piece tip. Ion milling is then used to remove the unmasked material in the pole piece tip layer and to form a beveled pole piece tip and preferably a beveled face on the main pole piece.

    摘要翻译: 描述了制造具有梯形极片尖端的磁头的方法。 沉积主极片的主体,然后沉积用于极片尖端的一个或多个层。 床材料沉积在极片末端材料上。 在用于极片尖端的区域上的床材料中形成空隙。 空隙填充有耐离子碾磨材料,例如氧化铝,优选使用原子层沉积或原子层化学气相沉积。 除去过量的抗离子碾磨材料和床料。 结果是在极片尖端的区域上形成离子铣削掩模。 然后使用离子铣削去除极片末端层中的未掩模材料,并且在主极片上形成斜面极片末端,并且优选地形成斜面。

    Magnetic transducer with milling mask
    8.
    发明申请
    Magnetic transducer with milling mask 失效
    具有铣削面罩的磁性换能器

    公开(公告)号:US20070139816A1

    公开(公告)日:2007-06-21

    申请号:US11707524

    申请日:2007-02-12

    IPC分类号: B44C1/22 G11B5/127

    摘要: A method for fabricating a magnetic head with a trapezoidal shaped pole piece tip is described. The body of the main pole piece is deposited; then one or more layers for the pole piece tip are deposited. A bed material is deposited over the pole piece tip material. A void is formed in the bed material over the area for the pole piece tip. The void is filled with an ion-milling resistant material such as alumina preferably using atomic layer deposition or atomic layer chemical vapor deposition. The excess ion-milling resistant material and the bed material are removed. The result is an ion-milling mask formed over the area for the pole piece tip. Ion milling is then used to remove the unmasked material in the pole piece tip layer and to form a beveled pole piece tip and preferably a beveled face on the main pole piece.

    摘要翻译: 描述了制造具有梯形极片尖端的磁头的方法。 主极片的主体被沉积; 然后沉积用于极片尖端的一个或多个层。 床材料沉积在极片末端材料上。 在用于极片尖端的区域上的床材料中形成空隙。 空隙填充有耐离子碾磨材料,例如氧化铝,优选使用原子层沉积或原子层化学气相沉积。 除去过量的抗离子碾磨材料和床料。 结果是在极片尖端的区域上形成离子铣削掩模。 然后使用离子铣削去除极片末端层中的未掩模材料,并且在主极片上形成斜面极片末端,并且优选地形成斜面。

    ROLL-TO-ROLL REACTOR FOR PROCESSING FLEXIBLE CONTINUOUS WORKPIECE
    10.
    发明申请
    ROLL-TO-ROLL REACTOR FOR PROCESSING FLEXIBLE CONTINUOUS WORKPIECE 审中-公开
    用于加工柔性连续工件的辊对辊反应器

    公开(公告)号:US20120234314A1

    公开(公告)日:2012-09-20

    申请号:US13100201

    申请日:2011-05-03

    IPC分类号: F24C3/00

    摘要: The present invention provides a reactor for preparing thin films of compound semiconductors for photovoltaic devices. The reactor includes a chamber that has a bottom surface that, in some locations, has protrusions that contact the bottom surface of the substrate having the compound semiconductor to provide uniform heating and cooling of the substrate. Interior walls of the chamber can also be lined with high thermal conductivity portions and low thermal conductivity portions interposed between high thermal conductivity portions.

    摘要翻译: 本发明提供一种用于制备用于光伏器件的化合物半导体的薄膜的反应器。 反应器包括具有底表面的室,其在一些位置具有与具有化合物半导体的衬底的底表面接触的突起,以提供衬底的均匀加热和冷却。 腔室的内壁还可以衬有高导热部分和介于高导热部分之间的低导热部分。